The invention relates to a sputtering target, a coating system, and a coating method for same. The sputtering target comprises a base plate with a target plate which is secured thereon and which is made of a first sputtering material with a surface and a plurality of recesses formed therein. A plurality of inserts are arranged in the recesses. At least some of the inserts are made of a second sputtering material, wherein the second sputtering material has a higher sputter yield than the first sputtering material. The aim of the invention is to achieve especially uniform coatings. This is achieved in that the inserts made of the second sputtering material are shaped such that the extent D1, D2 of the inserts, measured in a measuring direction parallel to the surface, increases from the surface to the base plate in a depth direction T.
The invention relates to a coating method and to a coating device for coating a body. A magnetron cathode having a target is arranged in the vacuum chamber. Electrical power is supplied to the magnetron cathode such that a plasma is generated and the target is sputtered in order to deposit a coating on the body. The electrical power is periodically supplied within a period duration T according to the HIPIMS method as cathode pulses, wherein each cathode pulse comprises at least two cathode sub-pulses and an intervening cathode sub-pulse break. In order to be able to deposit coatings having favorable properties in a particularly favorable manner by using the chopped HIPIMS method, a bias voltage is applied to the substrate to be coated with bias voltage pulses, wherein each bias voltage pulse comprises at least two bias sub-pulses and an intervening bias sub-pulse break.
The invention relates to a method and a device to for applying a layer 64 to a body 60, 62, and to a coated body 60. The body 60, 62 is disposed in a vacuum chamber 12 and process gas is supplied. A plasma is generated in the vacuum chamber 12 by operating a cathode 30 by applying a cathode voltage VP with cathode pulses and by sputtering a target 32. A bias voltage VB is applied to the body 60, 62 so that charge carriers of the plasma are accelerated into the direction of the body 60, 62 and attached to its surface. In order to achieve favorable properties of the coating 64 in a controlled way, the time course of the bias voltage VB is varied during the coating duration D. In the coating 64 of the body 60, 62, the material of the layer 64 comprises proportions of a noble gas, the concentration of which in the layer 64 varies over the layer thickness.
The invention relates to a device 10 for holding workpieces 30 in a process chamber. The invention additionally relates to a coating system 20 and to a method for coating a workpiece 30. In order to allow for precise adjustment of the height of the position of workpieces 30 while supporting same in a secure and stable manner, the holding device 10 comprises a tray 72 for the workpieces 30, a height-adjustable first support element 22 and a height-adjustable second support element 48 for the tray 72, wherein each of the support elements 22, 48 comprises at least one first and one second limb element 26, 56, wherein the respective first and the respective second limb element 26, 56 are coupled so as to be pivotable relative to one another about a pivot axis X, Y, and wherein the pivot axis X of the first support element 22 is arranged at an angle to the pivot axis Y of the second support element 48.
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
C23C 16/513 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
The invention relates to a method for coating a substrate 40, a coating system for carrying out the method, and a coated body. In a first method step 62, the substrate 40 is to pretreated in a ion etching process. In a second method step 64, a first coating layer 56a with a thickness of 0.1 μm to 6 μm is deposited on the substrate 40 by means of a PVD process. In order to achieve a particularly high-quality and durable coating 50, the surface of the first coating layer 56a is treated by means of an ion etching process in a third method step 66, and an additional coating layer 56b with a thickness of 0.1 μm to 6 μm is deposited on the first coating layer 56a by means of a PVD process in a fourth method step 68. The coated body comprises at least two coating layers 56a, 56b, 56c, 56d with a thickness of 0.1 μm to 6 μm on a substrate 40, wherein an interface region formed by ion etching is arranged between the coating layers 56a, 56b, 56c, 56d.
The invention relates to an atomization target (10), a coating system (30), and a coating method for same. The atomization target (10) comprises a base (12) with a target plate (14) which is secured thereon and which is made of a first atomization material with a surface (16) and a plurality of recesses (18) formed therein. A plurality of inserts (20) are arranged in the recesses (18). At least some of the inserts (20) are made of a second atomization material, wherein the second atomization material has a higher sputter yield than the first atomization material. The aim of the invention is to achieve especially uniform coatings. This is achieved in that the inserts (20) made of the second atomization material are molded such that the extension (D1, D2) of the inserts, measured in a measuring direction parallel to the surface (14), increases from the surface (14) to the base (12) over the depth direction (T).
The invention relates to a coating method and to a coating apparatus for coating a body (40). A magnetron-cathode (22a, 22b, 22c, 22d) having a target (24a, 24b, 24c, 24h) is arranged in the vacuum chamber (12). Electrical power is supplied to the magnetron-cathode (22a, 22b, 22c, 22d) such that a plasma is generated and the target (24a, 24b, 24c, 24h) is atomized in order to deposit a coating (44) on the body (40). The electrical power is periodically supplied within a period duration T according to the HIPIMS method as a cathode pulse (60), wherein each cathode pulse (60) comprises at least two cathode sub-pulses (62) and an intermediate cathode sub-pulse break (64). In order to be able to deposit coatings (44) having favorable properties, using the chopped HIP IMS method in a particularly favorable manner, a bias voltage is applied to the substrate (40) to be coated with bias voltage pulses (66), wherein each bias voltage pulse (66) comprises at least two bias sub-pulses (68) and an intermediate bias sub-pulse break (70).
The invention relates to a method and a device (10) for applying a layer (64) to an item (60), (62). The invention also relates to a coated item (60). The item (60), (62) is disposed in a vacuum chamber (12) and process gas is supplied. A plasma is generated in the vacuum chamber (12), by the powering of a cathode (30) by the application of a cathode voltage VP with cathode pulses, and by the atomization of a target (32). A bias voltage VB is applied to the item (60), (62) so that charge carriers of the plasma are accelerated toward the item (60), (62) and attached to the surface of the item. In order to achieve favorable properties of the coating (64) in a controlled way, the time curve of the bias voltage VB is varied during the coating duration D. In the coating (64) of the item (60), (62), the material of the layer (64) contains a noble gas, the concentration of which in the layer (64) varies over the layer thickness.
The invention relates to a device (10) for holding workpieces (30) in a process chamber. The invention additionally relates to a coating system (20) and to a method for coating a workpiece (30). The aim of the invention is to allow a precise adjustment of the height of the position of workpieces (30) while supporting same in a secure and stable manner. This is achieved in that the holding device (10) comprises a tray (72) for the workpieces (30) and a first support element (22) with an adjustable height and a second support element (48) with an adjustable height for the tray (72), wherein each of the support elements (22, 48) comprises at least one first and second limb element (26, 56), and in each case the first and second limb elements (26, 56) are coupled pivotally relative to each other about a pivot axis X, Y, the pivot axis X of the first support element (22) being arranged at an angle to the pivot axis Y of the second support element (48).
H01L 21/677 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for conveying, e.g. between different work stations
F16M 11/24 - Undercarriages with or without wheels changeable in height or length of legs, also for transport only
F16M 11/04 - Means for attachment of apparatusMeans allowing adjustment of the apparatus relatively to the stand
F16M 11/38 - Undercarriages with or without wheels changeable in height or length of legs, also for transport only by folding
F16M 11/42 - Stands or trestles as supports for apparatus or articles placed thereon with arrangement for propelling the support
F16M 11/18 - Heads with mechanism for moving the apparatus relatively to the stand
B66F 3/12 - Devices, e.g. jacks, adapted for uninterrupted lifting of loads screw-operated comprising toggle levers
B66F 7/06 - Lifting frames, e.g. for lifting vehiclesPlatform lifts with platforms supported by levers for vertical movement
C23C 30/00 - Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
The invention relates to a method for coating a substrate (40), a coating system for carrying out the method and a coated body. In a first method step (62), the substrate (40) is pretreated in an ion etching process. In a second method step (64), a first coating layer (56a) with a thickness of 0.1µm to 6µm is deposited on the substrate (40) by means of a PVD process. In order to achieve a particularly high-quality and durable coating (50), the surface of the first coating layer (56a) is treated by means of an ion etching process in a third method step (66), and an additional coating layer (56b) with a thickness of 0.1µm to 6µm is deposited on the first coating layer (56a) by means of a PVD process in a fourth method step (68). The coated body comprises at least two coating layers (56a, 56b, 56c, 56d) with a thickness of 0.1µm to 6µm on a substrate (40), wherein an interface region formed by ion etching is arranged between the coating layers (56a, 56b, 56c, 56d).
C23C 28/04 - Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups , or by combinations of methods provided for in subclasses and only coatings of inorganic non-metallic material
H01J 37/34 - Gas-filled discharge tubes operating with cathodic sputtering
01 - Chemical and biological materials for industrial, scientific and agricultural use
07 - Machines and machine tools
08 - Hand tools and implements
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Hard material chemical coatings made of diamonds, nitrides,
carbides or oxides as functional coating for manually
operated and machine tools, in particular for machining
tools, separating tools and forming tools. Machine tools, in particular cutting tools, separating tools
and forming tools, in particular coated tools. Manually operated tools, in particular cutting tools,
separating tools and forming tools, in particular coated
tools. Material treatment, namely coating of tools and work pieces
with functional layers, in particular using PVD/CVD-coating
machines.
01 - Chemical and biological materials for industrial, scientific and agricultural use
07 - Machines and machine tools
08 - Hand tools and implements
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Hard material chemical coatings made of diamonds, nitrides, carbides or oxides applied by chemical vapor deposition (CVD) and by physical vapor deposition (PVD) for the manufacturing of cutting surfaces on machining tools, separating tools and forming Coated machine tools for cutting and forming of materials Coated manually operated tools for cutting and forming of materials Material treatment, namely, coating of tools and work pieces with functional layers, in particular using PVD/CVD-coating machines
26.
Coating a body with a diamond layer and a hard material layer
The invention relates to a coated body and to a method for coating a body. The coated body comprises at least a substrate (22), a diamond layer (24) having a thickness of 1-40 μm, and a hard material layer (26), which is arranged farther outside on the body (10) than the diamond layer (24). The hard material layer (26) comprises at least one metal element and at least one non-metal element. An adhesive layer (32) having a thickness of 2-80 nm is provided between the diamond layer (24) and the hard material layer (26). The adhesive layer (32) contains carbon and at least one metal element. The diamond layer (24) can be applied by means of a CVD method. The hard material layer can be applied by means of a PVD method. The adhesive layer (32) between the diamond layer (24) and the hard material layer (26) can be produced in that, before the hard material layer (26) is applied, the surface of the diamond layer (24) is pretreated by means of HIPIMS metal ion etching, wherein ions are implanted into or diffuse into the surface of the diamond layer (24) by means of metal ion etching.
C23C 14/02 - Pretreatment of the material to be coated
C23C 16/02 - Pretreatment of the material to be coated
C23C 28/00 - Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups , or by combinations of methods provided for in subclasses and
01 - Chemical and biological materials for industrial, scientific and agricultural use
07 - Machines and machine tools
08 - Hand tools and implements
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Hard material coatings of diamonds, nitrides, carbides or
oxides as functional coating for manually operated and
machine tools, in particular for machining tools, separating
tools and forming tools. Machine tools, in particular cutting tools, separating tools
and forming tools, in particular coated tools. Manually operated tools, in particular cutting tools,
separating tools and forming tools, in particular coated
tools. Material treatment, namely coating of tools and work pieces
with functional layers, in particular using PVD/CVD-coating
machines.
40 - Treatment of materials; recycling, air and water treatment,
01 - Chemical and biological materials for industrial, scientific and agricultural use
07 - Machines and machine tools
08 - Hand tools and implements
Goods & Services
Material treatment, namely, coating of tools and work pieces with functional layers, in particular using PVD/CVD-coating machines Hard material coatings of diamonds, nitrides, carbides or oxides applied by chemical vapor deposition (CVD) and by physical vapor deposition (PVD) for the manufacturing of cutting surfaces on machining tools, separating tools and forming tools Coated machine tools for cutting and forming of materials Coated manually operated tools for cutting and forming of materials
29.
COATING A BODY WITH A LAYER OF DIAMOND AND A LAYER OF HARD MATERIAL
The invention relates to a coated body and to a method for coating a body. The coated body comprises at least a substrate (22), a layer of diamond (24) having a thickness of 1-40 µm, and a layer of hard material (26), which is arranged further outside on the body (10) than the layer of diamond (24). The layer of hard material (26) comprises at least one metal element and at least one non-metal element. An adhesive layer (32) having a thickness of 2-80 nm is provided between the layer of diamond (24) and the layer of hard material (26). The adhesive layer (32) contains carbon and at least one metal element. The layer of diamond (24) can be applied by mans of a CVD method. The layer of hard material can be applied by means of a PVD method. The adhesive layer (32) between the layer of diamond (24) and the layer of hard material (26) can be produced in that, before the layer of hard material (26) is applied, the surface of the layer of diamond (24) is pretreated by means of HIPIMS metal ion etching, wherein ions are implanted into or diffuse into the surface of the layer of diamond (24) by means of metal ion etching.
C23C 28/04 - Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups , or by combinations of methods provided for in subclasses and only coatings of inorganic non-metallic material
C23C 14/02 - Pretreatment of the material to be coated
C23C 16/02 - Pretreatment of the material to be coated
C23C 28/00 - Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups , or by combinations of methods provided for in subclasses and
01 - Chemical and biological materials for industrial, scientific and agricultural use
07 - Machines and machine tools
08 - Hand tools and implements
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Hard material coatings of diamonds, nitrides, carbides or
oxides as functional coating for manually operated and
machine tools, in particular for machining tools, separating
tools and forming tools. Machine tools, in particular cutting tools, separating tools
and forming tools, in particular coated tools; coating
systems, namely machines and machine devices for coating of
substrates with thin functional layers, in particular with
separation from a vapour or gaseous phase; parts of such
coating systems, included in this class. Manually operated tools, in particular cutting tools,
separating tools and forming tools, in particular coated
tools. Material treatment, namely coating of tools and work pieces
with functional layers, in particular using PVD/CVD-coating
machines.
01 - Chemical and biological materials for industrial, scientific and agricultural use
07 - Machines and machine tools
08 - Hand tools and implements
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Hard material coatings of diamonds, nitrides, carbides or
oxides as functional coating for manually operated and
machine tools, in particular for machining tools, separating
tools and forming tools. Machine tools, in particular cutting tools, separating tools
and forming tools, in particular coated tools; coating
systems, namely machines and machine devices for coating of
substrates with thin functional layers, in particular with
separation from a vapour or gaseous phase; parts of such
coating systems, included in this class. Manually operated tools, in particular cutting tools,
separating tools and forming tools, in particular coated
tools. Material treatment, namely coating of tools and work pieces
with functional layers, in particular using PVD/CVD-coating
machines.
40 - Treatment of materials; recycling, air and water treatment,
01 - Chemical and biological materials for industrial, scientific and agricultural use
07 - Machines and machine tools
Goods & Services
Material treatment, namely, coating of tools and work pieces with functional layers by using PVD/CVD-coating machines [ Hard material coatings of diamonds, nitrides, carbides or oxides applied by chemical vapor deposition (CVD) and by physical vapor deposition (PVD) for the manufacture of cutting surfaces on machining tools, separating tools and forming tools ] [ Coating systems, namely, machines and machine devices for coating of substrates with thin functional layers, in particular with separation from a vapour or gaseous phase; structural parts of such coating systems, included in this class ]
40 - Treatment of materials; recycling, air and water treatment,
01 - Chemical and biological materials for industrial, scientific and agricultural use
07 - Machines and machine tools
08 - Hand tools and implements
Goods & Services
Material treatment, namely, coating of tools and work pieces with functional layers, in particular using PVD/CVD-coating machines [ Hard material coatings of diamonds, nitrides, carbides or oxides applied by chemical vapor deposition (CVD) and by physical vapor deposition (PVD) for the manufacture of cutting surfaces on machining tools, separating tools and forming tools ] [ Coated machine tools for cutting and forming of materials; coating systems, namely, machines and machine devices for coating of substrates with thin functional layers produced from the separation of vapours or gases; and structural parts of such coating machines ] [ Coated manually operated tools for cutting and forming of materials ]
The invention relates to a charging device for workpieces (16) in a coating system (10) and a method for charging the workpieces (16). An upright support (22) has a number of openings (24) arranged above one another in a surface (44) pointing outward. A number of insertion sleeves (30) is provided for accommodation in the openings (24), wherein the insertion sleeves (30) each have a shaft (32) and a retaining structure (24), as well as a borehole (26) for accommodating a workpiece (16). The openings (24) and the shafts (32) of the insertion sleeves (30) are designed such that the insertion sleeves (30) are insertable through the openings (24). The openings (24) and the retaining structures (34) are designed such that a retaining engagement occurs between the insertion sleeves (30) and the openings (24).
C23C 16/458 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
B05B 13/02 - Means for supporting workArrangement or mounting of spray headsAdaptation or arrangement of means for feeding work
35.
Tool and method for machining fiber-reinforced materials
A tool for machining fiber-reinforced materials, said tool having a tool body having a particular cutting edge that has at least a main function surface and has a diamond coating applied at least to said main function surface. In order to provide a tool and a method which are especially suitable for machining fiber-reinforced materials, the surface of the diamond coating has a reduced peak height Spk of less than 0.25 μm.
B23C 5/16 - Milling-cutters characterised by physical features other than shape
C23C 30/00 - Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
C23C 28/04 - Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups , or by combinations of methods provided for in subclasses and only coatings of inorganic non-metallic material
36.
Method and device for generating an electrical discharge
A device and method for generating an electrical discharge are described. A first electrode (30) is operated to be a cathode relative to a second electrode (16). A gas is introduced into the chamber (14) by the first electrode (30). The first electrode (30) has a closed antechamber (32) with a metal wall (34). A tube (36) consisting of a different material than the wall (34) is provided through which the gas from the antechamber (32) is conducted into the chamber (14). A front portion of the tube (36) is embedded in the wall (34) of the antechamber (32). In its rear portion, the tube (36) has a free end projecting into the antechamber (32). A stable electrical discharge can be generated thereby in a particularly easy manner.
A tool for machining fiber-reinforced materials, said tool having a tool body (10) having a particular cutting edge (20) that has at least a main function surface (6) and has a diamond coating (16) applied at least to said main function surface (6). In order to provide a tool and a method which are especially suitable for machining fiber-reinforced materials, the surface (26) of the diamond coating (16) has a reduced peak height Spk of less than 0.25 μm.
B23C 5/16 - Milling-cutters characterised by physical features other than shape
B23P 15/28 - Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools
C23C 30/00 - Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
A process and a device for coating a substrate (22) are described. In a vacuum chamber (10), a first magnetron cathode (24) is provided with a sputtering target (28) of a first material composition as predominant metal element a processing metal element chosen from Hf, Ta, Zr, W, Nb, Mo. A second magnetron cathode (26) is provided with a sputtering target (30) of a second material composition comprising predominantly carbon or one or more metals with a lower atomic mass than the processing metal element. In order to obtain coatings with improved properties, electrical power is supplied to the cathodes (24, 26) such that the targets (28, 30) are sputtered, where electrical power is supplied to the first cathode (24) as pulsed electrical power according to high power impulse magnetron sputtering with a first peak current density, and to the second cathode (26) as DC electrical power with a constant second current density or as time-variable electrical power with a second peak current density lower than the first peak current density. The substrate (22) is arranged within the vacuum chamber such that particles from the plasma deposit onto the substrate forming a coating. During the deposition process, a bias voltage VB is applied to the substrate comprising bias pulses which are synchronized with pulses applied to the first cathode, and are applied for a shorter duration TB than the pulses at the first cathode. Thus, a coated body may be formed with a substrate (22) and a coating layer (52) which comprises oxides, nitrides, or oxynitrides of carbon or metals selected from the groups 4-6 of the periodic table and at least one processing metal element selected out of Hf, Ta, W, Zr, Nb and Mo, present in an atomic concentration of 1 - 18 at.-%. The coating layer (52) comprises a process gas concentration of 0.3 at.-% or less.
A process and a device for coating a substrate (22) are described. In a vacuum chamber (10), a first magnetron cathode (24) is provided with a sputtering target (28) of a first metal composition comprising predominantly aluminium. A second magnetron cathode (26) is provided with a sputtering target (30) of a second metal composition comprising at least 50 at-% of a second metal selected from groups IVA-VIA of the periodic table. In order to obtain coatings with improved properties, electrical power is supplied to the cathodes (24, 26) such that the targets (28, 30) are sputtered, where electrical power is supplied to the first cathode (24) as pulsed electrical power according to high power impulse magnetron sputtering with a first peak current density, and to the second cathode (26) with a second peak current density lower than the first peak current density. The substrate (22) is arranged within the vacuum chamber such that particles from the plasma deposit onto the substrate forming a coating.
C23C 14/35 - Sputtering by application of a magnetic field, e.g. magnetron sputtering
C23C 30/00 - Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
01 - Chemical and biological materials for industrial, scientific and agricultural use
07 - Machines and machine tools
08 - Hand tools and implements
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Hard material coatings of diamond as functional coating for
manually operated and machine tools, in particular for
machining tools, separating tools and forming tools. Machine tools, in particular cutting tools, separating tools
and forming tools, in particular coated tools; coating
systems, namely machines and machine de vices for coating of
substrates with thin functional layers, in particular with
separation from a vapour or gaseous phase; parts of such
coating systems. Manually operated tools, in particular cutting tools,
separating tools and forming tools, in particular coated
tools. Material treatment, namely coating of tools and work pieces
with functional layers, in particular using PVD/CVD-coating
machines.
01 - Chemical and biological materials for industrial, scientific and agricultural use
07 - Machines and machine tools
08 - Hand tools and implements
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
[ Hard material coatings of diamond used in the manufacture of manually operated cutting tools and of machine cutting tools ] [ Machine tools, namely, diamond coated cutting tools, ] coating systems comprised of machines for coating of substrates, and parts therefor [ Manually operated tools, namely, diamond coated cutting tools ] Treatment of materials, namely, coating of tools and work pieces with functional layers, using PVD/CVD-coating machines
The invention relates to a body with a substrate (1), an intermediate layer (2) applied on top thereof and a CVD diamond layer (3) applied to the intermediate layer. In order to propose a body coated with CVD diamond and a production process, in which the body has an increased load-bearing capacity under various mechanical loads, provision is made for the intermediate layer to be predominantly metallic, wherein the metal fraction of the intermediate layer consists predominantly of tungsten and/or chromium, and for the intermediate layer to have a roughness defined by an Rz value of 0.5 μm-3.0 μm.
C23C 16/00 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
C23C 16/02 - Pretreatment of the material to be coated
B24D 3/00 - Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special natureAbrasive bodies or sheets characterised by their constituents
A process and a device for coating a substrate (22) are described. In a vacuum chamber (10), a first magnetron cathode (24) is provided with a sputtering target (28) of a first metal composition comprising predominantly aluminium.A second magnetron cathode (26) is provided with a sputtering target (30) of a second metal composition comprising at least 50 at-% of a second metal selected from groups IVA – VIA of the periodic table. In order to obtain coatings with improved properties, electrical power is supplied to the cathodes (24, 26) such that the targets (28, 30) are sputtered, where electrical power is supplied to the first cathode (24) as pulsed electrical power according to high power impulse magnetron sputtering with a first peak current density, and to the second cathode (26) with a second peak current density lower than the first peak current density. The substrate (22) is arranged within the vacuum chamber such that particles from the plasma deposit onto the substrate forming a coating.
C23C 14/35 - Sputtering by application of a magnetic field, e.g. magnetron sputtering
C23C 14/06 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
C23C 30/00 - Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
44.
Apparatus for processing work piece by pulsed electric discharges in solid-gas plasma
Work piece processing is performed by pulsed discharges between an anode (2) and a magnetron sputtering cathode (1) in solid-gas plasmas using a chamber (2) containing the work piece (7). A system (12) maintains a vacuum in the chamber and another system (14) provides sputtering and reactive gases. The pulses are produced in a plasma pulser circuit including the anode and the cathode, the discharges creating gas and partially ionized solid plasma blobs (3) moving or spreading from a region at a surface of the cathode towards the work piece and the anode. A pulsed current comprising biasing pulses arises between the second electrodes. Biasing discharges are produced between the anode and the work piece when said plasma blobs have spread to regions at the anode and at the work piece so that the pulsed current is the current of these biasing discharges.
The invention relates to a device for coating a substrate (14) using CVD, in particular for coating with diamond or silicon, wherein a heat conductor array comprising a plurality of elongated heat conductors (2) is provided in a housing (10), said heat conductors extending between a first (1) and a second electrode (8), wherein the heat conductors (2) are held individually tensioned by a tensioning device attached to one end thereof. For the purposes of improving the life of the heat conductors (2), the invention proposes that the tensioning device comprises a tilt arm (5) having a tensioning weight (G), the heat conductor (2) being attached to the first end (E1) of said tilt arm, and the second end thereof substantially being mounted pivotably about a horizontal axis (H).
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
46.
Device and method for coating a substrate using CVD
The invention relates to a device for coating a substrate using CVD, in particular for coating with diamond or silicon, wherein a neat conductor array composed of a plurality of elongated heat conductors (2) is provided in a housing (9), said heat conductors extending between a first (1) and a second electrode (6), wherein the heat conductors are held individually tensioned by a weight (4) attached to one end thereof. To increase the life of the neat conductors (2), the invention proposes that the weight (4) or the heat conductor (2) be guided at the second electrode (6), forming an electrical loop contact, in such a way that a vector of the weight force (G) produced by the weight (4) makes an angle (α) of no more than 45° with a direction of the longitudinal extension of the heat conductor (2).
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
C23C 16/44 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
The invention relates to a body with a substrate (1), an intermediate layer (2) applied on top thereof and a CVD diamond layer (3) applied to the intermediate layer. In order to propose a body coated with CVD diamond and a production process, in which the body has an increased load-bearing capacity under various mechanical loads, provision is made for the intermediate layer to be predominantly metallic, wherein the metal fraction of the intermediate layer consists predominantly of tungsten and/or chromium, and for the intermediate layer to have a roughness defined by an Rz value of 0.5 μm - 3.0 μm.
The invention relates to an apparatus and a method for pretreating and coating bodies by means of magnetron sputtering. In a vacuum chamber having a metallic chamber wall (26), magnetrons with sputter targets are arranged, at least one of which is an HPPMS magnetron to which electric pulses are fed by connecting a capacitive element (6) with the sputter target of the HPPMS magnetron via a switching element (5). To achieve effective pretreatment and coating of substrates it is provided according to a first aspect to arrange the switching element on the chamber wall. According to a second aspect, an electrode pair is provided, wherein a first electrode is an HPPMS magnetron (1) and the first and second electrodes are arranged in such a manner that a body (11) supported on a substrate table (4) is arranged between the active surfaces of the electrode pair or is moved through the space between the active surfaces of the electrode pair. In a third aspect, a method is provided, wherein, in an etch step, a negative bias voltage is applied to the body and the body is etched by means of metal ion bombardment, and subsequently the bias voltage is continuously lowered so that material sputtered-off from the sputter targets results in a layer build-up on the body.
The invention relates to an end mill cutter or drill made of solid carbide for machining or drilling fiber-reinforced materials or circuit boards. The end mill cutter is provided with a CVD diamond layer. In order to achieve an advantageous and cost-effective design of the tool, by means of which increased loading ability and a long stamping time during machining of said materials can be achieved, without this resulting in reduced surface quality of the machined surfaces, the mill cutter or drill comprises an odd number of main blades at least in a plane perpendicular to the rotational axis.
The invention relates to a device for coating a substrate (14) using CVD, in particular for coating with diamond or silicon, wherein a heat conductor array comprising a plurality of elongated heat conductors (2) is provided in a housing (10), said heat conductors extending between a first (1) and a second electrode (8), wherein the heat conductors (2) are held individually tensioned by a tensioning device attached to one end thereof. For the purposes of improving the life of the heat conductors (2), the invention proposes that the tensioning device comprises a tilt arm (5) having a tensioning weight (G), the heat conductor (2) being attached to the first end (E1) of said tilt arm, and the second end thereof substantially being mounted pivotably about a horizontal axis (H).
The invention relates to a device for coating a substrate using CVD, in particular for coating with diamond or silicon, wherein a heat conductor array composed of a plurality of elongated heat conductors (2) is provided in a housing (9), said heat conductors extending between a first (1) and a second electrode (6), wherein the heat conductors are held individually tensioned by a weight (4) attached to one end thereof. To increase the life of the heat conductors (2), the invention proposes that the weight (4) or the heat conductor (2) be guided at the second electrode (6), forming an electrical loop contact, in such a way that a vector of the weight force (G) produced by the weight (4) makes an angle (α) of no more than 45° with a direction of the longitudinal extension of the heat conductor (2).
The invention relates to a device and to a method for pretreating and coating bodies by magnetron atomization. Said device comprises a vacuum chamber with metal chamber walls (26) and magnetrons with sputter-targets are arranged in said vacuum chamber, at least one magnetron being an HPPMS magnetron to which electric impulses are fed such that a capacitive element (6) is connected by a switch element (5) to the sputter-target of the HPPMS-magnetron. According to a first aspect of the invention, in order to effectively pretreat and coat substrates, the switch element is arranged on the chamber wall.
A coated body and a process for producing a layer of hard material on a substrate are described. The body comprises a substrate (30) and a layer of hard material (36) which has been applied to the substrate (30) and at least partly covers the body. The layer of hard material comprises the metallic elements Al, Cr and Si and also nonmetallic elements selected from the group consisting of B, C, N, O. The atomic proportion of oxygen among the nonmetallic elements is greater than 30%. The layer of hard material is deposited on the substrate by means of magnetron atomization.
Coated tool with geometrically defined cutting edge, having at least one layer of highly wear-resistant hard material, characterized in that at least one top layer of hard material is applied to the hard material layer (base layer) and this top layer is smoothed out more quickly in use compared with the base layer.
C23C 28/02 - Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups , or by combinations of methods provided for in subclasses and only coatings of metallic material
A description is given of a coated body and a method for producing and coating a body. The body has a substrate of a hard metal or cermet, comprising hard material particles (1) and binder material (2) and an adhering diamond layer (4) provided on top. At least some of the hard material particles (1) on the surface of the substrate and under the diamond layer (4) have transcrystalline depressions in the form of holes. The substrate may consist of hard metal, preferably consisting of WC and Co. A CVD diamond layer may be applied to the functional surfaces. In the case of at least one of the diamond-coated functional surfaces, the cobalt content of the surface, specified in % by weight, in relation to the WC, measured by means of energy-dispersive X-ray fluorescence, is only reduced by a maximum of 50% in comparison with the untreated substrate. In the method according to the invention, hard material particles on the surface of the substrate are subjected to transcrystalline corrosion by chemical etching in such a way that depressions are created in the form of pits or holes.
A coated body and a process for producing a layer of hard material on a substrate are described. The body comprises a substrate (30) and a layer of hard material (36) which has been applied to the substrate (30) and at least partly covers the body. The layer of hard material comprises the metallic elements Al, Cr and Si and also nonmetallic elements selected from the group consisting of B, C, N, O. The atomic proportion of oxygen among the nonmetallic elements is greater than 30%. The layer of hard material is deposited on the substrate by means of magnetron atomization.
C23C 14/35 - Sputtering by application of a magnetic field, e.g. magnetron sputtering
C23C 28/02 - Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups , or by combinations of methods provided for in subclasses and only coatings of metallic material
C23C 30/00 - Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Mechanical tools, in particular cutting, chopping and forming tools, in particular coated tools, mechanical apparatus, installations for coating tools and workpieces with hard materials. Hand-operated cutting, chopping and forming tools, in particular coated tools. Treatment of materials, namely coating tools and workpieces with hard materials.
58.
Work piece processing by pulsed electric discharges in solid-gas plasma
Work piece processing is performed by pulsed discharges between an anode (2) and a magnetron sputtering cathode (1) in solid-gas plasmas using a chamber (2) containing the work piece (7). A system (12) maintains a vacuum in the chamber and another system (14) provides sputtering and reactive gases. The pulses are produced in a plasma pulser circuit including the anode and the cathode, the discharges creating gas and partially ionized solid plasma blobs (3) moving or spreading from a region at a surface of the cathode towards the work piece and the anode. A potential is applied to the work piece so that a pulsed current comprising biasing pulses arises between the second electrodes. In particular biasing discharges are produced between the anode and the work piece when said plasma blobs have spread to regions at the anode and at the work piece so that the pulsed current is the current of these biasing discharges. The method is efficient for processing or modifying surface regions of work pieces of various kinds and configurations and can be employed for achieving efficient work piece etching, interface mixing, surface and balk diffusion, gas absorption and desorption, initial and further stages of thin film condensation, and for performing ion plating.
C23C 14/00 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
C23C 14/32 - Vacuum evaporation by explosionVacuum evaporation by evaporation and subsequent ionisation of the vapours
C25B 9/00 - Cells or assemblies of cellsConstructional parts of cellsAssemblies of constructional parts, e.g. electrode-diaphragm assembliesProcess-related cell features
C25B 11/00 - ElectrodesManufacture thereof not otherwise provided for
and in the second operating mode a lower carbon over-saturation of the gas atmosphere occurs near the substrate.
In this way, a body can be produced with a substrate and at least one layer deposited on the surface of the substrate, wherein the layer consists of nano-crystalline diamond.
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Chip removing, separating as well as transforming machines,
mechanical devices, mechanical tools, especially PVD-coated
tools, machinery for coating tools and work pieces with hard
materials. Manually operated tools, especially PVD-coated tools. Material treatment, namely coating of tools and work pieces
of metal with hard materials using PVD-coating machines.
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
[ CHIP REMOVING, SEPARATING, AND TRANSFORMING MACHINES, NAMELY, COATING MACHINES FOR USE IN COATING SUBSTRATES WITH THIN FUNCTIONAL LAYERS PRODUCED FROM THE SEPARATION OF VAPORS AND GASSES, CUTTING MACHINES, PUNCHING MACHINES, SQUEEZING MACHINES, GRINDING MACHINES, BORING MACHINES, LATHES, AND GEAR CUTTING AND FINISHING MACHINES FOR METAL WORKING IN THE FIELD OF COATINGS; MECHANICAL DEVICES, NAMELY, METALWORKING MACHINE TOOLS; MECHANICAL TOOLS FOR USE IN THE PHYSICAL VAPOR DEPOSITION COATING OF TOOLS WITH A HARDENED SURFACE MATERIAL; AND MACHINERY, NAMELY, METALWORKING MACHINE TOOLS FOR COATING TOOLS AND WORK PIECES WITH HARD MATERIALS ] [ MANUALLY OPERATED TOOLS COATED BY PHYSICAL VAPOR DEPOSITION, NAMELY, PUNCHES, HAND-HELD CUTTING TOOLS, CLAMPS, DIES, DRILLS, MANUALLY-OPERATED GRINDING WHEELS, PINCHERS, TONGS, SCRAPERS, SAWS, WRENCHES, AND VICES ] Material treatment, namely coating of tools and work pieces of metal with hard materials using PVD-coating machines
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Machines pour l'enlèvement de copeaux, machines pour la
séparation, machines pour l'usinage; appareils mécaniques
ainsi que parties des machines et appareils précités, outils
mécaniques, en particulier outils enduits et installations
composées de ces outils pour l'enduction d'outils au moyen
de matériaux durs. Outils pour l'enlèvement de copeaux, outils pour l'usinage,
outils pour la séparation, actionnés à la main, en
particulier outils enduits. Usinage des matériaux, en particulier enduction d'outils
avec des matériaux durs.
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Machines pour l'enlèvement de copeaux, machines pour
l'usinage, machines pour la séparation; appareils mécaniques
ainsi que parties des machines et appareils précités, outils
mécaniques, en particulier outils enduits et installations
composées de ces outils pour l'enduction d'outils au moyen
de matériaux durs. Outils pour l'enlèvement de copeaux, outils pour l'usinage,
outils pour la séparation, actionnés à la main, en
particulier outils enduits. Usinage des matériaux, en particulier enduction d'outils
avec des matériaux durs.
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Cutting, cutting-off and forming machines, mechanical equipment, machine tools, in particular PVC-coated tools; installations for coating tools and workpieces with hard materials. Hand tools, hand operated, in particular PVC-coated tools. Treatment of materials, namely coating of tools and workpieces of metal with hard materials, using PVC-coating installations.
09 - Scientific and electric apparatus and instruments
40 - Treatment of materials; recycling, air and water treatment,
42 - Scientific, technological and industrial services, research and design
Goods & Services
Machines and mechanical devices for coating substrates with
thin functional layers by separation from a vaporous or
gaseous phase and machinery assembled thereof; mechanical
apparatuses, mechanical tools, especially coated tools and
machinery built from these for coating tools with hard
materials. Manually operated tools, especially coated tools. Analysis devices for the determination of the composition of
coatings; measuring instruments for determination of coating
properties, in particular of thickness, adhesion and
hardness. Coating of plastics, metal and ceramic components with thin
functional layers for third parties, particularly for wear
and corrosion prevention, by separation in the vaporous or
gaseous phase, in particular hard material coatings;
material treatment, i.e. coating of tools with hard
materials. Technical project studies; construction drafting, technical
research and development; licencing.
09 - Scientific and electric apparatus and instruments
40 - Treatment of materials; recycling, air and water treatment,
42 - Scientific, technological and industrial services, research and design
Goods & Services
MACHINES AND MACHINE TOOLS, namely, COATING MACHINES FOR USE IN COATING SUBSTRATES WITH A THIN FUNCTIONAL LAYER PRODUCED FROM THE SEPARATION OF VAPORS AND GASSES [ ; AND COATED MACHINE TOOLS FOR USE IN THE COATING OF OTHER TOOLS WITH A HARDENED SURFACE MATERIAL ] [ MANUALLY OPERATED HAND TOOLS AND COATED HAND TOOLS, namely, CUTTING TOOLS, PUNCHING TOOLS, SQUEEZING TOOLS, GRINDING TOOLS AND MILLING TOOLS ] [ MEASURING INSTRUMENTS, NAMELY INSTRUMENTS FOR ANALYZING AND DETERMINING THE COMPOSITION OF COATINGS AND DETERMINING THE THICKNESS, ADHESION AND HARDNESS OF COATINGS ] MATERIAL TREATMENT SERVICES FOR OTHERS, NAMELY, COATING OF PLASTICS, METAL AND CERAMIC COMPONENTS WITH THIN FUNCTIONAL LAYERS, PARTICULARLY FOR WEAR AND CORROSION PREVENTION, BY SEPARATION IN THE VAPOROUS OR GASEOUS PHASE, IN PARTICULAR HARD MATERIAL COATINGS; COATING OF TOOLS WITH HARD MATERIALS [ CONDUCTING PROJECT FEASIBILITY STUDIES; CONSTRUCTION DRAFTING;] TECHNICAL RESEARCH AND PRODUCT DEVELOPMENT IN THE FIELD OF COATING MATERIALS, APPLICATION AND USE OF COATED GOODS [; AND LICENSING OF INTELLECTUAL PROPERTY ]
01 - Chemical and biological materials for industrial, scientific and agricultural use
03 - Cosmetics and toiletries; cleaning, bleaching, polishing and abrasive preparations
05 - Pharmaceutical, veterinary and sanitary products
07 - Machines and machine tools
08 - Hand tools and implements
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
16 - Paper, cardboard and goods made from these materials
37 - Construction and mining; installation and repair services
40 - Treatment of materials; recycling, air and water treatment,
42 - Scientific, technological and industrial services, research and design
45 - Legal and security services; personal services for individuals.
Goods & Services
(1) Machines and machine tools, namely coating machines for use in coating substrates with a thin functional layer produced from the separation of vapors and gases and coated machine tools for use in the coating of other tools with a hardened surface material, namely: metalworking machines coated with hard materials, mechanically- operated tools coated with hard materials; machine tools built from tools coated with hard materials; mechanical cutting tools coated with hard materials; mechanical cemented carbide tools coated with hard materials, metalworking machines built from tools coated with hard materials, mechanically operated tools built from tools coated with hard materials; machine tools built from tools coated with hard materials; metalworking machines built from coated tools for coating tools with hard materials; mechanically operated tools built from coated tools for coating tools with hard materials, tools built from coated tools for coating tools with hard materials; tools built from coated tools for coating tools with hard materials as part of machines, other metalworking machines, electron beam processing equipment, coating and painting machines and parts thereof; manually operated hand tools and coated hand tools, namely cutting tools, punching tools, squeezing tools, grinding tools and miling tools; analysis devices for the determination of the composition of coatings and for determining the thickness, adhesion and hardness of coatings, namely micro-scopes, film thickness gauges, coating hardness measuring instruments, instruments for measuring adhesive strength of coatings; micro hardness testers, X-ray fluorescence analysis spectroscopes, Fourier transform spectroscopes (FTIR), Raman spectrometers, electron beam microscopes, microprobes, scratchtesters, phase analysis devices, X-ray photoelectron spectroscopes, XRASER (X-ray laser), nano-indentation testers, glow-.discharge optical spectroscopes (GDOS), scanning electron microscopes (REM), energy-dispersive X-ray analyser (EDX), Vickers hardness meter (=diamond-pyramid hardness meter), image analysing computer; measuring instruments for determination of coating properties, in particular of thickness, adhesive and hardness. (1) Techinical project studies; construction drafting, technical research and development; licencing of intellectual property; coating of plastics, metal and ceramic components with thin functional layers for third parties, particularly for wear and corrosion prevention, by separation in the vaporous or gaseous phase, in particular hard material coatings; material treatment, i.e. coating of tools with hard materials.
40 - Treatment of materials; recycling, air and water treatment,
42 - Scientific, technological and industrial services, research and design
Goods & Services
Machines and mechanical devices for coating substrates with thin functional layers by separation from a vaporous or gaseous phase and machinery assembled thereof; mechanical apparatuses, mechanical tools, especially coated tools and machinery built from these for coating tools with hard materials. Coating of plastics, metal and ceramic components with thin functional layers for third parties, particularly for wear and corrosion prevention, by separation in the vaporous or gaseous phase, in particular hard coatings; material treatment, i e coating of tools with hard materials. Technical project studies; construction drafting, technical research and development; licencing.
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Chip removing, cutting and forming machine tools; mechanical
apparatuses, mechanical tools, especially coated tools and
machinery built from these for coating tools with hard
materials. Chip removing, cutting and forming manually operated tools,
especially coated tools. Material treatment, i.e. coating of tools with hard
materials.
