Patent holdings for IPC class H01J 61/14

Total number of patents in this class: 5

10-year publication summary

0
1
0
0
1
0
0
0
0
0
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
KLA-Tencor Corporation
2525
2
KLA Corporation
1768
2
Savant Technologies, LLC
367
1
Other owners 0