Abstract

Provided herein are heating systems for ultra-pure deionized water. One heating system is a closed loop, recirculating system that includes a first tank and a first stage heater and a second tank and a second stage heater. The first stage heater heats water from the first tank to a first temperature. Upon leaving the first stage heater, the water flows to the second tank. The second stage heater heats the water from the second tank to a second, final temperature. The water, at the second, final temperature, is sent through a closed loop recirculating system for the use in a manufacturing process such as semiconductor manufacturing.

IPC Classes  ?

• F24H 1/00 - Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
• F24H 1/10 - Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
• H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components

Abstract

Provided herein are heating systems for ultra-pure deionized water. One heating system is a closed loop, recirculating system that includes a first tank and a first stage heater and a second tank and a second stage heater. The first stage heater heats water from the first tank to a first temperature. Upon leaving the first stage heater, the water flows to the second tank. The second stage heater heats the water from the second tank to a second, final temperature. The water, at the second, final temperature, is sent through a closed loop recirculating system for the use in a manufacturing process such as semiconductor manufacturing.

IPC Classes  ?

• F24H 9/20 - Arrangement or mounting of control or safety devices
• F24H 9/16 - Arrangements for water drainage

Abstract

Provided herein are heating systems for ultra-pure deionized water. One heating system is a closed loop, dual input recirculating system that includes a tank and a trim heater. The tank accepts a flow of water from a cold water source and a flow of water from a heated water source. The system combines the cold and heated water to achieve a first temperature within the tank. The water is then heated from the first temperature to a second final temperature with the trim heater. The water, at the second, final temperature, is sent through a closed loop recirculating system for the use in a manufacturing process such as semiconductor manufacturing.

IPC Classes  ?

• F24H 15/175 - Supplying heated water with desired temperature or desired range of temperature where the difference between the measured temperature and a set temperature is kept under a predetermined value
• F24H 1/18 - Water-storage heaters
• F24H 15/219 - Temperature of the water after heating
• F24H 15/238 - Flow rate
• F24H 15/242 - Pressure
• F24H 15/315 - Control of valves of mixing valves
• H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components

Goods & Services

Heaters, namely industrial heaters and non-reactive, non-metallic water and liquid heaters; Heaters, namely, industrial heaters for deionized water, purified water, and liquids; Heaters, namely, industrial heaters for liquid and chemical purification.

Goods & Services

Heaters, namely, industrial heaters and non-reactive, non-metallic water and liquid heaters; Heaters, namely, industrial heaters for deionized water, purified water, and liquids; Heaters, namely, industrial heaters for liquid and chemical purification

Abstract

In one example, a valve includes a body defining a chamber, and a spool disposed in the chamber and configured to move within the chamber, such that a first operating position of the valve is defined when the spool is in a first position in the chamber, and a second operating position of the valve is defined when the spool is in a second position in the chamber. The valve also includes a magnetic element connected to the spool and responsive to a magnetic field such that the spool is biased in a first direction when the spool is in the first position and the spool is biased in a second direction when the spool is in the second position, and the second direction is different from the first direction.

IPC Classes  ?

• F16K 31/08 - Operating meansReleasing devices electricOperating meansReleasing devices magnetic using a magnet using a permanent magnet
• F16K 31/06 - Operating meansReleasing devices electricOperating meansReleasing devices magnetic using a magnet
• F16K 11/065 - Multiple-way valves, e.g. mixing valvesPipe fittings incorporating such valvesArrangement of valves and flow lines specially adapted for mixing fluid with all movable sealing faces moving as one unit comprising only sliding valves with linearly sliding closure members

Abstract

In one example, a fluid system is provided that includes an air-operated fluid pump, a control air system operably connected with the fluid pump, and a pump controller operably connected with one or more components of the control air system. The pump controller is configured to automatically control the operation of the air-operated fluid pump by way of the control air system. The fluid pump parameters automatically controlled by the pump controller can include a discharge flow rate of the fluid pump, a discharge pressure of the fluid pump, and/or a pulsation value associated with the discharge of the fluid pump.

IPC Classes  ?

• F04B 49/06 - Control using electricity

Abstract

In one example, a mixing header includes a body that defines a fluid passage having an inlet side and an outlet side. The mixing header also includes a flow conditioning element that is connected to the body and arranged for fluid communication with the fluid passage. The flow conditioning element also includes a plurality of elements each connected to, and extending outwardly from, a hub.

IPC Classes  ?

• F24H 1/10 - Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium

Goods & Services

Ultra-high purity chemical pumps. Industrial heaters and non-reactive, non-metallic heaters for all heating water, de-ionized water, purified water, chemicals and for industrial processes. Repair and maintenance of industrial heaters and pumps.

Goods & Services

INDUSTRIAL PUMPS, NAMELY, DIAPHRAGM PUMPS

Goods & Services

Heaters, namely industrial heaters and non-reactive, non-metallic heaters, all for heating water, de-ionized water, purified water, chemicals and acids for industrial processes

Goods & Services

MACHINE PARTS, NAMELY, SEALS FOR INDUSTRIAL PUMPS; PUMPS, NAMELY, INDUSTRIAL PUMPS FOR TRANSPORTING CHEMICALS AND ACIDS FOR INDUSTRIAL PROCESSES PUMPS, NAMELY, INDUSTRIAL PUMPS FOR TRANSPORTING WATER, DE-IONIZED WATER, AND PURIFIED WATER