A system for glass substrate inspection, such as flat patterned media, includes an air table that holds the glass substrate. The air table includes chucks that emit gas as air bearings. A camera is disposed over the air table and moves in a direction across a width of a top surface of the glass substrate. An assembly includes a gripper and a probe bar configured to be transported under the camera. The gripper is configured to grip a bottom surface of the glass substrate opposite the top surface. The probe bar delivers driving signals to the glass substrate through a plurality of probe pins.
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
G01N 21/88 - Investigating the presence of flaws, defects or contamination
G01R 31/26 - Testing of individual semiconductor devices
H01L 21/677 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for conveying, e.g. between different work stations
2.
SYNCHRONOUS SUBSTRATE TRANSPORT AND ELECTRICAL PROBING
A system for glass substrate inspection, such as flat patterned media, includes an air table that holds the glass substrate. The air table includes chucklets that emit gas as air bearings. A camera is disposed over the air table and moves in a direction across a width of a top surface of the glass substrate. An assembly includes a gripper and a probe bar configured to be transported under the camera. The gripper is configured to grip a bottom surface of the glass substrate opposite the top surface. The probe bar delivers driving signals to the glass substrate through a plurality of probe pins.
B65G 49/05 - Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
B65G 7/06 - Devices adapted to be interposed between loads and the ground or floor, e.g. crowbars with means for assisting conveyance of loads using fluid at high pressure supplied from an independent source to provide a cushion between load and ground
H01L 21/677 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for conveying, e.g. between different work stations
A defect detection system including a pattern generator for selectably energizing portions of an electrical circuit under 5 test at predetermined times determined at least in part by the electrical circuit under test, a plurality of sensors including at least one thermal sensor and a synchronization generator operative to receive an output of the pattern generator and based on said output to synchronize operation of the at least one thermal sensor with operation of the pattern generator.
A system for inspection of electrical circuits, which electrical circuits include a multiplicity of conductors which are mutually spaced from each other, the system including a voltage driver operative to apply different electrical voltages to a plurality of conductors from among the multiplicity of conductors, which plurality of conductors are in spatial propinquity to each other, a sensor operative to sense at least one characteristic of a test region defined thereby with respect to the electrical circuits, the sensor lacking sufficient spatial resolution to distinguish between the locations of individual ones of the plurality of conductors and a defect indicator responsive to at least one output of the sensor for ascertaining whether a defect exists in the plurality of conductors.
An electron-beam induced plasma is utilized to establish a non-mechanical, electrical contact to a device of interest. This plasma source may be referred to as atmospheric plasma source and may be configured to provide a plasma column of very fine diameter and controllable characteristics. The plasma column traverses the atmospheric space between the plasma source into the atmosphere and the device of interest and acts as an electrical path to the device of interest in such a way that a characteristic electrical signal can be collected from the device. Additionally, by controlling the gases flowing into the plasma column the probe may be used for surface modification, etching and deposition.
An electron-beam induced plasmas is utilized to establish a non-mechanical, electrical contact to a device of interest. This plasma source may be referred to as atmospheric plasma source and may be configured to provide a plasma column of very fine diameter and controllable characteristics. The plasma column traverses the atmospheric space between the plasma source into the atmosphere and the device of interest and acts as an electrical path to the device of interest in such a way that a characteristic electrical signal can be collected from the device. Additionally, by controlling the gases flowing into the plasma column the probe may be used for surface modification, etching and deposition.
A system for inspection of electrical circuits including a calibration subsystem operative to apply a time varying voltage to an electrical circuit being inspected during calibration and to sense differences in an electrical state at various different locations in the electrical circuit being inspected, thereby providing an indication of location of defects therein.
A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.
A probe system for facilitating the inspection of a device under test. System incorporates a storage rack; a probe bar gantry assembly; a probe assembly configured to electrically mate the device under test; and a robot system for picking the probe assembly from the storage rack and deliver the probe assembly to the probe bar gantry. The robot system is also enabled to pick a probe assembly from the probe bar gantry and deliver the probe assembly to the storage rack. The probe assembly includes a clamping assembly for attaching the probe assembly to the probe bar gantry or the storage rack. The probe assembly may include an array of contact pins configured to mate with conductive pads on the device under test when the probe assembly is installed on the probe bar gantry assembly.
An apparatus for identifying a defect in an electronic circuit having periodic features, the apparatus including at least a camera for obtaining an image of the electronic circuit and an image processing system. The image processing system receives the image of the electronic circuit from the camera, performs a diagonal shift of the received image of the electronic circuit by at least a diagonal size of the periodic features of the electronic circuit to produce a shifted image of the electronic circuit, identifies a candidate defect using the image of the electronic circuit and the shifted image of the electronic circuit, computes one or more local defect-free reference (golden) images of the electronic circuit using at least one selected area in the closest proximity of the identified candidate defect and determines the defect in the electronic circuit using one or more computed local golden images of the electronic circuit, the image of the electronic circuit.
System and method for selectively viewing features of objects, including features hidden under non-transparent materials. The system includes: illuminating light source producing illuminating light having controlled angular spectrum; homogenizing optics for spatial intensity modulation of illumination light; dephasing optics to reduce or suppress interference pattern in image due to the coherence of illumination light; infinity corrected objective directing the illuminating light on the object and collecting light from the object; illumination optical path delivering the illuminating light from the illuminating light source to infinity-corrected objective; relay optics for introducing necessary tilt angle for rays of the illuminating light entering the infinity corrected objective; adjustable iris vignetting free aperture of optical fiber; apodizing element within relay optics for spatial modulation of illumination intensity; image sensor for creating image of object; and imaging optical path for delivering light from object to image sensor, which includes tube lens, removable block and adjustable iris.
An LCD test system includes inspection heads, holders, a stage assembly and means for securing electro-optical transducer elements to the inspection heads. The one or more holders are adapted to house electro-optical transducer elements. The holders are placed on the stage assembly which is adapted to transfer the electro-optical transducer elements to the inspection heads using a computer control system. The LCD test system may also include cleaning stations and a stage assembly adapted to hold and move the cleaning stations. The cleaning stations are adapted to receive and house the electro-optical transducer elements.
A probe system for facilitating the inspection of a device under test. System incorporates a storage rack; a probe bar gantry assembly; a probe assembly configured to electrically mate the device under test; and a robot system for picking the probe assembly from the storage rack and deliver the probe assembly to the probe bar gantry. The robot system is also enabled to pick a probe assembly from the probe bar gantry and deliver the probe assembly to the storage rack. The probe assembly includes a clamping assembly for attaching the probe assembly to the probe bar gantry or the storage rack. The probe assembly may include an array of contact pins configured to mate with conductive pads on the device under test when the probe assembly is installed on the probe bar gantry assembly.
To determine the pixel positions of a flat panel display, signals are applied to the gate lines and the data lines of the flat panel display without exciting the pixels. The gate lines and data lines have the same periodicity or pitch as the panel pixels but because the gate and data lines have narrower dimensions than the camera pixels, they provide sharper and more distinct signals. The intersections of the gate and data lines provide information about the position of the pixels. The pixel positions are subsequently used to generate a dynamic pixel map. Enhanced computational techniques use the pixel positions to determine the magnification of the imaging sensor head as well as the degree of rotation and offset of the panel pixel plane relative to the pixel plane of the imaging sensor head.
Front-side illumination apparatus and methods are provided to enable, in general, detection of a-Si residue defects at the array test step well before the cell step. a-Si has high resistivity without exposure to light making it difficult to detect in conventional TFT-array test procedures. On the other hand, when the a-Si residue is illuminated with a light, its resistivity decreases, which, in turn, changes the electrical properties of the TFT array cell, which may be detected using the voltage imaging optical system (VIOS). In one implementation, the TFT array cell is exposed to illuminating light pulses, impacting the top side of the TFT panel during the testing performed using the VIOS. In one implementation, the front side illumination is traveling along the same path as the illumination used for voltage imaging in the VIOS. In another implementation, light source(s) for front side illumination are located in the close proximity to the VIOS modulator.
A laser decal transfer is used to generate thin film features by directing laser pulses of very low energy at the back of a target substrate illuminating an area of a thin layer of a high viscosity rheological fluid coating the front surface of the target. The illuminated area is shaped and defined by an aperture centered about the laser beam. The decal transfer process allows for the release and transfer from the target substrate to the receiving substrate a uniform and continuous layer identical in shape and size of the laser irradiated area. The released layer is transferred across the gap with almost no changes to its initial size and shape. The resulting patterns transferred onto the receiving substrate are highly uniform in thickness and morphology, have sharp edge features and exhibit high adhesion, independent of the surface energy, wetting or phobicity of the receiving substrate.
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF NAVY (USA)
Inventor
Auyeung, Raymond
Pique, Alberto
Bailey, Thomas, H.
Young, Lydia, J.
Abstract
A laser decal transfer is used to generate thin film features by directing laser pulses of very low energy at the back of a target substrate illuminating an area of a thin layer of a high viscosity rheological fluid coating the front surface of the target. The illuminated area is shaped and defined by an aperture centered about the laser beam. The decal transfer process allows for the release and transfer from the target substrate to the receiving substrate a uniform and continuous layer identical in shape and size of the laser irradiated area. The released layer is transferred across the gap with almost no changes to its initial size and shape. The resulting patterns transferred onto the receiving substrate are highly uniform in thickness and morphology, have sharp edge features and exhibit high adhesion, independent of the surface energy, wetting or phobicity of the receiving substrate.
In laser micromachining and laser defect repair of a first material, a first set of one or more laser wavelengths is selected in accordance with the first material's absorption characteristics and is combined and delivered concurrently with a second set of one or more laser wavelengths which is selected in accordance with the absorption characteristics of a second material generated by and remaining from the ablating interaction of the first material with the first set of laser wavelengths. The concurrent presence of the second set of one or more laser wavelengths removes the residual second material.
An electro-optic modulator assembly includes a sensor layer made from an electro-optic modulator material that comprises liquid crystal droplets encapsulated within a polymer matrix. The sensor layer material comprises an interfacial agent, for example a defoaming agent, in an amount sufficient to lower an intrinsic operating voltage at which the sensor layer transmits light. The defoaming agent can comprise from about 1 to about 10 percent by weight of the electro-optic modulator material, and the defoaming agent may comprise a reactive component to react with the polymer matrix, for example at least one of a siloxane with a reactive end group, a reactive fluorinated polymer or a non-ionic block copolymer to react with the polymer matrix. The assembly can also include a hard coating layer to protect the sensor layer.
E06B 9/24 - Screens or other constructions affording protection against light, especially against sunshineSimilar screens for privacy or appearance
G02F 1/13 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulatingNon-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
G02F 1/01 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulatingNon-linear optics for the control of the intensity, phase, polarisation or colour
20.
Method of performing an operation with rheological compound
The United States of America as represented by the Secretary of the Navy (USA)
Inventor
Birrell, Steven Edward
Cable, Alan
Visser, Joel
Young, Lydia J.
Kwak, Justin
Eldring, Joachim
Bailey, Thomas H.
Pique, Alberto
Auyeung, Raymond
Abstract
An apparatus includes integrated review, material removal and material deposition functions. The apparatus performs the review, material removal and material deposition operations along the same optical axis. The apparatus includes, in part, a camera, a pair of lenses, and one or more lasers. A first lens is used to focus the camera along the optical axis on a structure formed on the target substrate undergoing review. The first lens is also used to focus the laser beam on the structure to remove a material present thereon if the reviewed structure is identified as requiring material removal. The second lens is used to focus the laser beam on a ribbon to transfer a rheological compound from a recessed well formed in the ribbon to the structure if the reviewed structure is identified as requiring material deposition.
A system performs continuous full linear scan of a flat media having a plurality of pixels. The system includes, in part, a chuck, and at least first, second and third gantries. The chuck is adapted to support the flat media during the test. The first gantry includes at least one linear array of non-contacting sensors that spans the width of the flat media and is adapted to move across an entire length of the flat media. Each of the second and third gantries includes a probe head that spans the width of the flat media and each is adapted to apply an electrical signal to the flat media. Each probe head is further adapted to move along a direction substantially perpendicular to the surface of the flat media during the times when the first gantry is in motion and while test signals are being continuously applied.
G01R 31/00 - Arrangements for testing electric propertiesArrangements for locating electric faultsArrangements for electrical testing characterised by what is being tested not provided for elsewhere
22.
ARRAY TESTING METHOD USING ELECTRIC BIAS STRESS FOR TFT ARRAY
A method of detecting thin film transistor (TFT) defects in a TFT-liquid crystal display (LCD) panel (10), includes, in part, applying a stress bias to the TFTs disposed on the panel (10); and detecting a change in electrical characteristics of the TFTs. The change in the electrical characteristics of the TFTs may be detected using a voltage imaging optical system or a electron beam. The panel (10) temperature may be varied while the bias stress is being applied. The change in the electric characteristics is optionally detected across an array of the TFTs.
G01R 31/00 - Arrangements for testing electric propertiesArrangements for locating electric faultsArrangements for electrical testing characterised by what is being tested not provided for elsewhere
G01R 31/26 - Testing of individual semiconductor devices
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF NAVY (USA)
Inventor
Birrell, Steven, Edward
Cable, Alan
Visser, Joel
Young, Lydia, J.
Kwak, Justin
Eldring, Joachim
Bailey, Thomas, H.
Pique, Alberto
Auyeung, Raymond
Abstract
An apparatus includes integrated review, material removal and material deposition functions. The apparatus performs the review, material removal and material deposition operations along the same optical axis. The apparatus includes, in part, a camera, a pair of lenses, and one or more lasers. A first lens is used to focus the camera along the optical axis on a structure formed on the target substrate undergoing review. The first lens is also used to focus the laser beam on the structure to remove a material present thereon if the reviewed structure is identified as requiring material removal. The second lens is used to focus the laser beam on a ribbon to transfer a rheological compound from a recessed well formed in the ribbon to the structure if the reviewed structure is identified as requiring material deposition.
G02F 1/15 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulatingNon-linear optics for the control of the intensity, phase, polarisation or colour based on an electrochromic effect
F21S 4/00 - Lighting devices or systems using a string or strip of light sources
09 - Scientific and electric apparatus and instruments
35 - Advertising and business services
42 - Scientific, technological and industrial services, research and design
Goods & Services
Computer programmes; computer hardware; computer software; computer systems; computer systems comprised of hardware and software and electronic instructional manuals sold as a unit for detecting and locating defects in liquid crystal flat-panel displays, cathode ray tube displays and cathode ray tube glass and automotive glass inspection, automated vision and x-ray inspection of advanced semi conductors packages and printed circuit boards. Business management; business consultancy services; business consultancy in the field of integrated yield management solutions. Scientific and technological services in research and design relating thereto; industrial analysis and research services; design and development of computer hardware and software; computer systems consultancy; IT support services; research relating to computer hardware and/or software.
09 - Scientific and electric apparatus and instruments
Goods & Services
(1) Computer system comprised of hardware and software and instructional manuals sold as a unit for detecting and locating defects in liquid crystal flat-panel displays, cathode ray tube displays and cathode ray tube glass and automotive glass inspection, automated vision and x-ray inspection of advanced semi conductors packages and printed circuit boards
09 - Scientific and electric apparatus and instruments
Goods & Services
computer system comprised of hardware and software and instructional manuals sold as a unit therewith for detecting and locating defects in active matrix liquid crystal flat-panels
09 - Scientific and electric apparatus and instruments
Goods & Services
(1) Computer system namely, hardware and software and instructional manuals sold as a unit therewith for detecting and locating defects in active matrix liquid crystal flat-panels.
09 - Scientific and electric apparatus and instruments
Goods & Services
computer system comprised of hardware and software and instructional manuals sold as a unit therewith for detecting and locating defects in active matrix liquid crystal flat-panel displays
