Abstract

The present invention provides a sealing member which includes a substrate including silicon carbide; and a plurality of cylindrical or polygonal columnar graphites dispersed in the substrate, and a method for manufacturing the same.

IPC Classes  ?

• F16J 15/34 - Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
• F16J 15/328 - Manufacturing methods specially adapted for elastic sealings
• F16J 15/3284 - Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings characterised by their structureSelection of materials
• C04B 35/52 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on carbon, e.g. graphite
• C04B 35/565 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on carbides based on silicon carbide

Abstract

A stop seal for application of high temperature and high pressure is disclosed. A stop seal contains a first seal member and a second seal member, wherein the stop seal can prevent a fluid of high temperature and high pressure from leaking into an atmospheric space because, when the fluid of high temperature is introduced and the first seal member is moved toward a direction adjacent to a pump shaft, an opposite side of the second seal member is moved from a first position to a second position by the first seal member so as to block a gap between a pump side and a housing.

IPC Classes  ?

• F16J 15/3284 - Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings characterised by their structureSelection of materials
• F16J 15/54 - Other sealings for rotating shafts
• F04D 29/12 - Shaft sealings using sealing-rings

Abstract

The present invention provides a sealing member and a method for manufacturing same, the sealing member comprising: a substrate comprising silicon carbide; and a plurality of cylindrical or polygonal columnar graphite dispersed in the substrate.

IPC Classes  ?

• F16J 15/34 - Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
• F16J 15/3284 - Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings characterised by their structureSelection of materials
• F16J 15/328 - Manufacturing methods specially adapted for elastic sealings
• C04B 35/565 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on carbides based on silicon carbide
• C04B 35/52 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on carbon, e.g. graphite
• B28B 3/04 - Producing shaped articles from the material by using pressesPresses specially adapted therefor wherein a ram exerts pressure on the material in a moulding spaceRam heads of special form with one ram per mould
• B28B 11/24 - Apparatus or processes for treating or working the shaped articles for curing, setting or hardening

Abstract

Disclosed are: an electrostatic chuck having a high volume resistivity so as to reduce a leakage current, thereby improving the adsorption and desorption response characteristics of a semiconductor wafer; and a manufacturing method therefor. The electrostatic chuck is a sintered body in which an electrode is impregnated so as to fix a semiconductor wafer by electrostatic force, and comprises alumina, a sintering aid, and a rare earth composite oxide comprising two to five different rare earth metals, has adsorption and desorption response characteristics of a semiconductor wafer of two seconds or less, and has a volume resistivity at room temperature of 1.0E+16 Ω·cm to 1.0E+17 Ω·cm.

IPC Classes  ?

• H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
• C04B 35/111 - Fine ceramics
• H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
• H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
• C04B 35/645 - Pressure sintering
• C04B 35/117 - Composites

Abstract

The present invention provides a bellows and a method for manufacturing same, the bellows comprising: corrugated parts (110) and pressure resistance reinforcing supports (140). The corrugated parts (110) comprise multiple disk-shaped membranes (160), each of which has a perforated part (160b) formed at the center thereof and has a spherical wave-shaped curve formed around the perforated part (160b). The inner edge part (160c) of each of the disk-shaped membranes (160) is coupled/fixed to the inner edge part (160c) of another disk-shaped membrane (160) adjacent to the upper surface thereof, thereby forming perforated parts (160b), and the outer edge part (160d) of each of the disk-shaped membranes (160) is coupled/fixed to the outer edge part (160d) of another disk-shaped membrane (160) adjacent to the lower surface thereof, thereby forming continuous corrugations comprising troughs (120a, 120b) and crests (130). The pressure resistance reinforcing supports (140) have ring shapes and are inserted into the inner troughs (120a) or the outer troughs (120b) of the corrugated parts (110).

IPC Classes  ?

• F16J 3/04 - Bellows
• F16J 15/54 - Other sealings for rotating shafts
• B29C 53/22 - Corrugating
• B29C 53/80 - Component parts, details or accessoriesAuxiliary operations

Abstract

Provided is a carbon layer derived from carbide ceramics, wherein metal or non-metal atoms are extracted selectively from the surface of carbide ceramics to form voids, which, in turn, are filled with carbon synthesized by a carbon compound, thereby providing improved roughness and hardness, as well as to a method for preparing the same.

IPC Classes  ?

• B23B 9/00 - Automatic or semi-automatic turning-machines with a plurality of working-spindles, e.g. automatic multiple-spindle machines with spindles arranged in a drum carrier able to be moved into pre-determined positionsEquipment therefor
• C10M 103/02 - CarbonGraphite
• C04B 35/52 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on carbon, e.g. graphite