The invention relates to a contact device for contacting multiple sub-cells of solar cells that are physically and electrically separate from one another and also to an arrangement and a method for characterising such sub-cells. The contact device comprises a planar carrier element with at least two back-side contact arrangements or at least two planar carrier elements each with at least one back-side contact arrangement, at least one front-side contact arrangement and at least one holding device for fixing the sub-cells on the planar carrier element or elements. Each back-side contact arrangement and each front-side contact arrangement corresponds to a back-side or front-side contact, respectively, of one of the sub-cells. Either the back-side contact arrangements of the individual sub-cells can be electrically contacted separately, while the front-side contact arrangements of all the sub-cells are electrically connected to a common front-contact arrangement and can be contacted with a common front-side potential, or the front-side contact arrangements of the individual sub-cells can be electrically contacted separately, while the back-side contact arrangements of all the sub-cells are electrically connected to a common back-contact arrangement and can be contacted with a common back-side potential. With the aid of the contact device, multiple sub-cells can be electrically characterised at the same time during a lighting operation or one after the other during successive lighting operations.
An interdigitated back contact photovoltaic device includes a substrate having a structured layer with first and second doped structures. The substrate is divided, by a virtual axis in a first portion and a second portion. The first portion and second portion includes, arranged on the first-type structures and second type structures, electrical contacts that are aligned according to parallel first and second columns defining alternating negative and positive polarities. Each electrical contact of the columns of the first portion has a polarity opposite that of the electrical contacts of facing collinear columns of the second portion. The first and second portions include at least one non-rectangular corner. Also disclosed are resized photovoltaic devices that are the photovoltaic devices separated in two halves, and to modules that include the resized photovoltaic devices, as well as a method to realize the photovoltaic devices, the resized photovoltaic devices and the photovoltaic modules.
H01L 31/05 - Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
3.
DEVICE FOR TRANSPORTING A SUBSTRATE, TREATMENT DEVICE WITH A RECEIVING PLATE ADAPTED TO A SUBSTRATE CARRIER OF A DEVICE OF THIS KIND, AND METHOD FOR PROCESSING A SUBSTRATE USING A DEVICE OF THIS KIND FOR THE TRANSPORT OF A SUBSTRATE, AND TREATMENT FACILITY
The invention relates to an apparatus for transporting a substrate into or out of a treatment apparatus, to a treatment apparatus, to a method of processing a substrate and to a treatment system having a movement arrangement for moving such an apparatus for transporting a substrate. In this case, the apparatus for transporting a substrate has a substrate carrier that includes a horizontally extending holding area and one or a plurality of gripping arms. The holding area is even and uniform on a first surface facing the substrate, the shape of said holding area substantially corresponding to the shape of the substrate and the area size of said holding area being substantially the same as the area size of the substrate, the substrate being held with its rear side on the holding area merely by its weight. The treatment apparatus has a receiving plate on which the substrate is held during the treatment, the receiving plate having a recess that is suitable for receiving such a substrate carrier during the treatment of the substrate in a first surface.
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
C23C 16/509 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
The invention relates to a multi-junction solar cell comprising at least two sub-cells based on silicon and at least one material other than silicon, wherein a first sub-cell is designed to use photons in a spectral region of a shorter wavelength than a spectral region of a longer wavelength of a second sub-cell, the second sub-cell being based on silicon and the first sub-cell being based on a material which has a larger band gap than silicon, wherein the first sub-cell and the second sub-cell are designed as a monolithic unit consisting of a layer stack, and wherein the first sub-cell and the second sub-cell are electrically connected to one another in series by means of a tunnel diode, such that the tandem solar cell is equipped with two terminals, wherein the tunnel diode has a tunnel diode n layer and a tunnel diode p layer. The problem addressed is that of proposing a multi-junction solar cell of simple construction. The problem is solved by multi-junction solar cells in which the tunnel diode n layer and/or the tunnel diode p layer is/are silicon-based layer(s).
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
5.
PHOTOVOLTAIC DEVICE AND METHOD FOR MANUFACTURING THE SAME
The present invention relates to interdigitated back contact (IBC) photovoltaic device (1) having first-type charge collecting structures (IS1) and second-type charge collecting structures (IS2) comprising a first-type doped structured semiconducting layer consisting in a plurality of n- or p-doped portions (6') and a second-type doped semiconducting layer (6''), of the other doped-type of said first-type doped layer (6'). On the doped semiconducting layer (6), a continuous, electrically conductive, multifunctional protection layer (8) is arranged, to protect said semiconducting layer (6), and having a highest metal ion diffusion coefficient D1, that is, at the same temperature, lower than the lowest metal ion diffusion coefficient D2, so that the multifunctional protection layer (8) is less vulnerable to physical and chemical degradation than the to be protected semiconducting layer (6). On said multifunctional protection layer (8), a structured charge collecting layer stack (100) is arranged which vertical trenches (20) to separate electrically the first-type charge collecting structures (IS1) and the second-type charge collecting structures (IS2). This layer stack (100) comprises at least one conductive layer (10, 12). The invention is also achieved by a photovoltaic system comprising at least two interdigitated back contact (IBC) photovoltaic devices (1), and also by a method to realize the interdigitated back contact (IBC) photovoltaic devices (1).
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
6.
BACKSIDE EMITTER SOLAR CELL STRUCTURE HAVING A HETEROJUNCTION
A backside emitter solar cell structure having a heterojunction. On one side edge of the backside emitter solar cell structure having the heterojunction, on an edge region of a crystalline semiconductor substrate of the backside emitter solar cell structure having the heterojunction having a doping of a first conductivity type, there is a layer sequence with a double intrinsic layer formed.
H01L 31/068 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
H01L 31/20 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor material
The present invention relates to a solar plant with at least one solar tracker for use in a car park, wherein the solar tracker has at least one mounting and at least one photovoltaic module with at least a first surface and an opposite, second surface arranged parallel to the first surface, wherein at least one joint is arranged on the mounting, wherein an orientation of the first surface is changeable by a controller and a drive unit, along at least one degree of freedom of movement, so as to follow the course of the sun or so as to approach a safety position protecting the solar tracker. The problem addressed by the present invention lies in further optimising a solar plant with solar tracker so that, ideally, a more efficient energy recovery is possible. The problem is solved by a solar plant of the stated category, the controller of which includes further service, safety and/or comfort routines.
Disclosed is a method to fabricate an interdigitated back contact photovoltaic device including: providing a substrate of a first-type doping being an n-type or a p-type doping; realizing on a back side a semiconducting doped structure including individual doped layers portions of the first type doping and a semiconducting doped structure of a second type; realizing a conductive layer on top of the semiconducting structure; realizing a patterned isolation resist layer having contact apertures and isolation apertures onto the conductive layer; further applying conductive pads to the contact apertures; and etching the conductive layer up to the second-type doped layer to realize trenches to electrically separate first type charge collecting structures from second type charge collecting structures. Also disclosed is an interdigitated back contact photovoltaic device as manufactured according to the disclosed method of fabrication, and a photovoltaic system including at least two interdigitated back contact photovoltaic devices.
Solar cell module (2000) with a first solar cell string (2121, . . . , 2124), wherein the first solar cell string (2121, . . . , 2124) has at least two solar cells (2121, . . . , 2124) connected in series and arranged in two rows, with a first bypass element (2151) which is connected in parallel with the first solar cell string (2121, . . . , 2124), with a second solar cell string (2221, . . . , 2224) wherein the second solar cell string (2221, . . . , 2224) has at least two solar cells (2221, . . . , 2224) connected in series and arranged in two rows, with a second bypass element (2251) which is connected in parallel to the second solar cell string (2221, . . . , 2224), with a front side encapsulation layer (2002) and a rear side encapsulation layer (2003), wherein the solar cells (2121, . . . , 2124, 2221, . . . , 2224) of the first solar cell string (2121, . . . , 2124) and the second solar cell string (2221, . . . , 2224) are arranged between the front side encapsulation layer (2002) and the rear side encapsulation layer (2003), with an electrical internal connector (2062) arranged between the front side encapsulation layer (2002) and the rear side encapsulation layer (2003), and
to which the first solar cell string (2121, . . . , 2124) and the second solar cell string (2221, . . . , 2224) are connected in series, wherein the first bypass element (2151) and the second bypass element (2251) are arranged on the side of the rear side encapsulation layer (2003) facing away from the front side encapsulation layer (2002), wherein the first bypass element (2151) and the second bypass element (2251) are electrically conductively connected to each other with an external electrical connector (2072) arranged on the side of the rear side encapsulation layer (2003) facing away from the front side encapsulation layer (2002).
H02S 40/34 - Electrical components comprising specially adapted electrical connection means to be structurally associated with the PV module, e.g. junction boxes
H01L 31/05 - Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
06 - Common metals and ores; objects made of metal
09 - Scientific and electric apparatus and instruments
11 - Environmental control apparatus
19 - Non-metallic building materials
Goods & Services
Roofing of metal; roofing tiles of metal; roofing of metal,
incorporating photovoltaic cells. Solar modules; photovoltaic solar modules; solar panels for
the production of electricity. Solar energy powered heating installations; solar energy
powered heating installations; solar thermal collectors
[heating]; sunlight collecting apparatus for heating
purposes. Tiles of glass; roofing tiles, not of metal; roofing slates;
roofing, not of metal, incorporating photovoltaic cells;
roofing, not of metal, incorporating photovoltaic cells;
roofing shingles; cladding panels (non-metallic -) for
roofs.
06 - Common metals and ores; objects made of metal
09 - Scientific and electric apparatus and instruments
11 - Environmental control apparatus
19 - Non-metallic building materials
Goods & Services
Roofing of metal; roofing tiles of metal; roofing of metal,
incorporating photovoltaic cells. Solar modules; photovoltaic solar modules; solar panels for
the production of electricity. Solar energy powered heating installations; solar energy
powered heating installations; solar thermal collectors
[heating]; sunlight collecting apparatus for heating
purposes. Tiles of glass; roofing tiles, not of metal; roofing slates;
roofing, not of metal, incorporating photovoltaic cells;
roofing, not of metal, incorporating photovoltaic cells;
roofing shingles; cladding panels (non-metallic -) for
roofs.
12.
Backside emitter solar cell structure having a heterojunction and method and device for producing the same
A backside emitter solar cell structure having a heterojunction, and a method and a device for producing the same. A backside intrinsic layer is first formed on the back side of the substrate, then a frontside intrinsic layer and a frontside doping layer are formed on the front side of the substrate, and finally a backside doping layer is formed on the back side of the substrate.
H01L 31/068 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
H01L 31/20 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor material
The invention relates to a perovskite solar cell. The perovskite solar cell is either a single solar cell or at least one sub-cell of a multi-junction solar cell. The perovskite solar cell has: an absorber (4) made of a perovskite material, an electron transport layer (5) which is conductively connected to at least one negative contact of the perovskite solar cell, and a hole transport layer (6) which is conductively connected to at least one positive contact of the perovskite solar cell, wherein the electron transport layer serves as a hole reflector, and the hole transport layer serves as an electron reflector. The aim of the invention is to provide simple functional perovskite solar cells which are nevertheless inexpensive. This is achieved by a perovskite solar cell in which the electron transport layer (5) and/or the hole transport layer (6) and/or at least one passivation layer (7) for the absorber layer (4) is a layer based on deposited silicon.
H01L 31/078 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier including different types of potential barriers provided for in two or more of groups
H10K 30/57 - Photovoltaic [PV] devices comprising multiple junctions, e.g. tandem PV cells
14.
CONTACT DEVICE AND ARRANGEMENT AND METHOD FOR CHARACTERIZING SUB-CELLS
The invention relates to a contact device for contacting multiple sub-cells of solar cells that are physically and electrically separate from one another and also to an arrangement and a method for characterizing such sub-cells. The contact device comprises a planar carrier element with at least two back-side contact arrangements or at least two planar carrier elements each with at least one back-side contact arrangement, at least one front-side contact arrangement and at least one holding device for fixing the sub-cells on the planar carrier element or elements. Each back-side contact arrangement and each front-side contact arrangement corresponds to a back-side or front-side contact, respectively, of one of the sub-cells. Either the back-side contact arrangements of the individual sub-cells can be electrically contacted separately, while the front-side contact arrangements of all the sub-cells are electrically connected to a common front-contact arrangement and can be contacted with a common front-side potential, or the front-side contact arrangements of the individual sub-cells can be electrically contacted separately, while the back-side contact arrangements of all the sub-cells are electrically connected to a common back-contact arrangement and can be contacted with a common back-side potential. With the aid of the contact device, multiple sub-cells can be electrically characterized at the same time during a lighting operation or one after the other during successive lighting operations.
Disclosed is interdigitated back contact (IBC) photovoltaic devices and modules that are based on a silicon structured device which includes: a silicon-based substrate, an intrinsic amorphous silicon layer a-Si:H(i) situated on substrate a first patterned silicon layer, and a second patterned nano-crystalline silicon layer on the first patterned silicon layer. The second patterned layer is of the same type of doping than the first patterned silicon layer The first patterned layer and the second patterned layer form photovoltaic structures, of which at least one constitutes a fiducial mark having, in a predetermined wavelength range, a different optical reflectivity, than the reflectivity of the intrinsic amorphous silicon (a-Si:H(i)) layer portions interstices between the photovoltaic structures. Also disclosed are a photovoltaic device, photovoltaic modules and a method of fabrication of the photovoltaic device.
H01L 31/05 - Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
H01L 31/077 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells the devices comprising monocrystalline or polycrystalline materials
H01L 31/18 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
H01L 31/20 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor material
H01L 23/544 - Marks applied to semiconductor devices, e.g. registration marks, test patterns
06 - Common metals and ores; objects made of metal
09 - Scientific and electric apparatus and instruments
11 - Environmental control apparatus
19 - Non-metallic building materials
Goods & Services
Roofing of metal; Roofing tiles of metal; Roofing of metal, incorporating photovoltaic cells. Solar modules; Photovoltaic solar modules; Solar panels for the production of electricity. Solar energy powered heating installations; Solar energy powered heating installations; Solar thermal collectors [heating]; Sunlight collecting apparatus for heating purposes. Tiles of glass; Roofing tiles, not of metal; Roofing slates; Roofing, not of metal, incorporating photovoltaic cells; Roofing, not of metal, incorporating photovoltaic cells; Roofing shingles; Cladding panels (Non-metallic -) for roofs.
06 - Common metals and ores; objects made of metal
09 - Scientific and electric apparatus and instruments
11 - Environmental control apparatus
19 - Non-metallic building materials
Goods & Services
Roofing of metal; Roofing tiles of metal; Roofing of metal, incorporating photovoltaic cells. Solar modules; Photovoltaic solar modules; Solar panels for the production of electricity. Solar energy powered heating installations; Solar energy powered heating installations; Solar thermal collectors [heating]; Sunlight collecting apparatus for heating purposes. Tiles of glass; Roofing tiles, not of metal; Roofing slates; Roofing, not of metal, incorporating photovoltaic cells; Roofing, not of metal, incorporating photovoltaic cells; Roofing shingles; Cladding panels (Non-metallic -) for roofs.
The present invention relates to a tandem solar cell made of at least two monolithically stacked partial solar cells. So as to provide a tandem solar cell with increased mechanical stability, which also allows an advantageous application of perovskite-containing solar cell structures, the invention proposes to design the tandem solar cell in such a way that at least one of the partial solar cells has a support structure comprising at least one support trench that passes through a layer structure of this partial solar cell and that is filled with a support material, the at least one support trench having a hole-like embodiment in a cut plan view of a light-incidence side of the tandem solar cell and the support material being a dielectric material.
H01L 31/078 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier including different types of potential barriers provided for in two or more of groups
H01L 31/0468 - PV modules composed of a plurality of thin film solar cells deposited on the same substrate comprising specific means for obtaining partial light transmission through the module, e.g. partially transparent thin film solar modules for windows
The invention is achieved by an interdigitated back contact (IBC) photovoltaic device (1) comprising a substrate (2) having a structured layer (4) with first and second doped structures (4', 4''). The substrate (2) is divided, by a virtual axis (X) in a first portion (2a) and a second portion (2b). The first portion (2a) and second portion (2b) comprises, arranged on said first-type structures (4') and second type structures (4''), a plurality of electrical contacts (102a-d - 120a-d, 202a-d - 220a-d) that are aligned according to parallel first and second columns (100, 200) defining alternating negative and positive polarities. Each of the electrical contacts (102a-d - 120 a-d) of the columns (100) of said first portion (2a) have a polarity opposite to the polarity of the electrical contacts (202a-d - 220a-d) of facing collinear columns (200) of said second portion (2b). Said first portion (2a) and second portion (2b) comprise at least one corner (12, 14) that is not a rectangular corner. The invention relates also to resized photovoltaic devices (10, 20) that are said photovoltaic devices (1) separated in two halves, and to modules (300) that comprise the resized photovoltaic devices (10, 20). The invention relates also to a method to realize the photovoltaic devices (1), the resized photovoltaic devices (10, 20) and the photovoltaic modules (300).
H01L 31/061 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being of the point-contact type
H01L 31/068 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
09 - Scientific and electric apparatus and instruments
Goods & Services
Electrical generators using solar cells; Current generators; Wind-powered electricity generators; Solar power generators. Apparatus and instruments for accumulating and storing electricity; Chargers; Battery chargers; Wireless chargers; Solar battery chargers; Photovoltaic apparatus for generating electricity; Photovoltaic modules; Solar modules; Solar cells for electricity generation; Solar panels for the production of electricity.
The invention relates to a multi-junction solar cell comprising at least two sub-cells based on silicon and at least one material other than silicon, wherein a first sub-cell is designed to use photons in a spectral region of a shorter wavelength than a spectral region of a longer wavelength of a second sub-cell, the second sub-cell being based on silicon and the first sub-cell being based on a material which has a larger band gap than silicon, wherein the first sub-cell and the second sub-cell are designed as a monolithic unit consisting of a layer stack, and wherein the first sub-cell and the second sub-cell are electrically connected to one another in series by means of a tunnel diode, such that the tandem solar cell is equipped with two terminals, wherein the tunnel diode has a tunnel diode n layer and a tunnel diode p layer. The problem addressed is that of proposing a multi-junction solar cell of simple construction. The problem is solved by multi-junction solar cells in which the tunnel diode n layer and/or the tunnel diode p layer is/are silicon-based layer(s).
H01L 31/078 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier including different types of potential barriers provided for in two or more of groups
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
A backside emitter solar cell structure having a heterojunction, and a method and a device for producing the same. A backside intrinsic layer is first formed on the back side of the substrate, then a frontside intrinsic layer and a frontside doping layer are formed on the front side of the substrate, and finally a backside doping layer is formed on the back side of the substrate.
H01L 31/068 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
H01L 31/20 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor material
23.
Photovoltaic device and method for manufacturing the same
Disclosed is an interdigitated back contact photovoltaic device that includes a first patterned silicon layer situated on an intrinsic layer, and having the same type of doping as the one of the substrate. First charge collection portions are deposited on predetermined areas of the intrinsic layer, and include each an amorphous layer portion situated between the predetermined areas and the at least partially nano-crystalline layer portions. The amorphous layer portions have a larger width than the width of the nano-crystalline layer portions. On top if the first patterned silicon layer, a second nano-crystalline silicon layer is deposited that has a doping of a second type being the other of the p-type doping or the n-type doping with respect to the doping-type of the first patterned silicon layer.
H01L 31/077 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells the devices comprising monocrystalline or polycrystalline materials
H01L 31/20 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor material
24.
Solar energy roof tile, solar energy system and method for obtaining energy from solar radiation
A solar energy roof tile, thermally and/or electrically conductively connected to an adjacent solar energy roof tile, includes a lower face for placing on at least some regions of a roof construction, an upper face opposite the lower face formed at least in some regions by a solar energy utilisation module, two opposite lateral walls, a rear face connecting the lateral walls, and a front face opposite the rear face that connects the lateral walls. The two lateral walls, the rear face and front face together connect the lower and upper faces, such that a cavity is formed between the two lateral walls, the rear face, front face, and lower and upper faces. The lower face has, in the region of the front face, a lower opening for providing access. The upper face has, in the region of the rear face, an upper opening for providing access into the cavity.
H02S 20/24 - Supporting structures directly fixed to an immovable object specially adapted for buildings specially adapted for roof structures specially adapted for flat roofs
H02S 40/44 - Means to utilise heat energy, e.g. hybrid systems producing warm water and electricity at the same time
F24S 80/30 - Arrangements for connecting the fluid circuits of solar heat collectors with each other or with other components, e.g. pipe connectionsFluid distributing means, e.g. headers
F24S 10/50 - Solar heat collectors using working fluids the working fluids being conveyed between plates
F24S 20/69 - Solar heat collectors integrated in fixed constructions, e.g. in buildings in the form of shingles or tiles
E04D 1/00 - Roof covering by making use of tiles, slates, shingles, or other small roofing elements
E04D 1/18 - Roofing elements shaped as plain tiles or shingles, i.e. with flat outer surface of metal
E04D 1/30 - Special roof-covering elements, e.g. ridge tiles, gutter tiles, gable tiles, ventilation tiles
F24S 20/00 - Solar heat collectors specially adapted for particular uses or environments
E04D 1/34 - Fastenings for attaching roof-covering elements to the supporting elements
F25B 27/00 - Machines, plants or systems, using particular sources of energy
The present invention relates to a method for producing solar wafers textured at least on one side, wherein in a first method step, sawn solar wafers with sawing damage are provided, and at the end of the last method step textured solar wafers with different size types of large and small pyramids are provided, and wherein the textured solar wafers can then be further processed to produce solar cells. The problem addressed by the present invention is that of providing an improved texturing method within the framework of the technology for the production of solar cells. This problem is solved by a method for producing textured solar wafers wherein in the first texture etching step the large pyramids are created in a low surface area density such that at the end of the method less than 30% of the textured surface of the solar wafer is occupied by the large pyramids; and in the second texture etching step the small pyramids are produced with a large surface area density.
Solar-cell module (2000) having a first solar-cell series circuit (2121, 2124), wherein the first solar-cell series circuit (2121,..., 2124) has at least two solar cells connected in series (2121,..., 2124) and arranged in two rows, having a first bridging element (2151), which is connected in parallel with the first solar-cell series circuit (2121,..., 2124), having a second solar-cell series circuit (2221,..., 2224), wherein the second solar-cell series circuit (2221, 2224) has at least two solar cells (2221, 2224) connected in series and arranged in two rows, having a second bridging element (2251), which is connected in parallel with the second solar-cell series circuit (2221, 2224), having a front-side encapsulation layer (2002) and a rear-side encapsulation layer (2003), wherein the solar cells (2121, 2124, 2221,…,2224) of the first solar-cell series circuit (2121,..., 2124) and of the second solar-cell series circuit (2221,..., 2224) are arranged between the front-side encapsulation layer (2002) and the rear-side encapsulation layer (2003), having an electrical inner connector (2062), which is arranged between the front-side encapsulation layer (2002) and the rear-side encapsulation layer (2003) and by means of which the first solar-cell series circuit (2121, 2124) and the second solar-cell series circuit (2221,..., 2224) are connected in series, wherein the first bridging element (2151) and the second bridging element (2251) are arranged on that side of the rear-side encapsulation layer (2003) which is directed away from the front-side encapsulation layer (2002), wherein the first bridging element (2151) and the second bridging element (2251) are connected electrically conductively to one another by an electrical outer connector (2072), which is arranged on that side of the rear-side encapsulation layer (2003) which is directed away from the front-side encapsulation layer (2002).
The present invention relates to a method of production of silicon heterojunction solar cells having at least one stabilization step, wherein the stabilization step is performed after amorphous silicon layers, and preferably also transparent layers or even metallic contact materials, have already been applied beforehand to crystalline silicon solar wafers. The problem addressed by the invention consists in finding an efficient stabilization step which permits high solar cell efficiencies. The problem is solved by a method of production of silicon heterojunction solar cells in which the stabilization step comprises heating the solar cell to temperatures above 200° C. and illumination from a light source, wherein the light source emits light in a wavelength range <2 500 nm and wherein one of the light doses emitted by the light source is in excess of 8 000 Ws/m2.
H01L 31/18 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
H01L 31/20 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor material
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
28.
PHOTOVOLTAIC DEVICE AND METHOD FOR MANUFACTURING THE SAME
In the present invention a method to fabricate an interdigitated back contact (IBC) photovoltaic device (1) is disclosed and comprises the steps of providing a substrate (2) of a first-type doping being an n-type or a p-type doping; realizing on a back side (2b) a semiconducting doped structure (6) comprising individual doped layers portions (6') of said first type doping and a semiconducting doped structure (6'') of a second type; realizing a conductive layer (100) on top of the semiconducting structure (6); realizing a patterned isolation resist layer (14) having contact apertures (14b) and isolation apertures (14c) onto said conductive layer (100); further applying a plurality of conductive pads (16, 16') to said contact apertures (14b); and etching the conductive layer (100) up to said second-type doped layer (6'') to realize trenches (20) to electrically separate first type charge collecting structures (F1) from second type charge collecting structures (F2). The invention provides also an interdigitated back contact (IBC) photovoltaic device (1) as manufactured according to the disclosed method of fabrication. The invention relates also to a photovoltaic system comprising at least two interdigitated back contact (IBC) photovoltaic devices (1).
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
29.
PRODUCTION LINE FOR PRODUCING SOLAR MODULES FROM DIVIDED SOLAR CELLS
The present invention relates to a production line (1) for producing solar modules from divided solar cells, the production line comprising a solar cell production region (2), a light and temperature treatment device (5), a cell dividing region (4) and a module production region (6). The problem addressed by the present invention consists in achieving a high efficiency of produced solar cells while ensuring low production costs. The problem is solved by a production line in which the light and temperature treatment device and/or at least one layer production chamber is arranged in a process sequence arrangement of the production line downstream of the cell dividing region and upstream of the module production region.
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
H01L 31/18 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
H01L 31/20 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor material
30.
PHOTOVOLTAIC DEVICE AND METHOD FOR MANUFACTURING THE SAME
The invention relates to interdigitated back contact (IBC) photovoltaic devices and modules that are based on a silicon structured device (1) which comprises: a silicon-based substrate (3), an intrinsic amorphous silicon layer a-Si:H(i) (5) situated on substrate (3) a first patterned silicon layer (2), and a second patterned nano-crystalline silicon layer (4) on the first patterned silicon layer (2). The second patterned layer (4) is of the same type of doping than said first patterned silicon layer (2) The first patterned layer (2) and the second patterned layer (4) form photovoltaic structures (12a, 12g), of which at least one constitutes a fiducial mark (10) having, in a predetermined wavelength range, a different optical reflectivity (R1), than the reflectivity (R0) of the intrinsic amorphous silicon (a-Si:H(i)) layer portions interstices (5a-5f) between said photovoltaic structures (12a, 12g). The invention relates also to a photovoltaic device (1), to photovoltaic modules and to a method of fabrication of said photovoltaic device.
H01L 31/0745 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
H01L 31/18 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
H01L 31/20 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor material
31.
Device for transporting substrate, treatment device with receiving plate adapted to substrate carrier of a device of this kind, and method for processing a substrate using a device of this kind for the transport of a substrate, and treatment facility
The invention relates to an apparatus for transporting a substrate into or out of a treatment apparatus, to a treatment apparatus, to a method of processing a substrate and to a treatment system having a movement arrangement for moving such an apparatus for transporting a substrate. In this case, the apparatus for transporting a substrate has a substrate carrier that includes a horizontally extending holding area and one or a plurality of gripping arms. The holding area is even and uniform on a first surface facing the substrate, the shape of said holding area substantially corresponding to the shape of the substrate and the area size of said holding area being substantially the same as the area size of the substrate, the substrate being held with its rear side on the holding area merely by its weight. The treatment apparatus has a receiving plate on which the substrate is held during the treatment, the receiving plate having a recess that is suitable for receiving such a substrate carrier during the treatment of the substrate in a first surface.
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
C23C 16/509 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
32.
System for electrically decoupled, homogeneous temperature control of an electrode by means of heat conduction tubes, and processing facility comprising such a system
The invention relates to a system for temperature control of an electrode. The system comprises at least one heat pipe, a coupling element and a temperature control apparatus. In this case, the heat pipe is suitable for being arranged in the electrode at least in part and by means of at least one first end. The coupling element is suitable for heating or cooling a second end of the heat pipe, while the temperature control apparatus is suitable for heating or cooling the coupling element. In this case, the electrode and the temperature control apparatus are galvanically separated from one another. The invention further relates to a treatment facility comprising a treatment chamber and at least one electrode inside the treatment chamber and at least one system of this kind for temperature control of an electrode.
The present invention relates to a rear-emitter solar cell structure having a heterojunction and to a method and a device for producing same. According to the invention, first a rear intrinsic layer is formed on the rear of the substrate, subsequently a front intrinsic layer and a front doping layer are formed on the front of the substrate, and finally a rear doping layer is formed on the rear of the substrate.
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
H01L 31/18 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
34.
SOLAR ENERGY ROOF TILE, SOLAR ENERGY SYSTEM AND METHOD FOR OBTAINING ENERGY FROM SOLAR RADIATION
The invention relates to a solar energy roof tile, the shape of which substantially corresponds to the shape of a conventional roof tile and which is thermally and/or electrically conductively connectable to an adjacent solar energy roofing tile, having: - a lower face (2) for placing on a roof construction, at least in regions, - an upper face (8) opposite the lower face (2), which upper face is formed at least in regions by a solar energy utilization module, - two opposite lateral walls (5, 6), - a rear face (7) connecting the two lateral walls (5, 6), and - a front face (4) opposite the rear face (7) that also connects the two lateral walls (5, 6), wherein the two lateral walls (5, 6), the rear face (7) and the front face (4) together connect the lower face (2) and the upper face (8), such that a cavity (10) is formed between the two lateral walls (5, 6), the rear face (7), the front face (4), the lower face (2) and the upper face (8), wherein the lower face (2) has, in the region of the front face (4), a lower opening for providing access and the upper face (8) has, in the region of the rear face (7), an upper opening for providing access into the cavity (10) from the surroundings (U). The invention furthermore relates to a solar energy system and a method for obtaining energy from solar radiation and simultaneous use of the waste heat.
H02S 40/44 - Means to utilise heat energy, e.g. hybrid systems producing warm water and electricity at the same time
F24S 10/50 - Solar heat collectors using working fluids the working fluids being conveyed between plates
F24S 25/40 - Arrangement of stationary mountings or supports for solar heat collector modules using plate-like mounting elements, e.g. profiled or corrugated platesPlate-like module frames
F24S 25/67 - Fixation means, e.g. fasteners, specially adapted for supporting solar heat collector modules for coupling adjacent modules or their peripheral frames
F24S 80/30 - Arrangements for connecting the fluid circuits of solar heat collectors with each other or with other components, e.g. pipe connectionsFluid distributing means, e.g. headers
E04D 13/18 - Roof covering aspects of energy collecting devices, e.g. including solar panels
The present invention relates to a method for producing solar wafers textured at least on one side, wherein in a first method step, sawn solar wafers with sawing damage are provided, and at the end of the last method step textured solar wafers with different size types of large and small pyramids are provided, and wherein the textured solar wafers can then be further processed to produce solar cells. The problem addressed by the present invention is that of providing an improved texturing method within the framework of the technology for the production of solar cells. This problem is solved by a method for producing textured solar wafers wherein in the first texture etching step the large pyramids are created in a low surface area density such that at the end of the method less than 30 % of the textured surface of the solar wafer is occupied by the large pyramids; and in the second texture etching step the small pyramids are produced with a large surface area density.
The present invention relates to a method of production of silicon heterojunction solar cells having at least one stabilization step, wherein the stabilization step is performed after amorphous silicon layers, and preferably also transparent layers or even metallic contact materials, have already been applied beforehand to crystalline silicon solar wafers. The problem addressed by the invention consists in finding an efficient stabilization step which permits high solar cell efficiencies. The problem is solved by a method of production of silicon heterojunction solar cells in which the stabilization step comprises heating the solar cell to temperatures above 200°C and exposing same to a light source, wherein the light source emits light in a wavelength range < 2500 nm and wherein a light dose output by the light source is in excess of 8000 Ws/m2.
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
H01L 31/18 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
H01L 31/20 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor material
The invention relates to a solar-cell coating system for producing thin layers on a first solar cell side and/or a second solar cell side of crystalline silicon solar wafers at a throughput of at least 2000 solar wafers per hour (2000 W/h), to a solar-cell manufacturing line, and to a method for producing solar cells having a solar-cell coating system of this type. The problem addressed by the invention is that of providing options for economically manufacturing solar cells having at least one passivated contact. This problem is solved by means of a solar-cell coating system that is designed to produce at least one thin boundary layer of a dielectric material on a first solar cell side and/or a second solar cell side, the boundary layer being electrically conductive, in particular by means of tunnel currents, at least one doped or undoped silicon layer on the boundary layer, and at least one protective layer on the at least one silicon layer, it being possible to manufacture the boundary layer, the silicon layer and the protective layer within the solar-cell coating system without the silicon solar wafers leaving the solar-cell coating system in the meantime.
H01L 21/677 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for conveying, e.g. between different work stations
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
H01L 31/18 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
38.
PROCESS MODULE AND INSTALLATION COMPRISING AT LEAST ONE SUCH PROCESS MODULE
The invention relates to a process module, comprising a process chamber and a planar carrier device, which is horizontally movable in the process module, having a substrate receiving area for receiving substrates, and an outer edge area provided laterally on and/or around the substrate receiving area. The position of the carrier device and/or of a temperature-control plate provided underneath the carrier device can be changed in a closing direction transversely to the substrate transport direction in such a way that the carrier device and/or the temperature-control plate can form a bottom of the process chamber. The process module further comprises a transport system for transporting the carrier device to and away from the process chamber. The process chamber is a plasma chamber having a gas shower, which together with the support device forms a parallel plate arrangement. On at least one side wall of the process chamber, between the gas shower and the carrier device, at least one mask element is provided that projects into the process chamber interior and covers at least 50% of the surface of the outer edge area of the carrier device. The invention further relates to an installation having at least one such process module.
C23C 16/50 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
39.
Crystalline solar cell comprising a transparent, conductive layer between the front-side contacts and method for producing such a solar cell
A monofacial or bifacial crystalline solar cell, on the front face of which over the entire area a first surface passivation layer is arranged directly on the semiconductor interface and above this a first optically opaque, electrically conductive material is arranged in first lateral regions as a front face contact, and a first optically transparent, electrically conductive material is arranged exclusively in second lateral regions. The first optically transparent, electrically conductive material is electrically conductively connected to the front face contact and to a first region of the semiconductor material of the solar cell. The method provides for application of the first optically transparent, electrically conductive material only after the first optically opaque, electrically conductive material has been applied, in such a way that firing of the front face contact is avoided.
H01L 31/18 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
H01L 31/068 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
H01L 21/285 - Deposition of conductive or insulating materials for electrodes from a gas or vapour, e.g. condensation
40.
LINEAR MICROWAVE PLASMA SOURCE HAVING SEPARATED PLASMA CHAMBERS
The invention relates to a linear microwave plasma source. The plasma source contains: - a microwave antenna surrounded by a dielectric tube; - a wall having at least one opening; and - at least one gas inlet. The opening is arranged on the side of the plasma source facing a substrate surface to be treated by means of a plasma treatment. According to the invention, the plasma source has at least one dividing wall, which runs from opposite sides of the wall to the dielectric tube and thus divides the chamber within the plasma source into at least two sub-chambers.
C23C 16/511 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
H05H 1/46 - Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
41.
PLASMA TREATMENT DEVICE HAVING A LINEAR MICROWAVE PLASMA SOURCE AND HAVING A GAS-CONDUCTING DEVICE
The invention relates to a plasma treatment device for the plasma treatment of a substrate surface of a substrate, comprising a linear microwave plasma source. The plasma source contains: - a microwave antenna surrounded by a dielectric tube; - a wall having an opening; and - at least two gas inlets. The chamber of the plasma source is divided into a plasma generation region and a plasma treatment zone, the plasma generation region and the plasma treatment zone being connected to each other by a connection zone. The plasma source also has a gas-conducting device, which comprises two parts. The two parts of the gas-conducting device extend from opposite sides of the wall of the plasma source, with mirror symmetry in relation to a plane extending along the axis of the microwave antenna and perpendicularly to a plane of the opening, into the chamber of the plasma source and at least over a portion of the extent of the plasma source in the direction along the axis of the microwave antenna and reduce the width of the connection zone in said portion of the extent of the plasma source in comparison with a plasma source without a gas-conducting device.
C23C 16/511 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
C23C 16/455 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber
The present invention relates to a ventilation device having at least one feed line for a ventilation gas from a ventilation gas source into the ventilation device, and at least one valve, wherein the valve is able to be opened for ventilation purposes, in order to allow the ventilation gas to flow into a lock chamber of a vacuum plant in an inflow direction. The invention also relates to a vacuum production plant having high throughput requirements and at least one lock chamber. Therefore, it is an object of the present ivnention to create a simple ventilation device with which rapid and low-disruption ventilation of a lock chamber of a vacuum production plant is possible. The object is achieved by a ventilation device that is distinguished by the fact that the ventilation device has a compressed-gas store upstream of the valve in the inflow direction and a buffer container downstream of the valve.
C23C 14/56 - Apparatus specially adapted for continuous coatingArrangements for maintaining the vacuum, e.g. vacuum locks
C23C 16/54 - Apparatus specially adapted for continuous coating
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
The present invention relates to a substrate support for receiving at least one substrate and for processing substrates in a continuous system which processes a plurality of substrate supports passing through one after the other, more particularly a PECVD coating system for coating a plurality of solar wafers arranged on the substrate support in rows and columns, wherein the substrate support has a substantially two-dimensional grating, wherein between the profiles of the grating a partially open substrate nest for receiving a substrate is formed. The problem addressed by the present invention is therefore that of proposing a substrate support with good utilisation of the processing surface and also high processing quality. The problem is solved by a substrate support in which the grating has a front narrow edge profile and/or a narrow rear profile, seen in a pass-through direction of the substrate support in the continuous system, wherein the edge profiles of the two-dimensional grating extend in the pass-through direction in front of an outer front substrate edge and behind an outer rear substrate edge, and wherein the substrate support has at least one shielding element projecting from the two-dimensional grating into a third dimension and extending laterally along the front and/or rear edge profile.
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
H01L 21/673 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components using specially adapted carriers
The present invention relates to a continuous-flow vacuum system (1, 1', 1'') for the mass production of processed substrates, comprising at least one loading and/or unloading module, at least one processing module (2, 3) and a conveying device for conveying a substrate carrier (4) through the multiple modules of the continuous-flow vacuum system in a processing direction (5), wherein the substrate carrier receives at least one substrate for processing in the processing module (2, 3), wherein the continuous-flow vacuum system (1, 1', 1'') is equipped with devices for loading and unloading the substrate holding devices. The object of the invention is to provide a high-throughput continuous-flow vacuum system. This object is achieved by a continuous-flow vacuum system (1, 1', 1'') which has at least a first processing plane (6) and a second processing plane (7), wherein at a point along the processing direction at least one substrate in the first processing plane (6) can be arranged on a first tray plate (8) and at the same time at least one substrate in the second processing plane (7) can be arranged on a second tray plate (9), in order to process the substrates in the processing planes (6, 7) in one run through the continuous-flow vacuum system (1, 1', 1''), wherein the first tray plate (8) and the second tray plate (9) can be combined to form a dual-tray substrate carrier (10), wherein the first tray plate (8) and the second tray plate (9) are arranged parallel to one another in the dual-tray substrate carrier (10) and wherein at least both outer faces of the dual-tray substrate carrier (10) and the substrates held therein can be processed.
C23C 14/56 - Apparatus specially adapted for continuous coatingArrangements for maintaining the vacuum, e.g. vacuum locks
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
C23C 16/54 - Apparatus specially adapted for continuous coating
H01L 21/673 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components using specially adapted carriers
45.
Method for producing a solar cell, solar cell produced by this method and substrate carrier
A solar cell with a heterojunction is produced. A first amorphous nano- and/or microcrystalline semiconductor layer is formed on the front face of a crystalline semiconductor substrate to form front face emitter or a front face surface field layer. A second such layer is formed on the rear face of the substrate to form a rear face surface field layer or a rear face emitter. Electrically conductive, transparent front face and rear face electrode layers and a frontal metallic contact layer grid structure are formed. Surface selective frontal PECVD deposition forms an electrically non-conductive, transparent dielectric front face cover layer and with such a thickness to form a closed layer directly on deposition, without additional heat and/or chemical treatment, only on the areas surrounding the frontal contact layer grid structure but not on the frontal contact layer grid structure. Finally, a rear face metallization is formed.
H01L 31/18 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
H01L 31/0352 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
H01L 31/068 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
H01L 31/105 - Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier the potential barrier being of the PIN type
H01L 31/0376 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including amorphous semiconductors
H01L 31/20 - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor material
The invention relates to a vacuum chamber or part of a vacuum chamber comprising multiple components, in particular chamber walls and connection flanges, which form the vacuum chamber. The invention also relates to a method for producing the vacuum chamber and to methods for providing the vacuum chamber. The aim of the invention consists in disclosing a vacuum chamber which can be produced in an inexpensive manner and a method for producing the vacuum chamber. This is achieved by a vacuum chamber which has an adhesive connection that connects at least two components of the vacuum chamber.
SYSTEM FOR ELECTRICALLY DECOUPLED, HOMOGENEOUS TEMPERATURE CONTROL OF AN ELECTRODE BY MEANS OF HEAT CONDUCTION TUBES, AND PROCESSING FACILITY COMPRISING SUCH A SYSTEM
The invention relates to a system for controlling the temperature of an electrode. The system comprises at least one heat conduction tube, a coupling element, and a temperature control device. The heat conduction tube is suitable, at least in part, for arrangement with at least a first end in the electrode. The coupling element is suitable for heating or for cooling a second end of the heat conduction tube, whilst the temperature control device is suitable for heating or for cooling the coupling element. The electrode and the temperature control device are galvanically separated from one another. The invention also relates to a treatment facility comprising a treatment chamber and at least one electrode within the treatment chamber and at least one system of this kind for controlling the temperature of an electrode.
xyy deposited during applied substrate bias voltage by means of a PECVD process. The invention also relates to a substrate (1') wherein at least one layer system is mounted on the electrically conductive regions (3), the surface thereof having an adhesive and barrier layer (5) and a diffusion barrier layer (7, 7') and/or a hydrophobic covering layer (8, 8'). The method is particularly suitable in particular to protect electronic components supports, in particular conductor plates or flexible displays and OLEDs, from harmful environmental influences, for example aqueous liquids or air humidity. It is suitable for use on large area substrates with pronounced topology. The claimed substrate has a high electric strength even under the action of aqueous liquid or air humidity.
C23C 16/511 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
H01L 51/50 - Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes (OLED) or polymer light emitting devices (PLED)
49.
DEVICE FOR TRANSPORTING A SUBSTRATE, TREATMENT DEVICE WITH A RECEIVING PLATE ADAPTED TO A SUBSTRATE CARRIER OF A DEVICE OF THIS KIND, AND METHOD FOR PROCESSING A SUBSTRATE USING A DEVICE OF THIS KIND FOR THE TRANSPORT OF A SUBSTRATE, AND TREATMENT FACILITY
The invention relates to a device for transporting a substrate into or away from a treatment device, a treatment device, a method for processing a substrate and a treatment facility with a movement arrangement for moving a device of this kind for transporting a substrate. The device for transporting a substrate comprises a substrate carrier which contains a horizontally extending retaining surface and one or more grippers. The retaining surface is even and uniform on a first surface facing the substrate and the form thereof substantially corresponds to the form of the substrate. The surface thereof is substantially the same as the surface of the substrate, wherein the substrate is retained by its rear side on the retaining surface only by its weight. The treatment device has a receiving plate on which the substrate is retained during the treatment, wherein the receiving plate has a depression in a first surface which is suitable for accommodating a substrate carrier of this kind during treatment of the substrate.
H01L 21/673 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components using specially adapted carriers
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
C23C 16/509 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
The invention relates to a high-temperature CVD device which comprises a number of pairs consisting in each case of a gas distributor and a mounting plate. Here, the gas distributor and the mounting plate are arranged oppositely in each pair and delimit an associated process space. In each pair the gas distributor is suitable for introducing a gas into the process space, whereas the mounting plate is suitable for holding a substrate during the gas phase deposition. All pairs of the device are arranged one behind the other along a straight line so that the line in each pair corresponds to a connection line between the gas distributor and mounting plate. Here, the gas distributors and the mounting plates are arranged in alternation. The invention further relates to a method for operating a specific embodiment of such a device. Once multiple high-temperature CVD processes have been performed, a plasma-assisted cleaning process is performed with use of a fluorine-containing and/or chlorine-containing process gas, and then a conditioning process is performed.
C23C 16/44 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
C23C 16/509 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
The invention relates to a heatable wafer carrier for heating wafers in conjunction with a processing method for at least one wafer receivable on the wafer carrier with a heating plate provided opposite a rear side of the wafer. The problem addressed by the invention is that of proposing easily constructed heatable wafer carriers that enable wafer processing with good temperature homogeneity and that also can be formed as flat wafer carriers for more than one wafer. The problem addressed by the invention is solved by a heatable wafer carrier in which the heating plate has a large emissivity for thermal radiation and at least one heating element is arranged on the heating plate rear side, wherein the heating plate with the heating element forms an integral unit, and wherein the large emissivity is visible in particular at wavelength-dependent emission coefficients ε = ε(λ) ᡶ 0.7 in the wavelength range of λ = 0.8 to λ = 18 μm.
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
C23C 16/46 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
H01L 23/34 - Arrangements for cooling, heating, ventilating or temperature compensation
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
The invention relates to a substrate treatment system with at least one substrate carrier carrying at least one plate-like substrate and comprising at least one dielectric region, wherein a front side of the dielectric region is opposite to a back side of the substrate, and with an electrically conductive electrode provided on the back side of the substrate carrier or being formed by the substrate carrier. In order to improve the homogeneity of a plasma process for substrates provided at the same time on a substrate carrier, in the substrate treatment system a distance between the back side of the substrate and a back side of the dielectric region varies over the width of the dielectric region and/or varies from one of the dielectric regions to another of the dielectric regions, and/or the electrode comprises at least one additional dielectric region being allocated to the at least one dielectric region, and a distance between the back side of the substrate and a back side of the additional dielectric region varies over the width of the additional dielectric region and/or varies from one of the additional dielectric regions to another of the additional dielectric regions, and the substrate carrier is movable along a transport direction in order to transport the at least one substrate into or out off a PECVD system.
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Machines and machine components for treating metallic,
organic and mineral substrates in a vacuum, in particular
for manufacturing thin optical, transparent, solar
technology and wear-resistant coatings with chemical and
physical processes, and for ion and plasma treatment,
impregnation and heat treatment. Custom manufacture of optical, transparent, solar technology
and wear-resistant coatings on metallic, organic and mineral
substrates.
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Machines and machine components for treating metallic,
organic and mineral substrates in a vacuum, in particular
for manufacturing thin optical, transparent, solar
technology and wear-resistant coatings with chemical and
physical processes, and for ion and plasma treatment,
impregnation and heat treatment. Custom manufacture of optical, transparent, solar technology
and wear-resistant coatings on metallic, organic and mineral
substrates.
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Machines and machine components for treating metallic,
organic and mineral substrates in a vacuum, in particular
for manufacturing thin optical, transparent, solar
technology and wear-resistant coatings with chemical and
physical processes, and for ion and plasma treatment,
impregnation and heat treatment. Custom manufacture of optical, transparent, solar technology
and wear-resistant coatings on metallic, organic and mineral
substrates.
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Machines and machine components for treating metallic,
organic and mineral substrates in a vacuum, in particular
for manufacturing thin optical, transparent, solar
technology and wear-resistant coatings with chemical and
physical processes, and for ion and plasma treatment,
impregnation and heat treatment. Custom manufacture of optical, transparent, solar technology
and wear-resistant coatings on metallic, organic and mineral
substrates.
A substrate carrier includes a substrate carrier plate having a front-sided substrate carrier surface on which at least one substrate receiving area is provided for receiving a respective substrate. The substrate carrier is intended to enable a secure support of the substrate and a simple, damage-free removal of the substrate from the substrate carrier when operating in a fast manner, preferably without impairment of the characteristics of the substrate or the substrate processing. Therefore, the substrate receiving area has an interior area and an exterior area running around the interior area. The exterior area has spaced plateaus which are raised compared to a surface of the interior area for the support of edge areas of the substrates. Ventilation channels are provided between the plateaus.
H01L 21/673 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components using specially adapted carriers
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
09 - Scientific and electric apparatus and instruments
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Machines and machine components for treating metallic,
organic and mineral substrates in a vacuum, in particular
for manufacturing thin optical, transparent, solar
technology and wear-resistant coatings with chemical and
physical processes, and for ion and plasma treatment,
impregnation and heat treatment; coating sources for the
aforesaid machines, namely evaporators and plasma sources. Apparatus for testing optical, transparent, solar technology
and wear-resistant coatings on metallic, organic and mineral
substrates. Custom manufacture of optical, transparent, solar technology
and wear-resistant coatings on metallic, organic and mineral
substrates.
40 - Treatment of materials; recycling, air and water treatment,
07 - Machines and machine tools
Goods & Services
Custom manufacture of optical, transparent, solar technology and wear-resistant coatings on metallic, organic and mineral substrates Machines and machine components for treating metallic, organic and mineral substrates in a vacuum, in particular for manufacturing thin optical, transparent, solar technology and wear-resistant coatings with chemical and physical processes, and for ion and plasma treatment, impregnation and heat treatment
60.
PLASMA TREATMENT DEVICE HAVING A CONTACTLESS HF VOLTAGE SUPPLY TO A MOVABLE PLASMA ELECTRODE UNIT, AND METHOD FOR OPERATING SUCH A PLASMA TREATMENT DEVICE
The invention relates to a plasma treatment device in which a plasma electrode unit can be moved into and out of a process chamber and in which a high frequency power provided by a generator is transmitted to the plasma electrode unit by means of one or more electromagnetic fields and without an ohmic electrical contact. For this purpose, the plasma treatment device has a transmission device containing a primary coupling part, which is arranged inside the process chamber and can generate an electromagnetic field. The plasma electrode unit contains a secondary coupling part, which is firmly connected to the plasma electrode unit and is suitable to receive the electromagnetic field and to convert the electromagnetic field into electrical a.c. power. The invention further relates to a method for operating such a plasma treatment device.
The invention relates to a method for controlling a device for gripping or positioning at least one substrate on a substrate carrier. According to the invention, the substrate carrier consists of a material having at least one known expansion coefficient. In the method according to the invention, a first parameter set of the substrate carrier, consisting of length, width, and/or height of the substrate carrier and the relative position of a substrate reference point on the substrate carrier relative to a reference point of the substrate carrier is first determined at a known first temperature of the substrate carrier. A second parameter set consisting of length, width, and/or height of the substrate carrier at an unknown second temperature of the substrate carrier is then determined using at least two laser sensors, wherein two of the laser sensors are arranged on opposite sides of the substrate carrier and on a laser line. By means of the determined second parameter set and the at least one expansion coefficient, the exact position of the substrate reference point on the substrate carrier, positioned at a first position, can be determined at the unknown second temperature, and the device for gripping or positioning can be controlled accordingly. The system according to the invention for controlling a device for gripping or positioning comprises the means corresponding to the method steps.
H01L 21/68 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for positioning, orientation or alignment
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
62.
METHOD FOR PRODUCING A SOLAR CELL, SOLAR CELL PRODUCED BY THIS METHOD AND SUBSTRATE CARRIER
The invention relates to a method for producing a solar cell that has a heterojunction, comprising the following steps: forming a first amorphous, nano- and/or micro-crystalline semiconductor layer on the front face of a semiconductor substrate; forming an electrically conductive, transparent front electrode layer; forming a metallic front contact layer grid structure; and carrying out, on the front face, a PECVD deposition of a transparent dielectric front cover layer. According to the invention, a surface-selective PECVD deposition is used for the deposition of the front cover layer and the front cover layer is deposited with such a thickness that the front cover layer forms, directly after its deposition, a closed layer only in regions surrounding the front contact layer grid structure but not on the front contact layer grid structure without performing any additional heat and/or chemical treatment.
H01L 31/0747 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells
C23C 14/00 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
H01L 21/673 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components using specially adapted carriers
09 - Scientific and electric apparatus and instruments
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Machines and machine components for treating metallic, organic and mineral substrates in a vacuum, in particular for manufacturing thin optical, transparent, solar technology and wear-resistant coatings with chemical and physical processes, and for ion and plasma treatment, impregnation and heat treatment; Coating sources for the aforesaid machines, namely evaporators and plasma sources. Apparatus for testing optical, transparent, solar technology and wear-resistant coatings on metallic, organic and mineral substrates. Custom manufacture of optical, transparent, solar technology and wear-resistant coatings on metallic, organic and mineral substrates.
A bifacial photovoltaic module with at least one bifacial solar cell is provided. The at least one bifacial solar cell includes a substrate with a front-side and a rear-side. The front-side is the light incident side and the rear-side has rear-side contact structure. The rear-side contact structure includes a plurality of electrically conductive contact fingers, which have a first metal, a plurality of solder pads electrically connected to the contact fingers. The solder pads have a top. The solder pads have a second metal, which is different from the first metal. The rear-side contact structure further includes several cell connectors electrically connected to the solder pads. The top of the solder pads is free from the contact fingers in an area along one direction. The cell connectors are disposed planar on or above this area.
H01L 31/068 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
The present invention relates to a substrate support with a substrate support plate which has a front substrate support surface on which at least one substrate-receiving area is provided for receiving a respective substrate. The object of the present invention is to propose a substrate support which, as far as possible without impairing the properties of the substrate or the working of the substrate, ensures a secure application of the substrate and, while permitting rapid handling, allows the substrate to be easily removed from the substrate support without being destroyed. According to the invention, the object is achieved by the fact that the substrate-receiving area has an inner area and an outer area extending around the inner area, wherein the outer area has plateaus which are spaced apart from each other and elevated above a surface of the inner area and serve to carry edge areas of the substrate, wherein ventilation channels are provided between the plateaus.
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
The invention relates to a substrate treatment device for treating substrates, comprising a flat substrate support and at least one flat temperature-control device arranged parallel to the substrate support, wherein the substrate support has a substrate support front side for supporting at least one planar substrate and a substrate support back side facing the temperature-control device. Therefore, the problem addressed by the invention is proposing a substrate treatment device that enables the most uniform heat distribution possible in the substrate support. According to the invention, this problem is solved in that at least one spacing element is provided on the substrate support back side and/or on a surface of the temperature-control device facing the substrate support in order to form a distance between the substrate support and the temperature-control device.
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
C23C 16/46 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
67.
Frame profile moulding for solar cell laminate, framed solar module and fastening system for solar modules
b) of the laminate clamping section (2) right up to the portion and is connected to the frame profile (1) of an at least partially framed solar module (100).
09 - Scientific and electric apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Software. Software creation; Software development; Updating of computer software; Computer software technical support services; Design and development of software for control, regulation and monitoring of solar energy systems.
09 - Scientific and electric apparatus and instruments
11 - Environmental control apparatus
37 - Construction and mining; installation and repair services
Goods & Services
Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for domestic use; Solar batteries for industrial use; Solar cells; Electric cords; Solar energy collectors for electricity generation; Photovoltaics; Photovoltaic apparatus and installations for generating solar electricity; Optical reflectors; Mirrors [optics]. Reflectors for light deflection. Building and repair in relation to solar installations.
01 - Chemical and biological materials for industrial, scientific and agricultural use
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
Goods & Services
Silicones. Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for domestic use; Solar batteries for industrial use; Solar cells; Electric cords; Solar energy collectors for electricity generation; Photovoltaics; Photovoltaic apparatus and installations for generating solar electricity. Building and repair in relation to solar installations.
01 - Chemical and biological materials for industrial, scientific and agricultural use
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
Goods & Services
Silicones. Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for domestic use; Solar batteries for industrial use; Solar cells; Electric cords; Solar energy collectors for electricity generation; Photovoltaics; Photovoltaic apparatus and installations for generating solar electricity. Building and repair in relation to solar installations.
06 - Common metals and ores; objects made of metal
09 - Scientific and electric apparatus and instruments
20 - Furniture and decorative products
37 - Construction and mining; installation and repair services
Goods & Services
Metallic mountings; Retaining [fixing] devices of metal; Screws of metal; Metal hooks; Metal rails; Nuts of metal. Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for industrial use; Solar cells; Electric cords; Solar energy collectors for electricity generation; Electrical plugs; Plug-in connectors. Clip clamps, not of metal; Screws, not of metal; Nuts, not of metal; Cable fasteners, connectors and holders; Threaded fasteners made of plastic; Bundle clips of non-metallic materials; Fasteners. Installation of solar powered systems; Installation and maintenance of photovoltaic installations; Construction services.
09 - Scientific and electric apparatus and instruments
35 - Advertising and business services
37 - Construction and mining; installation and repair services
Goods & Services
Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for domestic use; Solar batteries for industrial use; Solar cells; Electric cords; Solar energy collectors for electricity generation; All being in connection with production in the field of photovoltaics and/or storage of solar energy. Advertising and marketing; All in connection with goods and/or services in the field of photovoltaics and/or the storing of solar energy; Business management; Office functions; Business administration. Building and repair in relation to solar installations.
09 - Scientific and electric apparatus and instruments
35 - Advertising and business services
37 - Construction and mining; installation and repair services
Goods & Services
Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for domestic use; Solar batteries for industrial use; Solar cells; Electric cords; Solar energy collectors for electricity generation; All being in connection with production in the field of photovoltaics and/or storage of solar energy. Advertising and marketing; All in connection with goods and/or services in the field of photovoltaics and/or the storing of solar energy; Business administration; Office functions; Business management. Building and repair in relation to solar installations.
06 - Common metals and ores; objects made of metal
09 - Scientific and electric apparatus and instruments
20 - Furniture and decorative products
Goods & Services
Metallic mountings; Retaining [fixing] devices of metal; Screws of metal; Metal hooks; Metal rails; Nuts of metal; all aforementioned goods used only in connection with photovoltaic solar systems and their individual parts, namely solar modules, solar cells, solar wafers, inventers, batteries, cables and plugs and not for use in connection with window covering and sun shading products. Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for industrial use; Solar cells; Electric cords; Solar energy collectors for electricity generation; Electrical plugs; Plug-in connectors. Clip clamps, not of metal; Screws, not of metal; Nuts, not of metal; Cable fasteners, connectors and holders; Threaded fasteners made of plastic; Bundle clips of non-metallic materials; Fasteners; all aforementioned goods used only in connection with photovoltaic solar systems and their individual parts, namely solar modules, solar cells, solar wafers, inventers, batteries, cables and plugs and not for use in connection with window covering and sun shading products.
09 - Scientific and electric apparatus and instruments
11 - Environmental control apparatus
37 - Construction and mining; installation and repair services
Goods & Services
Apparatus, instruments and cables for electricity; Photovoltaics; Photovoltaic inverters; Solar modules; Solar cells for electricity generation; Solar wafers. Solar powered ventilation apparatus; HVAC systems (heating, ventilation and air conditioning); Solar energy powered heating installations; Solar thermal collectors [heating]; Thermal storage instruments [solar energy] for heating; Solar furnaces; Solar lamps; Sunlight collecting apparatus for heating purposes. Construction services; Installation and maintenance of photovoltaic installations; Installation of solar powered systems.
06 - Common metals and ores; objects made of metal
09 - Scientific and electric apparatus and instruments
20 - Furniture and decorative products
Goods & Services
Metallic mountings; Retaining [fixing] devices of metal; Screws of metal; Metal hooks; Metal rails; Nuts of metal. Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for industrial use; Solar cells; Electric cords; Solar energy collectors for electricity generation; Electrical plugs; Plug-in connectors. Clip clamps, not of metal; Screws, not of metal; Nuts, not of metal; Cable fasteners, connectors and holders; Threaded fasteners made of plastic; Bundle clips of non-metallic materials; Fasteners.
01 - Chemical and biological materials for industrial, scientific and agricultural use
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
Goods & Services
Silicon. Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for domestic use; Solar batteries for industrial use; Solar cells; Electric cords; Solar energy collectors for electricity generation; Photovoltaic apparatus and installations for generating solar electricity. Installation of solar powered systems.
01 - Chemical and biological materials for industrial, scientific and agricultural use
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
Goods & Services
Silicon. Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for industrial use; Solar cells; Electric cords; Solar energy collectors for electricity generation; Electronic docking stations; Electrical plugs; Plug-in connectors. Installation and maintenance of photovoltaic installations.
01 - Chemical and biological materials for industrial, scientific and agricultural use
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
Goods & Services
Silicon. Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for industrial use; Solar cells; Electric cords; Solar energy collectors for electricity generation; Electrical plugs; Electronic docking stations; Plug-in connectors. Installation and maintenance of photovoltaic installations.
09 - Scientific and electric apparatus and instruments
11 - Environmental control apparatus
37 - Construction and mining; installation and repair services
Goods & Services
Apparatus, instruments and cables for electricity; Photovoltaics; Photovoltaic inverters; Solar modules; Solar cells for electricity generation; Solar wafers. Solar powered ventilation apparatus; HVAC systems (heating, ventilation and air conditioning); Solar energy powered heating installations; Solar thermal collectors [heating]; Solar furnaces; Solar lamps; Sunlight collecting apparatus for heating purposes; Solar water heaters; Thermal storage instruments [solar energy] for heating. Construction; Installation and maintenance of photovoltaic installations; Installation of solar powered systems; Installation and maintenance of solar thermal installations.
01 - Chemical and biological materials for industrial, scientific and agricultural use
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
Goods & Services
Silicon. Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for domestic use; Solar batteries for industrial use; Solar cells; Cables, electric; Solar energy collectors for electricity generation. Installation and maintenance of photovoltaic installations.
06 - Common metals and ores; objects made of metal
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
Goods & Services
Metal building materials; Non-electric cables and wires of common metal; Pipes and tubes of metal; Structures and transportable buildings of metal; Metal framed buildings; Buildings being fixed structures of metal. Apparatus, instruments and cables for electricity; Photovoltaics; Photovoltaic inverters; Solar modules; Solar cells for electricity generation. Building construction; Installation and maintenance of photovoltaic installations; Installation of solar powered systems; Erection of pre-fabricated buildings.
84.
Process for manufacturing a solar cell and solar cell
A solar cell segment includes a substrate defining a rear side including a number of base doped regions and emitter doped regions. A dielectric layer and at least one metallizing layer are disposed on the rear side of the substrate. The at least one metallizing layer is structured in an interdigital comb-shaped contact deck arrangement and defines base contact decks for a number of base doped regions and emitter contact decks for a number of base doped regions. The at least one metallization layer is disposed between the rear side of the substrate and the dielectric layer. At least one first row of first contact openings is formed in the dielectric layer lying in a region of the base contact decks and at least one second row of second contact openings is formed in the dielectric layer lying in a region of the emitter contact decks.
H01L 31/02 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof - Details
H01L 31/056 - Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means the light-reflecting means being of the back surface reflector [BSR] type
H01L 31/042 - PV modules or arrays of single PV cells
A substrate processing device contains a substrate loading/unloading area for loading/unloading of substrates. The substrate processing device further has a process chamber, a carrier device with which the substrates are transported by a carrier transport device to the process chamber, and a gas-tight closing device between the process chamber and the carrier transport area as well as a gas-tight closing device between the substrate loading/unloading area and the carrier transport area. The substrate processing device allows substrate processing at a high quality with high process purity, thereby being suitable for mass production. The object is achieved by the substrate loading/unloading area being coupled with the carrier transport area by a substrate transfer area with a substrate transfer device for transferring the substrates from a substrate cassette provided in the substrate loading/unloading area and in which substrates can be arranged in different horizontal cassette levels of the substrate cassette.
H01L 21/677 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for conveying, e.g. between different work stations
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
01 - Chemical and biological materials for industrial, scientific and agricultural use
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
Goods & Services
Silicones. Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for domestic use; Solar batteries for industrial use; Solar cells; Electrical cables; Solar energy collectors for electricity generation. Building and repair in relation to solar installations.
01 - Chemical and biological materials for industrial, scientific and agricultural use
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
Goods & Services
Silicones. Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for domestic use; Solar batteries for industrial use; Solar cells; Electrical cables; Solar energy collectors for electricity generation. Building and repair in relation to solar installations.
01 - Chemical and biological materials for industrial, scientific and agricultural use
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
Goods & Services
Silicones. Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for domestic use; Solar batteries for industrial use; Solar cells; Electrical cables; Solar energy collectors for electricity generation. Building and repair in relation to solar installations.
09 - Scientific and electric apparatus and instruments
35 - Advertising and business services
37 - Construction and mining; installation and repair services
Goods & Services
Solar modules; Solar wafers; Photovoltaic inverters; Batteries; Silicon wafers; Solar batteries for domestic use; Solar batteries for industrial use; Solar cells; Electrical cables; Solar energy collectors for electricity generation. Advertising and marketing; All in connection with goods and/or services in the field of photovoltaics and/or the storing of solar energy. Building and repair in relation to solar installations; All in connection with goods and/or services in the field of photovoltaics and/or the storing of solar energy.
A frame for a solar module that includes at least one solar cell. The solar-module frame has a frame corner having a corner connector made of a first material, in particular made of aluminum, and having a corner element made of a second material, which is different from the first material, in particular made of plastics material.
E04D 13/18 - Roof covering aspects of energy collecting devices, e.g. including solar panels
E04H 14/00 - Buildings for combinations of different purposes not covered by any single one of main groups of this subclass, e.g. for double purposeBuildings of the drive-in type
F24J 2/46 - Component parts, details or accessories of solar heat collectors
01 - Chemical and biological materials for industrial, scientific and agricultural use
09 - Scientific and electric apparatus and instruments
19 - Non-metallic building materials
Goods & Services
Silicones. Solar modules; Photovoltaic inverters; Silicon wafers; Electrical cables; Solar wafers; Solar panels; Solar cells for electricity generation; Batteries; Solar panel arrays; Solar batteries for domestic use; Solar batteries for industrial use; Software; Bypass diodes; Diodes. Roofing, not of metal, incorporating solar cells.
01 - Chemical and biological materials for industrial, scientific and agricultural use
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
Goods & Services
Silicones. Solar modules; Solar wafers; Solar collectors; Solar cells; Solar cells for electricity generation; Photovoltaic inverters; Solar panel arrays; Solar batteries for industrial use; Silicon wafers; Electrical cables. Building and repair in relation to solar installations.
93.
Single-pole switching unit for limiting the energy flow in a series circuit comprising photovoltaic modules, photovoltaic module arrangement and photovoltaic module
In various embodiments, a single-pole switching unit for limiting the energy flow in a series circuit having photovoltaic modules by a pulsating control signal present on at least one DC line is provided. The switching unit may include: a switching element, which is designed to reduce the current flow in the at least one DC line of the photovoltaic modules; a transmission element, which is designed to couple out an electrical control signal present on the DC line and to control the switching element merely with the energy of the coupled-out control signal; and a coupling element, which is arranged in parallel with the switching element and which conducts the control signal through the switching unit when the switching element is nonconducting.
The present invention relates to a microwave plasma generating device with a plasma chamber. At least one microwave generating device is provided outside of the plasma chamber, and the microwaves of said microwave generating device are coupled into the plasma chamber via at least one microwave incoupling device. The microwave incoupling device has an inner conductor which leads into the plasma chamber through at least one chamber wall of the plasma chamber, an insulating tube which encloses the inner conductor and separates the inner conductor from an interior of the plasma chamber, and at least one outer conductor which leads into the plasma chamber through the at least one chamber wall and which is coaxial to the inner conductor but is not provided over the entire circumference of the inner conductor. The outer conductor has at least one outer conductor end in the plasma chamber. The inner conductor and the outer conductor form a microwave line, an outlet of microwaves out of the microwave line being provided in the plasma chamber in order to generate a microwave plasma in the interior .of the plasma chamber. According to the invention, at least one plasma electrode which is electrically insulated from the chamber wall and to which a DC, NF, or HF voltage can be applied is provided in the interior of the plasma chamber coaxially to the inner conductor. The microwave plasma can be brought into electric contact with the plasma electrode such that the function of the outer conductor can be transferred at least partly to the microwave plasma. The invention further relates to a method for operating such a microwave plasma generating device.
In a method for manufacturing a foil-like electrical connector for connecting solar cells to form modules, an insulating carrier film sheet is initially provided in a width which essentially corresponds to the width of the solar cells to be connected. Furthermore, a conductive foil sheet having a width that is matched to the carrier film is provided. In addition, comb structures as subsequent electrical connection fingers are formed. The conductive foil sheet is positioned on the carrier film with the aid of pin-shaped extensions of a transport belt or a transport roller. The carrier film is subsequently joined to the conductive foil sheet, preferably via an adhesive bond. In the next step, an insulating cover film is applied, in particular laminated.
H05K 3/36 - Assembling printed circuits with other printed circuits
H05K 3/04 - Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching
B32B 37/02 - Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
H01L 31/05 - Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
H05K 3/20 - Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
H05K 3/34 - Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
97.
Adapter box for protection of the electrical connection of a photovoltaic module
An adapter box for the protection of the electrical connection of a photovoltaic module is attachable by form-fit to an electrical junction box of the photovoltaic module. At least one side of the adapter box comprises openings for inserting protective conduits in which cables run through for being connected to electrical connectors of the junction box, the adapter box further comprising at least one opening for said connectors.
H02G 3/08 - Distribution boxesConnection or junction boxes
98.
Photovoltaic module, method for electrically connecting a plurality of photovoltaic cells, and device for electrically connecting a plurality of photovoltaic cells
In various embodiments, a photovoltaic module may include: a plurality of photovoltaic cells, at least one photovoltaic cell of the number of photovoltaic cells comprising: a first plurality of contact wires on a front of the photovoltaic cell; and a second plurality of contact wires on a rear of the photovoltaic cell. The first plurality of contact wires and the second plurality of contact wires may be arranged offset with respect to one another.
H01L 31/044 - PV modules or arrays of single PV cells including bypass diodes
H01L 31/05 - Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
H02S 10/10 - PV power plantsCombinations of PV energy systems with other systems for the generation of electric power including a supplementary source of electric power, e.g. hybrid diesel-PV energy systems
99.
Method for fitting contact wires to a surface of a photovoltaic cell, photovoltaic cell, photovoltaic module, arrangement for fitting contact wires to a surface of a photovoltaic cell
In various embodiments, a method for fitting contact wires to a surface of a photovoltaic cell is provided. The method may include: feeding the contact wires to a contact wire positioning and placement device, wherein the contact wire positioning and placement device comprises a plurality of nozzles or eyes, wherein at least one contact wire is in each case passed through a respective nozzle or eye, for positioning and placement thereof onto the surface of the photovoltaic cell; positioning and placing the contact wires on the surface of the photovoltaic cell by means of the contact wire positioning and placement device; and attaching the contact wires to the surface of the photovoltaic cell.
A stackable flat-roof/ground framework (1) for solar panels, comprising a sloping desk-like supporting region (2, 5, 6) for the solar panel, at least said supporting region (2, 5, 6) being implemented as a wire grate, wherein the supporting region of the flat-roof/ground framework has downwardly angled elements on two opposite edges, one element, used as rear wall (3), being designed to be longer and one element, used a front wall (4), being designed to be shorter, and having weightable panel-like base regions (2, 5, 6), said base regions (2, 5, 6) being angled from the rear wall (3) and/or the front wall (4).
E04D 13/18 - Roof covering aspects of energy collecting devices, e.g. including solar panels
E04H 14/00 - Buildings for combinations of different purposes not covered by any single one of main groups of this subclass, e.g. for double purposeBuildings of the drive-in type
