A vacuum pump system (300), comprising at least one vacuum pump (330, 360) each comprising: a rotor (331, 361); a motor (332, 362) configured to drive the rotor (331, 361); and a converter (333, 363) configured to supply electrical power to the motor (332, 362) to accelerate and decelerate the rotor (331, 361). Each converter (333, 363) is further configured to: operate the motor 10 (332, 362) in a generator or braking mode for a deceleration of the rotor (331, 361); and capture as a regenerated energy at least a portion of the kinetic energy of the rotor (312, 361) during the deceleration.
H02P 3/18 - Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters for stopping or slowing an individual dynamo-electric motor or dynamo-electric converter for stopping or slowing an AC motor
H02P 5/74 - Arrangements specially adapted for regulating or controlling the speed or torque of two or more electric motors controlling two or more AC dynamo-electric motors
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
5.
VACUUM PUMP SYSTEM AND METHOD OF ENERGY REGENERATION
A vacuum pump system (300), comprising at least one vacuum pump (330, 360) comprising: a rotor (331, 361); a motor (332, 362) configured to drive the rotor (331, 361 ); and a converter (333, 363) configured to supply electrical power to the motor (332, 362) to accelerate and decelerate the rotor (331, 361). The converter (333, 363) is further configured to: operate the motor (332, 362) in a generator or braking mode for a deceleration of the rotor (331, 361 ); and capture as a regenerated energy at least a portion of the kinetic energy of the rotor (312, 361) during the deceleration.
H02P 3/18 - Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters for stopping or slowing an individual dynamo-electric motor or dynamo-electric converter for stopping or slowing an AC motor
H02P 5/74 - Arrangements specially adapted for regulating or controlling the speed or torque of two or more electric motors controlling two or more AC dynamo-electric motors
Claw pump (10) for generating a vacuum comprising a housing having an inlet and an outlet; at least one pump stage (12) built as claw pump stage in the housing driven by an electromotor to convey a gaseous medium from the inlet to the outlet; a temperature sensor (18) connected to the outlet to detect a temperature of the claw pump (10); and a controller (20) connected to the temperature sensor (18), wherein the controller (20) is configured to generate a first control signal, if the temperature of the claw pump (10) exceeds a first temperature threshold.
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/06 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
Cooling device, layer deposition apparatus and method for cooling a cooling element. Therein, the cooling device comprises a cooling element having a cooling duct with an inlet and an outlet. With the inlet a compressed gas supply is connected via a supply line. Further a spray supply line is connected to the supply line, wherein a spray nozzle is connected to the spray supply line to nebulize a liquid coolant and feeding the nebulized coolant into the supply line.
B05B 12/12 - Arrangements for controlling deliveryArrangements for controlling the spray area responsive to condition of liquid or other fluent material discharged, of ambient medium or of target responsive to conditions of ambient medium or target, e.g. humidity, temperature
B05B 1/30 - Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
B05B 7/26 - Apparatus in which liquids or other fluent materials from different sources are brought together before entering the discharge device
C23C 14/54 - Controlling or regulating the coating process
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
C23C 16/46 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
Magnetic assembly for a rotor preferably of a molecular drag vacuum pump, comprising a first rotated magnet to be connected to the rotor and rotated together with the rotor, a static damper element arranged axially next to the first rotated magnet to induce eddy currents into the static damper element, a rotated yoke arranged axially next to the first rotated magnet extending radially, a static coil configured to generate a magnetic field, and a static yoke connected to the static coil and arranged directly next to the rotated yoke to induce an axial magnetic force into the rotated yoke.
A screw pump comprising a housing defining a chamber and two screw rotors. Wherein each screw rotor comprises a rotor shaft and at least two displacement elements connected with the rotor shaft. Each displacement element having at least one helical protrusion. One of the displacement elements is a suction-side displacement element arranged in a suction-side section of the chamber. Another one of the displacement elements is a pressure-side displacement element arranged in a pressure-side section of the chamber. The suction-side displacement element is designed tapering in the conveying direction. The clearance between the pressure-side displacement element and the pressure-side section of the chamber at least partly decreases in the conveying direction. Furthermore, a screw rotor, a method of manufacturing a screw rotor and a use of a screw pump or a screw rotor.
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
A magnetic bearing assembly for a vacuum pump preferably a turbomolecular vacuum pump, comprising a static magnetic arrangement to be connected to a stator of the vacuum pump and a rotated magnetic arrangement to be connected to a rotor of the vacuum pump arranged coaxially to each other along an axis of rotation, the static magnetic arrangement comprising a plurality of first magnetic elements and an adjustment arrangement, the rotated magnetic arrangement comprising a plurality of second magnetic elements, the plurality of second magnetic elements being arranged with a predetermined axial offset with respect to the plurality of first magnetic elements of the static magnetic arrangement to create a bearing preload, wherein the adjustment arrangement is configured to compensate for the temperature dependent axial displacement of the rotated magnetic arrangement from the predetermined axial offset.
Method for operating a vacuum pump wherein first the humidity in the vacuum pump and/or humidity of an environment of the vacuum pump is determined and if the determined humidity is above a pre-set threshold generating a control signal to control condensation reduction means for reduction of humidity within the vacuum pump and/or generating a warn signal.
Method for operating a vacuum pump (14) including: Operating the vacuum pump in a first operating state; Determining one or more pump parameter (17) of the vacuum pump; Determining a forecast for a vacuum pump temperature from the one or more pump parameters for the condition of changing the operation of the vacuum pump from the first operating state to a second operating state; Reduce thermal load of the vacuum pump if the forecast exceeds a predetermined threshold.
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
Vacuum pump, in particular 2-shaft rotor pump, comprising a housing defining a pump chamber, an inlet and an outlet; two rotor shafts arranged in in the pump chamber, wherein each pump shaft comprises at least one pump element interacting with each other, wherein each rotor shaft comprises a first end and a second end; a front cover connected to the housing at the second end of the rotor shaft; wherein the front cover comprises at least one cooling element with a radial symmetry.
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
Vacuum system, in particular for food processing, comprising: a main valve being connectable to a processing chamber, a vacuum pump having an inlet and an outlet, wherein the inlet is connected to the main valve to connect the vacuum pump with the processing chamber, and a sterilization device being connected at a point of connection between the main valve and the inlet, wherein the sterilization device is configured to provide a sterilization gas.
A23L 3/3445 - Preservation of foods or foodstuffs, in general, e.g. pasteurising, sterilising, specially adapted for foods or foodstuffs by treatment with chemicals in the form of gases, e.g. fumigation; Compositions or apparatus therefor in a controlled atmosphere comprising other gases in addition to CO2, N2, O2 or H2O
A23L 3/00 - Preservation of foods or foodstuffs, in general, e.g. pasteurising, sterilising, specially adapted for foods or foodstuffs
Method for determining a service event of a vacuum pump with the steps: Acquiring one or more pump parameters from the vacuum pump by a control unit of the vacuum pump; Transmitting, by the control unit, the one or more pump parameters to the cloud server; Determining, by the cloud server, one or more service events for the vacuum pump on the basis of the one or more pump parameters, where-in determining the service event is performed by a look-up table stored in the cloud server comprising a correspondence between the one or more pump parameters and the service event.
Pump system with at least one pump, in particular a vacuum pump or a compressor, a controller connected to the at least one pump, wherein the controller comprises: a first processing unit directly connected to the at least one pump for providing low level services to the at least one pump, and a second processing unit connected to the first processing unit to provide high level services to the pump system, wherein the second processing unit is connectable to an external network.
A pair of intermeshing gears for multi-shaft vacuum pumps, comprising a first running gear and a second running gear is provided, wherein at least the first running gear comprises a first and a second gearwheel, respectively. The first and the second gearwheel are axially arranged in direct contact, wherein the first gearwheel comprises a predetermined number of first cogs of same dimension and the second gearwheel comprises a predetermined number of second cogs, wherein the predetermined number of second cogs is at least one. All of the predetermined number of first cogs have a dimension larger than the dimension of the predetermined number of second cogs to a predetermined amount. The first gearwheel is made of a material with a first elastic modulus. The second gearwheel is made of a material with a second elastic modulus, wherein the first and the second elastic modulus are different.
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
A rotor assembly for a vacuum pump preferably for turbomolecular vacuum pump, comprising a rotor shaft and a rotor hub, in particular a bell-shaped rotor hub, the rotor hub comprising at least a first part and a second part separate from the first part, and the first part comprises at least one first rotor element and the second part comprises at least one second rotor element, a centering element, the first part and/or the second part being centered and aligned with respect to the rotor shaft by means of the centering element.
Eddy current damper for a vacuum pump comprising a conductive ring connect- able to a housing; a magnetic element connectable to a rotor shaft to be rotated relative to the conductive ring. Therein the conductive ring is made from a conductive material and comprises an axial extending part and a radial extending part. Further, the magnetic element comprises at least one ring magnet wherein the radial extending part of the conductive ring is arranged axially next to the at least one ring magnet.
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D 29/66 - Combating cavitation, whirls, noise, vibration, or the likeBalancing
F16C 32/04 - Bearings not otherwise provided for using magnetic or electric supporting means
F16F 15/03 - Suppression of vibrations of non-rotating, e.g. reciprocating, systemsSuppression of vibrations of rotating systems by use of members not moving with the rotating system using electromagnetic means
Vacuum pump, in particular turbomolecular pump, comprising a housing, a rotor shaft arranged in the housing and rotatably supported by at least one radial bearing. The vacuum pump comprises further an axial bearing to support the rotor shaft in the axial direction. The axial bearing comprises a yoke connected to the rotor shaft and a first magnetic element connected to the housing and arranged in an axial next to the yoke to generate a magnetic force to the yoke to control the axial position of the rotor shaft. Therein, the first magnetic element is separated into at least two parts along a circumferential direction.
Vacuum pump, in particular a turbomolecular vacuum pump, comprising a housing and a rotor shaft disposed in the housing and rotatably supported by at least on permanent magnet bearing. Therein, the magnet bearing is arranged at one end of the rotor shaft and wherein the magnet bearing comprises a static bearing element and a rotated bearing element radially arranged next to each other. An eddy current damper is provided having a conductive disk connected to the static bearing element.
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D 29/66 - Combating cavitation, whirls, noise, vibration, or the likeBalancing
F16C 39/06 - Relieving load on bearings using magnetic means
F16F 15/03 - Suppression of vibrations of non-rotating, e.g. reciprocating, systemsSuppression of vibrations of rotating systems by use of members not moving with the rotating system using electromagnetic means
F16C 32/04 - Bearings not otherwise provided for using magnetic or electric supporting means
Magnetic bearing for a vacuum pump, in particular a turbomolecular pump, comprising a radial permanent magnetic bearing having a static magnetic element and a rotated magnetic element arranged radially next to each other and in mutual repulsion to provide radial support; a terminal ring attached axially next to the rotated magnetic element, a magnetic axial bearing comprising an electromagnet, wherein the terminal ring comprises a protrusion extending in radial direction and being arranged next to the electromagnet such that an axial magnetic force can be applied by the electromagnet to the protrusion of the terminal ring.
Vacuum pump, in particular turbomolecular pump, comprising: a housing having at least one housing element defining an internal volume; a rotor disposed at least partially in the internal volume of the housing element and rotatably supported by at least one bearing; wherein the minimum diameter of the internal volume is larger than the maximum diameter of the rotor.
Vacuum pump, in particular a turbomolecular vacuum pump, comprising a housing and a rotor shaft disposed in the housing and rotatably supported by at least on permanent magnet bearing. Therein, the magnet bearing is arranged at one end of the rotor shaft and wherein the magnet bearing comprises a static bearing element and a rotated bearing element radially arranged next to each other. An eddy current damper is provided having a conductive disk connected to the static bearing element.
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D 29/66 - Combating cavitation, whirls, noise, vibration, or the likeBalancing
F16C 32/04 - Bearings not otherwise provided for using magnetic or electric supporting means
F16C 39/06 - Relieving load on bearings using magnetic means
F16F 15/03 - Suppression of vibrations of non-rotating, e.g. reciprocating, systemsSuppression of vibrations of rotating systems by use of members not moving with the rotating system using electromagnetic means
Method for operating and in particular monitoring a scroll pump, with the steps of: producing a vacuum by means of the scroll pump; determining a pressure of the scroll pump; comparing the recorded pressure with a pre-set threshold value; and if the recorded pressure lies above the pre-set threshold value, emitting a warning signal. The invention furthermore concerns a scroll pump for executing the method.
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
Method for operating a pump system preferably comprising more than one pump, comprising the steps of: Obtaining at least one target parameter to be optimized based on target values of each pump; Obtaining an operation target, wherein the operation target is provided by one or more of the pumps operating each with an individual operation parameter; Acquiring a relationship for more than one and preferably all of the pumps between the operation parameter and the target value and determine a target function; Determining a maximum/minimum of the target function and obtaining operation parameter of at least one pump; and Controlling of at least one pump to operate with the obtained operation parameter to optimize the target parameter.
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
Vacuum pump having a housing which defines a pump chamber and a drive chamber. A rotor is arranged in the housing, wherein the rotor has at least one rotor element arranged in the pump chamber for conveying a gaseous medium from an inlet to an outlet. Therein, the rotor extends from the pump chamber through a shaft feedthrough into the drive chamber. The shaft feedthrough has a connection, wherein the connection is connected to an underpressure, so that a barrier gas flows from the drive chamber at least partially through the shaft feedthrough to the connection.
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
28.
GUIDE DEVICE, COOLANT DUCT AND DIFFUSION VACUUM PUMP
A guide device for a diffusion vacuum pump having a plurality of annular guide plates. The guide plates being arranged radially, wherein at least one guide plate has a first section starting from a connection point and a second section starting from the connection point. Therein, the first section extends axially in a first direction, the second section extending axially in the opposite second direction. Therein the first section is designed to taper radially and/or the second section is designed to taper radially.
A vacuum pump and a rotor preferably for a turbomolecular pump, comprising a support member connectable to a rotor shaft having a plurality of rotor blades. Therein each of the plurality of rotor blades comprises a plurality of layers perpendicular to the axial direction of the rotor, wherein each of the plurality of layers is formed at least partially as an arcuate curve connected at their respective end to the support member. The plurality of layers being arranged with a lateral offset with respect to each other.
09 - Scientific and electric apparatus and instruments
Goods & Services
Computer software; computer hardware and software for the
collection of data; computer hardware for remotely accessing
and transmitting data; computer software for monitoring
system status and supply of vacuum-related data, exhaust
reduction, chemical use and gas use, related to the
manufacture of semiconductors and integrated circuits;
computer software for design and configuration of gas,
chemical, vacuum and exhaust management systems, including
data on inlet pressure, engine speed, power consumption, oil
temperature, discharge temperature or inlet pressure;
computer software for remotely accessing and controlling a
computer system; computer software for monitoring status,
operation, function, environment, failures and errors of
pumps, vacuum pumps, ion pumps, getter pumps, ion getter
pumps, non-evaporable getter pumps, titanium sublimation
pumps; computer software for recording and display of data
relating to status, operation, function, environment,
failures and/or errors of pumps, vacuum pumps, ion pumps,
getter pumps, ion getter pumps, non-evaporable getter pumps,
titanium sublimation pumps; computer software for the
configuration of pumps, vacuum pumps, ion pumps, getter
pumps, ion getter pumps, non-evaporable getter pumps,
titanium sublimation pumps, and controllers therefor;
computer software for updating firmware for monitoring
status, operation, function, environment, failures and
errors of pumps, vacuum pumps, ion pumps, getter pumps, ion
getter pumps, non-evaporable getter pumps, titanium
sublimation pumps; computer software for designing and
configuring gas, chemical, vacuum and exhaust management
systems; computer software for use in controlling vacuum
pump systems and keypad/displays for vacuum pump systems;
computer interface software; computer software for data
integration; intelligent gateways for data processing; user
interface software user interface display; configurable
interface, configurable user interface; programmable
controls; programmable controllers; programmable control
apparatus; programmable displays; data processing equipment
and computers; data transmitters; data collection apparatus;
real-time data processing apparatus; software for real-time
data processing and visualisation; software and hardware for
remote access, monitoring, communication and analysis;
software and algorithms for function, configuration,
performance optimisation and programmed tasked operation of
pumps, singular and multiple pumps, vacuum pumps and vacuum
systems; computer software for optimising operation and
configuration installations of singular and multiple pumps,
vacuum pumps, ion pumps, getter pumps, ion getter pumps,
non-evaporable getter pumps, titanium sublimation pumps;
hardware and software for use in diagnostic and support
services for manufacturing processes; electrical controls,
electric control devices for pumps, vacuum pumps, ion pumps,
getter pumps, ion getter pumps, non-evaporable getter pumps,
titanium sublimation pumps; electric and electronic
controllers for pumps, vacuum pumps, ion pumps, getter
pumps, ion getter pumps, non-evaporable getter pumps,
titanium sublimation pumps; electrical controlling devices
for pumps, vacuum pumps; electrical controlling devices for
ion vacuum pumps; electrical controlling devices for getter
pumps, namely, titanium sublimation vacuum pumps; electronic
controllers for vacuum pump systems; wireless controllers to
remotely monitor and control the function and status of
other electrical, electronic, and mechanical devices or
systems; electronic monitors, display monitors; information
display terminals; displays for control devices and
controllers for pumps, vacuum pumps, ion pumps, getter
pumps, ion getter pumps, non-evaporable getter pumps,
titanium sublimation pumps; remote controls, remote control
apparatus, remote control receivers, remote control
transmitters; industrial controllers, industrial controllers
for vacuum pumps; power controllers, electronic power
controllers, power controllers for pumps, vacuum pumps, ion
pumps, getter pumps, ion getter pumps, non-evaporable getter
pumps, titanium sublimation pumps; pump controllers, vacuum
pump controllers, ion pump controllers, getter pump
controllers, neg pump controllers, titanium sublimation pump
controllers.
09 - Scientific and electric apparatus and instruments
Goods & Services
Downloadable Computer software for industrial pump control; computer hardware and downloadable computer software for the collection of data; computer hardware for remotely accessing and transmitting data; downloadable computer software for monitoring system status and supply of vacuum-related data, exhaust reduction, chemical use and gas use, related to the manufacture of semiconductors and integrated circuits; downloadable computer software for design and configuration of gas, chemical, vacuum and exhaust management systems, including data on inlet pressure, engine speed, power consumption, oil temperature, discharge temperature or inlet pressure; downloadable computer software for remotely accessing and controlling a computer system; downloadable computer software for monitoring status, operation, function, environment, failures and errors of pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; downloadable computer software for recording and display of data relating to status, operation, function, environment, failures and/or errors of pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; downloadable computer software for the configuration of pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps, and controllers therefor; downloadable computer software for updating firmware for monitoring status, operation, function, environment, failures and errors of pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; downloadable computer software for designing and configuring gas, chemical, vacuum and exhaust management systems; downloadable computer software for use in controlling vacuum pump systems and keypad/displays for vacuum pump systems; downloadable computer interface software; downloadable computer software for data integration; intelligent gateways for data processing; downloadable user interface software; electronic display interfaces; programmable logic controllers; programmable control apparatus in the nature of electronic controllers for industrial pumps; programmable displays in the nature of LCDs and LED screen displays; data processing equipment and computers; data transmitters in the nature of electronic and optical transmitters and receivers for control of industrial pumps; data collection apparatus in the nature of data transceivers, wireless networks and gateways for collection and management of data; real-time data processing apparatus in the nature of data processing equipment; downloadable software for real-time data processing and visualisation; downloadable software and computer hardware for remote access, monitoring, communication and analysis; downloadable computer software and algorithms for function, configuration, performance optimisation and programmed tasked operation of pumps, singular and multiple pumps, vacuum pumps and vacuum systems; downloadable computer software for optimising operation and configuration installations of singular and multiple pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; computer hardware and downloadable computer software for use in diagnostic and support services for manufacturing processes; electrical controls, electric control devices for pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; electric and electronic controllers for pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; electrical controlling devices for pumps, vacuum pumps; electrical controlling devices for ion vacuum pumps; electrical controlling devices for getter pumps, namely, titanium sublimation vacuum pumps; electronic controllers for vacuum pump systems; wireless controllers to remotely monitor and control the function and status of other electrical, electronic, and mechanical devices or systems; electronic monitors, display monitors; information display terminals; displays for control devices and controllers for pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; remote controls, remote control apparatus, remote control receivers, remote control transmitters; industrial controllers, industrial controllers for vacuum pumps; power controllers, electronic power controllers, power controllers for pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps, non-evaporable getter pumps, titanium sublimation pumps; pump controllers, vacuum pump controllers, ion pump controllers, getter pump controllers, neg pump controllers, titanium sublimation pump controllers
The invention relates to a particle detector, comprising: a measuring electrode for measuring charged particles, a detection device for detecting the charged particles measured by the measuring electrode, and an evaluation device for determining the number of charged particles detected by the detection device. The detection device has a charge amplifier for converting a charge signal generated by the charged particles into a voltage signal and an amplifier device for amplifying the voltage signal.
The invention relates to a holding device for at least one filament, comprising: at least one filament receptacle for receiving the at least one filament. The holding device is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to a container of an ionization device. The invention also relates to a mass spectrometer comprising: an ionization device having a container in which an ionization space for ionizing a gas is formed, at least one holding device which is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to the container, and a vacuum housing to which the holding device, in particular a base body of the holding device, is detachably connected.
Cooling device, layer deposition apparatus and method for cooling a cooling element. Therein, the cooling device comprises a cooling element having a cooling duct with an inlet and an outlet. With the inlet a compressed gas supply is connected via a supply line. Further a spray supply line is connected to the supply line, wherein a spray nozzle is connected to the spray supply line to nebulize a liquid coolant and feeding the nebulized coolant into the supply line.
C23C 16/44 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
B05B 7/00 - Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
B05B 7/26 - Apparatus in which liquids or other fluent materials from different sources are brought together before entering the discharge device
C23C 14/54 - Controlling or regulating the coating process
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
C23C 16/46 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
B05B 12/06 - Arrangements for controlling deliveryArrangements for controlling the spray area for controlling time, or sequence, of delivery for effecting pulsating flow
B05B 12/12 - Arrangements for controlling deliveryArrangements for controlling the spray area responsive to condition of liquid or other fluent material discharged, of ambient medium or of target responsive to conditions of ambient medium or target, e.g. humidity, temperature
B05B 1/30 - Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
35.
Vacuum pump system and method for operating a vacuum pump system
A vacuum pump system comprising a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
A screw pump (100) comprising a housing defining a chamber (62) and two screw rotors (10). Wherein each screw rotor (10) comprises a rotor shaft (11) and at least two displacement elements (12, 14) connected with the rotor shaft (11). Each displacement element (12, 14) having at least one helical protrusion (36, 50). One of the displacement elements (12, 14) is a suction-side displacement element (12) arranged in a suction-side section (64) of the chamber (62). Another one of the displacement elements (12, 14) is a pressure-side displacement element (14) arranged in a pressure-side section (68) of the chamber (62). The suction-side displacement element (12) is designed tapering in the conveying direction (22). The clearance between the pressure-side displacement element (14) and the pressure-side section (68) of the chamber at least partly decreases in the conveying direction (22). Furthermore, a screw rotor (10), a method of manufacturing a screw rotor (10) and a use of a screw pump (100) or a screw rotor (10).
F04C 2/16 - Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 13/00 - Adaptations of machines or pumps for special use, e.g. for extremely high pressures
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
Vacuum system, in particular for food processing, comprising: a main valve (20) being connectable to a processing chamber, a vacuum pump (10) having an inlet (12) and an outlet (14), wherein the inlet (12) is connected to the main valve (20) to connect the vacuum pump (10) with the processing chamber, and a sterilization device (22) being connected at a point of connection (25) between the main valve (20) and the inlet (12), wherein the sterilization device (22) is configured to provide a sterilization gas.
A23B 7/144 - Preserving or ripening with chemicals not covered by group or in the form of gases, e.g. fumigationCompositions or apparatus therefor
A23L 3/3409 - Preservation of foods or foodstuffs, in general, e.g. pasteurising, sterilising, specially adapted for foods or foodstuffs by treatment with chemicals in the form of gases, e.g. fumigation; Compositions or apparatus therefor
A61L 2/00 - Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lensesAccessories therefor
Apparatus for connecting a vacuum pump to a vacuum apparatus, comprising a connection element (14) configured to be connectable to a vacuum pump (12) and a fastening element (16) configured to be connectable to a vacuum apparatus. Further, the apparatus comprises a transmission element (18a, 18b) configured to transfer a transversal insertion motion of the transmission element into an axial motion of the connection element to provide a vacuum-tight connection between the vacuum pump and the vacuum apparatus.
The invention relates to a mass spectrometer, having: a gas inlet adapted to supply a sample gas to be ionized to an ionization region of the mass spectrometer, a calibration unit adapted to supply a calibration gas to be ionized to the ionization region, and an ionization unit adapted to ionize the sample gas and/or the calibration gas in the ionization region. The calibration unit includes at least one evaporation source for generating the calibration gas by evaporating a source material. The invention also relates to a method for calibrating a mass spectrometer.
Vacuum pump comprising a housing, a rotor shaft disposed in the housing, at least one bearing rotatably supporting the rotor shaft against the housing including an inner race in contact with the rotor shaft and an outer race in contact with the housing, and an axial spring applying an axial force onto the outer race, wherein a bearing ring is disposed between the axial spring and the outer race, the bearing ring applying a clamping force to the housing.
The invention concerns an ion trap, including a first ring-shaped end cap electrode and a second ring-shaped end cap electrode, between which is formed a ring-shaped ion storage cell, as well as a plurality of radially inner disk-shaped ring electrodes and a plurality of radially outer disk-shaped ring electrodes, which delimit the ring-shaped ion storage cell. The invention also relates to a mass spectrometer that has such an ion trap as well as a control device that is designed to actuate the disk-shaped ring electrodes and the end cap electrodes for the storage, selection, excitation and/or detection of ions in the ring-shaped ion storage cell.
A pair of intermeshing preferably oil-free running gears in particular for dual- or multi-shaft vacuum pumps, comprising a first running gear and a second running gear is provided, wherein at least the first running gear comprises a first and a second gearwheel, respectively. The first and the second gearwheel are axially arranged in direct contact, wherein the first gearwheel comprises a predetermined number of first cogs of same dimension and the second gearwheel comprises a predetermined number of second cogs, wherein the predetermined number of second cogs is at least one. All of the predetermined number of first cogs have a dimension larger than the dimension of the predetermined number of second cogs to a predetermined amount. The first gearwheel is made of a material with a first elastic modulus. The second gearwheel is made of a material with a second elastic modulus, wherein the first and the second elastic modulus are different.
F01C 17/00 - Arrangements for drive of co-operating members, e.g. for rotary piston and casing
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
F16H 55/18 - Special devices for taking-up backlash
A non-evaporable getter pump, comprising a getter material in order to absorb or adsorb gas and a heating element connected to the getter material in order to regenerate the getter material. Therein, the heating element is an electric heating element and the heating element is directly connectable to the mains.
F04B 37/02 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for evacuating by absorption or adsorption
F04B 37/08 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
H01J 17/24 - Means for absorbing or adsorbing gas, e.g. by gettering
44.
METHOD FOR OPERATING A VACUUM PUMP AND VACUUM PUMP
Method for operating a vacuum pump wherein first the humidity in the vacuum pump and/or humidity of an environment of the vacuum pump is determined and if the determined humidity is above a pre-set threshold generating a control signal to control condensation reduction means for reduction of humidity within the vacuum pump and/or generating a warn signal.
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04B 37/20 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use for specific elastic fluids for wet gases, e.g. wet air
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
F04D 27/00 - Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
The invention relates to an ionization device with an ionization space formed in a container, an inlet system for supplying a gas to be ionized to the ionization space, an electron source having at least one filament for supply of an electron beam to the ionization space, and an outlet system for letting the ionized gas out of the ionization space. Electron optics having at least two electrodes are disposed between the filament and the ionization space.
Pump system with at least one pump, in particular a vacuum pump or a compressor, a controller connected to the at least one pump, wherein the controller comprises: a first processing unit directly connected to the at least one pump for providing low level services to the at least one pump, and a second processing unit connected to the first processing unit to provide high level services to the pump system, wherein the second processing unit is connectable to an external network.
H01J 49/42 - Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locksArrangements for external adjustment of electron- or ion-optical components
Method for operating and in particular monitoring a scroll pump, with the steps of: producing a vacuum by means of the scroll pump; determining a pressure of the scroll pump; comparing the recorded pressure with a pre-set threshold value; and if the recorded pressure lies above the pre-set threshold value, emitting a warning signal. The invention furthermore concerns a scroll pump for executing the method.
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
Method for operating a pump system preferably comprising more than one pump, comprising the steps of: Obtaining at least one target parameter to be optimized based on target values of each pump; Obtaining an operation target, wherein the operation target is provided by one or more of the pumps operating each with an individual operation parameter; Acquiring a relationship for more than one and preferably all of the pumps between the operation parameter and the target value and determine a target function; Determining a maximum/minimum of the target function and obtaining operation parameter of at least one pump; and Controlling of at least one pump to operate with the obtained operation parameter to optimize the target parameter.
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04B 49/20 - Control of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for in, or of interest apart from, groups by changing the driving speed
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
Vacuum pump having a housing which defines a pump chamber and a drive chamber. A rotor is arranged in the housing, wherein the rotor has at least one rotor element arranged in the pump chamber for conveying a gaseous medium from an inlet to an outlet. Therein, the rotor extends from the pump chamber through a shaft feedthrough into the drive chamber. The shaft feedthrough has a connection, wherein the connection is connected to an underpressure, so that a barrier gas flows from the drive chamber at least partially through the shaft feedthrough to the connection.
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
51.
GUIDE DEVICE, COOLANT DUCT AND DIFFUSION VACUUM PUMP
A guide device for a diffusion vacuum pump having a plurality of annular guide plates. The guide plates being arranged radially, wherein at least one guide plate has a first section starting from a connection point and a second section starting from the connection point. Therein, the first section extends axially in a first direction, the second section extending axially in the opposite second direction. Therein the first section is designed to taper radially and/or the second section is designed to taper radially.
The invention relates to a mass spectrometer for analysing a gas by mass spectrometry, comprising: a controllable inlet system for pulsed feeding of the gas to be analysed from a process region outside the mass spectrometer into an ionisation region, an ionisation device for ionising the gas to be analysed in the ionisation region, an ion transfer device for transferring the ionised gas from a ionisation region via an ion transfer region into an analysis region, and an analyser for detecting the ionised gas in the analysis region. The invention further relates to an associated method for mass spectrometrically analysing a gas.
H01J 49/24 - Vacuum systems, e.g. maintaining desired pressures
H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locksArrangements for external adjustment of electron- or ion-optical components
A vacuum pump includes a housing having an inlet and an outlet, at least one rotor arranged in the housing configured to convey a gaseous medium from the inlet to the outlet, a motor configured to rotate the rotor, a control device connected to the motor configured to control the motor, and at least one sensor connected to the control device. The at least one sensor is configured to sense at least one operating parameter of the vacuum pump. The control device comprises a correlation module. The correlation module is configured to correlate the sensed at least one operating parameter with at least one critical parameter. The motor is controlled on the basis of the at least one critical parameter.
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
Vacuum pump, in particular a turbomolecular vacuum pump, with a rotor shaft borne in a pump housing, this shaft bearing at least one rotor element. Two bearings are respectively arranged between a bearing seat element connected to the pump housing and the rotor shaft, wherein at least one bearing has a first magnet element connected to the bearing seat element, and a second magnet element connected to the rotor shaft, wherein the first magnet element and the second magnet element repel one another magnetically to bear the rotor shaft. Further, the first magnet element and the second magnet element respectively have several magnet rings, wherein a spring element is provided between at least two magnet rings of the first magnet element and/or of the second magnet element. Therein, the vacuum pump furthermore has an axial adjusting element for setting the bearing pre-stress, wherein through the adjusting element, the axial position of the first magnet element or of the second magnet element can be adjusted, wherein the spring element is compressed or relieved when the axial position is adjusted.
The invention relates to a particle detector (1), comprising: a measuring electrode (6) for measuring charged particles (2), a detection device (7) for detecting the charged particles (2) measured by the measuring electrode (6), and an evaluation device (8) for determining the number (QN) of charged particles (2) detected by the detection device (7). The detection device (7) has a charge amplifier (6) for converting a charge signal (Q(t)) generated by the charged particles (2) into a voltage signal (U(t)) and an amplifier device (10) for amplifying the voltage signal (U(t)).
The invention relates to a holding device (1) for at least one filament, comprising: at least one filament receptacle (2a, b) for receiving the at least one filament. The holding device (1) is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle (2a, b) to a container (7) of an ionization device. The invention also relates to a mass spectrometer comprising: an ionization device having a container (7) in which an ionization space for ionizing a gas is formed, at least one holding device (1) which is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle (2a, b) to the container (7), and a vacuum housing to which the holding device (1), in particular a base body (4) of the holding device (1), is detachably connected. The holding device (1) is designed to apply a clamping force to the at least one filament receptacle (2a, b) in the installation position in order to press the at least one filament receptacle (2a, b) against the container (7).
A multi-stage rotary piston pump comprising two shafts in a housing, which support multiple rotary pistons. Corresponding rotary pistons form a respective rotary piston pair, wherein multiple rotary piston pairs are provided which form a respective pump stage. Neighboring pump stages are each connected to one another via connection channels. The multi-stage rotary piston pump also comprises a pump inlet that is connected to the first pump stage, as well as a pump outlet that is connected to the last pump stage. The built-in volume ratio is at least 15, so that high pumping capacities of at least 1500 m3/h can be achieved.
The invention relates to a mass spectrometer (1), comprising: a gas inlet (2) adapted to supply a sample gas (4) to be ionized to an ionization region (5) of the mass spectrometer (1), a calibration unit (6) adapted to supply a calibration gas (7) to be ionized to the ionization region (5), and an ionization unit (8) adapted to ionize the sample gas (4) and/or the calibration gas (7) in the ionization region (5). The calibration unit (6) comprises at least one evaporation source (9) for generating the calibration gas (7) by evaporating a source material (10). The invention also relates to a method for calibrating a mass spectrometer (1).
H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locksArrangements for external adjustment of electron- or ion-optical components
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
60.
ION TRAP WITH RING-SHAPED ION STORAGE CELL AND MASS SPECTROMETER
1,i2,i1,i2,i2,i) and the end cap electrodes (4a, 4b) for the storage, selection, excitation and/or detection of ions (6) in the ring-shaped ion storage cell (5).
A vacuum pump comprises stator elements in a pump housing. The stator elements cooperate with rotor elements. The rotor elements are held by a rotor shaft, wherein the rotor shaft is mounted in the pump housing via bearing elements. The bearing element is surrounded by a supporting element, wherein the supporting element comprises an inner portion, an outer portion and a plurality of spring arms connecting the inner portion (28) to the outer portion. Each spring arm comprises at least one hollow space.
FF) at the filament (15a, b) of the electron source (12) that is lower than a pressure (p) in the ionization space (10). The invention also relates to a mass spectrometer (1) for mass-spectrometric analysis of a gas (2) comprising: an ionization device (12) designed as described further above, and a detector (24) for detection of the gas (2a) to be analysed that has been ionized in the ionization device (12).
The invention relates to a lubricant receptacle (10) for a vacuum pump (100). The lubricant receptacle (10) comprises a lubricant reservoir (20), a lubricant separator (30) and an exhaust (12). A first gas connection (40) is provided between a gas outlet (24) of the lubricant reservoir (20) and a gas inlet (32) of the lubricant separator (30). A second gas connection (42) is provided to connect a gas inlet (22) of the lubricant reservoir (20) with the vacuum pump (100), and a first lubricant connection (44) is provided to connect a lubricant outlet (26) of the lubricant reservoir (20) with the vacuum pump (100). In addition, a further lubricant connection (46) is provided between a lubricant outlet (38) of the lubricant separator (30) and the lubricant inlet (26) of the lubricant reservoir (20) and/or an additional lubricant connection is provided for connecting the lubricant outlet (38) of the lubricant separator (30) to the vacuum pump (100). At least one of the gas connections (40; 42) and one of the lubricant connections (44; 46; 48) can be selectively coupled. The invention also relates to a vacuum pump system (1000) comprising a lubricant receptacle (10) of this type and a vacuum pump (100).
Vacuum pump, in particular turbomolecular pump comprising rotor assembly rotatable supported by a first bearing and a second bearing, wherein at least one bearing is a ball bearing. Further, the vacuum pump comprises a preload force compensator unit, wherein the preload force compensator unit is built to generate a force to adjust the preload force on the at least one ball bearing. A control unit is connected to at least one sensor detect a pumping parameter, then further connected to the preload force compensator unit to generate a force dependent on the detected pump parameter.
A separating system for gases in high-vacuum devices has a housing (10) with an inlet (12), wherein the inlet (12) can be connected to an outlet of a chamber that is to be evacuated. A tubular separating element (14) with a cooled surface (16) is arranged in the housing (10). Resublimed gas deposits on the surface (16). Moreover, at least one flow duct (14), through which the gas flows, is provided inside the separating element (14).
B01D 7/02 - Crystallisation directly from the vapour phase
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
66.
Method for analyzing a gas by mass spectrometry, and mass spectrometer
A method for analyzing a gas by mass spectrometry includes exciting ions of the gas to be analyzed in an FT ion trap, and recording a first frequency spectrum in a first measurement time interval during or after the excitation of the ions. The first frequency spectrum contains ion frequencies of the excited ions and interference frequencies. The method also includes recording a second frequency spectrum in a second measurement time interval. The second frequency spectrum contains the interference frequencies, but not the ion frequencies of the first frequency spectrum. The method further includes comparing the first frequency spectrum with the second frequency spectrum to identify the interference frequencies in the first frequency spectrum. The disclosure also relates to a mass spectrometer which is suitable for carrying out the method for analyzing the gas by mass spectrometry.
The invention relates to a vacuum pump, comprising a housing (12) having an inlet (14) and an outlet (15), a rotor (16, 20) being arranged in the housing (12) in order to convey a gaseous medium from the inlet (14) to the outlet (15). Furthermore, a motor (24) is provided for rotating the rotor (16, 20), and a control device (30) connected to the motor (24) is provided for controlling the motor (24). At least one sensor (36, 38) is provided for sensing at least one operating variable (42) of the vacuum pump (10). The sensor (36, 38) is connected to the control device (30). The control device (30) has a correlation module (44). The correlation module (44) is designed to correlate the sensed operating variable (42) with at least one critical parameter (46). The motor (24) is controlled using the critical parameter (46).
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
The invention relates to a dual or multi-shaft vacuum pump comprising a motor, a first shaft and at least a second shaft, wherein the first shaft and the second shaft are driven synchronously by the motor via a common drive belt. The first shaft has a pumping element, and the second shaft likewise has a pumping element, which cooperates with the pumping element of the first shaft in order to convey a gaseous medium from an inlet to an outlet. The first shaft has a first emergency running gear, and the second shaft likewise has a second emergency running gear, which meshes with the first emergency running gear.
F01C 17/00 - Arrangements for drive of co-operating members, e.g. for rotary piston and casing
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
69.
DISPLACER ELEMENT, ROTOR AND DEVICE OF A VACUUM PUMP, AND METHOD FOR PRODUCING A DISPLACER ELEMENT AND A ROTOR FOR A VACUUM PUMP
The invention relates to a vacuum pump displacer element (10), more particularly a vacuum pump rotary piston displacer element with a constant cross-section. The vacuum pump displacer element (10) is, at least originally, produced as an extruded profile or an continuously cast profile. The invention further relates to a vacuum pump rotor (100) with a vacuum pump displacer element (10) of this kind and to a vacuum pump device having a vacuum pump rotor (100) of this kind. The invention further relates to a method for producing a vacuum pump displacer element (10), in which the primary forming step for producing the displacer element (10) involves extrusion or continuous casting. The invention also relates to a method for producing a vacuum pump rotor (100) in which the shaft (40) and the displacer element (10) are primary-formed as a single piece by means of extrusion or continuous casting.
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
A multistage Roots pump comprise a plurality of pump chambers in a pump housing. They constitute respective pump stages, wherein each pump stage comprises two two-toothed rotary pistons. The pump stages are separated from each other by partition walls. In the partition walls essentially radially extending connecting ducts are arranged. The connecting ducts are connected with an inflow chamber whose inflow opening has a larger cross-section than the connecting ducts.
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
09 - Scientific and electric apparatus and instruments
Goods & Services
Vacuum pumps and component parts therefor; compressors, namely compressors for machines, electric compressors, compressors as parts of machines, rotary compressors, centrifugal compressors, gas compressors
72.
Vacuum pump system and method for operating a vacuum pump system
A vacuum pump system is provided that includes a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
A vacuum pump has stator elements (12) in a pump housing (10). The stator elements (12) cooperate with rotor elements (16). The rotor elements (16) are borne by a rotor shaft (14), wherein the rotor shaft (14) is mounted in the pump housing (10) by means of bearing elements (20). The bearing element (20) is surrounded by a support element (26), wherein the support element (26) has an inner part (28), an outer part (30) and multiple resilient arms (32) connecting the inner part (28) to the outer part (30). The resilient arms (32) each have at least one cavity (36).
The invention relates to a vacuum pump system having at least two chambers (10, 12) which are arranged in series. A turbomolecular pump (18) is connected to the second or final chamber, and a multistage Roots pump (24) is connected to the first chamber, wherein the outlet (25) of the first chamber (10) is connected to an intermediate inlet (26) of the multistage vacuum pump, and an outlet (20) of the turbomolecular pump (18) is connected to a main inlet (22) of the multistage vacuum pump (24).
A dry-running rotary-screw compressor comprises two screw rotors in a housing (26) that forms a suction chamber. Preferably atmospheric pressure is applied to a compressor inlet (28) of the compressor and preferably a pressure of more than 2 bar (absolute) is applied to a compressor outlet (32) of the compressor. At least one displacement element (10, 12) is provided per screw rotor and has a helical recess with several turns. The at least one displacement element (10, 12) per screw rotor has an asymmetric profile with a single thread.
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
76.
Vacuum pump screw rotors with symmetrical profiles on low pitch sections
A vacuum pump screw rotor, comprising at least two helical displacer elements on a rotor shaft. The at least two displacer elements have different pitches, but the pitches of each displacer element are constant. Furthermore, the displacer elements each have a helical recess, each having a contour that remains the same over its entire length. Hereby, a suction-side displacer element has a recess having an asymmetric contour, and a pressure-side displacer element has a recess having a symmetrical contour.
F01C 1/16 - Rotary-piston machines or engines of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 18/00 - Rotary-piston pumps specially adapted for elastic fluids
F04C 18/18 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
A screw vacuum pump comprises a housing forming a pumping chamber, wherein the housing is made of aluminum or an aluminum alloy. Further provided are two screw rotors arranged in the pumping chamber, each screw rotor comprising at least one displacer element having a helical recess for forming a plurality of windings, wherein the at least one displacer element is made of aluminum or an aluminum alloy. Between the region in which prevail 5% to 30% of the outlet pressure and a pressure-side end of the rotor (pump outlet), at least six, particularly at least eight, and with particular preference at least ten windings are provided.
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
The invention relates to a screw rotor for screw vacuum pumps, comprising a rotor shaft (10) which bears at least two displacement elements (12, 14). The displacement element (12) is conical in the conveying direction (22) and the adjoining conveying element (14) has a cylindrical design.
F04C 2/16 - Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
A vacuum pump comprises rotor elements arranged in a suction chamber. An outlet duct is connected to an exhaust pipe. For the purpose of silencing, sound expansion spaces are provided in the outlet duct, which are integrated into the pump housing. Alternatively or in addition to these sound expansion spaces, sound expansion spaces may be provided in an inlet duct which is used for the inlet of gas ballast, said sound expansion spaces being preferably likewise integrated into the pump housing.
F04C 11/00 - Combinations of two or more machines or pumps, each being of rotary-piston or oscillating-piston typePumping installations
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04B 53/00 - Component parts, details or accessories not provided for in, or of interest apart from, groups or
A vacuum pump drive comprising at least one electric motor which is connected to the rotor of a vacuum pump via a drive shaft, a frequency converter which is electrically connected to the motor and which supplies a motor input voltage to the motor, and a switchover device with at least one electric switch. The switchover device is designed to connect the motor windings in a star or delta shape depending on the switching position of the switch in order to change the motor characteristic curve. The vacuum pump drive also comprises a measuring device with sensors for detecting physical operating variables of the vacuum pump and a controller which is electrically or optically connected to the switchover device and the measuring device and which is designed to actuate the at least one switch on the basis of the measured value of the operating variable of the vacuum pump in order to produce the star-delta switchover.
H02P 23/00 - Arrangements or methods for the control of AC motors characterised by a control method other than vector control
H02P 1/32 - Arrangements for starting electric motors or dynamo-electric converters for starting dynamo-electric motors or dynamo-electric converters for starting an individual polyphase induction motor by star/delta switching
H02K 11/21 - Devices for sensing speed or position, or actuated thereby
H02K 11/25 - Devices for sensing temperature, or actuated thereby
H02K 11/33 - Drive circuits, e.g. power electronics
H02P 27/04 - Arrangements or methods for the control of AC motors characterised by the kind of supply voltage using variable-frequency supply voltage, e.g. inverter or converter supply voltage
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
A connection device serves for connecting a first tube end, which can be connected to a vacuum pump, to a second tube end which can be connected to a chamber to be evacuated. To this end, the connection element has a tube element for fluidically connecting the vacuum pump to the chamber to be evacuated. The tube element is connected on each side via a connection element to the respective tube end. At least one of the two connection elements is configured here in such a way that it is exclusively suitable for transmitting torques. Furthermore, a decoupling element is provided for mechanically decoupling the at least one connection element, which is exclusively suitable for transmitting torques, from the corresponding tube end.
The invention relates to a multi-stage rotary piston pump comprising two shafts in a housing, which support multiple rotary pistons. Corresponding rotary pistons form a respective rotary piston pair, wherein multiple rotary piston pairs are provided which form a respective pump stage. Neighbouring pump stages are each connected to one another via connection channels. The multi-stage rotary piston pump also comprises a pump inlet that is connected to the first pump stage, as well as a pump outlet that is connected to the last pump stage. According to the invention, the built-in volume ratio is at least 15, so that high pumping capacities of at least 1500 m3/h can be achieved.
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 28/26 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves using bypass channels
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
The invention relates to a dry-compressing vacuum pump, in particular a screw pump, a multi-stage Roots pump, a Roots pump, or a claw pump, having rotor elements (14) arranged in a suction chamber (12). The two rotor elements are each borne by a rotor shaft (22). Two shaft ends of the rotor shafts (22) project through a side wall (28) of the pump housing (10). One toothed belt pulley (38) is arranged on each of the two shaft ends (28). Furthermore, there is a drive device and an electric motor for driving the rotor shaft (22). The rotor shafts (22) are driven by means of a toothed belt (40). The toothed belt pulleys (38) and a belt pulley (46) connected to a drive shaft (44) of the drive device (42) are arranged in a common synchronization housing (54).
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
A device for storing kinetic energy, which has a flywheel in a housing. The flywheel is mounted in the housing via a shaft. A motor-generator unit is provided for storing energy as well as for energy recovery. In order to improve efficiency, a vacuum pump for evacuating the interior is arranged in the housing. The vacuum pump is disposed on the shaft.
A dry vacuum pump, comprising a pump housing, which forms a plurality of suction chambers, wherein rotor elements are arranged in the suction chambers, in order to convey a pump medium from a high-vacuum-side inlet to an outlet. At least one rotor element is arranged in each suction chamber. The rotor elements are connected to a rotor shaft. The rotor shaft is supported by bearings, wherein a high-vacuum-side bearing is arranged in a cut-out. A sealing device is arranged between the high-vacuum-side bearing and at least one suction chamber adjacent to the high-vacuum-side bearing. The cut-out is connected, by means of a first channel, to a region of the dry vacuum pump in which there is a higher pressure than in at least one suction chamber adjacent to the high-vacuum-side bearing.
A filter system for vacuum pumps, in particular for oil-sealed vacuum pumps, comprises a filter element (10). The filter element (10) is arranged in a filter housing (12). A filter inlet element (14) is accommodated in a housing inlet (16). Further, the filter element (10) has wing-shaped tabs (54) in particular in the region of a filter outlet element (24), the tabs cooperating with corresponding slot-shaped receiving elements (58) provided in the pump housing (12). For an improved adjustment of the filter element (10) in a defined position in the filter housing (12), the filter inlet element (14) and the housing inlet (16) and/or the retaining elements (54) and the receiving elements (58) are formed correspondingly.
A multi-stage rotary vane pump comprising at least two rotor elements. The rotor elements are supported by a rotor shaft. The rotor elements and the rotor shaft are in the form of a single piece.
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 18/344 - Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups , , , , , or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group or and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
A lubricant-sealed vacuum pump, such as a rotary vane pump, comprises a rotor element (16) arranged in a suction chamber (10). The rotor element (16) is carried by a rotor shaft (26). The shaft (26) is surrounded by a main seal (32) arranged in the pump housing (12). In addition to the main seal (32), an additional seal (44) is arranged on an inner side (42) of the main seal (32). The additional seal (44) comprises a sealing lip (50) arranged on an outer side (36) of a shell (30).
09 - Scientific and electric apparatus and instruments
Goods & Services
Vacuum pumps; controllers in the nature of regulators for driving devices being parts of vacuum pumps mass spectrometers; automatic control apparatus, namely, control valves for regulating the flow of gases in vacuum pumps, electronic controls for regulating vacuum pump motors, cooling circuits and purge circuits, and electronic controls for controlling external vacuum apparatus including mass spectrometers and chamber pressure control; programmable controllers, namely, electronic controls for regulating motors; sensors for measuring instruments, namely, sensors for mass measuring spectrometers; computer software for monitoring residual gas analyzer; sensory software for sensing the functioning of residual gas analyzers
The invention relates to a multi-stage rotary lobe pump having a plurality of pump chambers (14) in a pump housing (16, 18). Said pump chambers form respective pump stages (26, 28, 30, 32, 34), each pump stage having two bidentate rotary pistons (10). The pump stages (26, 28, 30, 32, 34) are separated from each other by intermediate walls (44). Substantially radially extending connecting channels (48) are arranged in the intermediate walls (44). The connecting channels (48) are connected to an inflow chamber (40), the inflow opening (42) of which has a larger cross-section than the connecting channels (48).
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
The invention relates to a vacuum pump system, comprising a main vacuum pump (10) that is connected to a chamber (14) that is to be evacuated. An auxiliary pump (12) is connected to an outlet of the main vacuum pump (10). Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device (20) as a function of a predetermined control variable. The invention further relates to a method for controlling the vacuum pump system.
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04D 17/16 - Centrifugal pumps for displacing without appreciable compression
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
A processing chamber (10) is connected to a lock chamber (12). A vacuum pump system is provided for evacuating the lock chamber (12) and/or the processing chamber (10). Said system comprises a vacuum pump device (18) comprising at least one vacuum pump (20, 22). The vacuum pump system also comprises a valve device (26) for connecting to the lock chamber (12) and a control device (30). For noise reduction, a cyclically occurring operating parameter is determined by means of the control device. From this it is determined at which point the valve is to be opened such that at some point before the valve is opened, the speed of at least one of the vacuum pumps (20, 22) can be reduced. This leads to considerable noise reduction with good evacuation times.
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
F04C 28/24 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves
100.
FOOD PROCESSING AND/OR PACKAGING DEVICE AND METHOD FOR CLEANING SUCH DEVICE
A food processing and/or packaging device comprises at least one food chamber (10). Via a conduit system (16, 18, 20), the at least one food chamber is connected to a vacuum pump (12) for generating vacuum in the at least one food chamber (10). According to the invention, for sterilizing the conduit system (16, 18, 20) and/or the food chamber (10), a sterilization device is provided. The sterilization device comprises e.g. spray nozzles (24) for introducing cleaning liquid into the conduit system (16, 18, 20). The cleaning liquid is separated by a liquid separator (32) arranged upstream of the vacuum pump (12) in flow direction.
