Abstract

The invention relates to a silicon tip capable of being arranged at one end of a connecting element. The tip comprises a first portion (PT) and a second portion (ZI) arranged between the first portion (PT) and the connecting element, the first portion (PT) having a tetrahedral shape having a triangular section of continuously variable height, the second portion (ZI) having a non-triangular section (SZI), and wherein, at the interface between the first portion (PT) and the second portion (ZI) of the tip (P), the height (HPT) of the triangular section (SPT) of the first portion (PT) is less than a width of the connecting element.

IPC Classes  ?

• G01Q 70/10 - Shape or taper
• G01Q 70/16 - Probe manufacture

Abstract

A detection device to be inserted in a holder of a scanning probe microscope is provided. The detection device comprises a probe comprising a support, a lever extending from the support, a tip positioned at one end of the lever, opposite from said support. The probe has dimensions that are small in comparison with the holder and the detection device comprises an adapter secured to the probe so as to adapt said probe to fit the holder. The adapter is secured to the probe by bonding comprising at least one adhesive or by assembly comprising a filler material used to secure said adapter to said probe during a brazing operation.

IPC Classes  ?

• G01Q 70/16 - Probe manufacture
• G01Q 70/02 - Probe holders
• G01Q 70/08 - Probe characteristics

Abstract

A micromechanical sensor includes a movable micromechanical element and an optical resonator of disk or ring type, wherein the optical resonator has at least one interruption; and in that the movable micromechanical element is mechanically coupled to the optical resonator in such a way that a movement of the movable micromechanical element induces a modification of the width of the interruption of the optical resonator by moving at least one edge of the interruption in a direction substantially parallel to a direction of propagation of the light in the resonator at the interruption.

IPC Classes  ?

• G01Q 60/38 - Probes, their manufacture or their related instrumentation, e.g. holders
• G01Q 20/02 - Monitoring the movement or position of the probe by optical means
• G01P 15/093 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration by making use of inertia forces with conversion into electric or magnetic values by photoelectric pick-up

Abstract

The invention relates to a detection device intended to be inserted in a holder (40) of a scanning probe microscope (50). The detection device comprises a probe (20A, 20B, 20C) comprising a support (21A, 21B, 21C), a lever (22A, 22B, 22C) extending from the support (21A, 21B, 21C), a tip (23A, 23B, 23C) positioned at one end of the lever (22A, 22B,22C), opposite from said support (21A, 21B, 21C). The probe (20A, 20B, 20C) has dimensions that are small in comparison with the holder (40) and the detection device (30A, 30B, 30C) comprises an adapter (10A, 10B, 10C, 10D, 10E, 10F) secured to the probe (20A, 20B, 20C) so as to adapt said probe (20A, 20B, 20C) to fit the holder (40). The adapter (10A, 10B, 10C, 10D, 10E, 10F) is secured to the probe (20A, 20B, 20C) by bonding means comprising at least one adhesive or by means of assembly comprising a filler material used to secure said adapter to said probe during a brazing operation.

IPC Classes  ?

• G01Q 70/02 - Probe holders

Abstract

The invention relates to a probe (100) for an atomic force microscope comprising an optomechanical resonator (102) and a probe tip (103) protruding from the resonator, wherein the resonator is coupled to optical means configured to emit a light beam incident on the resonator and to receive a light beam emerging from the resonator. The optomechanical resonator comprises a body configured to resonate both in a volume mechanical vibration mode and in a volume optical vibration mode, wherein the optical vibration mode is coupled to the mechanical vibration mode such that a mechanical deformation of the resonant body in the mechanical vibration mode induces a change in the light transmission state in the optical vibration mode, which modifies the emerging light beam.

IPC Classes  ?

• G01Q 10/04 - Fine scanning or positioning
• G01Q 20/04 - Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
• G01Q 60/38 - Probes, their manufacture or their related instrumentation, e.g. holders
• G02B 6/293 - Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means

Abstract

A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a direction referred to as the longitudinal direction and protrudes from an edge of a substrate in the longitudinal direction, wherein the tip is arranged at one end of a shuttle attached to the substrate at least via a first and via a second structure, which structures are referred to as support structures, at least the first support structure being a flexible structure, extending in a direction referred to as the transverse direction, perpendicular to the longitudinal direction and anchored to the substrate by at least one mechanical linkage in the transverse direction, the support structures being suitable for allowing the shuttle to be displaced in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided.

IPC Classes  ?

• G01Q 10/04 - Fine scanning or positioning
• G01Q 60/38 - Probes, their manufacture or their related instrumentation, e.g. holders
• G01Q 70/10 - Shape or taper
• G01Q 20/02 - Monitoring the movement or position of the probe by optical means
• G01Q 20/04 - Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
• G01Q 30/14 - Liquid environment
• G01Q 60/40 - Conductive probes
• G01Q 70/06 - Probe tip arrays
• G01Q 60/06 - SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
• G01Q 60/22 - Probes, their manufacture or their related instrumentation, e.g. holders
• G01Q 60/30 - Scanning potential microscopy
• G01Q 60/58 - SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes

Abstract

A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a longitudinal direction, wherein: the tip is arranged at one end of a sensitive part of the probe, which is movable or deformable and linked to a support structure, which is anchored to the main surface of the substrate; the sensitive portion and the support structure are planar elements, extending mainly in planes that are parallel to the main surface of the substrate; the sensitive portion is linked to the support structure via at least one element allowing the sensitive portion to be displaced or to be extended in this direction; and the tip, the sensitive part and the support structure protrude from an edge of the substrate in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided.

IPC Classes  ?

• G01Q 20/02 - Monitoring the movement or position of the probe by optical means
• G01Q 60/38 - Probes, their manufacture or their related instrumentation, e.g. holders
• G01Q 70/10 - Shape or taper
• G01Q 10/04 - Fine scanning or positioning
• G01Q 20/04 - Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge

Abstract

Micromechanical sensor comprising a mobile micromechanical element (MME) and a disc-type or ring-type optical resonator (ROP4), characterised in that - the optical resonator has at least one gap (GR1, GR2); and in that - the mobile micromechanical element is mechanically coupled with the optical resonator such that a movement of the mobile micromechanical element leads to a modification of the width of the gap of said optical resonator by shifting at least one edge of the gap in a direction that is substantially parallel to a direction of light propagation in the resonator in alignment with the gap.

IPC Classes  ?

• G01Q 20/02 - Monitoring the movement or position of the probe by optical means
• G01P 15/093 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration by making use of inertia forces with conversion into electric or magnetic values by photoelectric pick-up
• G01D 5/26 - Mechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using optical means, i.e. using infrared, visible or ultraviolet light
• G01Q 20/04 - Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
• G01Q 70/10 - Shape or taper
• B81B 3/00 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Abstract

A microelectromechanical device comprising a mechanical structure extending along a longitudinal direction, linked to a planar substrate by an anchorage situated at one of its ends and able to flex in a plane parallel to the substrate, the mechanical structure comprises a joining portion, which links it to each anchorage and includes a resistive region exhibiting a first and second zone for injecting an electric current to form a resistive transducer, the resistive region extending in the longitudinal direction from an anchorage and arranged so a flexion of the mechanical structure in the plane parallel to the substrate induces a non-zero average strain in the resistive region and vice versa; wherein: the first injection zone is carried by the anchorage; and the second injection zone is carried by a conducting element not fixed to the substrate and extending in a direction, termed lateral, substantially perpendicular to the longitudinal direction.

IPC Classes  ?

• H01L 27/14 - Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy
• B81B 3/00 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Abstract

The invention relates to a probe for atomic-force microscopy including a tip for atomic-force microscopy (PT1) oriented in a so-called longitudinal direction (y) and projecting from an edge (B) of a substrate (S1) in said longitudinal direction, characterised in that said tip is arranged at one end of a shuttle (PJ1) attached to said substrate at least via a first (ET) and second (R, RA) so-called support structure, at least said first support structure being a flexible structure, extending in a so-called transverse direction (x) which is perpendicular to said longitudinal direction, and being anchored to the substrate by at least one mechanical connection in said transverse direction, said support structures being suitable for allowing the shuttle to move in the longitudinal direction. The invention also relates to an atomic-force microscope including at least one such probe.

IPC Classes  ?

• G01Q 10/04 - Fine scanning or positioning
• G01Q 60/38 - Probes, their manufacture or their related instrumentation, e.g. holders
• G01Q 70/10 - Shape or taper