Abstract

An electronic device 1 for analyzing a gas composition, which is present in an environment A at an environment pressure Pa, is described. The device 1 is portable and comprises a gas sampling module 7, an ion filtering module 8 and an ion detecting module 9. The sampling module 7 is configured to adjust an input gaseous flow Fi of gaseous particles from the environment A and an output gaseous flow Fo so as to reproduce inside the sampling module 7 a gas composition representative of the gas composition to be analyzed. In addition, the sampling module 7 is configured to ionize said gaseous particles and to emit the ions produced, so as to generate an ion flow I having an ion composition representative of the gas composition to be analyzed. The ion filtering module 8 is operatively connected to the sampling module 7 to receive the ion flow I, and is configured to controllably select at least one type of ions present in the ion flow I and to generate a corresponding at least one homogeneous ion beam I', having an intensity representative of the concentration of the corresponding gas particle in the gaseous composition to be analyzed. The ion detecting module 9 is operatively connected to the ion filtering module 8 to receive the at least one ion beam I', and is configured to measure the intensity of such least one ion beam I' and to generate a corresponding electric signal S representative of the concentration of the corresponding gas particle in the gaseous composition to be analyzed. The device 1 further comprises pumping means 95, configured to extract gas from the device 1, so as to control an ionization pressure Pi that is present inside the sampling module 7. The sampling module 7 is configured in such a way that the input gaseous flow Fi comprises a plurality of micro-flows at a molecular or predominantly molecular regime, at the environment pressure Pa, and the output gaseous flow Fo is a flow at a molecular or predominantly molecular regime, at the ionization pressure Pi.

IPC Classes  ?

• G01N 1/22 - Devices for withdrawing samples in the gaseous state
• H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locksArrangements for external adjustment of electron- or ion-optical components
• B01L 3/00 - Containers or dishes for laboratory use, e.g. laboratory glasswareDroppers
• H01J 49/00 - Particle spectrometers or separator tubes

Abstract

A device 1 is described for controlling a gaseous flow, comprising a gaseous flow adjusting interface 2, configured to inhibit or allow a flow of gas through the device 1 in a controlled manner, and control means 3, 4 of the adjusting interface. The adjusting interface 2 comprises a plurality of nano-holes 20. Each of the nano-holes has sub-micrometric dimensions and is suitable to be opened or closed in a controlled manner. The control means 3,4, in turn, comprise actuating means 3, suitable to open or close these nano-holes, and electronic processing means 4, configured to activate the actuation means to open or close individually or collectively the nano-holes 20 in a controlled manner. The invention also comprises systems and methods for gas sampling, systems and methods for controlling and measuring a gaseous flow and systems and methods for controlling a pressure gradient, employing the above device.

IPC Classes  ?

• F16K 99/00 - Subject matter not provided for in other groups of this subclass
• H01J 49/00 - Particle spectrometers or separator tubes
• H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locksArrangements for external adjustment of electron- or ion-optical components

Abstract

A device 1 for generating a controlled ionic flow I is described. The device 1 is portable and comprises an ionization chamber 6, at least one inlet member 2 and at least one ion outlet member 3. The ionization chamber 6 is suitable to be kept at a vacuum pressure, and configured to ionize gaseous particles contained therein. The at least one inlet member 2 is configured to inhibit or allow and/or adjust an inlet in the ionization chamber of a gaseous flow Fi of said gaseous particles. In addition, the at least one inlet member 2 comprises a gaseous flow adjusting interface 22, having a plurality of nano-holes 20, of sub-micrometric dimensions, suitable to be opened or closed, in a controlled manner, to inhibit or allow a respective plurality of gas micro-flows through the at least one inlet member 2. The at least one ion outlet member 3 is configured to inhibit or allow and/or adjust an output gaseous flow Fo and an ionic flow I, exiting the ionization chamber 6, of the generated ions. The at least one outlet member 3 comprises an orifice 30, suitable to be opened or closed in a controlled manner, so as to control an output conductance for the output gaseous flow Fo.

IPC Classes  ?

• F16K 99/00 - Subject matter not provided for in other groups of this subclass
• H01J 49/00 - Particle spectrometers or separator tubes
• H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locksArrangements for external adjustment of electron- or ion-optical components

Abstract

A portable system 1 for analyzing gaseous flows that vary over time is described, the system comprising a sampling chamber 18, a gas sampling module 7, an ion filtering module 8 and an ion detecting module 9. The sampling chamber 18 is suitable to be kept at a controlled sampling pressure Pc, and is configured to receive at least one gaseous flow F having a gaseous composition to be analyzed that is variable over time. The gas sampling module 7, arranged in fluidic communication with the sampling chamber 18, is configured to adjust an input gaseous flow Fi of gas particles from the sampling chamber 18, and an output gaseous flow Fo from the sampling module 7, so as to reproduce inside the sampling module 7 a gaseous composition representative of the gaseous composition to be analyzed. The gas sampling module 7 is further configured to ionize said gas particles and to emit the produced ions, so as to generate an ion flow I having an ion composition representative of the gaseous composition to be analyzed. The sampling module 7 is also suitable to maintain inside it a controlled ionization pressure Pi, and it is also configured in such a way that the input gaseous flow Fi comprises a plurality of micro-flows at a molecular or predominantly molecular regime, at the sampling pressure Pc, and the output gaseous flow Fo is a flow at a molecular or predominantly molecular regime, at the ionization pressure Pi. The ion filtering module 8 is operatively connected to the sampling module 7 to receive the ion flow I, and is configured to controllably select at least one type of ion present in the ion flow I and to generate a corresponding at least one homogeneous ion beam l', having an intensity representative of the concentration of the corresponding gas particle in the gaseous composition to be analyzed. The ion detecting module 9 is operatively connected to the ion filtering module 8 to receive the at least one ion beam l', and is configured to measure the intensity of the at least one ion beam l' and to generate a corresponding electric signal S representative of the concentration of the corresponding gas particle in the gaseous composition to be analyzed.

IPC Classes  ?

• G01N 1/22 - Devices for withdrawing samples in the gaseous state
• H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locksArrangements for external adjustment of electron- or ion-optical components
• B01L 3/00 - Containers or dishes for laboratory use, e.g. laboratory glasswareDroppers
• H01J 49/00 - Particle spectrometers or separator tubes
• G01N 30/72 - Mass spectrometers

Abstract

A miniaturized device 1 for pressure measurements over a very wide range is described. The device comprises at least one first electro-mechanical miniaturized sensor member 11, configured to detect a respective first pressure value P1 and generate a first electrical signal S1 representative of the first pressure value P1, and further comprises an ionization-based detection member 19, configured to detect a second pressure value P2, and generate a second electrical signal S2 depending on the amount of ions detected and representative of the second pressure value P2. The ionization-based detection member 19 comprises an ionization source 21, an ionization region 20, ion extraction means 22, and at least one ion detector 23, configured to detections. The device 1 further comprises electronic processing means 10, operatively connected to the first sensor member 11 and to the ionization-based detection member 19, and configured to determine a measured pressure value P based on the first S1 and second S2 detected electrical signals. The device 1 finally comprises interface means 15, operatively connected to the electronic processing means 10 and configured to provide in output the measured pressure value P. The first sensor member 11, the ionization-based detection member 19, the electronic processing means 10 and the interface means 15 are comprised in a single integrated device.

IPC Classes  ?

• G01L 15/00 - Devices or apparatus for measuring two or more fluid pressure values simultaneously
• G01L 21/34 - Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
• G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
• G01L 19/00 - Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges

Abstract

A miniaturized device for measurements of very low level pressure 1 is described. The device 1 comprises an ionization-based detection member 11, configured to detect a pressure value Pi, electronic processing means 10, operatively connected to the ionization-based detection member 11, and configured to generate a measured pressure value P based on the detected pressure value Pi, and further comprising interface means 15, operatively connected to the electronic processing means 10 and configured to provide in output the measured pressure value P. The ionization-based detection member 11, the electronic processor 10 and the interface means 15 are comprised in a single integrated device. The ionization-based detection member 1 1 comprises an ionization source 21 and an ionization region 20, containing gas particles the pressure of which has to be measured, arranged so as to be passed through by ionization particles (e.g., electrons) generated by the source 21, so that the ionization electrons ionize the gas particles, thus generating respective ions. The ionization-based detection member 11 further comprises ion extraction means 22, configured to determine a preferential trajectory for the generated ions, passing through at least one ion extracting window 31, through which the ions leave the ionization region 20; and at least one ion detector 23, configured to detect ions and generate an electrical variable depending on the amount of ions detected and representative of the pressure value of the gas particles that are present in the ionization region 20. The at least one ion detector 23 having micrometer dimensions and is arranged at a respective ion extraction window 31, so as to be shielded against trajectories of X rays generated by impacts of the ionizing electrons with parts of the ionization region 20 other than the at least one ion detector (23).

IPC Classes  ?

• G01L 15/00 - Devices or apparatus for measuring two or more fluid pressure values simultaneously
• G01L 27/00 - Testing or calibrating of apparatus for measuring fluid pressure
• G01L 21/34 - Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes

Abstract

An electro-mechanical miniaturized device 1 for pressure measurements is described, the device comprising at least one first electro-mechanical miniaturized pressure sensor member 11, configured to detect a respective first pressure value P1 and to generate a first electrical signal S1 representative of the first pressure value P1, and further comprising at least one second electro-mechanical miniaturized pressure sensor member 12, configured to detect a respective second pressure value P2 and to generate a second electrical signal S2 representative of said second pressure value P2. The second sensor member 12 is arranged within a casing 13 suitable to seal it. The device 1 further comprises electronic processing means 10, operatively connected to the first 11 and the second 12 sensor members, and configured to determine a measured pressure value P based on said first S1 and second S2 electrical signals; and finally comprises interface means 15, operatively connected to the electronic processing means 10 and configured to provide in output said measured pressure value P. The first 11 and second 12 sensor members, the electronic processing means 10 and the interface means 15 are comprised in a single integrated device.

IPC Classes  ?

• G01L 15/00 - Devices or apparatus for measuring two or more fluid pressure values simultaneously
• G01L 27/00 - Testing or calibrating of apparatus for measuring fluid pressure

Abstract

A miniaturized device 1 for pressure measurements over a very wide range and for gas concentration measurements is described. The device comprises at least one first electro-mechanical miniaturized sensor member 11 configured to detect a first pressure value P1 and generate a first electrical signal Si representative of the first pressure value P1, and further comprises an ionization-based detection member 19, configured to detect a second pressure value P2, and generate a second electrical signal S2 depending on the amount of ions detected and representative of the second pressure value P2. The ionization-based detection member 19 comprises an ionization source 21, an ionization region 20, ion extraction means 22 and at least one ion detector 23, configured to detect ions and generate the above-mentioned second electrical signal S2. The device 1 further comprises controlled flow opening/closing means 90, configured to control a fluidic communication between the ionization-based detection member 19 and an environment in which the first sensor member 11 is located. Also comprised in the device 1 are electronic processing means 10, operatively connected to said first sensor member 11 and to the ionization-based detection member 19, and configured to determine a measured pressure value P based on the first S1 and/or second S2 detected electrical signals. The electronic processing means 10 are further operatively connected to the controlled flow opening/closing means 90 and further configured to control the condition thereof. The device 1 finally comprises interface means 15, operatively connected to the electronic processing means 10 and configured to output the measured pressure value P. The first sensor member 11, the ionization-based detection member 19, the controlled flow opening/closing means 90, the electronic processing means 10 and the interface means 15 are comprised in a single integrated device.

IPC Classes  ?

• G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
• G01L 15/00 - Devices or apparatus for measuring two or more fluid pressure values simultaneously
• G01L 19/00 - Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
• G01L 21/34 - Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes