06 - Common metals and ores; objects made of metal
07 - Machines and machine tools
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
42 - Scientific, technological and industrial services, research and design
Goods & Services
Ironmongery and pipes, including flanges, intermediate
rings, end pieces of tubes, membranes and membrane bellows,
junctions for pipes and intermediate pieces; all the
aforesaid goods of metal and particularly in the fields of
surface coating technology, research, medical technology,
semiconductor manufacturing, cryotechnology and fluids
technology. Pneumatic controls for machines and engines; Steam traps;
valves (parts of machines); clack valves [parts of
machines]; pressure valves (parts of machines); control
mechanisms for machines, engines or motors; bellows (parts
of machines); hydraulic pressure valves; control valves
(parts of machines); valve diaphragms; flanges, intermediate
rings, end pieces of tubes, membranes and membrane bellows,
junctions for pipes and intermediate pieces; all the
aforesaid goods as parts of machines, particularly in the
fields of surface coating technology, research, medical
technology, semiconductor manufacturing, cryotechnology and
fluids technology, as well as engine parts (except engines
for land vehicles). Distribution consoles (electricity); Electric regulating
apparatus; solenoid valves (electromagnetic switches);
pressure indicator plugs for valves; pressure measuring
apparatus; remote control apparatus; control panels
(electricity); switches; electronic remote control apparatus
for valves; electric installations for the remote control of
industrial companies. Repair and installation services, including repair and
installation services for valves, ironmongery, pipes,
flanges, intermediate rings, end pieces, membranes, membrane
bellows, junctions for pipes, intermediate pieces, pneumatic
controls for machines and engines, steam traps, valves
(parts of machines), clack valves, pressure valves (parts of
machines), control mechanisms for machines, engines or
motors, bellows (parts of machines), hydraulic pressure
valves, control valves, valve diaphragms, distribution
consoles (electricity), electric regulating apparatus,
solenoid valves (electromagnetic switches), pressure
indicator plugs for valves, pressure measuring apparatus,
remote control apparatus, control panels (electricity),
switches, electronic remote control apparatus for valves,
electric installations for the remote control of industrial
companies. Scientific and technological services as well as related
research and design services; Design, development,
maintenance and updating of software.
A vacuum valve with a valve seat which has a first sealing surface surrounding the valve opening, a valve closure with a second sealing surface corresponding to the first sealing surface, and a coupling arrangement. The vacuum valve has a drive unit and a connecting element (20) defining a connecting axis (V) and having a first end and a second end, the second end lying opposite the first end along the connecting axis (V), and wherein the connecting element (20) is connected at the first end to the drive unit, and has a connecting portion (21) defining a connecting width (22) for insertion into the coupling arrangement (10) in the region of the second end. The drive unit is designed in such a manner that the valve closure (4) in a coupled state is adjustable from an open position into a closed position and back. The connecting portion (21) has a fastening recess (23) extending along the connecting axis (V), has a depression (24) which is set back with respect to the connecting width (22), extends orthogonally to the connecting axis (V) and has a depression opening (25), which is open towards the fastening recess (23), and has a clamping element (26) which is located in the depression (24) and is movably mounted at least orthogonally to the connecting axis (V), the clamping element (26) projecting through the depression opening (25) into the fastening recess (23).
F16K 1/48 - Attaching valve members to valve-spindles
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
A pendulum valve includes a valve seat with a first sealing surface and a valve closure with a second sealing surface corresponding to the first sealing surface, wherein the valve closure is pivotably mounted about a pivot axis by means of a drive unit. The pendulum valve has a calibration surface and a position sensor for determining a distance between the position sensor and the calibration surface, wherein the position sensor is arranged with a fixed positional relationship relative to the valve seat and the calibration surface is connected to the valve closure and is movably arranged such that a position of the calibration surface and the distance between the position sensor and the calibration surface vary during a pivoting movement of the valve closure.
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
F16K 31/04 - Operating meansReleasing devices electricOperating meansReleasing devices magnetic using a motor
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
4.
CLOSING MODULE FOR A SHUTTLE VALVE, COMPRISING AN ADJUSTABLE PNEUMATIC DRIVE
The invention relates to a closing module (10) comprising a valve shutter (14), a pneumatic drive unit (20) coupled to the valve shutter (14), and a valve rod (18). The pneumatic drive unit (20) has a piston system the mobility of which can be variably limited by means of a first stop element.
F16K 3/06 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
F16K 31/122 - Operating meansReleasing devices actuated by fluid the fluid acting on a piston
F16K 31/50 - Mechanical actuating means with screw-spindle
F16K 31/54 - Mechanical actuating means with toothed gearing with pinion and rack
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
A valve (1), in particular a vacuum valve, with a valve housing (2) and a closing member (3) for closing a valve opening (4), and with a valve drive (5) for moving the closing member (3) to and fro between a closed position, in which the closing member (3) closes the valve opening (4), and an open position, in which the closing member (3) fully or partially opens the valve opening (4), wherein the closing member (3) is connected to the valve drive (5) by means of a valve rod (6) of the valve (1), and the closing member (3) is removably fastened or fastenable to the valve rod (6) by means of a releasable connecting device (7), wherein the releasable connecting device (7) has a fastening magnet (8) for removably fastening the closing member (3) to the valve rod (6) by means of magnetic attraction forces.
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
The invention relates to a valve, in particular a vacuum valve, comprising a closing element (2) for closing an opening (3) and a valve drive for moving the closing element (2) between an open position in which the closing element (2) leaves the opening (3) open and a closed position in which the closing element (2) closes the opening (3), wherein: the valve drive has at least two pivotably mounted levers (5); the valve drive has at least one rotatably mounted spindle (6); and an angle (W) included by the at least two levers (5) can be changed by the rotation of the at least one spindle (6).
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 31/50 - Mechanical actuating means with screw-spindle
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
The invention relates to a valve (1), in particular a vacuum valve, having a closing element for closing an opening and having a valve drive (4) for moving the closing element back and forth between an open position, in which the closing element releases the opening, and a closed position, in which the closing element closes the opening, wherein the valve drive (4) has two threaded rods (7, 8) each of which can be rotated about its longitudinal axis (5, 6) and each having a thread (9), wherein the valve drive (4) has a gear (10) with teeth (11) and has a spindle drive (12), wherein the gear (10) engages, with its teeth (11), in the threads (9) of the threaded rods (7, 8) and for driving the spindle drive (12) is connected to the spindle drive (12).
The invention relates to an assembly (1) having a sensor unit (2) with a measuring sensor (8) for measuring a state parameter of a fluid in a chamber interior (15) of a chamber (3), wherein the assembly (1) has a housing (4) with a housing interior (5) and a housing closure (6) for closing a housing opening (7), leading into the housing interior (5), of the housing (4), and the measuring sensor (8) of the sensor unit (2) is arranged in the housing interior (5) at least in one operating state of the assembly (1), wherein the housing closure (6) opens up the housing opening (7) in an open position and closes same in a closed position.
G01K 1/00 - Details of thermometers not specially adapted for particular types of thermometer
G01L 19/00 - Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
A vacuum system includes at least a first vacuum valve, a second vacuum valve, a pressure sensor connected to the vacuum volume to determine an actual pressure in a vacuum volume, and a regulation and control unit connected to the first vacuum valve, to the second vacuum valve and to the pressure sensor. The regulation and control unit is configured to regulate the actual pressure based on a predetermined target pressure, with continuous detection of the actual pressure, a determination of a negative pressure or a positive pressure as the first pressure deviation based on the detected actual pressure and the predetermined target pressure, an opening of the first or the second vacuum valve to reduce the first pressure deviation, a monitoring of the first pressure deviation, a determination of a second pressure deviation, an additional opening of the other vacuum valve to reduce the second pressure deviation.
G05D 16/20 - Control of fluid pressure characterised by the use of electric means
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
10.
Closure device for closing an opening in a wall in a vacuum-tight manner
A closure device for closing an opening in a wall in a vacuum-tight manner has a valve plate, which by way of a connecting device is connected to a valve rod, for closing and exposing the opening. The connecting device has a swivel head of which at least portions of the external surface are of a spherical configuration and which is disposed in a receptacle space of a joint body. For blocking a rotation of the swivel head about the longitudinal axis of the valve rod, at least one projecting stud, that is disposed on the swivel head or joint body, protrudes into an assigned groove which is disposed in the other one of these two parts and which in a central position of the connecting device extends in a plane that lies parallel to the longitudinal axis of the valve rod.
Disclosed is a vacuum processing system including a vacuum chamber, a controllable fluid application arrangement connected to the vacuum chamber and configured to provide inflow of fluid into the vacuum chamber in controlled manner and a controlling and/or regulating unit for controlling at least the controllable fluid application arrangement. The vacuum processing system comprises an atmospheric analyzer, the atmospheric analyzer is arranged and configured to determine atmospheric information of inside of the vacuum chamber and to provide the atmospheric information as a respective atmospheric signal and the controlling and/or regulating unit is configured to control the controllable fluid application arrangement as a function of the atmospheric signal.
C23C 16/52 - Controlling or regulating the coating process
C23C 16/44 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
C23C 16/455 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber
The invention relates to a valve (1) comprising a housing (2), a flow opening (3) which is arranged in the housing (2), and a valve disc (4), wherein the valve disc (4) is mounted in the flow opening (3) in a pivotal manner back-and-forth between a maximum open position and a contact position by means of a pivot axis (5) of the valve (1), and the pivot axis (5) is mounted on the housing (2) so as to run transversely through the flow opening (3). The valve disc (4) releases a respective sub-region of the flow opening (3) on opposing sides (6, 7) of the pivot axis (5) in the maximum open position and rests against valve seats (8, 9), in particular arc-shaped valve seats, which reach out from the housing (2) into the flow opening (3), in the contact position, said valve seats being movably mounted on the housing (2).
The invention relates to a seal element (10) for a valve closure of a valve, having a securing region (21) with a securing element (22) and a seal region (11) for providing a seal for a valve opening of the valve, said securing region (21) and seal region (11) being connected together. The seal element (10) has a seal lip (12) and an aligning lip (13) in the seal region (11), wherein the seal lip (12) and the aligning lip (13) are oriented relative to each other so as to form an opening angle (α), the seal lip (12) is designed to provide a seal for the valve opening of the valve, and the aligning lip (13) is designed to align the seal region (11) relative to a seal surface upon being brought into contact with the seal surface. The securing element (22) has at least one holding surface (23) on a lower face lying opposite the seal region (11).
F16K 1/20 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members with pivoted discs or flaps with axis of rotation arranged externally of valve member
F16J 15/06 - Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
F16K 27/02 - Construction of housingsUse of materials therefor of lift valves
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
A valve on which a valve plate is arranged in a valve housing interior space of a valve housing and fixed to a shaft, in which the valve plate together with the shaft can be displaced back and forth in directions parallel to a shaft longitudinal axis between a closed position and an intermediate position, and by rotation of the shaft about the shaft longitudinal axis can be pivoted back and forth between the intermediate position and a maximum open position. A shaft leadthrough for sealing the shaft with respect to the valve housing has a bellows which can be expanded and pushed together in the directions parallel to the shaft longitudinal axis, a first bellows end of this bellows being fixed to the valve housing, and a shaft sealing ring in which the shaft is rotatably mounted, being arranged on a second bellows end.
A valve for closing and opening a valve opening in a gas-tight manner and for ventilating a vacuum volume is disclosed. The valve includes a valve seat, a closure element and an adjusting unit, which is arranged to provide a movement of the closure element relative to the valve seat in such a way that the closure element is adjustable from an open position to a closed position and back again. The valve seat, the closure element and the adjusting unit are arranged in such a way that the closure element can be adjusted linearly along an opening axis. The valve comprises a holding device arranged to hold the closure element in the closed position by providing a holding force.
Disclosed is a valve for regulating a volume or mass flow and/or for closing and opening a valve opening, having a valve seat, a valve closure and a drive unit which is coupled to the valve closure and is set up to provide a movement of the valve closure in such a way that the valve closure can be adjusted from an open position to a closed position and back. The vacuum valve includes a radio arrangement having at least one coupling element and a memory element, and information relating to a valve state can be provided by means of the memory element.
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
The invention relates to a gas inlet valve (1) for the controlled inlet of a fluid into a vacuum process chamber, wherein the gas inlet valve (1) has: a gas flow unit (2) with an internal volume (23), wherein the gas flow unit has a sealing surface (24) in the internal volume (23); an adjustment unit (31) that projects into the internal volume (23) and has a valve disc (32); a drive unit (3) which is coupled to the adjustment unit (31) outside the gas flow unit (2); and a flexible sealing element (25) which is connected to the gas flow unit (2) and to the adjustment unit (31) and atmospherically separates the adjustment device (3) from the internal volume (23). The drive unit (3) has an expansion element (11), wherein a spatial expansion of the expansion element (11) is variable with a variation in the expansion volume, and has a compressed air duct (12), connected to the expansion volume, for pressurisation and expansion of the expansion volume. The gas inlet valve (1) has a coupling unit (15a, 15b) which is connected to the drive unit (3) and to the adjustment unit (31) and is arranged in such a way that the coupling unit (15a, 15b) is moved upon variation of the expansion volume and causes the adjustment unit (31) to move.
Controlling and processing unit (40) for a gauge system (1) comprising at least a first sensor (10) comprising a membrane (12), a suspension (13) of the membrane (12), a bottom wafer (21), and a cavity (30) being formed between the membrane (12) and at least a portion of the bottom wafer (21). The gauge system (1) comprising an oscillation generator unit (28) configured to set at least the membrane (12) in oscillation. The controlling and processing unit (40) is configured to provide driving the oscillation generator unit (28) in a first oscillation mode and in a second oscillation mode, measuring a first damping response during applying the first oscillation mode, measuring a second damping response during applying the second oscillation mode, jointly processing the first damping response and the second damping response and deriving at least a value for the pressure and/or molecular parameter based on the joint processing.
G01L 1/14 - Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
The invention relates to a heating device (1) with a heating plate (2) for heating a workpiece (3), in particular a wafer, in a vacuum chamber (4), wherein the heating plate (2) has a carrier layer (5) with an upper side (6), on which or above which the workpiece (3) can be arranged for heating, and the heating device (1) has a heating element (7) for heating the carrier layer (5) of the heating plate (2), wherein the heating device (1) has fastening arms (9) arranged at an edge (8) of the heating plate (2) for fastening the heating plate (2) to supports (10) in the vacuum chamber (4), wherein the fastening arms (9) each have at least one elastically deflectable spring element (11) and a fastening device (12) for fastening the respective spring element (11) to the respective support (10).
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
A vacuum valve or door having a closure plate for closing an opening in a wall. The opening has opposing first and second longitudinal edges and shorter opposing first and second transverse edges. A sealing unit seals the closure plate against the wall in the closed position. The sealing unit includes a supporting frame having opposing first and second longitudinal legs and shorter opposing first and second transverse legs, on which supporting frame there is mounted on one side a circumferential closure plate seal and on the other side a circumferential wall seal. The supporting frame is secured to fastening points on the wall, with central portions of the first and second longitudinal legs being free with respect to the wall, or the supporting frame is secured to fastening points on the closure plate, with the central being free with respect to the closure plate.
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 27/04 - Construction of housingsUse of materials therefor of sliding valves
The invention relates to a gas inlet valve for controlling inlet of a fluid into a vacuum process chamber, wherein the gas inlet valve (1) comprises: a gas flow unit (2), wherein the gas flow unit comprises a sealing surface (24) in the internal volume (23), an adjustment device (3) having an adjustment unit (31), wherein the adjustment unit (31) projects into the internal volume (23) and is adjustably mounted along an adjustment axis outside the gas flow unit (2) in the adjustment device (3), and a flexible sealing element (25) which is fastened to the gas flow unit (2) and to the adjustment unit (31) and seals the adjustment device (3) from the internal volume (23). The adjustment device (3) comprises a pretensioning element (34) interacting with the adjustment unit (31) and arranged in such a way that a pretensioning force is provided pressing the valve plate (32) in the closing direction (S). The adjustment device (3) comprises a pneumatic drive cylinder (35) with at least one piston (36a), wherein the piston (36a) is coupled with the adjustment unit (31) and an opening force opposing the pretensioning force can be generated in the opening direction (O) through an application of pressure by the drive cylinder (35). The adjustment device (3) comprises a limiting element (37), which limiting element (37) provides a stop point (38), which limits an adjustability of the adjustment unit (31) along the adjustment axis (V) in the opening direction (O). The limiting element (37) is designed and mounted such that by means of actuation of the limiting element (37) a position of the stop point (38) can be varied along the adjustment axis (V), wherein the position of the stop point (38) defines a maximum valve opening.
F16K 1/52 - Means for additional adjustment of the rate of flow
F16K 31/122 - Operating meansReleasing devices actuated by fluid the fluid acting on a piston
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
F16K 41/12 - Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm
The invention relates to a vacuum valve (1) with a valve seat (3, 3b), a closure arrangement (10) and a drive unit (7) coupled to the closure arrangement (10), wherein the closure arrangement (10) has a carrier element (20) with a first connection side and a closure plate (30, 40) with a second connection side and the first and the second connection side are designed to connect the carrier element (20) to the closure plate (30, 40), with a support and a holding element, wherein the closure plate (30, 40) is joined to the carrier element (20) and the support and the holding element correspond such that as a result of an interaction between the support and the holding element in the joined state a clamping force is generated that is directed orthogonally to an extent of at least one of the connection sides, and the holding element projects from the respective connection side and has a curved boundary line for interaction with the support.
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
23.
Device for connecting fluid-conducting pipes and/or chambers
A device (1) for connecting fluid-conducting lines (2) and/or chambers (3) in a high-frequency electromagnetic field. The device includes two line bodies (4, 6) each having a line body inner wall (5, 7), which is rigid per se, and a bellows (8). The line body inner walls together enclose an inner cavity (9) for the passage of fluid through the device, and the line bodies are connected to one another, and enclosed with a sealing action, by the bellows and the first and second line bodies can be displaced and/or tilted relative to one another. The second line body inner wall projects a little into an interior space (10) surrounded by the first line body inner wall and ends there and the first line body inner wall is electrically conductively connected to the second line body inner wall by at least one elastically deformable sliding contact (11).
F16L 27/11 - Adjustable jointsJoints allowing movement comprising a flexible connection only the ends of the pipe being interconnected by a flexible sleeve the sleeve having the form of a bellows with multiple corrugations
F16L 25/01 - Construction or details of pipe joints not provided for in, or of interest apart from, groups specially adapted for realising electrical conduction between the two pipe ends of the joint or between parts thereof
F16L 51/02 - Expansion-compensation arrangements for pipe-lines making use of a bellows or an expansible folded or corrugated tube
24.
Valve plate for a closure device for closing an opening in a wall in a vacuum-tight manner
A valve plate for a closure device for closing an opening in a vacuum-tight manner. A front side of the valve plate has a seal ring for sealing to the wall, and the rear side has a depression for connecting to a valve rod. In regions of two mutually opposite lateral walls of the depression, an extension adjoins in each depression. For each respective extension a threaded bore is present, which on a lateral wall thereof opens into the extension. The valve rod is connectable to the valve plate by a respective retaining bolt screwed into the respective threaded bore and via an end portion that protrudes from the threaded bore into the extension, with the end portion interacting with a groove on a connecting part connected to the valve rod end, or at the valve rod end is configured integral to the latter.
The invention relates to a valve (1) comprising a valve rod and a closure element (3), which is arranged on the valve rod, for closing a valve opening (4). The closure element (3) can be moved between a closing position and a maximum open position by means of the valve rod solely in a linear manner in directions that are parallel to the longitudinal extension of the valve rod, and the valve (1) has a valve drive (7) with a handle (8) which can be actuated manually, wherein the valve drive (7) has a valve drive housing (9) and at least one lever pair (10), each lever pair (10) having a first lever (11) and a second lever (12).
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/12 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with wedge-shaped arrangements of sealing faces
The invention relates to a vacuum valve for substantially gas-tight closure of a first valve opening including a valve seat, a closure element for substantially gas-tight closure of the first valve opening, and a drive unit for providing a movement of the closure element relative to the valve seat. The closure element is designed to be flexible in such a way that a spatial expansion of the closure element in the closed position is variable in a direction parallel to the opening axis as a function of an applied differential pressure.
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
27.
Adjustment device for a vacuum area with pressure measuring functionality
Vacuum adjustment device for an active element movable in a process atmosphere region, having a coupling, a drive unit having an electric motor, which cooperates with the coupling in such a way that the coupling can be adjusted from a normal position into an active position and back. The device has a mechanical interface for connecting the vacuum adjustment device to a process volume providing a process atmosphere, a dynamic separating device for separating the process atmosphere from an outer atmosphere region and a control and processing unit at least electrically connected to the drive unit and designed to control the electric motor. The control and processing unit is designed to derive motor state information based on the extent of a motor operating parameter, and has a pressure determination functionality designed in such a way that a load difference is derived by comparing the motor state information with a known motor target state, and a pressure difference between the outer atmosphere region and the process atmosphere region is derived on the basis of the load difference.
F16K 41/10 - Spindle sealings with diaphragm, e.g. shaped as bellows or tube
F16K 31/04 - Operating meansReleasing devices electricOperating meansReleasing devices magnetic using a motor
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
The invention relates to a valve (1), in particular a vacuum valve, for metering a volume flow through a flow opening (2). The valve (1) has a valve plate (3) for closing the flow opening (2) in a closed position of the valve (1) and at least two valve rods (4, 5), each of which is elongate, wherein the valve rods (4, 5) are secured to the valve plate (3) at mutually spaced locations, and at least one of the valve rods (4, 5) is driven in a linearly movable manner by means of a valve drive (6, 7) of the valve (1) in order to adjust the valve plate (3) between the closed position and a maximum open position. The valve rods (4, 5) are designed to have different degrees of rigidity with respect to a deflection transversely to the respective longitudinal extension thereof.
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 1/32 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces Details
F16K 1/12 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with streamlined valve member around which the fluid flows when the valve is opened
F16K 31/04 - Operating meansReleasing devices electricOperating meansReleasing devices magnetic using a motor
The invention relates to a valve (1), in particular a vacuum valve, for metering a volume flow through a flow opening (2). The valve (1) has a valve plate (3) for closing the flow opening (2) in a closed position of the valve (1) and at least two valve rods (4, 5), each of which is elongate, wherein the valve rods (4, 5) are secured to the valve plate (3) at mutually spaced locations, each of the valve rods (4, 5) is driven in a linearly movable manner by a dedicated valve drive (6, 7) of the valve (1) in order to adjust the valve plate (3), and only a subset of the valve rods (4) are driven in a linearly movable manner by the valve drive (6) thereof over the entire movement path (10) of the valve plate (3) between the closed position and the maximum open position.
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 1/32 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces Details
F16K 1/12 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with streamlined valve member around which the fluid flows when the valve is opened
F16K 31/04 - Operating meansReleasing devices electricOperating meansReleasing devices magnetic using a motor
30.
MODULAR VACUUM VALVE SYSTEM FOR A VACUUM TRANSPORT SYSTEM
Disclosed is a vacuum valve system for a vacuum transport system, including a valve seat assembly having a first valve opening defining an opening axis and a first sealing surface surrounding the first valve opening; a closure component for closing of the first valve opening with a second sealing surface corresponding to the first sealing surface; and a drive unit for the closure component. The valve seat assembly can be combined with the transport tube to provide a gas-tight transition between the valve seat assembly and the transport tube, and the first valve opening. At least the valve seat assembly and the closure component are formed as separate system components that can be modular, and the closure component the valve seat assembly can be modular so that the open position and the closed position for the closure component is driven by the drive unit.
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/12 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with wedge-shaped arrangements of sealing faces
A pin lifting device (1) for lowering a substrate (2) onto a substrate carrier (15) and for lifting the substrate (2) off the substrate carrier (15) in a process chamber, in particular a vacuum process chamber. The pin lifting device (1) includes at least one lifting pin holder (4) and at least one lifting drive (5) for moving the lifting pin holder (4), which has a lifting pin (6) mounted thereon, in a reciprocating manner along a linear lifting motion path (7). The lifting pin holder (4) is mounted on the lifting drive (5) by a compensation bearing (8), and the compensation bearing (8) facilitates a relative movement between the lifting drive (5) and the lifting pin holder (4) in at least one direction (9) orthogonal to the linear lifting motion path (7).
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
B23Q 1/44 - Movable or adjustable work or tool supports using particular mechanisms
The invention relates to a vacuum valve (10) for interrupting a flow path in a gas-tight manner, said vacuum valve comprising a valve body (11) having: a first connection (12) in the direction of a first axis (12'); a second connection (13) in the direction of a second axis (13'); and a valve seat (16). The vacuum valve also has: a valve plate (17); a drive unit (30), wherein a controlled displacement of the valve plate (17) along or orthogonal to the first axis (12') can be provided by means of the drive unit (30); and a control unit (40) for controlling the displacement of the valve plate (17). The vacuum valve (10) has a pressure sensor (50) positioned in such a way that a process pressure present in the flow chamber can be measured by means of the pressure sensor (50). The control unit (40) has a process control functionality which is designed in such a way that, when it is implemented, a provided item of process information is processed, the process pressure present in the flow chamber (15) is measured by the pressure sensor (50), and the displacement of the valve plate (17) is controlled depending on the processed item of process information and the process pressure.
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
A valve (1) with a valve housing (2) and valve openings (3), and with a closing element (5) and at least one valve drive (6). The valve also has two mutually opposite flanges (9, 10) each having a passage opening (11). The flanges can be moved towards and away from one another by the valve drive and are force-coupled to the closing element with respect to the movements of the closing element and in the fully opened position of the closing element are pressed against the wall regions (4) of the valve housing and thus the passage openings of the flanges connect the valve openings together. The two flanges (9, 10) each include a sequence of fingers (12) and recesses (13) arranged in between, and the fingers surround the passage openings and the fingers of the one flange engage in the respective recesses of the other flange.
F16K 29/00 - Arrangements for movement of valve members other than for opening or closing the valve, e.g. for grinding-in, for preventing sticking
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
A vacuum valve system (10) is proposed, comprising a valve seat arrangement which has a valve opening, a first valve seat encircling the valve opening and a second valve seat encircling the valve opening, comprising a closure component (20), which has a first sealing surface and a second sealing surface, for substantially gas-tightly closing the valve opening, and comprising a drive unit for moving the closure component (20) relative to the valve seat arrangement such that the closure component (20) is adjustable in a closing direction from an open position into a closed position and vice versa. The closure component (20) has a first closure side (24), which has the first sealing surface, and a second closure side (25), which has the second sealing surface. The closure component (20) has a closure element (23) which is arranged between, and connects, the first and the second closure side (24, 25). The closure element (23) and closure sides (24, 25) are configured such that the closure component (20) has at least one first recess that is open towards the edge of the closure component (20), and an opening of the at least first recess points in the closing direction.
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
A lifting device for lowering a substrate onto and for lifting it off from a substrate carrier in a process chamber. The lifting device had a lifting rod and a linear drive, for moving the lifting rod along a linear lifting movement path, and a plurality of adjustment screws for adjusting the position of the lifting movement path. The lifting device has a drive housing for the linear drive, and a drive housing flange and a passage opening surrounded by this flange. The lifting rod is guided through the passage opening, and the adjustment screws are each screwed through an adjustment screw receiving opening in the drive housing flange. The adjustment screw receiving openings are spaced apart in the drive housing flange, and a protrusion of the respective adjustment screw over the drive housing flange is adjustable by screwing that adjustment screw through the respective receiving opening at differing depths.
B23Q 7/00 - Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
36.
DEVICE FOR HOMOGENIZING A GAS DISTRIBUTION IN A PROCESS CHAMBER
A device (1) for homogenizing a gas distribution in a process chamber (2). The device (1) has a aperture shield (3) and a linear drive (4) for moving the aperture shield (3) in a reciprocating manner in two mutually opposite linear movement directions (5) between two terminal positions. The aperture shield (3) is able to be heated by at least one heating installation (6) of the device (1), and the aperture shield (3) by way of at least one interposed compensation element (7) of the device (1) is connected to the linear drive (4). The compensation element (7) enables a relative movement between the aperture shield (3) and the linear drive (4) in at least one direction (8) transverse, preferably orthogonal, to the linear movement directions (5) of the aperture shield (3).
The invention relates to a pendulum valve (10) comprising a valve seat with a first seal surface and a valve closure (14) of a second seal surface which corresponds to the first seal surface, wherein the valve closure is pivotally mounted about a pivot axis (R) by means of a drive unit (19). The pendulum valve (10) has a calibration surface and a position sensor for determining the distance between the position sensor and the calibration surface, wherein the position sensor is arranged at a fixed position relative to the valve seat, and the calibration surface is connected to the valve closure (14) and is movably arranged such that the position of the calibration surface and the distance between the position sensor and the calibration surface vary in the event of a pivoting movement of the valve closure (14).
F16K 3/06 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
A connecting device (1) for a line system for passing through charged particles, the connecting device (1) having first and second flanges (2, 4) and a bellows (6). The first flange (2) and the second flange (4) are connected to each other with the interposition of the bellows (6), and the first flange (2) and the second flange (4) are movable relative to one another to compensate for displacements in the line system in a longitudinal direction (7) and in at least one transverse direction (8) angled relative thereto. A line element (10) is arranged inside the bellows (6) and connects the flanges (2, 4) electrically conductively to one another. The line element (10) is movably mounted in or on both connection elements (13, 14) of the two flanges (2, 4), and/or the line element (10) has at least one annular spring (15) or at least one helical spring (16).
A valve plate has a plate portion with an elastomeric seal on a front face and an elongated connecting portion spaced apart from a rear face by a slot for fastening the valve plate to a valve rod. The extension of the connecting portion in the width direction is defined by opposing first and second side edges of the connecting portion when viewed in a plan view of the rear face of the plate portion. A connecting structure is configured in the connecting portion in a central region of the longitudinal extension of the first side edge of the connecting portion for connecting the connecting portion to an end portion of the valve rod. The connecting portion is reinforced in a region of its extension in the width direction adjoining the second side edge, relative to a region of its extension in the width direction adjoining the first side edge.
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 41/10 - Spindle sealings with diaphragm, e.g. shaped as bellows or tube
A valve plate has a plate portion with a front side elastomeric seal fitted thereon, and a connection apparatus arranged at the rear side for connecting the valve plate to a carrier apparatus of a vacuum valve. The connection apparatus includes first and second elongate connection portions, the first connection portion is located at one side and the second connection portion is located at the other side of the longitudinal center of the plate portion, with each being connected to the plate portion with the two spaced-apart ends thereof. The connection portions are spaced apart from the plate portion in the region between the two ends thereof, with a respective slot formed between the plate portion and the respective connection portion, and have in a central region of the longitudinal extent thereof a connection structure for connection to an end portion of a respective valve rod of the carrier apparatus.
Disclosed is a vacuum valve having a valve closure and having a drive unit which is coupled to the valve closure and which has at least one adjustment element. The vacuum valve furthermore has a position sensor, in particular a travel or distance sensor, such that a position of the valve closure and/or of the at least one adjustment element relative to a zero position, in particular an open position or closed position of the vacuum valve, can be measured.
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
F16K 3/10 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
A valve (1), in particular vacuum valve, having a valve housing (2) and a closure member (3) for closing a valve opening (4), and having a valve drive (5) for moving the closure member (3) to and fro between a closed position, in which the closure member (3) closes the valve opening (4), and an open position, in which the closure member (3) entirely or partially opens up the valve opening (4), wherein the closure member (3) is connected to the valve drive (5) by means of a valve rod (6) of the valve (1), and the closure member (3) is fastened or fastenable removably to the valve rod (6) by means of a releasable connecting device (7), wherein the releasable connecting device (7) has a fastening magnet (8) for removably fastening the closure member (3) to the valve rod (6) by means of magnetic attraction forces.
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
43.
Vacuum machining system having a process chamber with a vacuum regulating valve
B23Q 11/00 - Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling workSafety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
F16K 15/10 - Check valves with guided rigid valve members shaped as rings integral with, or rigidly fixed to, a common valve plate
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
The invention relates to a gas inlet valve for the controlled inlet of a process gas into a vacuum process chamber, wherein the gas inlet valve comprises: a gas flow unit with a gas inlet, a gas outlet and an inner volume which has free access to the gas inlet and to the gas outlet, wherein the gas flow unit has a sealing surface in the inner volume, an adjusting device with an adjusting unit, wherein the adjusting unit projects into the inner volume and is adjustably mounted outside the gas flow unit in the adjusting device, wherein the adjusting unit has a plate which is arranged inside the inner volume, wherein the plate can be brought into a closed position by means of the adjusting device, in which the plate rests on the sealing surface and thus prevents a gas flow, and wherein the plate can be brought by means of the adjusting device into an open position in which the plate is spaced from the sealing surface and thus allows a gas flow, two flexible sealing elements, which are fixed in each case to the gas flow unit and to the adjusting unit and thereby seal the inner volume, and a position determination unit which is arranged on or in the adjusting device and is adapted to determine a position of a part of the adjusting unit which has a fixed local relation to the plate.
F16K 41/12 - Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
45.
Method for monitoring, determining the position of, and positioning a pin-lifting system
Method for monitoring a state of a pin lifter device (10), wherein the pin lifter device (10) is designed for moving and positioning a substrate in a process atmosphere region (P). The pin lifter device (10) has a coupling (18) and a drive unit (12) having an electric motor, which is designed and interacts with the coupling (18) in such a way that the coupling (18) is adjustable from a lowered normal position into an individual active position and back. The method for monitoring includes progressively receiving a present item of motor current information with respect to a motor current applied to the electric motor, comparing the present motor current information to an item of target current information, and deriving an item of state information based on the comparison.
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
A vacuum valve including a housing, a closure unit with two valve plates, supported by a valve rod, and a carrier piece connected rigidly to the valve rod, a transmission unit, a drive unit with a base body and an actuator, a longitudinal linear guide, by which the transmission unit is guided parallel to a longitudinal adjusting direction relative to the base body, an oblique linear guide, by which the carrier piece is guided parallel to an oblique adjusting direction relative to the transmission unit, a spring acting between the transmission unit and the carrier piece, a stop device which blocks adjustment of the closure unit in the longitudinal adjusting direction in a middle position thereof, and a blocking unit, which in the locked state blocks an adjustment of the closure unit situated in the middle position counter to the longitudinal adjusting direction and, in the release state, allows adjustment.
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/32 - Means for additional adjustment of the rate of flow
F16K 31/122 - Operating meansReleasing devices actuated by fluid the fluid acting on a piston
A sealing ring made of an elastomer material is fitted on the front side of an essentially rectangular valve plate for sealing a vacuum valve opening. On the rear side, the valve plate has a recess with an undercut boundary wall which forms a sloping surface which, for fastening the valve plate on a carrier, is braced with a sloping surface of the carrier. The valve plate has a lug which protrudes beyond the rear side thereof and has a through-passage bore through which a clamping screw is screwable into a threaded bore of the carrier, for bracing the valve plate sloping surface with the carrier sloping surface. In a side view of the valve plate, seen parallel to the longitudinal sides, the straight-line extension of the longitudinal center axis of the through-passage bore runs past the sloping surface at a distance from the rear side of the valve plate.
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
F16K 27/04 - Construction of housingsUse of materials therefor of sliding valves
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
An arrangement with a valve having a valve housing and a closure member mounted for movement in an interior space of the valve housing between a closed position and an open position by a valve drive. The closure member closes valve housing openings in the closed position and opens them in the open position. The arrangement has an attachment part with an attachment part housing and a push tube, and the push tube is mounted displaceably in the attachment part housing. The attachment part housing and the push tube together enclose a line cavity of the attachment part for conducting a fluid through the attachment part. The attachment part housing is fastened on the outside to the valve housing, and the push tube can be pushed through the interior space of the valve housing when the closure member is in the open position.
F16K 43/00 - Auxiliary closure means in valves, which in case of repair, e.g. rewashering, of the valve, can take over the function of the normal closure meansDevices for temporary replacement of parts of valves for the same purpose
F16K 3/12 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with wedge-shaped arrangements of sealing faces
F16K 3/30 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing Details
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
49.
HIGH-FREQUENCY GROUNDING DEVICE AND VACUUM VALVE HAVING HIGH-FREQUENCY GROUNDING DEVICE
The invention relates to a high-frequency grounding device (40) for use with a vacuum valve for closing and opening a valve opening of a vacuum chamber system, having a grounding band (42) made of a conductive material for discharging electrical charges occurring on the vacuum valve, wherein the grounding band has a first end (41) and a second end (43) and, for grounding the vacuum valve, is designed to be connected at the first end to a valve closure of the vacuum valve, and to be connected at the second end to a component of the vacuum chamber system, wherein the high-frequency grounding device has a correction impedance, wherein the grounding band is coupled to the correction impedance so that a resonant circuit results, which comprises the grounding band and the correction impedance, and the correction impedance has a first element for shifting a resonant frequency of the resonant circuit and/or a second element for reducing a quality of the resonant circuit. The invention additionally relates to a vacuum valve and a vacuum chamber system having such a high-frequency grounding device.
A vacuum valve having a valve body, a closure member, a valve rod which supports the closure member, a guide piece by which the valve rod is movably guided parallel to a longitudinal displacement direction, a longitudinal travel drive by which the valve rod is displaceable with respect to the guide piece parallel to the longitudinal displacement direction, a transverse travel drive, and a slide part which is movable by the transverse travel drive, is guided by a primary linear guide to be movable with respect to the valve body, and is guided by a secondary linear guide to be movable with respect to the guide piece. The primary and secondary linear guides each run at an angle of less than 45° with respect to the longitudinal displacement direction, and the primary linear guides form an angle of more than 3° and less than 45° with the secondary linear guides.
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Vacuum processing system (1) comprising a vacuum chamber (10), a controllable fluid application arrangement (30) connected to the vacuum chamber (10) and configured to provide inflow of fluid into the vacuum chamber (10) in controlled manner and a controlling and/or regulating unit (40) for controlling at least the controllable fluid application arrangement (30). The vacuum processing system (1) comprises an atmospheric analyser (50), the atmospheric analyser (50) is arranged and configured to determine atmospheric information of inside of the vacuum chamber (10) and to provide the atmospheric information as a respective atmospheric signal and the controlling and/or regulating unit (40) is configured to control the controllable fluid application arrangement (30) as a function of the atmospheric signal.
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
A seal support ring (1) for a valve (2), particularly a vacuum valve, which has a throughflow opening (3) and a basic body (4), which annularly surrounds the throughflow opening, and a fastener arrangement (5) for fastening the seal support ring to a valve housing (6) of the valve. The basic body has a first side (7) on which the seal support ring, in a mounted state on the valve housing, lies against the valve housing, and the seal support ring has a seal ring (8) made from an elastomer which, in its position on the basic body, surrounds the throughflow opening. A casing wall (9) is arranged on the basic body and at least partially surrounds the throughflow opening and, on a second side (10) of the basic body (4) opposite the first side, protrudes from the basic body and has a larger inside diameter than the seal ring.
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 27/04 - Construction of housingsUse of materials therefor of sliding valves
F16K 31/04 - Operating meansReleasing devices electricOperating meansReleasing devices magnetic using a motor
F16K 27/00 - Construction of housingsUse of materials therefor
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/06 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
53.
Vacuum valve for loading and/or unloading a vacuum chamber
A vacuum valve (1) for loading and/or unloading a vacuum chamber (2). The vacuum valve has a closure plate (3) that is pressed against a valve seat (4) when in a closed position to seal a loading opening (5) and being raised from the valve seat (4) when in an open position, exposing the loading opening (5) for loading and/or unloading the vacuum chamber (2). The vacuum valve has at least one drive (6) for moving the closure plate (3) back and forth between the open and closed positions, the closure plate (3) being held by at least one guide (7) on at least one plate holder (8) of the drive (6). The vacuum valve has at least one elastic preload body (9), with the closure plate (3) being movable against a preload of the elastic preload body (9) along the guide (7) relative to the plate holder (8).
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
The invention relates to a valve (10) for opening and closing a valve opening (11) in a gas-tight manner and for ventilating a vacuum volume, having a valve seat (30), a closure element (20), and an adjusting unit (40) which is designed to provide a movement of the closure element (20) relative to the valve seat (30) such that the closure element (20) can be adjusted from an open position into a closing position and back. The valve seat (30), the closure element (20), and the adjusting unit (40) are arranged such that the closure element (20) can be adjusted linearly along an opening axis (A). The valve (10) has a holding device (50) which is designed to hold the closure element (20) in the closing position by providing a holding force.
The invention relates to a valve (10) for opening and closing a valve opening (11) in a gas-tight manner and for ventilating a vacuum volume, having a valve seat (30), a closure element (20), and an adjusting unit (40) which is designed to provide a movement of the closure element (20) relative to the valve seat (30) such that the closure element (20) can be adjusted from an open position into a closing position and back. The valve seat (30), the closure element (20), and the adjusting unit (40) are arranged such that the closure element (20) can be adjusted linearly along an opening axis (A). The valve (10) has a holding device (50) which is designed to hold the closure element (20) in the closing position by providing a holding force.
The invention relates to a vacuum valve (1) for regulating a volumetric or mass flow and/or for closing and opening a valve opening (2), comprising a valve seat, a valve closure (4), and a drive unit (7) which is coupled to the valve closure (4) and is designed to provide a movement of the valve closure (4) such that the valve closure (4) can be moved from an open position (0) into a closing position (S) and back. The vacuum valve (1) has a wireless assembly (10) with at least one coupling element and a storage element, and information relating to the valve state can be provided by means of the storage element.
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/10 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
F16K 31/04 - Operating meansReleasing devices electricOperating meansReleasing devices magnetic using a motor
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Described is a valve (1) on which a valve plate (5) is arranged in a valve housing interior space (6) of a valve housing (2) and fixed to a shaft (7), wherein the valve plate (5) together with the shaft (7) can be displaced back and forth in directions (8) parallel to a shaft longitudinal axis (9) between a closed position and an intermediate position, and by rotation of the shaft (7) about the shaft longitudinal axis (9) can be pivoted back and forth between the intermediate position and a maximum open position, wherein a shaft leadthrough (10) for sealing the shaft (7) with respect to the valve housing (2) has a bellows (11) which can be expanded and pushed together in the directions (8) parallel to the shaft longitudinal axis (9), a first bellows end (12) of said bellows being fixed to the valve housing (2), and a shaft sealing ring (14), in which the shaft (7) is rotatably mounted, being arranged on a second bellows end (13).
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 41/10 - Spindle sealings with diaphragm, e.g. shaped as bellows or tube
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 3/06 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
F16K 3/10 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
58.
CLOSURE DEVICE FOR CLOSING AN OPENING IN A WALL IN A VACUUM-TIGHT MANNER
The invention relates to a closure device for closing an opening (2) in a wall (3) in a vacuum-tight manner, having a valve plate (1) for closing and releasing the opening (2), said valve plate being connected to a valve rod (4) via a connection device. The connection device has a joint head (16), at least sections of the outer surface of which have the shape of a spherical surface and which is arranged in a receiving area (18) of a joint body (17). In order to block a rotation of the joint head (16) about the longitudinal axis (26) of the valve rod (4), at least one protruding pin (16d), which is arranged on the joint head (16) or the joint body (17), protrudes into a paired groove (19a), which is arranged in the respective other part and which extends on a plane (40) that lies parallel to the longitudinal axis of the valve rod (4) in a central location of the connection device.
The invention relates to a valve plate for a closure device for closing an opening (2) in a wall (3) in a vacuum-tight manner, said valve plate having a seal ring (8) on the front face for forming a seal with respect to the wall (3) and having a depression (29) on the rear face for connecting to a valve rod (4) of the closure device. The depression (29) arranged on the rear face of the valve plate (1) is adjoined by at least one respective extension (30) at least in regions of two opposing lateral walls of the depression (29). A threaded bore (31) is provided for each extension (30), said threaded bore leading to the extension (30) on a lateral wall of the respective extension (30), wherein the valve rod (4) can be connected to the valve plate (1) by means of a respective holding pin (39), which is screwed into the respective threaded bore (31) and an end section of which protrudes out of the threaded bore (31) and into the extension (30), by means of an interaction between the end section of the holding pin (39) and a groove (32a) which is arranged on a connection part (32) that is connected to the end of the valve rod (4) or is integrally formed together with the valve rod on the end of the valve rod (4).
Disclosed is a vacuum valve (10) for substantially gas-tightly sealing a first valve port (31), comprising a valve seat (30), a sealing element (20) for substantially gas-tightly sealing the first valve port (31), and a drive unit (40) for imparting a movement to the sealing element (20, 120) relative to the valve seat (30, 130). The sealing element (20) is flexibly designed in such a way that in the sealing position, a three-dimensional expansion of the sealing element (20) is variable in a direction running parallel to the opening axis (A) according to the prevailing difference in pressure.
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 3/20 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats
An edge-welded bellows, including a plurality of diaphragms and a guide part for guiding on the outer surface of a rod extending through an inner through-opening of the bellows or for guiding on the inner surface of a tube surrounding the bellows. The guide part has a retaining fin, which, at the edge thereof, lies between the edges of adjacent diaphragms and is welded thereto, and a guide sleeve, which surrounds the longitudinal central axis and has a guide surface for guiding the bellows on the outer surface of the rod or the inner surface of the tube. The guide sleeve has a wall thickness that is more than three times that of the retaining fin. The guide sleeve has a step having a contact surface. The retaining fin lies, in a region adjoining the edge thereof, on the contact surface and is form-fittingly secured against being lifted off from the contact surface.
Disclosed is a vacuum valve (10) for substantially gas-tightly sealing a first valve port (31), comprising a valve seat (30), a sealing element (20) for substantially gas-tightly sealing the first valve port (31), and a drive unit (40) for imparting a movement to the sealing element (20, 120) relative to the valve seat (30, 130). The sealing element (20) is flexibly designed in such a way that in the sealing position, a three-dimensional expansion of the sealing element (20) is variable in a direction running parallel to the opening axis (A) according to the prevailing difference in pressure.
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/20 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
The invention relates to a vacuum valve for the substantially gas-tight closure of an opening, comprising a closure element having a closure side and a coupling unit arranged on a rear side opposite the closure side, and a valve wall having valve seat surrounding the opening. The valve further comprises a linear drive unit enabling the closure element to be adjustable in at least two adjustment directions. The closure element is adjustable between an open position releasing the opening, an intermediate position pushed over the opening and a closed position closing the opening. The vacuum valve comprises a guide for the closure element associated with the opening. The closure element comprises a guide element interacting with the guide during an adjustment from the open position to the closed position and back.
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 31/528 - Mechanical actuating means with crank, eccentric, or cam with pin and slot
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
The invention relates to a vacuum valve for closing a valve opening for a vacuum transport system in a gas-tight manner. The vacuum transport system has a transport tube with multiple transport tube segments for transporting a vehicle in the interior along the transport tube, and the valve opening defines an opening axis. The vacuum valve additionally has: a seal surface which encircles the valve opening, a closure component for closing the valve opening in a gas-tight manner, comprising a single-piece seal, which has a closed circumference and is designed to interact with the seal surface, and a drive unit for providing a movement of the closure component relative to the valve opening such that the closure component can be moved parallel to a closure axis from an open position into a closing position and back, wherein the closure component at least partly releases the valve opening in the open position, and the seal contacts the seal surface in the closing position and closes the valve opening in a gas-tight manner. The closure axis is perpendicular to the opening axis, and the respective course of the seal surface and the seal has a first and second main section as well as two lateral sections. The two main sections lie on planes which are oriented at a right angle to the opening axis and which are mutually spaced, and the two main sections are connected by one of the lateral sections on two respective opposing faces of the main sections.
B65G 54/02 - Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
65.
MODULAR VACUUM VALVE SYSTEM FOR A VACUUM TRANSPORT SYSTEM
The invention relates to a vacuum valve system (10) for closing a first valve opening (31) for a vacuum transport system in a substantially gas-tight manner, having: a valve seat assembly (30) which has a first valve opening (31) that defines an opening axis and a first seal surface which encircles the first valve opening (31); a closure component (20) for closing the first valve opening (31) in a substantially gas-tight manner, comprising a second seal surface (21) corresponding to the first seal surface; and a drive unit (50) for providing a movement of the closure component (20) relative to the valve seat assembly (30). The valve seat assembly (30) can be combined with the transport tube such that a gas-tight transition is provided between the valve seat assembly (30) and the transport tube, and the first valve opening (31) corresponds to a tube cross-section. At least the valve seat assembly (30) and the closure component (20) are designed as separate modular combinable system components which interact in a combined state, and the closure component (20) can be combined with the valve seat assembly (30) in a modular manner such that the open position and the closing position of the closure component (20) can be provided by the movement that can be provided by the drive unit.
B65G 54/02 - Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
The invention relates to a vacuum valve for closing a valve opening for a vacuum transport system in a gas-tight manner. The vacuum transport system has a transport tube with multiple transport tube segments for transporting a vehicle in the interior along the transport tube, and the valve opening defines an opening axis. The vacuum valve additionally has: a seal surface which encircles the valve opening, a closure component for closing the valve opening in a gas-tight manner, comprising a single-piece seal, which has a closed circumference and is designed to interact with the seal surface, and a drive unit for providing a movement of the closure component relative to the valve opening such that the closure component can be moved parallel to a closure axis from an open position into a closing position and back, wherein the closure component at least partly releases the valve opening in the open position, and the seal contacts the seal surface in the closing position and closes the valve opening in a gas-tight manner. The closure axis is perpendicular to the opening axis, and the respective course of the seal surface and the seal has a first and second main section as well as two lateral sections. The two main sections lie on planes which are oriented at a right angle to the opening axis and which are mutually spaced, and the two main sections are connected by one of the lateral sections on two respective opposing faces of the main sections.
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
The invention relates to a vacuum valve system (10) for closing a first valve opening (31) for a vacuum transport system in a substantially gas-tight manner, having: a valve seat assembly (30) which has a first valve opening (31) that defines an opening axis and a first seal surface which encircles the first valve opening (31); a closure component (20) for closing the first valve opening (31) in a substantially gas-tight manner, comprising a second seal surface (21) corresponding to the first seal surface; and a drive unit (50) for providing a movement of the closure component (20) relative to the valve seat assembly (30). The valve seat assembly (30) can be combined with the transport tube such that a gas-tight transition is provided between the valve seat assembly (30) and the transport tube, and the first valve opening (31) corresponds to a tube cross-section. At least the valve seat assembly (30) and the closure component (20) are designed as separate modular combinable system components which interact in a combined state, and the closure component (20) can be combined with the valve seat assembly (30) in a modular manner such that the open position and the closing position of the closure component (20) can be provided by the movement that can be provided by the drive unit.
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 27/04 - Construction of housingsUse of materials therefor of sliding valves
Disclosed is a pin lifting device which is designed for moving and positioning a substrate to be processed, in particular a wafer, in a process atmosphere region which can be provided by a vacuum process chamber. The pin lifting device includes a coupling designed to receive a support pin adapted to contact and support the substrate, and a drive unit designed and interacting with the coupling such that the coupling is linearly adjustable along an axis of adjustment from a lowered normal position to an extended support position and back. The pin lifting device has at least one sensor unit which is designed and arranged in such a way that force-dependent and/or acceleration-dependent condition information can be generated by means of the sensor unit with reference to at least part of the pin lifting device.
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
G01P 15/18 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration in two or more dimensions
G01P 15/02 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration by making use of inertia forces
Disclosed is a pin lifting device which includes a housing extending along an adjustment axis, a housing end at a first end region of the housing and has a housing opening, a drive part arranged at a second end region of the housing, an adjusting device having a part which can move in the housing in the direction of the adjustment axis, a guide section for the adjusting device formed on the inside of the housing between a first stop at the frontal housing end and a second stop remote therefrom, a tight connecting device formed inside the housing between the frontal housing end and the adjusting device, and a connecting channel extending from the first stop to the second stop at the guide section. A contiguous second inner region leads to minimal changes in the volume of the second inner region even during movements of the movable part.
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
The invention relates to a pin lifting device (1) for lowering a substrate (2) onto a substrate carrier (15) and for lifting the substrate (2) off the substrate carrier (15) in a process chamber, in particular a vacuum process chamber, wherein the pin lifting device (1) comprises at least one lifting pin holder (4) and at least one lifting drive (5) for moving the lifting pin holder (4), which has a lifting pin (6) mounted thereon, back and forth along a linear lifting movement path (7), wherein the lifting pin holder (4) is mounted on the lifting drive (5) by means of a compensating bearing (8), wherein the compensating bearing (8) facilitates a relative movement between the lifting drive (5) and the lifting pin holder (4) in at least one direction (9) orthogonal to the linear lifting movement path (7). (Fig. 6)
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
Disclosed is a pin lifting device is designed for moving and positioning a substrate to be processed in a vacuum process chamber. The pin lifting device includes a coupling part having a coupling adapted to receive a support pin designed to contact and support the substrate, and further comprises a drive part having a drive unit adapted to cooperate with the coupling such that the coupling is linearly adjustable along an adjustment axis from a lowered normal position to an extended support position and back The pin lifting device has at least one temperature sensor, where the temperature sensor is designed and arranged such that a measurement signal representing thermal information with respect to at least part of the pin lifting device can be generated by means of the temperature sensor.
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
G01K 13/00 - Thermometers specially adapted for specific purposes
72.
Assembly having at least two chambers and at least one transfer valve
An assembly having at least two chambers (1, 2) and at least one transfer valve (3), wherein: a valve housing interior (9) of the transfer valve (3) is separated from each the chamber interiors (4, 5) of the chambers (1, 2) by respective partitions (12, 13) and a transfer opening (14, 15) for the feeding through of objects and/or fluids is formed in each of the partitions (12, 13) and in addition to the transfer opening (14, 15) in question an additional opening (16, 17) is arranged in each of the partitions (12, 13). The additional openings (16, 17) can be closed by respective switching valves (18, 19) of the assembly and, in an open state of the respective switching valves (18, 19), directly fluidically connect the valve housing interior (9) to the respective chamber interiors (4, 5) adjoining the respective partitions (12, 13).
F16K 11/20 - Multiple-way valves, e.g. mixing valvesPipe fittings incorporating such valvesArrangement of valves and flow lines specially adapted for mixing fluid with two or more closure members not moving as a unit operated by separate actuating members
F16K 27/04 - Construction of housingsUse of materials therefor of sliding valves
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
73.
VACUUM VALVE FOR PROVIDING A SYMMETRICAL FLUID FLOW
Disclosed is a regulating vacuum having a first valve seat having a first valve opening defining a first opening axis and a first sealing surface surrounding the first valve opening, and a first valve disk having a first contact surface corresponding to the first sealing surface. The valve includes a drive unit coupled to the first valve disk to adjust at least between an open position to a closed position. The regulating vacuum valve has at least one second valve seat, having a second valve opening with a second sealing surface. In addition, a second valve disk having a second contact surface corresponding to the second sealing surface is provided. An overall valve opening of the regulating vacuum valve is formed by the first valve opening as a first valve partial opening and the second valve opening as a second valve partial opening.
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
74.
Connecting apparatus for the connection of a valve rod to a closure member of a vacuum valve
A connecting apparatus for the connection of a valve rod (4) to a closure member (1) of a vacuum valve, with a connecting body (12) which is arranged between a first connecting part (10) and a second connecting part (11). The connecting body (12) has a basic shape of a Steinmetz body which is formed by way of a intersection of two circular cylinders. The connecting body (12) is arranged in an intermediate space between arm projections (24, 25) of the first connecting part (10) and in an intermediate space between arm projections (26, 27) of the second connecting part (11). Corresponding bearing faces (28, 29, 30, 31) of the arm projections (24, 25, 26, 27) bear against bearing faces (13, 14, 15, 16) of the connecting body (12). The two arm projections (24, 25, 26, 27) of the respective connecting part (10, 11) approach one another towards their free ends.
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 1/48 - Attaching valve members to valve-spindles
F16K 31/528 - Mechanical actuating means with crank, eccentric, or cam with pin and slot
The invention relates to a vacuum process system for an evacuable vacuum process volume, a vacuum valve, a peripheral unit having a closed-loop and open-loop control unit. The vacuum valve includes a valve seat, with a valve opening and a first sealing surface; a valve closure, with a second sealing surface and a drive unit coupled to the valve closure. The valve closure can be varied to provide different valve opening states. The closed-loop and open-loop control unit can perform multiple execution of a process cycle with control of the peripheral unit at least in part to execute a control cycle providing a deliberate variation or setting of the valve opening state by controlling the drive unit on the basis of a currently determined controlled variable for a process parameter and on the basis of a target variable and can be performed with a certain temporal relation.
F16K 3/06 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
The invention relates to a vacuum valve or a vacuum door comprising a closure plate (7) for closing an opening (4, 29) in a wall (3, 32), wherein the opening (4, 29) has opposing first and second long edges (4a, 4b; 29a, 29b) and shorter, by comparison, opposing first and second side edges (4c, 4d). A sealing unit (12) is provided to seal the closure plate (7) against the wall (3, 32) in the closed position of the closure plate (7). Said sealing unit comprises a supporting frame (13) having opposing first and second long legs (14, 15) and shorter, by comparison, opposing first and second side legs (17, 18), on which supporting frame there is mounted on one side a circumferential closure plate seal (18) and on the other side a circumferential wall seal (19). The supporting frame (13) is secured to fastening points on the wall (3, 32), with at least the central portions of the first and second long legs (14, 15) of the supporting frame (13) being free with respect to the wall (3, 32), or the supporting frame (13) is secured to fastening points on the closure plate (7), with at least central portions of the first and second long legs (14, 15) of the supporting frame (13) being free with respect to the closure plate (7).
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 27/04 - Construction of housingsUse of materials therefor of sliding valves
77.
DEVICE FOR CONNECTING FLUID-CONDUCTING PIPES AND/OR CHAMBERS
The invention relates to a device (1) for connecting fluid-conducting pipes (2) and/or chambers (3) in a high-frequency electromagnetic field, the device having two pipe bodies (4, 6), each with an intrinsically rigid pipe body inner wall (5, 7), and a bellows (8), the pipe body inner walls (5, 7) together surrounding an inner cavity (9) for conducting fluid through the device (1), and the pipe bodies (4, 6) being connected to each other and surrounded sealingly by the bellows (8), and the first pipe body (4) and the second pipe body (6) being displaceable and/or tiltable relative to each other, the second pipe body inner wall (7) of the second pipe body (6) protruding a little into an inner space (10) surrounded by the first pipe body inner wall (5) and ending there, and the first pipe body inner wall (5) being connected electrically conductively to the second pipe body inner wall (7) by means of at least one elastically deformable sliding contact (11) of the device (1).
F16L 25/01 - Construction or details of pipe joints not provided for in, or of interest apart from, groups specially adapted for realising electrical conduction between the two pipe ends of the joint or between parts thereof
F16L 27/11 - Adjustable jointsJoints allowing movement comprising a flexible connection only the ends of the pipe being interconnected by a flexible sleeve the sleeve having the form of a bellows with multiple corrugations
F16L 27/12 - Adjustable jointsJoints allowing movement allowing substantial longitudinal adjustment or movement
H01H 7/14 - Devices for introducing a predetermined time delay between the initiation of the switching operation and the opening or closing of the contacts with timing by mechanical speed-control devices by escapement electromagnetic
78.
METHOD FOR MONITORING, DETERMINING THE POSITION OF, AND POSITIONING A PIN-LIFTING SYSTEM
The invention relates to a method for monitoring a state of a pin-lifting device (10), the pin-lifting device (10) being designed to move and position a substrate in a process atmosphere zone (P). The pin-lifting device (10) comprises a coupling (18) and a drive unit (12) having an electric motor, which drive unit is designed and interacts with the coupling (18) in such a way that the coupling (18) can be moved from a lowered normal position to an individual working position and back. The method for monitoring comprises the steps of continuously obtaining current motor current information regarding a motor current at the electric motor, comparing the current motor current information with target current information, and deriving state information on the basis of the comparison.
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
The invention relates to a gas inlet valve (1) for the controlled inlet of a process gas into a vacuum process chamber, wherein the gas inlet valve has: a gas passage unit (2) with a gas input (21), a gas output (22) and an internal volume (23) which has free access to the gas input and to the gas output, wherein the gas passage unit has a sealing surface (24) in the internal volume, an adjusting device (3) with an adjusting unit (31), wherein the adjusting unit protrudes into the internal volume and is mounted such that it can be adjusted outside the gas passage unit in the adjusting device, wherein the adjusting unit has a plate (32) which is arranged within the internal volume, wherein the plate can be moved by means of the adjusting device into a closed position, in which the plate lies on the sealing surface and therefore prevents a passage of gas, and wherein the plate can be moved by means of the adjusting device into an open position, in which the plate is spaced apart from the sealing surface and therefore makes a passage of gas possible, two flexible seal elements (41, 42) which are fastened in each case to the gas passage unit and to the adjusting unit and therefore seal the internal volume, and a position determining unit which is arranged on or in the adjusting device and is set up to determine a position of a part of the adjusting unit, which part has a fixed spatial relation with respect to the plate.
F16K 41/12 - Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
F16K 31/122 - Operating meansReleasing devices actuated by fluid the fluid acting on a piston
80.
Pin lifting device with coupling for receiving and releasing a supporting pin
Disclosed is a pin lifting device for moving and positioning a substrate. The pin lifting device includes a coupling, a supporting pin configured to support the substrate, and a drive unit which configure to drive the coupling. The pin lifting device includes a separating means for separating a process atmosphere area from an external atmosphere area. The drive unit is at least partially in the external atmosphere area and the coupling is in the process atmosphere area. The coupling includes a linearly extending recess defining a central receiving axis. The recess has a width substantially orthogonally to the receiving axis. A clamping section delimited axially with respect to the receiving axis has a clamping element, in an unloaded receiving state, defines a clamping width that is smaller than the recess width, and the clamping width is variable as a function of a force acting radially on the clamping element.
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
A vacuum valve comprises a valve body (1), a closure member (4), at least one valve rod (9) which supports the closure member (4), at least one guide piece (15a, 15b) by which the at least one valve rod (9) is guided so as to be movable parallel to a longitudinal displacement direction (13), a longitudinal travel drive (17) by which the at least one valve rod (9) can be displaced with respect to the at least one guide piece (15a, 15b) parallel to the longitudinal displacement direction (13), a transverse travel drive (23), and at least one sliding part (24) which can be moved by the transverse travel drive (23), is guided by at least one primary linear guide (26) so as to be movable with respect to the valve body (1), and is guided by at least one secondary linear guide (27) so as to be movable with respect to the at least one guide piece (15a, 15b). The primary and secondary linear guides (26, 27) each run at an angle of less than 45° with respect to the longitudinal displacement direction (13), and the primary linear guides (26) form an angle of more than 3° and less than 45° with the secondary linear guides (27).
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
An arrangement with a valve (1) which has a valve housing (2) and a closure member (5) which is mounted such that it can be moved in an interior space (3) of the valve housing (2) to and fro between a closed position and an open position by a valve drive (4) of the valve (1), wherein the closure member (5) closes valve housing openings (6, 7) in the closed position and opens the valve housing openings (6, 7) in the open position, wherein the arrangement has an attachment part (8), and the attachment part (8) has an attachment part housing (9) and a torque tube (10), and the torque tube (10) is mounted displaceably in the attachment part housing (9), wherein the attachment part housing (9) and the torque tube (10) together enclose a line cavity (11) of the attachment part (8) for conducting a fluid through the attachment part (8), and the attachment part housing (9) is fastened on the outside to the valve housing (2), and the torque tube (10) of the attachment part (8) can be pushed through the interior space (3) of the valve housing (2) when the closure member (5) is situated in the open position.
F16K 43/00 - Auxiliary closure means in valves, which in case of repair, e.g. rewashering, of the valve, can take over the function of the normal closure meansDevices for temporary replacement of parts of valves for the same purpose
F16K 3/12 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with wedge-shaped arrangements of sealing faces
F16K 3/30 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing Details
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
83.
ADJUSTMENT DEVICE FOR A VACUUM AREA WITH PRESSURE MEASURING FUNCTIONALITY
A vacuum adjustment device (10) for an active element (19), which can move in a process atmosphere area (P) and has a clutch (18) and a drive unit which has an electric motor (12) and which interacts with the clutch (18) in such a way that the clutch (18, 38) can be adjusted from a normal position into an active position and back. The device has a mechanical interface for connecting the vacuum adjustment device (10) to a process volume which provides a process atmosphere, a dynamic separation device (15) for separating the process atmosphere from an external atmosphere area (A) and a control and processing unit which is at least electrically connected to the drive unit and is designed to control the electric motor (12). The control and processing unit is designed to derive engine status information on the basis of the magnitude of an engine operating parameter, and has a pressure-determining functionality which is configured in such a way that a load difference is derived by means of a comparison of the engine status information with a known engine setpoint status, and a pressure difference between the external atmosphere area (A) and the process atmosphere area (P) is derived on the basis of the load difference.
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
84.
VACUUM VALVE FOR LOADING AND/OR UNLOADING A VACUUM CHAMBER
The invention relates to a vacuum valve (1) for loading and/or unloading a vacuum chamber (2), wherein the vacuum valve (1) has a closing plate (3), the closing plate (3) being pressed against a valve seat (4) when in a closed position and sealing a loading opening (5) and being raised from the valve seat (4) when in an open position and exposing the loading opening (5) for loading and/or unloading the vacuum chamber (2), wherein the vacuum valve (1) has at least one drive (6) for moving the closing plate (3) back and forth between the open position and the closed position, the closing plate (3) being held by means of at least one guide (7) on at least one plate holder (8) of the drive (6) and the vacuum valve (1) having at least one elastic preload body (9), the closing plate (3) being movable against a preload of the elastic preload body (9) along the guide (7) relative to the plate holder (8).
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
F16P 3/12 - Safety devices acting in conjunction with the control or operation of a machineControl arrangements requiring the simultaneous use of two or more parts of the body with means, e.g. feelers, which in case of the presence of a body part of a person in or near the danger zone influence the control or operation of the machine
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
Disclosed is a pin lifting device for moving and positioning a substrate in a process atmosphere region. The pin lifting device has a coupling part including a coupling configured to receive a support pin designed to contact and carry the substrate, and a drive unit configured to adjust the coupling linearly along an adjustment axis (A) from a lowered normal position into an extended support position and back. The coupling part has a sliding guide element movable along the adjustment axis (A), where the sliding guide element is coupled to the drive unit and where the sliding guide element has at least one sliding element. The sliding element interacts with a guide surface provided by the coupling part to guide the sliding guide element can be linearly along the adjustment axis (A) and in a sliding manner relative to the guide surface.
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
A piston-cylinder unit having a cylinder housing (1) with a cylinder interior (2) and a piston (3) arranged in cylinder interior (2), from which a piston rod (4) starts and is guided out from the cylinder housing (1) through an opening and at the same time is sealed with respect to the cylinder housing (1) by a piston rod seal (12) arranged on the cylinder housing (1). A sliding sleeve (11) made of plastic and entrained by the piston rod (4) is arranged on the piston rod (4), and the piston rod seal (12) bears against said sliding sleeve.
F15B 15/14 - Fluid-actuated devices for displacing a member from one position to anotherGearing associated therewith characterised by the construction of the motor unit of the straight-cylinder type
F16K 31/122 - Operating meansReleasing devices actuated by fluid the fluid acting on a piston
F16K 41/10 - Spindle sealings with diaphragm, e.g. shaped as bellows or tube
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
87.
Safeguarding device, wafer transport container with at least one safeguarding device, safeguarding system and method with the safeguarding device
A safeguarding device includes one or more positive-fit units that safeguard a wafer-transport-container opening element of a wafer transport container, which is held in its closure position by a closing mechanism. The closing mechanism includes one or more chambers, which includes a pressure connection channel that allows a variation of an inner pressure in the chamber relative to a reference pressure. A differential pressure is calculated from the inner pressure of the chamber and the reference pressure and influences a safeguarding status of the positive-fit unit.
B65G 47/91 - Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
H01L 21/673 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components using specially adapted carriers
H01L 21/677 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for conveying, e.g. between different work stations
88.
Joining system for mechanically joining two materials
A joining system for mechanically joining two materials is disclosed. A receiving device having a sleeve which surrounds an axis of extension and which is designed to receive a pin, and a plug-in device having the pin, where the joining system is configured such that, when the pin is inserted in the sleeve, the pin is clamped to the sleeve in the axial direction in relation to the axis of extension on account of a spring element of the receiving device being pushed radially against a belly region of the pin.
F16B 13/02 - Dowels or other devices fastened in walls or the like by inserting them in holes made therein for that purpose in one piece with protrusions or ridges on the shaft
06 - Common metals and ores; objects made of metal
07 - Machines and machine tools
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
42 - Scientific, technological and industrial services, research and design
Goods & Services
Ironmongery and pipes, including flanges, intermediate
rings, end pieces of tubes, membranes and membrane bellows,
junctions for pipes and intermediate pieces; all the
aforesaid goods of metal and particularly in the fields of
surface coating technology, research, medical technology,
semiconductor manufacturing, cryotechnology and fluids
technology. Pneumatic controls for machines and engines; steam traps;
valves (parts of machines); clack valves [parts of
machines]; pressure valves (parts of machines); control
mechanisms for machines, engines or motors; bellows (parts
of machines); hydraulic pressure valves; control valves
(parts of machines); valve diaphragms; flanges,
intermediate rings, end pieces of tubes, membranes and
membrane bellows, junctions for pipes and intermediate
pieces; all the aforesaid goods as parts of machines,
particularly in the fields of surface coating technology,
research, medical technology, semiconductor manufacturing,
cryotechnology and fluids technology, as well as engine
parts (except engines for land vehicles). Distribution consoles (electricity); electric regulating
apparatus; solenoid valves (electromagnetic switches);
pressure indicator plugs for valves; pressure measuring
apparatus; remote control apparatus; control panels
(electricity); switches; electronic remote control
apparatus for valves; electric installations for the remote
control of industrial companies. Repair and installation services, including repair and
installation services for valves, ironmongery, pipes,
flanges, intermediate rings, end pieces, membranes, membrane
bellows, junctions for pipes, intermediate pieces, pneumatic
controls for machines and engines, steam traps, valves
(parts of machines), clack valves, pressure valves (parts of
machines), control mechanisms for machines, engines or
motors, bellows (parts of machines), hydraulic pressure
valves, control valves, valve diaphragms, distribution
consoles (electricity), electric regulating apparatus,
solenoid valves (electromagnetic switches), pressure
indicator plugs for valves, pressure measuring apparatus,
remote control apparatus, control panels (electricity),
switches, electronic remote control apparatus for valves,
electric installations for the remote control of industrial
companies. Scientific and technological services as well as related
research and design services; design, development,
maintenance and updating of software.
The invention relates to a directional valve having a valve housing (1) having a primary connection (3) and at least one first and one second secondary connection (4, 5) and a rotating piece (9) arranged in the valve housing (1), which rotating piece is penetrated by a channel (11) and is rotatable about a rotation axis (10) in order to adjust the directional valve between at least one first and one second switch position, wherein a first end of the channel (11) is concentric to the rotation axis (10). The rotating piece (9) has an outer surface (13) which is curved in the shape of a spherical calotte, at which outer surface the second end of the channel (11) opens. The valve housing (1) has an inner surface (14) which is curved in the shape of a spherical calotte, at which inner surface secondary connection channels (7, 8) of the secondary connections (4, 5) open, and which is opposite the outer surface (13) of the rotating piece (9) that is curved in the shape of a spherical calotte. The outer surface (13) of the rotating piece, which is curved in the shape of a spherical calotte, and the curved inner surface (14) of the valve housing (1), which is curved in the shape of a spherical calotte, extend at most over the area of a hemisphere.
F16K 11/087 - Multiple-way valves, e.g. mixing valvesPipe fittings incorporating such valvesArrangement of valves and flow lines specially adapted for mixing fluid with all movable sealing faces moving as one unit comprising only taps or cocks with spherical plug
F16K 5/20 - Special arrangements for separating the sealing faces or for pressing them together for plugs with spherical surfaces
F16K 49/00 - Means in or on valves for heating or cooling
F16K 5/06 - Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having spherical surfacesPackings therefor
The invention relates to an edge-welded bellows, comprising a plurality of diaphragms (2) and at least one guide part (8) for guiding on the outer surface of a rod (6) extending through an inner through-opening of the edge-welded bellows or for guiding on the inner surface of a tube (14) surrounding the edge-welded bellows. The guide part (8) has a retaining fin (9), which, at the edge thereof, lies between the edges of adjacent diaphragms (2) and is welded thereto, and a guide sleeve (10), which surrounds the longitudinal central axis (7) and has a guide surface (12) for guiding the edge-welded bellows on the outer surface of the rod (6) or the inner surface of the tube (14). The guide sleeve (10) has a wall thickness that is more than three times the wall thickness of the retaining fin. The guide sleeve (10) has a step having a contact surface (11). The retaining fin (9) lies, in a region adjoining the edge thereof, on the contact surface (11) and is interlockingly secured against lifting off from the contact surface (11).
06 - Common metals and ores; objects made of metal
07 - Machines and machine tools
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
42 - Scientific, technological and industrial services, research and design
Goods & Services
Ironmongery and pipes, namely, metal flanges, metal intermediate sealing caps, metal gaskets for use in the field of surface coating, metal key rings, end pieces of tubes in the nature of metal sealing caps; junctions of metal for pipes and intermediate pieces in the nature of pipe couplings of metal; structural joint connectors of metal being junctions for pipes and intermediate pieces; all the aforesaid goods for use in the field of surface coating technology, research, medical technology, manufacturing of liquids cryotechnology, semiconductors and technologies Pneumatic controls for machines and engines; valves being parts of machines, namely, steam traps; valves being parts of machines; clack valves being parts of machines; pressure valves being parts of machines; control mechanisms for machines, engines or motors, namely, hydraulic controls for machines, motors and engines; bellows being parts of machines; hydraulic pressure valves being parts of machines; pump control valves; valve diaphragms being parts of machines; flanges being structural parts and sold as integral components of machines; intermediate piston rings being engine parts; end pieces of tubes being parts of machines; membranes filters for use as parts of machines and membrane bellows being parts of machines; mechanical seals, namely, junctions for pipes and intermediate pieces; all the aforesaid goods as parts of machines or engines, other than engines for land vehicles, in particular, in the fields of surface coating technology, research, medical technology, cryotechnology, semiconductors, manufacturing technology and fluids, as well as engine parts Electricity distribution consoles; apparatus for regulating electric current; electromagnetic switches, namely, solenoid valves; pressure indicator plugs for valves; pressure measuring apparatus; remote control apparatus, namely, remote controls for electricity distribution consoles; electric control panels; electric switches; electronic remote control apparatus for controlling valves; electric installations for the remote control of industrial company operations Repair and installation services for valves, ironmongery, pipes, flanges, intermediate rings, end pieces, membranes, membrane bellows, junctions for pipes, intermediate pieces, pneumatic controls for machines and engines, steam traps, valves being parts of machines, clack valves, pressure valves being parts of machines, control mechanisms for machines, engines or motors, bellows being parts of machines, hydraulic pressure valves, control valves, valve diaphragms, electricity distribution consoles, electric regulating apparatus, electromagnetic switches in the nature of solenoid valves, pressure indicator plugs for valves, pressure measuring apparatus, remote control apparatus, electricity control panels , switches, electronic remote control apparatus for valves, and electric installations for the remote control of industrial companies Scientific and technological services, namely, maintenance and updating of software in the field of valve controls and control mechanisms for machines, as well as research and design services relating thereto; design, development, maintenance and updating of software in the field of valve controls control mechanisms for machines, namely, for machine parts being valves, machine clack valves, machine parts being pressure valves, machine parts being bellows, and machine parts being hydraulic pressure valves and control valves
The invention relates to a vacuum valve (10) for closing, in a substantially gas-tight manner, an opening defining an opening axis, said vacuum valve having a closure member (14) with a closure side and a coupling unit arranged on a rear side opposite the closure side, and a valve wall which runs around the opening and has a valve seat (12a). The valve further has a linear drive unit, by means of which the closure member (14) can be adjusted along an adjustment axis in at least two adjustment directions substantially orthogonal to the opening axis and thus the closure member (14) can be adjusted between an open position, exposing the opening, an intermediate position, pushed over the opening, and a closed position, closing the opening. The vacuum valve (10) has a guide for the closure member (14), said guide being associated with the opening. The closure member (14) has a guide member (25) which interacts with the guide during adjustment out of the open position into the closed position, and back again, and the guide and the guide member (25) are formed and interact such that, during adjustment out of the intermediate position into the closed position, in a first partial movement, a tilting of the closure member (14) transversely with respect to the adjustment axis is initiated and/or effected.
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 31/528 - Mechanical actuating means with crank, eccentric, or cam with pin and slot
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
Disclosed is a vacuum valve with a sensor arrangement having at least one inertial sensor, where the sensor arrangement is designed in such a way it detects a measuring signal with respect to an acceleration impacting on the valve.
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
Disclosed is a vacuum valve having a valve seat, which has a valve opening, defining an opening axis, and a first sealing surface, a valve closure having a second sealing surface corresponding to the first sealing surface, a drive unit coupled to the valve closure, which can be moved from an open position, in which the valve closure and the valve seat do not contact each other, to a closed position, in which there is a sealing contact between the first sealing surface and the second sealing surface by a seal there between, and the valve opening is sealed gastight as a result. The vacuum valve has at least one temperature sensor, where the temperature sensor is designed and arranged such that, from the temperature sensor, a measurement signal representing thermal information in respect of at least one part of the vacuum valve can be detected.
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
F16K 3/04 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/10 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
96.
Assembly having a first chamber and at least one second chamber
An assembly, including a first chamber (1) and at least one second chamber (2) and at least one pivoting drive (3) for pivoting a pivoting object (4) of the assembly, wherein the pivoting object (4) is arranged in the first chamber (1) and at least one intermediate wall (5) is arranged between the first chamber (1) and the second chamber (2). A transmission body (6), which is annular at least in some sections, can be rotated about an axis of rotation (7) by the pivoting drive (3) and is fed through at least one feed-through opening (8), preferably two feed-through openings (8), in the intermediate wall (5).
F16K 3/06 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members in the form of closure plates arranged between supply and discharge passages
F16K 3/10 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
F16K 31/53 - Mechanical actuating means with toothed gearing
F16K 31/54 - Mechanical actuating means with toothed gearing with pinion and rack
F16H 19/04 - Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary motion and reciprocating motion comprising a rack
F16H 57/023 - Mounting or installation of gears or shafts in gearboxes, e.g. methods or means for assembly
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
The invention relates to a pin-lifting device (10), in particular a pin lifter, which is designed to move and position a substrate to be processed, in particular a wafer, in a process atmosphere region that can be provided by a process chamber. The pin lifting device (10) has a coupling (32), which is designed to receive a support pin configured to contact and support the substrate and has a drive unit (12), which is formed and cooperates with the coupling (32) in such a way that the coupling (32) can be displaced linearly along a displacement axis (A) from a lowered normal position into an extended support position and back. The pin lifting device (10) has at least one sensor unit (41-44), which is formed and arranged in such a way that force-dependent and/or acceleration-dependent state information with reference to a least one part of the pin lifting device (10) can be generated by means of the sensor unit (41-44).
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
The invention relates to a pin lifting device (10), in particular a pin lifter, which is designed to move and position a substrate, which is to be processed, in a process atmosphere region that can be provided by means of a vacuum process chamber. The pin lifting device comprises: a coupling part (31), which has a coupling (32) designed to receive a supporting pin, which is designed to contact and support the substrate; and a drive part (11), which has a drive unit (12), which is designed in such a way and interacts with the coupling (32) in such a way that the coupling (32) can be moved linearly along a movement axis (A) from a lowered normal position into an extended supporting position and back. The pin lifting device (10) has at least one temperature sensor (41, 42), the temperature sensor (41, 42) being designed and arranged in such a way that, by means of the temperature sensor (41, 42), a measurement signal representing thermal information in respect of at least one part of the pin lifting device (10) can be generated.
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
Disclosed is a vacuum valve having a valve closure and having a drive unit which is coupled to the valve closure and which has at least one adjustment element. The vacuum valve furthermore has a position sensor, in particular a travel or distance sensor, such that a position of the valve closure and/or of the at least one adjustment element relative to a zero position, in particular an open position or closed position of the vacuum valve, can be measured.
F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
F16K 3/10 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
100.
LOCK DEVICE, LOCK SYSTEM, AND METHOD FOR OPERATING A LOCK DEVICE
The invention relates to a lock device (68; 68a; 68b), in particular a vacuum lock device, having at least one lock chamber (10; 10a; 10b), which, in particular, can be closed vacuum-tight, comprising at least one movably mounted lock actuation element (12; 12a; 12b) for setting an opening state of at least one opening (14, 16; 14a, 16a; 14b, 16b) of the lock chamber (10; 10a; 10b), preferably opening states of at least two openings (14, 16; 14a, 16a; 14b, 16b) of the lock chamber (10; 10a; 10b), and comprising a bearing unit (18; 18a; 18b) for movably mounting the lock actuation element (12; 12a; 12b).
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
