An induction heated abatement apparatus includes a work coil configured to inductively heat a porous susceptor defining an abatement chamber for treating an effluent stream, wherein said work coil is hollow to define a conduit coupled with a source of reaction reagents and wherein at least one surface of said work coil defines a plurality of apertures in fluid communication with said conduit for conveying said reaction reagents from said conduit to said surface of said work coil for supply to said porous susceptor. The work coil is protected from the effects of overheating whilst also reducing wasted heat because the heat obtained by the reaction reagents used as coolant gas is recycled and is used to facilitate abatement in the porous susceptor defining an abatement chamber.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
H05B 6/10 - Induction heating apparatus, other than furnaces, for specific applications
A heat exchanger is disclosed. The heat exchanger comprises a first set of first conduits for conveying a first fluid, first conduits having a triangular cross-section portion; and a second set of second conduits for conveying a second fluid, the second conduits having a triangular cross-section portion, wherein adjacent first conduits are interspaced by an intervening second conduit. In this way, the conduits may be located closely together with a space-efficient configuration which helps to improve the exchange of heat between the first and second fluids while also providing a compact arrangement which minimises the amount of material used to construct the heat exchanger.
F28D 7/16 - Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged in parallel spaced relation
3.
VACUUM PUMP, ROTARY BODY OF VACUUM PUMP, AND ROTARY BLADE ON UPSTREAM SIDE OF VACUUM PUMP
[Problem] To curb the inflow of heat from a downstream-side rotary blade to an upstream-side rotary blade. [Solution] A vacuum pump 100A includes: a first rotary blade 20A; a second rotary blade 30A disposed on a downstream side of the first rotary blade 20A; a rotary shaft 113 for transmitting rotation to the first rotary blade 20A and the second rotary blade 30A; a drive mechanism 121 for the rotary shaft 113; and a casing 127 that contains the rotary shaft 113, the first rotary blade 20A, and the second rotary blade 30A. A clearance n1 is provided between mutually opposing surface parts of the first rotary blade 20A and the second rotary blade 30A, and at least a section of the opposing surface part of the first rotary blade 20A is configured to have a lower emissivity than that of surface parts other than said opposing surface part.
A bearing assembly, method of assembling a bearing assembly and a pump are disclosed. The bearing assembly is for mounting a rotatable shaft of a pump, and comprises an inner ring and an outer ring and a plurality of rollable elements mounted between said inner and outer rings. The bearing assembly has a lubricant directing element extending radially outwards from an outer circumference of the inner ring. The lubricant directing element may comprise a sloped radial surface, at least a portion of the sloped radial surface facing an annular gap between the inner and outer rings, a radially inner portion of the sloped surface being closer to the rollable elements than a radially outer portion of the sloped surface.
F16C 33/66 - Special parts or details in view of lubrication
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D 29/063 - Lubrication specially adapted for elastic fluid pumps
F16C 19/16 - Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with a single row of balls
The present invention relates to a gaseous flow line section (1) for use in a thermally controlled gaseous flow line, comprising a first generally tubular wall portion (2) defining a gaseous flow conduit (3) configured to convey a gaseous flow, a second generally tubular wall portion (4) substantially surrounding the first generally tubular wall portion (2) to define therebetween a liquid conduit (5) configured to contain a thermally controlled liquid, and a third generally tubular wall portion (6) substantially surrounding the second generally tubular wall portion (4) to define therebetween a vacuum conduit (7) configured to be evacuated.
F16L 9/18 - Double-walled pipesMulti-channel pipes or pipe assemblies
B01D 53/34 - Chemical or biological purification of waste gases
C23C 16/44 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
F16L 53/32 - Heating of pipes or pipe systems using hot fluids
F16L 59/065 - Arrangements using an air layer or vacuum using vacuum
H01L 21/00 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid-state devices, or of parts thereof
F16L 39/00 - Joints or fittings for double-walled or multi-channel pipes or pipe assemblies
A non-contacting scroll pump, the non-contacting scroll pump comprising a housing, an orbiting scroll located within the housing, and a thrust bearing assembly located within the housing for axially supporting the orbiting scroll. The thrust bearing assembly comprises a first plate fixed to the orbiting scroll, a second plate spaced apart from the first plate, a ball bearing located between the first plate and the second plate, the ball bearing being configured to roll against the first and second plates during orbiting of the orbiting scroll, and a coupling structure extending axially between the housing and the second plate to couple the housing to the second plate, wherein the coupling structure is engaged with the second plate, and wherein the coupling structure comprises a spring arranged to push the coupling structure against the second plate.
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
A scroll pump (100, 200, 300, 400, 500) comprising an orbiting scroll (130, 230, 330, 430), a fixed scroll (120, 220, 320, 420), and a biasing mechanism (190, 290, 390, 490) arranged to provide a biasing force to axially bias the orbiting scroll and the fixed scroll together.
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
F01C 21/00 - Component parts, details, or accessories, not provided for in groups
F16C 25/08 - Ball or roller bearings self-adjusting
A vacuum pumping system and method for evacuating a vacuum system. The vacuum system may be a wafer transfer station and comprises a smaller load lock vacuum chamber (30) operable to cycle between a predetermined pressure that is below atmospheric pressure and atmospheric pressure, and a larger wafer transfer vacuum chamber (40) configured to be maintained at a pressure at or close to the predetermined pressure. The vacuum pumping system comprises: first and second vacuum pumps (10, 20); a valve system (V1, V2, V3, V4, V5) configured to selectively connect and isolate the first and second vacuum pumps with the smaller and larger vacuum chambers; and control circuitry (25). The control circuitry is configured in response to determining that a pressure within the smaller vacuum chambers (30) is to fall to the predetermined pressure within a first time period, to control the valve system (V1, V2, V3, V4, V5) such that the first and second pump (10, 20) are isolated from the larger vacuum chamber (40) and are in fluid communication with the smaller vacuum chamber (30) and both contribute to evacuating the chamber. When the smaller vacuum chamber (30) is at the predetermined pressure the valve system (V1, V2, V3, V4, V5) is controlled so that the second vacuum pump (20) is isolated from the smaller vacuum chamber (30) and pumps the larger vacuum chamber (40).
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
A vacuum pump system and method for evacuating a process chamber comprising is disclosed. The system has two vacuum pumps (20, 30) each having a required pumping performance and being arranged in parallel. There is a valve system comprising respective first and second valves (V1, V2) for controlling a rate of flow of fluid into the respective two vacuum pumps. There is also control circuitry (40) configured: to control the first and second valves (V1, V2) during a first period of operation, such that each of the valves is partially open and a cumulative pumping performance of the two vacuum pumps (20, 30) provides the required pumping performance. In response to determining that one of the two vacuum pumps is to be shut down, the control circuitry (40) closes one of the first and second valves and to fully opens the other of the first and second valves, such that the pumping performance of the pump with the open valve provides the required pumping performance.
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04B 49/02 - Stopping, starting, unloading or idling control
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04C 28/06 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
F04D 15/00 - Control, e.g. regulation, of pumps, pumping installations, or systems
The present invention provides an abatement apparatus for treating an effluent gas stream from a manufacturing processing tool. The abatement apparatus comprises a treatment chamber at least partially defined by a first porous wall, and comprising an inlet configured to enable an effluent gas stream from the manufacturing processing tool to enter the treatment chamber; a second porous wall generally surrounding the first porous wall and defining therebetween a second chamber, the second chamber being porous to allow gas flow therethrough; one or more heating elements are arranged within the second chamber and are configured to heat the gas flowing therethrough during use; a third porous wall generally surrounding the second chamber and defining therebetween a third chamber, the third chamber containing a relatively thermally insulating material, said third chamber being porous to allow gas flow; and a gas inlet. Wherein, the apparatus is configured such that, in use, a gas flow is conveyed from the gas inlet through the third chamber and the second chamber to the treatment chamber where it reacts with the effluent gas stream.
B01D 53/00 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
B01D 53/46 - Removing components of defined structure
B01J 12/00 - Chemical processes in general for reacting gaseous media with gaseous mediaApparatus specially adapted therefor
F23J 15/00 - Arrangements of devices for treating smoke or fumes
B01D 53/34 - Chemical or biological purification of waste gases
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
11.
VACUUM PUMP, FIXED DISK, AND RETROFITTED COMPONENT
[Problem] To provide a vacuum pump in which exhaust speed is improved while back pressure dependency performance is maintained, and a fixed disk and a retrofitted component used in the vacuum pump. [Solution] A vacuum pump according to the present embodiment is a Siegbahn element. In a fixed disk which is disposed opposing a rotary disk and in which a spiral groove having a valley part and a crest part is provided in an opposing surface, an inflow guide part for guiding inflow of gas is provided in a gas inflow port of the spiral groove. The inflow guide part has a shape in which the fixed disk crest part is extended farther outward than the outer diameter of the opposing rotary disk.
[Problem] To propose a vacuum pump that offers excellent back pressure performance even when the suction gas is hydrogen gas or the like. [Solution] A vacuum pump 100 comprising an exhaust part 114 that includes: a turbine pump section 115 with a plurality of stages of rotary blades 102 and fixed blades 123; and a drag pump section 116 positioned on the exhaust downstream side of the turbine pump section 115. Intake gas sucked in from an intake port 101 by the exhaust part 114 is discharged from an exhaust port 133 via a gas flow passage FP1. The vacuum pump 100 is characterized by comprising an introduction flow passage FP3 for introducing intermediate introduction gas having a higher viscosity than the intake gas. The vacuum pump 100 is also characterized in that the introduction flow passage FP3 is connected to the gas flow passage FP1 on the exhaust downstream side of the rotary blade 102 closest to the intake port 101 among the plurality of stages of rotary blades 102 in the exhaust part 114.
In order to provide an abnormality detection device for a vacuum pump, a vacuum pump system, and a vacuum pump abnormality detection method with which an abnormality in a gap between a rotary blade and a fixed blade or a casing can be detected easily and with high accuracy without disassembling the vacuum pump, an abnormality detection device (320) for a vacuum pump (100) is provided with a casing (311), a rotor shaft (113), a magnetic bearing device (312), a plurality of rotary blades (102), and a plurality of fixed blades (123). The abnormality detection device (320) is also provided with: a vibration detection means (321) for acquiring vibration generated in the vacuum pump (100); and a contact determination means (323) that controls the magnetic bearing device (312) to set the position of the rotor shaft (113) to a reference position set in advance and set the rotor shaft (113) to a designated predetermined operation state set in advance, and while the rotor shaft (113) is in the designated operation state, controls the magnetic bearing device (312) to offset the position of the rotor shaft (113) by a designated amount from a reference position, and determines whether or not there has been contact with the plurality of rotary blades (102) according to a change in the vibration data acquired by the vibration detection means (321) from before the offset to after the offset.
A vacuum pump, comprising a pump assembly (110), an inlet means (120) and an outlet means (130), and an enclosure (140) for containing the pump assembly (110), the enclosure (140) comprising a first-end part (141), a second-end part (142), and sleeve means (143) arranged between the first-end part (141) and the second-end part (142), wherein the sleeve means (143) comprises a bellows means (143a) for accommodating a thermal expansion of the vacuum pump (100).
The present disclosure relates to vacuum pump 10 comprising a substantially hermetically sealed enclosure 40, a core pump assembly located within the enclosure 40, and an inert purge gas inlet 70 fluidly connected to the enclosure 40 for supplying inert purge gas to an interior of the enclosure 40 surrounding the core pump assembly. By providing a sealed enclosure 40 around the core pump assembly and supplying inert purge gas thereto via the inlet 70, an inert positive pressure can be applied to the core pump assembly that reduces leakage of process gas from the core pump assembly such that seals therein can be removed or reduced. In particular, the need for elastomer seals that may be expensive and not be suited to high temperature or corrosive process gas conditions can be removed.
A vacuum pump which can prevent wasting of materials and can be manufactured easily is provided.
A vacuum pump which can prevent wasting of materials and can be manufactured easily is provided.
Main-body casings and a rotating body installed rotatably in the main-body casings are provided, and the rotating body has a structure that a second component is caused to cover a periphery of a first component disposed on an inner side. The second component is formed by solidifying a powder. The first component is formed of at least any one of an extruded material, a cast material, and a forged material. The second component is formed of a green pellet.
A turbomolecular pump bladed disc, comprising: a central hub configured to be rotated about an axis, the axis defining an axial direction; and one or more blades radially extending from the central hub; wherein each of the one or more blades has a cross-section that: tapers to a first point in a first direction, the first direction being parallel with the axial direction, tapers to a second point in a second direction, the second direction being parallel with the axial direction and opposite to the first direction; and is substantially a parallelogram in shape.
A vacuum pump that is small in height (length) is configured to bring a rotating body and a protective net as close to each other as possible by causing the rotating body to actively support the protective net. The vacuum pump is provided with a mechanism that causes a rotating body (a shaft or a rotor) to actively support a protective net when the protective net becomes deformed (bent) toward the vacuum pump side due to a change in pressure or temperature of the vacuum pump. Specifically, instead of preventing the protective net from being caught in the rotating body by increasing the distance therebetween, the entanglement of the protective net is prevented by actively supporting the protective net by bringing the protective net and the rotating body closer to each other. Accordingly, the height (length) of the vacuum pump can be reduced more.
A scroll pump and thrust bearing assembly for providing axial support for a first scroll member with respect to a second scroll member within the scroll pump are disclosed. The thrust bearing assembly comprises: at least one ball bearing and a first and second ball bearing cage for accommodating and constraining movement of the at least one ball bearing. The first and second ball bearing cages each comprise at least one aperture, the at least one aperture of the first ball bearing cage overlaps with the at least one aperture of the second ball bearing cage. The at least one ball bearing is accommodated within the respective overlapping apertures of the ball bearing cages and at least one control aperture of the first ball bearing cage is configured to have a predetermined length in one dimension that is at least 2% greater than a predetermined length in a direction perpendicular to the one dimension, such that a clearance relative to a path traced by the ball bearing in the one dimension is greater than a clearance in the perpendicular direction.
The present invention relates to a rotor for a separator apparatus. The rotor having an axis of rotation and comprising an inlet operable to receive an effluent stream, an annular skirt defining a centrifugal separator operable to separate the effluent stream, the centrifugal separator having a gas outlet in first direction and a waste outlet in a second direction. A surface of the annular skirt is angled towards the axis of rotation of the rotor, such that during rotation of the rotor, non-gaseous matter in the effluent stream is biased towards the waste outlet by contact with said surface. The invention also relates to a separator apparatus comprising such a rotor, a method of treating an effluent stream, and a method of designing a rotor.
B01D 45/14 - Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces generated by rotating vanes, discs, drums or brushes
A vacuum pump including: a current measuring means that measures a current flowing through a motor, in which a first region defined such that a current measured value flowing through the motor is equal to or larger than a current specified value and a rotational speed measured value of a rotor blade is equal to or larger than a rotational speed specified value, a second region defined such that the current measured value flowing through the motor is less than the current specified value or the rotational speed measured value of the rotor blade is less than the rotational speed specified value, a region determining means that determines which region a rotational speed measured value and the current measured value belong, and a calculating means that calculates a risk degree of a failure of the vacuum pump with elapse of time based on the determination by the region determining means.
A pumping system (100) comprising: a booster pump (104) comprising a booster pump inlet (114) and a booster pump outlet (116); and a primary pump (106) comprising a primary pump inlet (120) and a primary pump outlet (122); wherein the booster pump outlet (116) is fluidly coupled to the primary pump inlet (120); a maximum capacity of the booster pump (104) is less than or equal to 40m3/hr; and a maximum capacity of the primary pump (106) is less than or equal to 5m3/hr.
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
An interstage plate system comprising: a first plate portion comprising a first recess in a first mating surface of the first plate portion; and a second plate portion comprising a second recess in a second mating surface of the second plate portion; wherein the first plate portion and the second plate portion are configured to be coupled together so as to form an interstage plate for a vacuum pump and such that: the first mating surface and the second mating surface abut; and the first recess and the second recess are opposing, contiguous recesses which together form an aperture through the interstage plate.
F01C 21/10 - Outer members for co-operation with rotary pistonsCasings
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
24.
PUMP ASSEMBLY AND VACUUM PUMP WITH REDUCED SEAL REQUIREMENTS
A pump assembly (100) for a vacuum pump, comprising: an inlet side (110) and an outlet side (120) and a plurality of pump chambers (130) arranged therebetween; a first assembly component (140) defining a first sealing face (141) and a second assembly component (150) defining a second sealing face (151); wherein the first assembly component (140) and the second assembly component (150) are arranged to be joined together at the first and second sealing faces (141, 151) thereby providing a seal (160) for substantially sealing the plurality of pump chambers (130) from an exterior of the pump assembly (170); wherein the seal (160) comprises a labyrinth seal.
F01C 21/10 - Outer members for co-operation with rotary pistonsCasings
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
F04D 17/16 - Centrifugal pumps for displacing without appreciable compression
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
A claw booster pump (104) comprising: a pair of parallel shafts (202, 204) arranged to rotate in opposite directions to each other; a pair of rotors (206, 208) secured to the pair of shafts (202, 204), respectively, the pair of rotors (206, 208) including a first rotor (206) having a claw portion (220) projecting in a radial direction and a second rotor (208) having a recess (228) into which the claw portion (220) enters in use; a pump chamber (210) accommodating the pair of rotors (206, 208); an inlet (114) formed in the pump chamber (210) on one side of a plane (232) containing axes of the pair of shafts (202, 204); and an outlet (116) formed in the pump chamber (210) on another side of the plane (232); wherein a maximum capacity of the claw booster pump (104) is less than or equal to 40m3/hr.
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
A gas separator and method are disclosed. The gas separator is for separating a target gas component from a gas mixture and comprises: a first cryogenic stage configured in a solidifying phase to receive the gas mixture at a subatmospheric pressure, to solidify a first group of gas components of the gas mixture and to exhaust a second group of gas components of the gas mixture which includes the target gas component; and a second cryogenic stage configured to receive the second group of gas components at a subatmospheric pressure, to solidify the target gas component and to exhaust a third group of gas components of the gas mixture.
B01D 53/00 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
F25J 3/06 - Processes or apparatus for separating the constituents of gaseous mixtures involving the use of liquefaction or solidification by partial condensation
Provided is a vacuum exhaust system (10) for exhausting process gas from a plurality of chambers (10-1 to 10-n), the vacuum exhaust system (10) comprising a plurality of turbo molecular pumps (100-1 to 100-n), a collecting pipe (14) for connecting the exhaust ports of the plurality of turbo molecular pumps in parallel, one or more dry pumps (16) connected to the collecting pipe (14), and chamber introduction valve devices (30-1 to 30-n) that control the flow rate of the gas introduced into the plurality of chambers (10-1 to 10-n). A threshold value (T) for the process gas exhaust flow rate is set on the basis of the exhaust flow rates that the plurality of turbo molecular pumps (100-1 to 100-n) can achieve, and the gas introduction timing and/or flow rate are/is controlled by the chamber introduction valve devices (30-1 to 30-n) so as not to exceed the exhaust flow rate threshold value (T).
[Problem] To provide a vacuum evacuation device that can favorably perform plasma cleaning without the provision of a pressure adjustment valve. [Solution] A vacuum evacuation device 10 that comprises a turbo molecular pump 100 and a plasma generation device 210 comprises a throttle part 244 that can raise the internal pressure of the plasma generation device 210 to satisfy P≥0.3/D. P is the pressure [Pa], and D is the inter-electrode distance [m] inside the plasma generation device. The throttle part can also raise the internal pressure of the plasma generation device 210 to satisfy P≤1.5/D.
[Problem] To achieve a hermetic connector with a small size and high performance while suppressing manufacturing cost thereof. [Solution] Provided is a vacuum pump (100) provided with a hermetic connector (10), the vacuum pump (100) being characterized in that: the hermetic connector (10) has pins (11, 12) that are electrically connected, a connector base part (13) that surrounds the pins (11, 12), and a sealing part (14) that seals between the pins (11, 12) and the connector base part (13); and the sealing part (14) is formed of an insulating resin material.
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04B 39/00 - Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups
H01R 9/16 - Fastening of connecting parts to base or caseInsulating connecting parts from base or case
A vacuum pump that allows for the identification of the noise immunities or the like of a master circuit and one or more slave circuits for controlling an operation of at least one portion included in the vacuum pump, and a controller used for such a vacuum pump are proposed. The present disclosure includes a control means 200 configured to control an operation of at least one portion included in a vacuum pump 100. The control means 200 includes a slave circuit 201, 202 connected to the at least one portion to control the operation of the at least one portion and a master circuit 204 connected to the slave circuit 201, 202 to control the slave circuit 201, 202. The master circuit 204 is configured to perform periodical communications with the slave circuit 201, 202 and obtain a history of communication states in the communications.
The present invention provides a vacuum pump (1) passive magnetic bearing, the vacuum pump (1) including a stator (2) and a rotor (4) configured to rotate about a rotational axis relative to the stator (2); the passive magnetic bearing comprising a rotor bearing half (12) including one or more substantially annular rotor-side magnets (14) and an opposing and substantially concentrically radially arranged stator bearing half (16) including one or more substantially annular stator-side magnets (18); a radial gap (g) extending between the rotor and stator bearing halves (14,16); wherein at least one, preferably each, rotor-side magnet (14) has an axial extent which is from around 3.5 times to around 5.3 times the width of the radial gap (g), and a radial extent which is less than 1.2 times the axial extent of the respective magnet; and/or, wherein at least one, preferably each, stator-side magnet (18) has an axial extent which is from around 3.5 times to around 5.3 times the width of the radial gap (g), and a radial extent which is less than 1.2 times the axial extent of the respective magnet.
A vacuum pump and a method of controlling such a pump to reduce power consumption of the pump during a standby mode. The method comprises: operating the pump by driving a pumping mechanism at a nominal speed; determining that the pump is to enter a standby mode in which an exhaust non- return valve is closed; boosting a speed of the pumping mechanism for a predetermined time to reduce an amount of gas within the pump; and reducing the speed of the pumping mechanism and operating the pump in the standby mode with the exhaust non-return valve being closed.
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/06 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
F04C 29/12 - Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
34.
A VACUUM PUMP AND A PERMANENT MAGNETIC BEARING ASSEMBLY FOR A VACUUM PUMP
A vacuum pump includes a rotating body including a rotor blade; a rotor shaft disposed in a center of the rotating body; a magnetic bearing configured to levitate and support the rotor shaft; a touchdown bearing that is separated, by a gap, from the rotor shaft and configured to support the rotor shaft when the magnetic bearing is uncontrollable; and a bearing protection structure configured to protect the touchdown bearing. The bearing protection structure includes a protrusion disposed on at least one of the rotating body and a component around the rotating body. Upon a touchdown of the rotor shaft on the touchdown bearing, the rotating body comes into contact with the component around the rotating body through the protrusion so that kinetic energy of the rotating body acting on the touchdown bearing is reduced.
The present invention provides a vacuum pump (1), preferably a turbomolecular pump, comprising a rotor shaft (9) configured to have one or more rotor blades (8) coupled thereto and the rotor shaft (9) defining a bearing well (7) containing, in an interference-fit configuration, a permanent magnetic bearing, wherein the magnetic bearing insert comprises one or more permanent magnet alloy rings (3,4,5) of a rotor bearing half of a permanent magnetic bearing and a radially outwardly extending sleeve (16) coupled thereto around an outer circumference of the or each said permanent magnet alloy ring (3,4,5), and an outer surface of the permanent magnetic bearing insert (3) engages with an inward facing wall of the bearing well (7) to provide an interference fit, wherein the radially outwardly extending sleeve (16) has a coefficient of thermal expansion that is at least substantially the same as the coefficient of thermal expansion of the material of the rotor shaft (9) defining the engaged bearing well wall.
A method of manufacturing a permanent magnetic bearing insert for a vacuum pump comprising a rotor shaft defining a cavity configured to receive the magnetic bearing insert in an interference-fit configuration, the method comprising the steps of: a) providing one or more permanent magnet alloy rings of a rotor bearing half of a permanent magnetic bearing; b) masking one or more surfaces of the or each permanent magnet alloy ring which are configured to substantially interface with another surface of the permanent magnetic bearing insert and/or the rotor shaft cavity when the permanent magnetic bearing insert is received by the rotor shaft cavity; and c) applying a coating to the or each permanent magnet alloy ring; wherein step b) substantially prevents those masked surfaces from being coated during step c); and wherein step b) and step c) are carried out substantially externally from a vacuum pump.
A vacuum pump (100) comprising: a stator (102) comprising: a first end wall (110) at a first end (111) of the stator (102); a second end wall (112) at a second end (113) of the stator (102), the second end (113) of the stator (102) being opposite 5 to the first end (111) of the stator (102); and one or more side walls (114) disposed between the first end wall (110) and the second end wall (112); wherein the first end wall (110), the second end wall (112), and the one or more side walls (114) define a pumping chamber (104); the first end wall (110) comprises a first opening (116) therethrough; and the vacuum pump (100) further comprises a first end 10 plate (120) removably disposed in the first opening (116).
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
Flange assembly (100) for a vacuum pump apparatus, comprising a first flange (110) comprising a first rim (111), the first rim (111) defining a first contact face; a second flange (120) comprising a second rim (121), the second rim (121) defining a second contact face; and means for clamping the first flange (110) to the second flange (120). The means for clamping comprises a first plurality of holes (131) arranged through the first rim (111), each hole in the first plurality of holes (131) being arranged to receive a shaft (132a) of a respective bolt (132); a second plurality of holes (133) arranged in the second contact face (121a) for receiving said shafts (132a) of said respective bolts (132); wherein the first plurality of holes (131) and the respective bolts (132) define a clearance gap (160) around the shafts (132a) of the respective bolts (132), such that first and second flange axes (A, B) can be offset from each other in angle or in a first linear direction perpendicular to the flange axes (A, B).
F16L 23/02 - Flanged joints the flanges being connected by members tensioned axially
F16L 23/036 - Flanged joints the flanges being connected by members tensioned axially characterised by the tensioning members, e.g. specially adapted bolts or C-clamps
F16L 27/053 - Universal joints, i.e. with mechanical connection allowing angular movement or adjustment of the axes of the parts in any direction with partly-spherical engaging surfaces held in place by bolts passing through flanges
F16L 23/032 - Flanged joints the flanges being connected by members tensioned axially characterised by the shape or composition of the flanges
[Problem] To provide a vacuum pump capable of keeping a temperature around a heater constant even if a flow rate of gas changes. [Solution] A vacuum pump (100) for discharging gas sucked by rotation of a rotor (103) is characterized by comprising: a cooling component (128) having a flow path (110) through which a cooling medium flows; a heating component (153) disposed farther toward a gas discharge side than the cooling component and having a heater (190); and a control device (200) for performing temperature control of the cooling component and the heating component, and is also characterized in that the control device changes, on the basis of a history of the temperature control of one of the heating component and the cooling component, the temperature control of the other.
An inlet assembly includes: a combustion chamber module defining a plenum configured to supply combustion reagents to its combustion chamber, the combustion chamber module having a mount configured to interface with a common head which defines at least one gallery configured to supply the combustion reagents, the mount comprising a plurality of feed apertures positioned for fluid communication of the combustion reagents between the gallery and the plenum. In this way, a mount which is suited to its combustion chamber module interfaces with a standard or common head, which enables the combustion reagents to be supplied from the gallery of the common head via the mount and to the plenum of the combustion chamber module. This enables a common head to be used for different combustion chamber modules, which reduces the number of parts required for the assembly and maintenance of the abatement apparatus.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
A valve module for a vacuum pumping system, comprising: a plurality of inlets for receiving a fluid; a plurality of pressure sensors, each configured to measure a fluid pressure associated with a respective inlet; a first fluid line manifold; a second fluid line manifold; a plurality of multifurcating conduits, each connecting a respective inlet to both the first and second fluid line manifolds; a plurality of valves disposed in the multifurcating conduits; and a valve controller coupled to the sensors and the valves; wherein the valve controller is configured to control, based on pressure measurements from the sensors, the valves such that a fluid flow through a multifurcating conduit is directed to either only the first fluid line manifold or only the second fluid line manifold.
F04B 49/22 - Control of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for in, or of interest apart from, groups by means of valves
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
43.
CIRCUIT FOR DRIVING A MOTOR OF A VACUUM PUMP, VACUUM PUMP ASSEMBLY, AND METHOD
A circuit (210) for driving a motor of a vacuum pump (220). The circuit (210) 5 comprises a filter (212) configured to receive an alternating current 'AC' electrical input power. The filter (212) is configured to supply, a filtered AC electrical power. The circuit (210) comprises an active-front-end 'AFE' rectifier (213) configured to receive the filtered AC electrical power. The AFE rectifier (213) comprises a plurality of electrically connected switching devices. The 10 plurality of switching devices are controllable, by a plurality of switching signals, to convert the filtered AC electrical power to a direct current 'DC' electrical power. The circuit (210) comprises an inverter (215) configured to receive the DC electrical power. The inverter (215) is configured to convert the DC electrical power to an AC electrical output power for driving a motor of a vacuum pump 15 (220).
H02M 1/12 - Arrangements for reducing harmonics from AC input or output
H02M 5/458 - Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into DC by static converters using discharge tubes or semiconductor devices to convert the intermediate DC into AC using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
37 - Construction and mining; installation and repair services
Goods & Services
Pumps; vacuum pumps; dry vacuum pumps, booster vacuum pumps,
roots vacuum pumps, screw vacuum pumps; vacuum pump
installations; machine parts and controls for the operation
of vacuum pumps; drives for vacuum pumps; motors for vacuum
pumps; bearings for vacuum pumps; mechanical seals for
vacuum pumps; filters for vacuum pumps; rotors and shafts
for vacuum pumps; stators for vacuum pumps; parts and
fittings of the aforementioned. Installation, cleaning, repair and maintenance of pumps;
installation, cleaning, repair and maintenance of vacuum
pumps; installation, cleaning, repair and maintenance of
vacuum pump installations; reconditioning of vacuum pumps
and parts thereof; advisory, consultancy and information
services for the aforementioned.
Aspects and embodiments relate to plasma torch device component monitoring, a plasma torch device component monitoring system and a plasma torch device including such a monitoring system or suitable for use with such a system. The monitoring method comprises: collecting electromagnetic radiation generated by a plasma torch in a plasma torch device; analysing the collected electromagnetic radiation generated by the plasma torch; comparing the analysed electromagnetic radiation generated to known electromagnetic radiation associated with one or more components of the plasma torch device; and triggering one or more actions in the event that the analysed emission differs from the known emission. Such a monitoring method can allow for ameliorative action to be taken in the event that degradation of one or more components forming the device is detected.
G01N 21/73 - Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
An inlet head assembly for an abatement apparatus is disclosed. The inlet head assembly is for an abatement apparatus for abating an effluent stream from a semiconductor processing tool, the inlet head assembly comprises: an inlet head; a pilot nozzle extending within the inlet head and configured to supply at least one pilot combustion reagent stream to a downstream abatement chamber of the abatement apparatus; and a plurality inlet nozzles, each extending within the inlet head and configured to supply an associated effluent stream for abatement within the abatement chamber, the plurality of inlet nozzles being positioned around the pilot nozzle. In this way, the effluent streams are packed closer together around the pilot nozzle which improves the heating of the effluent stream, improving the DRE and reducing heat loss, which enables a reduction in the combustion reagents needing to be supplied.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
F23D 14/22 - Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone with separate air and gas feed ducts, e.g. with ducts running parallel or crossing each other
A detoxifying device of a structure wherein the deposits can be removed cleanly, without leaving residue, even for a nozzle that is provided with a narrow diameter portion and a wide diameter portion that is further to the downstream side than the narrow diameter portion, and to provide a nozzle scraper used in said detoxifying device.
B08B 9/043 - Cleaning the internal surfacesRemoval of blockages using cleaning devices introduced into and moved along the pipes moved by externally powered mechanical linkage, e.g. pushed or drawn through the pipes
B08B 1/16 - Rigid blades, e.g. scrapersFlexible blades, e.g. wipers
B08B 1/30 - Cleaning by methods involving the use of tools by movement of cleaning members over a surface
B08B 1/54 - Cleaning by methods involving the use of tools involving cleaning of the cleaning members using mechanical tools
B08B 13/00 - Accessories or details of general applicability for machines or apparatus for cleaning
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
A vacuum pump, which prevents adhesion of products even when a rotating body is stopped, by heating the rotating body using an alternating current (AC) magnetic field. Two heating electromagnets are disposed facing each other across a rotating body. The heating electromagnets receive a supply of AC electric current from a heating electric power source. Excitation of the heating from this AC electric current generates an AC magnetic field. The generated AC magnetic field intersects with the rotating body. Eddy current is generated around the intersecting AC magnetic field. The rotating body is heated by this eddy current. This heating enables deposition of products to be prevented even further, and realize improved pump operation efficiency.
An apparatus for conveying an effluent stream from a semiconductor processing tool for plasma treatment is disclosed. The apparatus comprises: a foreline conduit defining an inlet configured to receive the effluent stream; and a mixing lance positioned within the foreline conduit, the mixing lance defining a mixing conduit coupled with a first plasma reagent conduit configured to supply a first plasma reagent to the mixing lance and with a second plasma reagent conduit configured to supply a second plasma reagent to the mixing lance, the mixing conduit being configured to support mixing of the first plasma reagent and the second plasma reagent and defining a mixing lance outlet configured to deliver mixed first and second plasma reagent into the foreline conduit for mixing with the effluent stream.
B01D 53/00 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
[Problem] To provide a vacuum pump and a fixed disk with which movement of heat between a plurality of fixed disks can be suppressed. [Solution] A turbo molecular pump (vacuum pump) 100 includes: an outer cylinder (casing) 127; a rotor shaft (rotary shaft) 113 rotatably supported inside the outer cylinder 127; a plurality of rotary disks 200 that rotate together with the rotor shaft 113; and a plurality of fixed disks 201 alternately arranged between the plurality of rotary disks 200. The turbo molecular pump (vacuum pump) 100 exhausts gas via the interaction between the plurality of rotary disks 200 and the plurality of fixed disks 201. The plurality of fixed disks 201 include a first fixed disk 201a and a second fixed disk 201b adjacent to the first fixed disk 201a in the axial direction. The first fixed disk 201a has an outer peripheral protrusion (first contact part) 210 abutting on the second fixed disk 201b to position the first fixed disk in the axial direction, and the outer peripheral protrusion 210 has a space part 216 provided between the outer peripheral protrusion 210 and the second fixed disk 201b.
In order to efficiently remove deposited material adhering to the interior of an abatement device, an abatement device is equipped with a deposited material removing means for removing deposited material produced during abatement of exhaust gas. The deposited material removing means includes: a storage unit that stores a liquid; a gas supply unit that supplies pressurized gas to the storage unit; and a valve that sprays a mixed fluid of the liquid stored in the storage unit and the gas supplied by the gas supply unit.
The present disclosure relates to a vacuum gauge assembly 100 for measuring gas pressure in a vacuum system. The assembly comprises a pressure sensor element 130, an orientation sensor 160 that can determine an orientation of the pressure sensing element 130, and a microcontroller 155 configured to determine a gas pressure using data received from both the pressure sensing element 130 and the orientation sensor 160. The present disclosure also relates to an associated method of correcting a gas pressure output value in a vacuum gauge assembly 100.
G01L 21/12 - Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filamentsVacuum gauges of the Pirani type
To make it possible to detect the presence or absence of contact between a fixed blade and a rotary blade of a vacuum pump, a control device (200) of a vacuum pump (100) sets a floating position of a rotor shaft (113) in the axial direction to a preset reference position, brings the rotor shaft (113) into a preset predetermined operating state, and then offsets the position of the rotor shaft (113) by a predetermined amount. The control device (200) detects the presence or absence of contact between a rotary blade (102) and a fixed blade (123) on the basis of a change in speed data of the rotor shaft (113).
37 - Construction and mining; installation and repair services
Goods & Services
Installation, cleaning, repair and maintenance of machinery;
installation of vacuum pump installations, equipment and
apparatus; maintenance of vacuum pump installations,
equipment and apparatus; repair of vacuum pump
installations, equipment and apparatus; cleaning of vacuum
pump installations, equipment and apparatus; advisory,
consultancy and information services relating to the
aforementioned.
[Problem] To provide a vacuum pump and a vacuum pump control device capable of accurately determining a timing of replacement of a rotary blade by creating an index which enables quantitative and easy determination of the fatigue degree of the rotary blade in accordance with an operation state of the pump. [Solution] This vacuum pump is capable of determining a timing of replacement of a rotary blade, and comprises: a rotary blade incorporated in a vacuum pump body; and a sensor that is disposed in the vacuum pump body and that measures a physical quantity related to the rotary blade. The physical quantity measured by the sensor is sampled and extracted at each prescribed time during the operation of the vacuum pump. At a time point when the extraction is performed for an arbitrarily-defined number of sampling times, a physical quantity range having the highest density of values of the physical quantity at the respective sampling times up to said time point is found. Thus, a physical-quantity upper limit value, which is the upper limit value of the physical quantity range, and a physical-quantity lower limit value, which is the lower limit value of the physical quantity range, are defined, and each interval between the physical-quantity upper limit value and the physical-quantity lower limit value is changed by a fixed quantity in accordance with the magnitude of the physical quantity.
The present invention provides a vacuum pump and method for changing the evacuation performance of a vacuum pump which make it possible to adjust evacuation performance to a desired level, without changing the rotation speed of a vacuum pump comprising a Siegbahn evacuation mechanism. To this end, provided is a vacuum pump comprising a Siegbahn evacuation mechanism, wherein adjusting a gap in the axial direction or radial direction between a first fixed disk and a first rotating disk positioned at an entrance of an evacuation flow path of the Siegbahn evacuation mechanism makes it possible to change evacuation performance during rated operation. The following are methods for adjusting the gap: (A) a method in which the floating position of the rotating disk is offset to adjust the gap between the fixed disk and the rotating disk; and (B) a method in which a spacer (additional sheet) is inserted at a prescribed position in the vacuum pump to adjust the gap between the fixed disk and the rotating disk.
A magnetic bearing device and a vacuum pump configured to measure with high sensitivity a natural vibration mode of a rotating body in a floating system using a magnetic bearing. The natural vibration to be measured is a bending mode of the rotating body, a natural vibration mode of the rotor blades, a vibration mode associated with the stator, and a rigid body mode of the rotating body. The natural vibration may be computed by a central processing unit (CPU) of a control device or may be computed externally. In this manner, the natural vibration mode can be detected with high sensitivity.
A cryopump (10) includes a housing (12) having an inlet (16) to be connected to a vacuum chamber (18), a cold head (20) arranged in the housing (12) for generating a temperature for condensation of gases or vapors, a cold panel (30) connected to the cold head (20) and a non-evaporable getter (NEG) element (36) connected to the cold panel (30).
F04B 37/02 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for evacuating by absorption or adsorption
F04B 37/04 - Selection of specific absorption or adsorption materials
F04B 37/08 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
[Problem] To propose a vacuum pump and a magnetic bearing control device for which, in a case where information stored in a writable non-volatile memory is damaged, recovery is possible even without a specialized engineer or the like. [Solution] A vacuum pump 100 is characterized by comprising, in a control unit 100B, a determination/overwriting means that: determines whether a first storage means 204 is normal, and if the first storage means 204 is abnormal, recognizes individual identification information stored in a third storage means 203 as accurate and overwrites individual identification information stored in the first storage means 204; or determines whether a second storage means 202 is normal, and if the second storage means 202 is abnormal, recognizes the individual identification information stored in the third storage means 203 as accurate and overwrites individual identification information stored in the second storage means 202.
An inlet assembly includes an inlet nozzle configured to deliver an effluent stream into a combustion chamber of an abatement apparatus; and a reagent nozzle configured to deliver a reagent into the combustion chamber of the abatement apparatus, the reagent nozzle being located concentrically with respect to the inlet nozzle, the reagent nozzle being configured to deliver the reagent in different quantities at different positions around its perimeter.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
A vacuum pump and a heat insulating member for the vacuum pump are provided that improve the rigidity and heat insulating effect of a heat insulating portion and facilitate the control of intended temperatures of components within the pump. A turbomolecular pump having at least a cooling function includes a heat insulator that is disposed on a threaded spacer and has a hollow structure including cavities extending in the axial direction.
A vacuum pump comprising: a stator (114), the stator comprising one or more stator walls (122,124,126) defining a pumping chamber (118); and a heat transfer device (130) coupled to the one or more stator walls (122,124,126), the heat transfer device (130) comprising: a thermally conductive body (126;500); and a conduit (132) through the thermally conductive body and through which, in use, a purge gas is passed whereby to heat the purge gas.
A magnetic bearing device and a vacuum pump configured to recover from an abnormal state, such as oscillation in a magnetic bearing levitation system with low false detection of abnormalities. The magnetic bearing device includes a magnetic bearing controller that controls the magnetic bearing, and detects an abnormality of control by the magnetic bearing controller and configured to correct control parameters while continuing an operation of the magnetic bearing device. The device also detects abnormality of the control by the magnetic bearing controller based on an abnormality condition having a larger degree of abnormality than the first abnormality condition, and a stopping means for stopping the operation of the magnetic bearing device.
A vacuum pump stator (114) comprising: one or more walls (122, 124, 126) defining a pumping chamber (118); and a heat exchanger (130) comprising a conduit (132) through at least one of the one or more walls (122, 124, 126) which, in use, a purge gas is passed through whereby to heat the purge gas.
[PROBLEM] To perform magnetic bearing control using control setting data with a small amount of data. [SOLUTION] A control circuit 211 controls a magnetic bearing device that supports a rotor shaft in at least two directions. A memory unit 212a stores control setting data for a plurality of models of magnetic bearing devices. A data setting unit 212b selects, from the control setting data for the plurality of models of magnetic bearing devices, the control setting data for a magnetic bearing device to be controlled, and sets the control setting data in the control circuit 211. The control setting data includes control setting values of a plurality of items, and, when the control setting data for a certain model has an item of which control setting values for the two directions are the same, the control setting data includes only the control setting value of one of the two directions for that item. Moreover, for the item of which the control setting values for the two directions are the same, the data setting unit 212b identifies, from one of the control setting values, the other control setting value, and sets the control setting values for the two directions in the control circuit 211.
[Problem] To provide a vacuum pump, a control device, and a temperature rising time control method with which the temperature rising time of a pump can be reduced while a substrate is protected from high temperatures accompanying heating. [Solution] Temperature information is detected from a temperature sensor 3 located near a heater 1 and inputted to a control device 200. In a temperature rising state determination unit of the control device 200, determination of a temperature rising state is started in step 1. In step 3, the inputted temperature information is compared with a rated temperature. The rated temperature will differ depending on the model and specifications of the pump, but is defined as a target temperature necessary for preventing products from accumulating. As shown in step 5, when all the inputted temperature information exceeds the rated temperature, a post-temperature rise mode is determined to be in effect, and this process is completed in step 9. By contrast, when, as shown in step 7, the state of the temperature information is lower than the rated temperature, a temperature rising mode is determined to be in effect, and this process is completed in step 9. Thereafter, the operations of step 1 to step 9 are periodically repeated.
A gas capture element for capturing gas within a non-evaporable getter pump, said gas capture element comprising a surface structure comprising a plurality of structure elements formed from NEG material as pillars or microvilli gener- ated by additive manufacturing.
B01D 53/02 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols by adsorption, e.g. preparative gas chromatography
B01D 53/04 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
F04B 37/02 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for evacuating by absorption or adsorption
B33Y 80/00 - Products made by additive manufacturing
An inlet nozzle assembly, an abatement apparatus and a method are disclosed. The inlet nozzle assembly is for an abatement apparatus for treating an effluent stream from a semiconductor processing tool, the inlet nozzle assembly comprises: an inlet nozzle configured to deliver the effluent stream into an abatement chamber; a head defining an aperture for receiving the inlet nozzle; and an insulating mount configured to retain the inlet nozzle within the aperture. In this way, the thermal path between the inlet nozzle and the head is interrupted by the insulating mount which helps to prevent the inlet nozzle being cooled by the head, which helps to prevent condensates gathering as powder or particulates on the inlet nozzle.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
An abatement apparatus includes a combustion chamber formed by a foraminous sleeve defining an upstream portion of the combustion chamber for treating an effluent stream, the upstream portion of the combustion chamber having an inlet for receiving the effluent stream and a wetted sleeve fluidly coupled with foraminous sleeve, the wetted sleeve defining a downstream portion of the combustion chamber, wherein the foraminous sleeve is configured to provide a foraminous axial surface facing downstream towards the downstream portion of the combustion chamber. In this way, the foraminous surface not only faces inwards towards the upstream portion of the combustion chamber, but also faces downstream, towards the downstream portion of the combustion chamber.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
There are proposed a vacuum pump capable of suppressing a temperature increase of a stator blade by heat from a heating source without increasing the number of components, and a spacer used in such a vacuum pump. The present invention is a vacuum pump including a plurality of rotor blades which rotate together with rotating shafts, a plurality of stator blades which are disposed in multiple tiers between the rotor blades, and a plurality of spacers which are provided in multiple tiers inside casings and hold respectively the stator blades at predetermined positions, and, in the vacuum pump, at least one spacer of the plurality of spacers holding the stator blade has a concave surface in a contact surface which comes into contact with the stator blade.
A scroll pump 10' includes an inlet (28), an outlet, and two scroll members comprising a fixed scroll (12) and an orbiting scroll (14) interleaving with the fixed scroll (12) and mounted such that rotation of a motor imparts an orbital motion to the orbiting scroll (14) relative to the fixed scroll (12). Each scroll member has a base (16, 20) from which an involute wall (18, 22) extends to define a pumping chamber for conveying fluid from the inlet (28) to the outlet and which, with orbital movement of the orbiting scroll (14), transitions from an open configuration, in which the pumping chamber receives fluid from the inlet along a first flow path, to a closed configuration, in which the pumping chamber is isolated from the inlet. A base of one of the scroll members includes a channel (34) in fluid communication with the inlet and positioned so that, when the pumping chamber is in an open configuration, the pumping chamber receives fluid from the inlet along an additional flow path passing through the channel (34).
F04C 15/06 - Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
37 - Construction and mining; installation and repair services
Goods & Services
Installation, cleaning, repair and maintenance of machinery; installation of vacuum pump installations, equipment and apparatus; maintenance of vacuum pump installations, equipment and apparatus; repair of vacuum pump installations, equipment and apparatus; cleaning of vacuum pump installations, equipment and apparatus; advisory, consultancy and information services relating to the aforementioned.
37 - Construction and mining; installation and repair services
Goods & Services
Pumps; vacuum pumps; dry vacuum pumps, booster vacuum pumps, roots vacuum pumps, screw vacuum pumps; vacuum pump installations; machine parts and controls for the operation of vacuum pumps; drives for vacuum pumps; motors for vacuum pumps; bearings for vacuum pumps; mechanical seals for vacuum pumps; filters for vacuum pumps; rotors and shafts for vacuum pumps; stators for vacuum pumps; parts and fittings of the aforementioned. Installation, cleaning, repair and maintenance of pumps; installation, cleaning, repair and maintenance of vacuum pumps; installation, cleaning, repair and maintenance of vacuum pump installations; reconditioning of vacuum pumps and parts thereof; advisory, consultancy and information services for the aforementioned.
A modular abatement apparatus is for abatement of an effluent stream from a semiconductor processing tool and comprises: a housing defining a common housing chamber; a plurality of combustion chamber modules positionable within the common housing chamber for treating the effluent stream, each combustion chamber module containing a foraminous sleeve defining a combustion chamber therewithin. In this way, multiple combustion chambers may be provided within a single, common housing, each of which may be configured to treat a particular effluent stream flow. Accordingly, the number of combustion chambers can be selected to match the different types and flowrates of the effluent stream expected from any particular processing tool. This provides an architecture which is readily scalable to suit the needs of different effluent gas stream types and flowrates while retaining a common housing which may interface with upstream and downstream components.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
B01D 53/00 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
An inlet nozzle assembly includes: a delivery nozzle configured to deliver an effluent stream into an abatement chamber; and a mount configured to couple with an enclosure defining the abatement chamber, the mount being further configured to receive the delivery nozzle, wherein the delivery nozzle is configured to extend from the mount distal from the abatement chamber. In this way, the height of the mount and the location of the abatement chamber can remain fixed for different length delivery nozzles and different amounts of the delivery nozzle extend from the mount, dependent on the length of that nozzle.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
A wet electrostatic precipitator includes an ancillary component cleaning device with a cleaning assembly moveably supportable within an electrostatic precipitator; the cleaning assembly having a scraper configurable to abut an ancillary component of the electrostatic precipitator, such that movement of the cleaning assembly within the electrostatic precipitator causes movement of the scraper with respect to the ancillary component and wherein the ancillary component includes a component of a separation assembly provided in the wet electrostatic precipitator to maintain electrical isolation between the discharge and collection electrodes.
There are provided a vacuum pump which can effectively prevent stress corrosion cracking of a rotating body and has excellent corrosion resistance, and a rotating body of the vacuum pump. In a vacuum pump (e.g., a turbo-molecular pump 100) exhausting gas by rotation of a rotating body 103, the rotating body 103 has, on a surface thereof, a first area 1 covered with a first surface treatment layer 1A and a second area 2 covered with a second surface treatment layer 2A, and a boundary portion 3 between the first area 1 and the second area 2 has an area in which the surface treatment layers 1A and 1B of the first and second areas 1 and 2 overlap each other.
A vacuum pump which prevents dust generation from a shaft by avoiding contact between a top portion of the shaft and corrosive gas and includes a balance correction function for a rotating body. A vacuum pump includes a rotating body including a rotating shaft and a rotor blade which has a through hole, through which a top portion of the rotating shaft is caused to pass, and is fixed with the top portion, and a cover portion fixed to the rotating to cover the top portion and the through hole. The cover portion includes a balance correction function for the rotating body and corrosion resistance to exhaust gas. The cover portion, prevents contact between the top portion and corrosive gas and prevents dust generation from the shaft.
A multistage rotary vane vacuum pump (100) comprising: a first pumping stage (104) comprising: a first pump chamber (108); and a first rotor (112) rotatably mounted within the first pump chamber (108); a second pumping stage (106) comprising: a second pump chamber (110); and a second rotor (114) rotatably mounted within the second pump chamber (110); a first fluid passage (124) between the first pump chamber (108) and the second pump chamber (110) for allowing fluid to be pumped from the first pump chamber (108) to the second pump chamber (110); a second fluid passage (132) between the first pumping stage (104) and the second pumping stage (106) for allowing the fluid to be pumped from the second pumping stage (106) back to the first pumping stage (104); and a valve (134) disposed within the second fluid passage (132).
F04C 18/344 - Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups , , , , , or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group or and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/26 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves using bypass channels
F04C 29/12 - Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
A vacuum pump includes a contact portion that contacts a jig used to adjust the height of a seal member in an axial direction. At the time of assembling the vacuum pump in which a pump fixing component is arranged opposed to the outer periphery of a rotating body, the jig is positioned by the contact portion with the pump fixing component arranged on a base, and the pump fixing component is pressed in the direction of the base by the pressing portion of the positioned jig to adjust the height of the seal member in the axial direction. The pump fixing component is entirely lowered in the direction of the base by the adjustment.
A connector (16) for use in a vacuum pumping system (2) having a plurality of pumping modules (4), each pumping module (4) comprising a first vacuum pump (12) and a second vacuum pump (14). The connector (16) comprises: a conduit (50) having a first conduit portion (51) comprising a first opening (61) and a second opening (62); a second conduit portion (52) extending from the first conduit portion (51) at a branching point (54) between the first opening (61) and the second opening (62), the second conduit portion (52) comprising a third opening (63) at an end distal from the branching point (54); a first valve (71) disposed along the first conduit portion (51) between the branching point (54) and the second opening (62); and a second valve (72) disposed along the second conduit portion (52) between the branching point (54) and the third opening (63).
F04B 25/00 - Multi-stage pumps specially adapted for elastic fluids
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
[Problem] To provide a vacuum pump capable of providing further improved safety. [Solution] A turbomolecular pump 100 comprises: a casing 215 that is provided with at least an exhaust outlet 133 from among an air intake inlet 101 and the exhaust outlet 133; and a heater 148 that sets the temperature high at at least a portion of the casing 215 from among the exhaust outlet 133 and the casing 215. The turbomolecular pump 100 has an annular and thin-plate-like side-surface cover 224 that covers a side surface of the casing 215, and a thin-plate-like exhaust outlet cover 222 that covers the circumference of the exhaust outlet 133. The exhaust outlet cover 222 and the side-surface cover 224 are separate components. The exhaust outlet cover 222 can be detached even in a state of having the side-surface cover 224 attached.
A pump monitoring system includes a controller and a microphone for detecting sound waves. The controller is configured to receive an audio signal from the microphone representing sound waves generated by the vacuum pump. The controller processes the received audio signal to generate a frequency domain representation of the audio signal. The frequency domain representation of the audio signal is analysed to identify at least one fault condition frequency component indicative of a fault condition. A fault condition signal is output to identify the fault condition in dependence on the identification of the at least one fault condition frequency component. In a further embodiment, the pump monitoring system comprises a vibration sensor for detecting vibrations. The present invention also relate to a vacuum pump; a method of monitoring a vacuum pump; and a nontransitory computer-readable medium.
A turbomolecular pump is obtained in which a gas absorbing substance is placed without increasing the axial length of an inlet port due to the gas absorbing substance. The turbomolecular pump includes a rotor portion and a stator portion in a casing (outer cylinder 127). The turbomolecular pump includes a getter pump portion, which is placed in the stator portion or the casing, and a heater portion 402, which performs at least one of activation and regeneration of a gas absorbing substance 401 of the getter pump portion.
F04B 37/06 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for evacuating by thermal means
F04B 37/02 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for evacuating by absorption or adsorption
F04B 49/00 - Control of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for in, or of interest apart from, groups
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
To obtain a vacuum pump which appropriately performs temperature management of a gas flow path and reduces restrictions on a gas flow rate attributable to the temperature management. A cooling tube performs temperature adjustment of a gas flow path. A first temperature sensor is arranged at a position closer to the gas flow path than the cooling tube, a second temperature sensor is arranged at a position closer to the cooling tube than the gas flow path, and a control apparatus controls, based on a sensor signal of the first temperature sensor and a sensor signal of the second temperature sensor, (an on-off valve of) the cooling tube so that a temperature of the gas flow path approaches a predetermined gas flow path target temperature.
[Problem] To provide an evacuation device which can be easily reduced in size. [Solution] This evacuation device comprises a turbomolecular pump and a plasma generator 210 having a displaceable electrode 214, and when not in operation and no plasma is generated, same can block a plasma communication opening 228 through displacement of the electrode 214. A pipe for supplying a raw-material gas for generating a plasma is connected to the plasma generator 210, and the raw-material gas is utilized for displacement of the electrode 214. A piston 220 is disposed in the plasma generator 210, and the electrode 214 is displaced by a pressure difference acting on the piston 220.
At least a part of a stator for a vacuum pump, comprising: a first wall and one or more sidewalls extending therefrom, the first wall and the one or more sidewalls define an internal cavity, and an outlet channel formed through a sidewall of the one or more sidewalls, the outlet channel having an opening at an internal surface of one or more of the sidewalls, the outlet channel being for allowing a fluid to flow from the internal cavity to an outside of the at least a part of the stator. The internal surface of the first wall is contiguous with the opening. Thus, liquid and particulate matter within the at least a part of a stator will tend to flow, due to gravity, out of the stator via the outlet channel.
F04C 28/26 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves using bypass channels
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 29/12 - Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
At least a part of a stator for a vacuum pump, comprising: a plurality of walls defining therebetween at least a part of a pumping chamber; a channel formed within one or more of the walls of the plurality of walls, the channel comprising a first opening at a first end of the channel and a second opening at a second end of the channel, the first opening being an opening in an internal surface of the one or more of the walls and being in fluid communication with the pumping chamber; and a pressure relief valve disposed within the channel.
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/24 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves
A fluid routing module for a vacuum pumping system, the fluid routing module comprising: a first fluid inlet; a second fluid inlet; a fluid outlet; a first fluid line coupled between the first fluid inlet and the fluid outlet; a second fluid line coupled between the second fluid inlet and the fluid outlet; a first restrictor configured to restrict a flow of the fluid therethrough, the first restrictor being disposed along the first fluid line; a vacuum pump disposed along the second fluid line; and one or more valves configured to selectably direct a fluid flow through either the first fluid line or the second fluid line.
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
A system comprising: a semiconductor processing tool (102) comprising a process chamber (108); a valve module (104) configured to receive a fluid from the process chamber (108) and to selectably direct a flow of said fluid; and a cooling apparatus (402) configured to supply a flow of a cooling fluid to the process chamber (108); wherein the valve module (104) and the cooling apparatus (402) are arranged in a stacked configuration.
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
C23C 16/44 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
A channel seal (200, 300) for a scroll pump (100). The channel seal comprises an inner portion (210, 310) and an outer portion (220, 320) located around the periphery of the inner portion. The outer portion is formed from a more wear resistant material than the inner portion. A surface of the inner portion which is subject to wear during operation of the scroll pump is axially offset from a surface of the outer portion which is subject to wear during operation of the scroll pump.
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
[Problem] To provide a vacuum pump capable of stably controlling the temperature of gas without impairing the cooling effect of the gas. [Solution] A vacuum pump (100) is provided with: a casing (126, 127); a rotor shaft (113) that is rotatably supported inside the casing; a plurality of stages of rotary blades (102) that are fixed to the rotor shaft and rotatable with the rotor shaft; a plurality of stages of stationary blades (123) that are fixed to the casing and disposed between the plurality of stages of rotary blades; and a plurality of stages of stationary blade spacers (125) that support the plurality of stages of stationary blades. The vacuum pump (100) includes a temperature control means (110) that is provided in a specific spacer (128, 228) which is one stage among the plurality of stages of stationary blade spacers, and performs temperature control for the specific spacer, and a temperature sensor (185) that is provided in a position closer to the temperature control means than a gas flow path (F1) of a turbo pump unit, which is composed of the plurality of stages of rotary blades and the plurality of stages of stationary blades.
A gas treatment system includes: a main exhaust line for guiding exhaust gas to a detoxification apparatus; a bypass line for guiding the exhaust gas to an emergency detoxification apparatus; an upstream exhaust line; and a three-way valve capable of switching a flow of the exhaust gas from the upstream exhaust line to the main exhaust line or the bypass line, in which the bypass line includes: a gate valve; a gas introduction pipe through which a second gas is introduced; and a pressure gauge configured to detect pressure. When the three-way valve discharges gas to the main exhaust line, in a state where the second gas has been introduced into a closed flow path C between the gate valve and the three-way valve from the gas introduction pipe, internal leakage in the three-way valve is detectable using change in the pressure detected by the pressure gauge.
A vacuum pump and/or abatement system connector (50) for connecting a vacuum pump and/or abatement apparatus (16) to a fluid line (6), the vacuum pump and/or abatement system connector (50) comprising: a conduit (56) for permitting the flow therethrough of a fluid, the conduit (56) having a first end (60) and a second end (64) opposite to the first end (60), the conduit (56) being expandable and compressible such that a length of the conduit (56) between the first end (60) and the second end (64) may be varied; a first flange (52) at or proximate to the first end (60) of the conduit (56); a second flange (54) at or proximate to the second end (64) of the conduit (56); and a pin (58); wherein the pin (58) is fixedly coupled to the first flange (52) and is received in an opening (62) through the second flange (54), thereby to substantially prevent or oppose lateral movement of the flanges (52, 54) with respect to each other.
F16L 23/02 - Flanged joints the flanges being connected by members tensioned axially
F16L 27/111 - Adjustable jointsJoints allowing movement comprising a flexible connection only the ends of the pipe being interconnected by a flexible sleeve the sleeve having the form of a bellows with multiple corrugations the bellows being reinforced
[Problem] To provide a vacuum pump with which it is possible to accurately detect any change in capacitance. [Solution] The present invention has: an outer tube 127, etc., having an exhaust pathway through which exhaust gas flows; a threaded spacer 131 serving as a subject of heating performed by a heater 148; a base part 129 serving as a subject of cooling performed by a coolant pipe 149; and a foreign-matter sensor 210 that detects foreign matter. The foreign matter sensor 210 is provided with a pair of electrodes for which the capacitance can change due to deposition of foreign matter, and a capacitance measurement unit that measures the capacitance between the electrodes. The electrodes are installed on the threaded spacer 131, and the capacitance measurement unit is installed on the base part 129.
Aspects relate to monitorable plasma torch device components and in particular to monitoring and predictive maintenance of one or more such monitorable plasma torch device components. One aspect provides a monitorable plasma torch device component, the component comprising: a component body and a sacrificial component located in an erosion zone of the component body. The sacrificial component comprises material which differs from the plasma torch device component body and which, on exposure to a plasma torch in a plasma torch device, generates electromagnetic radiation distinct from that of the plasma torch device component body. The distinct electromagnetic radiation generated is indicative of erosion of the monitorable plasma torch device component in the erosion zone. Such a monitorable plasma torch device component can facilitate effective component monitoring which allows for ameliorative action to be taken in the event that degradation of the device component is detected.
A vacuum chamber (10) includes a housing (12) and a tube (16) connected to the housing (12). A side wall of the tube (16) intersects a side wall of the housing (12) to define an interface (25) through which gas passes between the housing (12) and the tube (16).
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
H01J 49/24 - Vacuum systems, e.g. maintaining desired pressures
98.
SCROLL PUMP AND ANTI-ROTATION DEVICE FOR A SCROLL PUMP
A scroll pump anti-rotation device for resisting relative rotational movement between two scrolls and a scroll pump comprising such an anti-rotation device are disclosed. The anti-rotation device (50) comprises: a body portion (53) from which two perpendicular arms (56,58) extend, a first arm (56) being configured for connection in a fixed relation to one of the two scrolls and a second arm (58) being configured for connection in a fixed relation to the other of the two scrolls. The first arm is configured to flex to allow movement of the one scroll relative to the other scroll in a first direction and the second arm being configured to flex to allow movement of the other scroll in a second direction generally orthogonal to the first direction; wherein at least one of the two arms is mounted within the body portion (53).
F01C 17/06 - Arrangements for drive of co-operating members, e.g. for rotary piston and casing using cranks, universal joints, or similar elements
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
99.
VACUUM PUMP, VACUUM PUMP CONTROLLER, AND REMOTE CONTROLLER
A vacuum pump, a vacuum pump controller, and a remote controller are provided that can reduce the workload of users and field service engineers. A vacuum pump 10 includes a turbomolecular pump 100 that exhausts gas inside a semiconductor manufacturing apparatus X, and a controller 200 that performs control on the turbomolecular pump 100. The controller 200 includes a remote signal receiving means that receives a command signal from a remote controller 300, which remotely controls the turbomolecular pump 100, and changes a setting relating to an operating specification of the turbomolecular pump 100 on the basis of the command signal received by the remote signal receiving means.
A method of cooling an abatement apparatus for abatement of an effluent stream from a semiconductor processing tool includes: providing at least one modular cooling assembly having a cooling capacity; determining a cooling requirement of an abatement apparatus; and incorporating into the abatement apparatus a number of the modular cooling assemblies whose cumulative cooling capacity at least matches the cooling requirement of the abatement apparatus. In this way, multiple modular cooling assemblies may be incorporated into the abatement apparatus, each of which provides cooling capacity. The number of modular cooling assemblies can be selected to suit the cooling requirement of the abatement apparatus.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
