Patent holdings for IPC class H01J 21/18

Total number of patents in this class: 8

10-year publication summary

1
0
0
0
0
0
2
0
1
0
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Vacon Ltd.
3
2
Varian Semiconductor Equipment Associates, Inc.
1179
1
Tokyo Electron Limited
13920
1
Massachusetts Institute of Technology
10290
1
ColdQuanta, Inc., AKA ColdQuanta
156
1
Balakin, Andrey Vladimirovich
65
1
Balakin, Pavel Vladimirovich
65
1
Other owners 0