Abstract

A pendulum gate valve (10) including an expandable gate (12) which pivots when unexpanded to selectively block a vacuum or other pressure-differential passage (20). The valve includes a valve plate (56) sealing one side of the passage and a ring (88) or barrier plate (154) abutting an opposed side of the passage when the gate member is expanded. A compression spring (106) biases apart the valve plate and ring to close the valve by means of respective two-stage hangers attached thereto, extending along the spring, and having distal ends capturing the spring. Pneumatic pressure (116) applied to a pneumatic cavity (114) formed between the middles of the two-stage hangers (66, 102) and accommodating the spring forces apart the valve plate and ring to open the valve in the blocking position. Thereby if pressure fails, the valve fails to a sealed state. The axially movable valve or barrier plate is advantageously water cooled (60) to allow use with a heated processing chamber.

IPC Classes  ?

• F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
• F16K 3/28 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with resilient valve members
• F16K 31/64 - Operating meansReleasing devices responsive to temperature variation
• F16K 3/30 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing Details