The present invention addresses the problem of providing a plate-type heat exchanger that has a high heat exchange rate due to a substantially uniform flow rate of fluid in the width direction of a heat transfer part. The problem is solved by a plate-type heat exchanger that comprises a flow path between a plurality of laminated heat transfer plates and exchanges heat between fluids flowing in respective two flow paths that are adjacent via a heat transfer plate. The heat transfer plates include at least two types of a first heat transfer plate and a second heat transfer plate. The first heat transfer plate comprises a first heat transfer part, a first supply part, and a first discharge part. The second heat transfer plate comprises a second heat transfer part, a second supply part, and a second discharge part. The first supply part is present at the center of the first heat transfer part in the width direction, and the second supply part is present next to the first heat transfer part in the width direction. The first discharge part is present at the center of the first heat transfer part in the width direction, and the second discharge part is present next to the first heat transfer part in the width direction. The plate-type heat exchanger comprises a first supply passage, a first discharge passage, a second supply passage, and a second discharge passage.
F28D 9/00 - Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
F28F 3/04 - Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element
The present invention addresses the problem of providing a chuck that can achieve a more uniform temperature distribution on an upper surface thereof. This problem is solved by a chuck, wherein a cooling layer includes a heat exchange layer, an introduction layer, and a discharge layer. The heat exchange layer has therein a first space expanding in a horizontal direction, the introduction layer has therein a second space expanding in the horizontal direction, and the discharge layer has therein a third space expanding in the horizontal direction. The chuck also comprises a flow channel α that connects the second space and the first space and can move a refrigerant introduced into the second space to the inside of the first space, and a flow channel β that connects the first space and the third space and can move the refrigerant inside the first space to the inside of the third space. The refrigerant is introduced into the second space of the introduction layer from the outside, passes through the flow channel α, and moves to the inside of the first space of the heat exchange layer, after which the refrigerant moves to the inside of the third space of the discharge layer, and is then discharged to the outside.
A heat transport device comprises first flow passages through which a first fluid flows, and second flow passages through which a second fluid flows, wherein a cross-section A satisfying the following Requirement 1 to Requirement 3 can be achieved. Requirement 1 is that the cross-section A is a cross-section perpendicular to the second flow passages. Requirement 2 is that the holes of the second flow passages are disposed so as to be aligned in the left-right direction and to form layers in the up-down direction; and when comparing layers with holes adjacent in the up-down direction, the holes of the second flow passages are not disposed at the same position in the left-right direction. Requirement 3 is that the first flow passages exist between the layers with holes adjacent in the up-down direction, and the first flow passages meander in the up-down direction so as to avoid the holes of the second flow passages in the layers with holes that are sandwiched in the up-down direction.
F28D 7/16 - Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged in parallel spaced relation
4.
Heat Transport Device And Method For Manufacturing Same
A heat transport device comprises first flow passages through which a first fluid flows, and second flow passages through which a second fluid flows, wherein a cross-section A satisfying the following Requirement 1 to Requirement 3 can be achieved. Requirement 1 is that the cross-section A is a cross-section perpendicular to the second flow passages. Requirement 2 is that the holes of the second flow passages are disposed so as to be aligned in the left-right direction and to form layers in the up-down direction; and when comparing layers with holes adjacent in the up-down direction, the holes of the second flow passages are not disposed at the same position in the left-right direction. Requirement 3 is that the first flow passages exist between the layers with holes adjacent in the up-down direction, and the first flow passages meander in the up-down direction so as to avoid the holes of the second flow passages in the layers with holes that are sandwiched in the up-down direction.
F28D 7/16 - Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged in parallel spaced relation
5.
Heat Transport Device And Method For Manufacturing Same
A method of manufacturing a heat transport device includes a flat plate working process, a first joining process, a plastic working process, and a second joining process. In the first plate working process, a processed flat plate Q including recesses is obtained. In the first joining process, a flat plate R and the processed flat plate Q are joined to obtain a first flow passage plate including a first set of flow passages. In the plastic working process, the first set of flow passages are deformed to form recesses and obtain a second flow passage plate. In the second joining process, multiple second flow passage plates are stacked on top of each other and joined to form a second set of flow passages which is not parallel to the first set of flow passages.
F28F 3/08 - Elements constructed for building-up into stacks, e.g. capable of being taken apart for cleaning
F28D 9/00 - Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
F28D 9/04 - Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being formed by spirally-wound plates or laminae
F28F 3/04 - Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element
F28F 7/02 - Blocks traversed by passages for heat-exchange media
A heat sink is a multilayer cooler for cooling a contacting heat-generating element by flowing a coolant from a fluid inlet to a fluid outlet, and includes a heat-receiving plate, a channel plate, an orifice plate, a header plate, and a bottom plate stacked in this order from the top surface and bonded by diffusion bonding. The channel plate has many cooling micropaths arranged in a matrix. The orifice plate has jet orifices for jetting a coolant into the cooling micropaths and drain orifices for draining the coolant from the cooling micropaths. The header plate includes a baffle that separates the fluid inlet from the fluid outlet. The baffle includes a plurality of parallel plates and first end plates and second end plates that alternately close openings at an end and at the opposite end of the parallel plate. The baffle and the peripheral wall define a supply channel.
H01L 23/473 - Arrangements for cooling, heating, ventilating or temperature compensation involving the transfer of heat by flowing fluids by flowing liquids
F28F 3/12 - Elements constructed in the shape of a hollow panel, e.g. with channels
F28F 13/06 - Arrangements for modifying heat transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media
A vaporizer is provided that is capable of heating source material mist under precise temperature management and thereby able to acquire a gas source material which can be adjusted to a prescribed temperature and which has a very low level of variation in temperature and that produces almost no precipitate. The vaporizer heats and vaporizes a source material mist to obtain a gas source material for film forming. The vaporizer comprises a main part formed from a metal material and having therein first flows path through which the source material mist flows and second flow paths through which a heating medium for heating the source material mist flows, the equivalent area circle diameter of the cross-section of the first flow paths is 5 mm or less while the equivalent area circle diameter of the cross-section of the second flow paths is 2 mm or less, and there are no gaps aside from the second flow paths between one of the first flow paths and another of the first flow paths adjacent thereto in the inside of the main part.
C23C 16/44 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
C23C 16/455 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber
C23C 16/06 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
C23C 16/448 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
C23C 16/52 - Controlling or regulating the coating process
8.
Heat transport device and method for manufacturing same
A heat transport device comprises first flow passages through which a first fluid flows, and second flow passages through which a second fluid flows, wherein a cross-section A satisfying the following Requirement 1 to Requirement 3 can be achieved. Requirement 1 is that the cross-section A is a cross-section perpendicular to the second flow passages. Requirement 2 is that in the cross-section A, the holes of second flow passages are separated by meandering partition plates and are disposed in a layered manner. Two adjacent partition plates are a partition plate B and a partition plate C, and when comparing a point α, which is the top point of a mountain in the partition plate B closest to the partition plate C, and a point β, which is the bottom point of a valley in the partition plate C closest to the partition plate B, the point α is closer to the partition plate C side than the point μ. Requirement 3 is that the first flow passages are present inside the partition plates.
F28F 3/08 - Elements constructed for building-up into stacks, e.g. capable of being taken apart for cleaning
F28D 9/00 - Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
F28D 9/04 - Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being formed by spirally-wound plates or laminae
F28F 3/04 - Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element
F28F 7/02 - Blocks traversed by passages for heat-exchange media
9.
Heat transport device and method for manufacturing same
A heat transport device comprises first flow passages through which a first fluid flows, and second flow passages through which a second fluid flows, wherein a cross-section A satisfying the following Requirement 1 to Requirement 3 can be achieved. Requirement 1 is that the cross-section A is a cross-section perpendicular to the second flow passages. Requirement 2 is that the holes of the second flow passages are disposed so as to be aligned in the left-right direction and to form layers in the up-down direction; and when comparing layers with holes adjacent in the up-down direction, the holes of the second flow passages are not disposed at the same position in the left-right direction. Requirement 3 is that the first flow passages exist between the layers with holes adjacent in the up-down direction, and the first flow passages meander in the up-down direction so as to avoid the holes of the second flow passages in the layers with holes that are sandwiched in the up-down direction.
F28D 7/16 - Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged in parallel spaced relation
[Problem] To provide a vaporizer that is capable of heating source material mist under precise temperature management and thereby able to acquire a gas source material which can be adjusted to a prescribed temperature and which has a very low level of variation in temperature and that produces almost no precipitate. [Solution] Provided is a vaporizer for heating and vaporizing a source material mist to obtain a gas source material for film forming, wherein the vaporizer comprises a main part formed from a metal material and having therein first flows path through which the source material mist flows and second flow paths through which a heating medium for heating the source material mist flows, the equivalent area circle diameter of the cross-section of the first flow paths is 5 mm or less while the equivalent area circle diameter of the cross-section of the second flow paths is 2 mm or less, and there are no gaps aside from the second flow paths between one of the first flow paths and another of the first flow paths adjacent thereto in the inside of the main part.
H01L 21/31 - Treatment of semiconductor bodies using processes or apparatus not provided for in groups to form insulating layers thereon, e.g. for masking or by using photolithographic techniquesAfter-treatment of these layersSelection of materials for these layers
C23C 16/448 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
C23C 16/455 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber
H01L 21/205 - Deposition of semiconductor materials on a substrate, e.g. epitaxial growth using reduction or decomposition of a gaseous compound yielding a solid condensate, i.e. chemical deposition
A multilayer heat sink including a heat-receiving layer, a channel layer including cooling micropaths extending and directing a fluid in a direction orthogonal to a stacking direction, an orifice layer including jet orifices configured to jet the fluid into the cooling micropaths, and drain orifices configured to drain the fluid from the cooling micropaths, a header layer including a peripheral wall and a baffle, and a bottom layer, wherein the baffle includes parallel plates disposed parallel to each other, and end plates configured to alternately close an opening at an end and an opening at an opposite end of the parallel plates, and the orifice layer, the bottom layer, the baffle, and the peripheral wall define a supply channel to guide the fluid from a fluid inlet to the jet orifices and a drain channel to guide the fluid from the drain orifices to a fluid outlet.
H01L 23/473 - Arrangements for cooling, heating, ventilating or temperature compensation involving the transfer of heat by flowing fluids by flowing liquids
F28F 3/12 - Elements constructed in the shape of a hollow panel, e.g. with channels
F28F 13/06 - Arrangements for modifying heat transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media
A heat exchanger includes a first flow channel and a second flow channel that are alternately stacked in a stacking direction, each of the first flow channel and the second flow channel including: upstream parts disposed parallel to one another in a direction perpendicular to the stacking direction and to a direction in which the flow channels extend; downstream parts disposed parallel to one another in a direction perpendicular to the stacking direction and to a direction in which the flow channels extend; and branching/merging parts configured to branch the flow channels immediately upstream of the branching/merging parts into two divergent channels and merge the divergent channels adjacent to one another to form next flow channels, between the upstream parts and the downstream parts, wherein the branching/merging parts are provided in a plurality of stages between the upstream parts and the downstream parts.
F28F 3/00 - Plate-like or laminated elementsAssemblies of plate-like or laminated elements
F28D 9/00 - Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
F28F 13/12 - Arrangements for modifying heat transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media by creating turbulence, e.g. by stirring, by increasing the force of circulation
13.
HEAT TRANSPORT DEVICE AND METHOD FOR MANUFACTURING SAME
The present invention addresses the problem of providing a heat transport device which has a high heat transmission rate because one flow passage meanders and the interval between two flow passages is kept substantially constant, and as a result thereof, a reduction in size, a reduction in weight, or a reduction in thickness, etc. can be achieved. This problem is solved by a heat transport device comprising first flow passages through which a first fluid flows, and second flow passages through which a second fluid flows, wherein a cross-section A satisfying the following [Requirement 1] to [Requirement 3] can be achieved. [Requirement 1] The cross-section A is a cross-section perpendicular to the second flow passages. [Requirement 2] The holes of the second flow passages are disposed so as to be aligned in the left-right direction and to form layers in the up-down direction; and when comparing layers with holes adjacent in the up-down direction, the holes of the second flow passages are not disposed at the same position in the left-right direction. [Requirement 3] The first flow passages exist between the layers with holes adjacent in the up-down direction, and the first flow passages meander in the up-down direction so as to avoid the holes of the second flow passages in the layers with holes that are sandwiched in the up-down direction.
F28F 3/08 - Elements constructed for building-up into stacks, e.g. capable of being taken apart for cleaning
F28D 9/00 - Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
14.
HEAT TRANSPORT DEVICE AND METHOD FOR MANUFACTURING SAME
The present invention addresses the problem of providing a heat transport device which has a high heat transmission rate because one flow passage meanders and the interval between two flow passages is narrow, and the other fluid flows through the narrow space between the flow passages, and as a result thereof, a reduction in size, a reduction in weight, or a reduction in thickness, etc. can be achieved. This problem is solved by a heat transport device comprising first flow passages through which a first fluid flows, and second flow passages through which a second fluid flows, wherein a cross-section A satisfying the following [Requirement 1] to [Requirement 3] can be achieved. [Requirement 1] The cross-section A is a cross-section perpendicular to the second flow passages. [Requirement 2] In the cross-section A, the holes of second flow passages are separated by meandering partition plates and are disposed in a layered manner. Two adjacent partition plates are a partition plate B and a partition plate C, and when comparing a point α, which is the top point of a mountain in the partition plate B closest to the partition plate C, and a point β, which is the bottom point of a valley in the partition plate C closest to the partition plate B, the point α is closer to the partition plate C side than the point β. [Requirement 3] The first flow passages are present inside the partition plates.
F28F 3/08 - Elements constructed for building-up into stacks, e.g. capable of being taken apart for cleaning
F28D 9/00 - Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
The purpose of the present invention is to improve the cooling capability of a heat sink. A heat sink 10 is a cooler of layered construction in which a refrigerant is channeled from an inflow port 14a to an outflow port 14b, thereby cooling a heat-radiating body 16 with which contact is made, wherein a heat receiving plate 18, a flow channel plate 20, an orifice plate 22, a header plate 24, and a back surface plate 26 are diffusion-bonded in order from the surface side. The flow channel plate 20 comprises a plurality of narrow cooling passages 28 placed vertically and horizontally. The orifice plate 22 comprises: an ejection hole 30 for ejecting refrigerant to the narrow cooling passages 28, and an exhaust hole 32 for exhausting refrigerant from the narrow cooling passages 28. The header plate 24 comprises a partition plate 36 that partitions the inflow port 14a and the outflow port 14b. The partition plate 36 has: a plurality of parallel plates 38; and a first end plate 40 and a second end plate 42 for alternately blocking one opening and the other opening of the parallel plate 38. An inflow path 44 that guides the refrigerant from the inflow port 14a to the ejection hole 30, and an outflow path 46 that guides the refrigerant from the exhaust hole 32 to the outflow port 14b are formed by the partition plate 36 and a peripheral wall 34.
H01L 23/473 - Arrangements for cooling, heating, ventilating or temperature compensation involving the transfer of heat by flowing fluids by flowing liquids
H05K 7/20 - Modifications to facilitate cooling, ventilating, or heating
Provided is a heat exchanger that is compact and inexpensive and that is highly efficient and pressure-resistant. This heat exchanger 10 performs heat exchange between hydrogen and a refrigerant. Refrigerant flow paths and hydrogen flow paths are provided in a layered shape and in an alternating manner in a Z direction orthogonal to the flow path direction in portions at which heat exchange is performed. The refrigerant flow paths have ten refrigerant upstream narrow paths 48 and ten refrigerant downstream narrow paths 50 that are arranged in parallel in a Y direction, and honeycomb parts 52 that are provided between the refrigerant upstream narrow paths 48 and the refrigerant downstream narrow paths 50. First branching/merging parts 54 and second branching/merging parts 56 are provided in an alternating manner to the honeycomb parts 52. In the first branching/merging parts 54, a previous flow path is branched into two partial flow paths 60, 60, and a next flow path is formed by the merging together of adjacent partial flow paths 60, 60. In the second branching/merging parts 56 as well, a flow path is branched into two partial flow paths 62, 62 and adjacent partial flow paths 62, 62 are merged in the same manner. The hydrogen flow paths also have similar honeycomb parts 52.
F28F 3/00 - Plate-like or laminated elementsAssemblies of plate-like or laminated elements
F28D 9/00 - Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
F28F 3/08 - Elements constructed for building-up into stacks, e.g. capable of being taken apart for cleaning
F28F 13/12 - Arrangements for modifying heat transfer, e.g. increasing, decreasing by affecting the pattern of flow of the heat-exchange media by creating turbulence, e.g. by stirring, by increasing the force of circulation
A steam injector provided with: an introduction part which introduces a liquid flow of a refrigerant and a steam flow of the refrigerant; a mixing part which has a shape with an interior cross-sectional area decreasing in the direction of movement of the liquid flow, and forms a refrigerant flow by mixing the jet-like liquid flow and the steam flow therein; a throat part which is formed on the output side of the mixing part; and a diffuser part which has a shape with an interior cross-sectional area increasing from the throat part in the direction of the movement of the refrigerant flow, and discharges the refrigerant flow with an increased pressure from a discharge section, wherein the interior cross-sectional area of the throat part is a cross-sectional area smaller than a critical cross-sectional area at which the discharge pressure of the refrigerant flow discharged from the discharge section of the diffuser part nonlinearly increases when the interior cross-sectional area of the throat part is reduced.
F04F 5/04 - Jet pumps, i.e. devices in which fluid flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid displacing elastic fluids
F25B 1/00 - Compression machines, plants or systems with non-reversible cycle
F25B 43/00 - Arrangements for separating or purifying gases or liquidsArrangements for vaporising the residuum of liquid refrigerant, e.g. by heat
A weighing hopper includes a tubular main body having an upper end opening constituting a loading port and a lower end opening constituting a dispensing port and a gate provided on the main body swingably in such a way that the gate opens/closes the dispensing port, wherein the main body and the gate are formed by bending components after joining the components by diffusion.
B65D 88/54 - Large containers characterised by means facilitating filling or emptying
B21D 5/00 - Bending sheet metal along straight lines, e.g. to form simple curves
B65B 1/32 - Devices or methods for controlling or determining the quantity or quality of the material fed or filled by weighing
B65B 37/18 - Separating measured quantities from supply by weighing
G01G 19/393 - Weighing apparatus or methods adapted for special purposes not provided for in groups for combinatorial weighing, i.e. selecting a combination of articles whose total weight or number is closest to a desired value using two or more weighing units
B65B 37/00 - Supplying or feeding fluent-solid, plastic, or liquid material, or loose masses of small articles, to be packaged
A measuring hopper (10) comprising: a cylindrical main body (20) in which an upper-end opening constitutes a loading port (23) and a lower-end opening constitutes a dispensing port (24); and a gate (30) swingably disposed on the main body (20) so as to open or close the dispensing port (24). Therein, the main body (20) and the gate (30) undergo bending and shaping after the constituent members have been joined together by diffusion bonding.
G01G 19/387 - Weighing apparatus or methods adapted for special purposes not provided for in groups for combinatorial weighing, i.e. selecting a combination of articles whose total weight or number is closest to a desired value
B21D 5/01 - Bending sheet metal along straight lines, e.g. to form simple curves between rams and anvils or abutments
B21D 31/00 - Other methods for working sheet metal, metal tubes, metal profiles
B23K 20/00 - Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
B65B 37/18 - Separating measured quantities from supply by weighing
A method for bonding two plate-shaped members, comprising: a cutting step for cutting a plate-shaped body (100) to produce one plate-shaped member (28) in which a convex part (283) continuous to a cut surface (282) is formed on one flat surface (281) in a cut-side end part (28a); and a bonding step for causing the convex part to undergo plastic deformation until contact is made with the bonding surface (275) of another plate-shaped member (27), the bonding surface being the surface to be bonded, in a state in which the flat surface of the one plate-shaped member, the flat surface being one on which the convex part is formed, is brought into contact with the bonding surface, and then bringing the one plate-shaped member into close contact with the other plate-shaped member to bond the two members together using plastic deformation and surface diffusion action so as to fill a space (S) formed between the convex part in contact with the bonding surface and the flat surface in contact with the bonding surface.
G01G 19/387 - Weighing apparatus or methods adapted for special purposes not provided for in groups for combinatorial weighing, i.e. selecting a combination of articles whose total weight or number is closest to a desired value
patents
