Patent holdings for IPC class H01J 31/16

Total number of patents in this class: 3

10-year publication summary

1
0
0
0
0
0
0
0
0
0
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Varian Semiconductor Equipment Associates, Inc.
1180
1
Futaba Corporation
143
1
Taiwan Futaba Electronics Corporation
1
1
Other owners 0