Aspects of the present invention relate to a vacuum pressure gauge for measuring a vacuum pressure in a vacuum system component. The vacuum pressure gauge has a base for mounting the vacuum pressure gauge to the vacuum system component. A vacuum pressure sensor is fastened to the base. A control unit is provided to control the vacuum pressure sensor. A power supply unit is provided for supplying power to the vacuum pressure sensor. The power supply unit and the vacuum pressure sensor have complementary electrical connectors for connecting the power supply unit to the vacuum pressure sensor. The power supply unit is removably mounted to the vacuum pressure sensor.
G01L 19/00 - Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
A lubricant cartridge for use in a vacuum pump containing reservoir; at least one lubricant receiving and/or retaining medium located within the lubricant reservoir; wherein said at least one lubricant receiving and/or retaining medium contains an embedded electrode arrangement; and wherein said electrode arrangement is connectable to a controller for detecting changes in an electrical parameter of lubricant within the lubricant reservoir.
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F16N 29/00 - Special means in lubricating arrangements or systems providing for the indication or detection of undesired conditionsUse of devices responsive to conditions in lubricating arrangements or systems
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
3.
FOREIGN MATTER DEPOSITION AMOUNT ESTIMATION DEVICE AND VACUUM PUMP
] Provided is a foreign matter deposition amount estimation device capable of estimating a deposition amount of foreign matter. A foreign matter deposition amount estimation device 210 used in a turbo molecular pump 100 including an inlet port and an outlet port includes: an exhaust member 212 connectable to the outlet port 133; a conductor member 214 which is disposed at an inner side of the exhaust member 212, at least a part of the conductor being provided with a gap t with respect to an inner peripheral surface 213 of the exhaust member 212, and to which a voltage for detecting electrostatic capacitance is applied between the conductor member and the exhaust member 212; a measurement device 216 that measures electrostatic capacitance between the exhaust member 212 and the conductor member 214; and an arithmetic device 218 that estimates from a change in electrostatic capacitance a deposition amount of foreign matter inside the turbo molecular pump 100.
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04D 27/00 - Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
G01N 27/22 - Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
4.
FOREIGN MATTER DEPOSITION AMOUNT ESTIMATION DEVICE AND PIPING COMPONENT
Provided is a foreign matter deposition amount estimation device capable of estimating a deposition amount of foreign matter. Provided are a conductive casing 212 having an inlet 225A and an outlet 225B, a conductor member 214 disposed at an inner side of the casing 212 with a gap t from the casing 212, a measurement device 216 that measures electrostatic capacitance between the casing 212 and the conductor member 214, and an arithmetic device 218 that estimates, from a change in electrostatic capacitance, a foreign matter deposition amount in the casing 212. The conductor member 214 includes a communication port 236.
G01N 27/22 - Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
G01F 23/26 - Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring variations of capacity or inductance of capacitors or inductors arising from the presence of liquid or fluent solid material in the electric or electromagnetic fields
G01B 7/06 - Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width, or thickness for measuring thickness
5.
DYNAMIC DISPLAY OF INFORMATION FOR A VACUUM OR ABATEMENT SYSTEM
A dynamic display is disclosed that is configured to be linked to an apparatus, such as a vacuum pump, vacuum pressure gauge or gas abatement system. The dynamic display comprises: an input configured to receive signals from the apparatus, at least one of the signals being indicative of a current state of the apparatus; processing circuitry configured to generate a representation of information relating to the apparatus. The information includes: data relevant to the apparatus including operational data derived from the received signal. The processing circuitry is configured to periodically update the generated representation and the display comprises an output means configured to display the representation. The output means comprises an electronic paper display f configured to provide the display when powered and when not powered.
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04B 51/00 - Testing machines, pumps, or pumping installations
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04D 27/00 - Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
G02F 1/167 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulatingNon-linear optics for the control of the intensity, phase, polarisation or colour based on translational movement of particles in a fluid under the influence of an applied field characterised by the electro-optical or magneto-optical effect by electrophoresis
G09G 3/34 - Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix by control of light from an independent source
Vacuum pump housing (100), in particular for a multistage 2-shaft vacuum pump, comprising: a housing element (10) having an upper side (11) and an opposite lower side (13), a plurality of pump chambers (20) defined by the housing element separated by respective chamber walls (31) configured to receive rotor elements connected to one of the pump shafts, wherein the chamber walls extend at least partially between the upper side (11) and the lower side (13) of the housing element, wherein at least one chamber wall comprises openings (16, 18) extending from one pump chamber (20) to a directly adjacent pump chamber (20), wherein the openings are separated by an intermediate section (26) of the chamber wall (31), wherein at least one heat spreading element (34) extends from the intermediate section (26) towards the upper side (11) and/or lower side (13).
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
A mechanical vacuum pump and method of adapting a mechanical vacuum pump are disclosed. The mechanical vacuum pump may be a screw pump (5) and comprises: a pumping mechanism (40) for pumping a gas from an inlet (32) to an outlet (10); a motor (70) for driving the pumping mechanism; a non-return exhaust valve (12); a tank (50) providing a volume in fluid communication with gas within the pumping mechanism; and a controller (60) for controlling operation of the vacuum pump. The controller is configured to: determine that the pump is to enter a standby mode in which the exhaust valve is closed; and boost a speed of the pumping mechanism for a predetermined time prior to the exhaust valve closing to reduce an amount of gas within the pump and the tank.
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 28/06 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
F04C 28/24 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves
Provided is a structure for mitigating an impact in a radial direction of a flange axis when an impact is applied to a flange. A vacuum pump includes: a casing having an inlet port flange with a bolt hole formed therein; a rotor shaft disposed within the casing; and a rotor blade that is able to rotate together with the rotor shaft; wherein the inlet port flange includes a recessed portion that is formed continuously adjacent to the bolt hole in a radial direction of the rotor shaft and has a depth smaller than a thickness of the inlet port flange to leave a first thin portion, and a through hole formed adjacent to the bolt hole in a direction opposite to a rotational direction of the rotor shaft with a second thin portion interposed therebetween.
A non-contacting scroll pump, the non-contacting scroll pump comprising a housing, an orbiting scroll located within the housing, and a thrust bearing assembly located within the housing for axially supporting the orbiting scroll. The thrust bearing assembly comprises a first plate fixed to the orbiting scroll, a second plate spaced apart from the first plate, a ball bearing located between the first plate and the second plate, the ball bearing being configured to roll against the first and second plates during orbiting of the orbiting scroll. The thrust bearing assembly further comprises a coupling structure extending between the housing and the second plate to couple the housing to the second plate, wherein the coupling structure comprises a thermal break for reducing heat transfer from the second plate to the coupling structure during operation of the non-contacting scroll pump.
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
A vacuum pump (100) comprising: a first chamber (112); a second chamber (106); a rotatable shaft (110) extending from the first chamber (112) into the second chamber (106); one or more sealing members (208) extending around the shaft (110) and positioned between the first chamber (112) and the second chamber (106); and a dynamic sealing element (206) extending around the shaft (110), the dynamic sealing element (206) having a first side (220) facing towards the first chamber (112) and an opposing second side (222) facing towards the second chamber (106); wherein the dynamic sealing element (206) is configured to, responsive to a positive pressure differential between the first side (220) and the second side (222) being at or above a threshold value, axially deform such that the second side (222) contacts a first surface of the one or more sealing members (208), thereby restricting and/or preventing flow of fluid between the first chamber (112) and the second chamber (106).
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
A vacuum pump is disclosed that provides both a drag and regenerative pumping effect. The vacuum pump comprises: one or more pumping channels; a stator and a rotor mounted on a rotatable shaft. The rotor comprises a plurality of blades extending from a surface of the rotor and into the pumping channel, the surface forming a first wall of the pumping channel, a second wall of the pumping channel facing the first wall comprises a surface of the stator. A distance between the first and second walls provides a depth of the pumping channel and is between 3 and 12mm. A surface area of the pumping channel provided by the rotor is between 30 and 70% of a total surface area of the pumping channel.
[Problem] To provide a vacuum evacuation device having excellent characteristics related to cleaning of deposits. [Solution] The vacuum evacuation device comprises: a pressure vessel 100B; a rotor lower-cylinder part 103b rotatably held in the pressure vessel 100B; and a screw stator 131 disposed to face the rotor lower-cylinder part 103b in the pressure vessel 100B with an outer discharge gap part 264 interposed therebetween. A voltage can be applied to the screw stator 131. Projected parts 131b that are continuous at a prescribed angle in the circumferential direction are disposed at at least a part of the surface where the screw stator 131 and the rotor lower-cylinder part 103b face each other, thereby a drag pump part is constituted. The projected parts 131b are each formed into a tapered shape narrowing to the tip side thereof.
An abatement apparatus includes: an abatement chamber configured to receive aneffluent stream and to provide an abated effluent stream; a wet scrubber located downstream of the abatement chamber, the wet scrubber being configured to receive the abated effluent stream and provide a scrubbed effluent stream; and a catalyst bed located downstream of the wet scrubber, the catalyst bed being configured to receive the scrubbed effluent stream and provide a remediated effluent stream. In this way, undesirable compounds present in the abated effluent stream, which are there because they were either already present in the effluent stream and were insufficiently abated by the abatement chamber or because they are abatement by-products generated within the abatement chamber, can be remediated, removed or reduced by the catalyst bed prior to being vented by the abatement apparatus.
There is provided a method (400) of manufacturing a clamshell stator for a vacuum pump comprising providing (410) a first half-shell stator component and a second half-shell stator component, wherein the first half-shell stator component and the second half-shell stator component comprise respective first and second internal walls for defining a plurality of pump chambers having gas transfer passages arranged therebetween; boring (420) a first bore extending through one or more of the first internal walls and defining first portholes; boring (430) a second bore extending through one or more of the second internal walls and defining second portholes; arranging (440) a first sealing means and a second sealing means respectively to seal one or more of the first portholes and second portholes such that a fluid connection is provided between the outlet and inlet of adjacent pump chambers.
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
A sealing gasket (20) for a vacuum pump, the sealing gasket (20) comprising: a first surface (30, 40); a second surface (32, 42) opposite to the first surface (30, 40); opposing side walls (34, 36; 44, 46) disposed between the first surface (30, 40) and the second surface (32, 42); and one or more protrusions (48a, 48b, 48c, 48d) extending from the first surface.
A shell stator (12, 14) for a vacuum pump, the shell stator (12, 14) comprising: a seal groove (50, 52) formed in a surface of the shell stator (12, 14), the seal groove (50, 52) being defined by a first side wall (60), a second side wall (62) opposite to the first side wall (60), and a bottom surface (64) disposed between the first side wall (60) and the second side wall (62), the bottom surface (64) being opposite to an opening of the seal groove (50, 52); wherein the seal groove (50, 52) comprises: a protrusion (68) formed in the first side wall (60) and extending towards the second side wall (62); and an indentation (69) formed in the second side wall (62) opposite to the protrusion (68).
[Problem] To provide a vacuum pump comprising a Siegbahn exhaust mechanism wherein the exhaust quantity is stable and the exhaust performance (P-Q characteristic) is improved, even when a large exhaust quantity of gas has been made to flow, as well as to provide a stator disc that is used in a Siegbahn exhaust mechanism. [Solution] In a vacuum pump according to the present embodiment, said vacuum pump including a Siegbahn exhaust mechanism, an inner diameter-side turnaround location is provided before the minimum diameter of a rotor disc 9. In other words, the inner diameter-side turnaround is performed partway along a flow path. Additionally, an annular rib part 250 for maintaining an exhaust gas sealing property and a communication port 260 serving as a passage for the exhaust gas to a lower level are positioned respectively on and in the stator disc 50 in this section. Due to the rib part 250 and the communication port 260 being thus positioned, the use of a section where the exhaust speed decreases in the exhaust flow path is avoided, and as a result, it is more difficult for the flow speed of the exhaust gas to decrease. In other words, a decrease in the gas exhaust speed near the rotational center of the rotor disc 9, which is a problem in Siegbahn exhaust mechanisms, can be prevented.
A sealing gasket (20) for a vacuum pump comprising: a first sealing member (22) defining a closed shape (preferably a rounded square or rounded rectangle) and comprising: a first surface (30); a second surface (32) opposite the first surface (30); a first inner surface (34); and a first outer surface (36) opposite to the first inner surface (34), wherein the first inner surface (34) and the first outer surface (36) are disposed between the first surface (30) and the second surface (32); a second sealing member (24) defining a closed shape (preferably a rounded square) and comprising: a third surface (40); a fourth surface (42) opposite the third surface (40); a second inner surface (44); and a second outer surface (46) opposite to the second inner surface (44), wherein the second inner surface (44) and the second outer surface (46) are disposed between the third surface (40) and the fourth surface (42); a first longitudinal sealing member (26) connected between the first outer surface (36) and the second outer surface (46); and a second longitudinal sealing member (28) connected between the first outer surface (36) and the second outer surface (46).
A vacuum pump having multiple pumping mechanisms mounted on at least two shafts is disclosed. The vacuum pump comprises a combined electric machine and magnetic gearing mechanism comprising a first magnetic gear member and a second magnetic gear member for rotating the at least two shafts at two different speeds; wherein at least one component of the magnetic gearing mechanism comprises a rotor of the electric machine or a stator of the electric machine.
H02K 7/14 - Structural association with mechanical loads, e.g. with hand-held machine tools or fans
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D 25/06 - Units comprising pumps and their driving means the pump being electrically driven
H02K 16/02 - Machines with one stator and two rotors
H02K 21/14 - Synchronous motors having permanent magnetsSynchronous generators having permanent magnets with stationary armatures and rotating magnets with magnets rotating within the armatures
H02K 49/10 - Dynamo-electric clutchesDynamo-electric brakes of the permanent-magnet type
A vacuum pump (100) comprising: a housing (104) in which a pumping chamber (131) is formed; a shaft (107) arranged for rotation within the housing (104) about its lengthwise axis, the lengthwise axis extending in an axial direction (110); a rotor (141a) located in the pumping chamber (131), the rotor (141a) being fixedly attached to the shaft (107); and a disc (161a) located in the pumping chamber (131), the disc being fixedly attached to the shaft (107) at a first side of the rotor (141a); wherein a first end of the shaft (107) is substantially immovable relative to the housing (104) in the axial direction (110); a second end of the shaft (107) is movable relative to the housing (104) in the axial direction (110), the second end being opposite to the first end; a wall (181) of the pumping chamber (131) comprises a recess (201) formed therein; and at least a part of the disc (161a) is located in the recess (201).
F01C 21/10 - Outer members for co-operation with rotary pistonsCasings
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
A pressure sensor is disclosed that uses an ion-trap device; a coherence detector configured to detect a coherence decay of qubits within the ion-trap device; and circuitry to determine a pressure from the detected decay of coherence. (Figure 1)
A vacuum pump and a vacuum exhaust system are provided that can improve the cleaning efficiency of a radical generator, effectively clear reaction products accumulating in the vacuum pump with fewer radical generators, and also reduce operating costs. A radical supply port 134A is disposed adjacent to an exhaust side outlet of an exhaust mechanism 132 and provided to extend through a housing 110A, and a radical supply means 135 supplies radicals 136 into the housing 110A through the radical supply port 134A and causes the supplied radicals 136 to flow to an area in which reaction products accumulate in the exhaust mechanism 132.
A vacuum pumping system and method for evacuating at least one vacuum chamber in a semiconductor processing tool are disclosed. The vacuum pumping system comprises: a plurality of vacuum pumps for evacuating the at least one vacuum chamber; and a water vapour inlet configured to receive a flow of water and to admit a flow of water vapour into the vacuum pumping system upstream of at least one of the vacuum pumps, to purge a flow of process gas evacuated from the semiconductor processing tool.
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
A pressure sensor and method for sensing pressures in the sub-atmospheric pressure region are discussed. The pressure sensor comprises :a substrate having a surface in contact with a gas whose pressure is to be measured. A driving means for generating a surface acoustic wave in the surface of the substrate. A detecting means for detecting a change in at least one property of the surface acoustic wave caused by a damping effect due to momentum transfer or drag force from gas molecules interacting with the sensing surface, the detecting means being configured to determine a pressure of the gas from the detected at least one property change.
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
A flux estimator for estimating an air-gap flux in an electric motor includes a resistance compensation stage having a first multiplying digital-to-analogue converter, and an inductance compensation stage having a second multiplying digital-to-analogue converter. The flux estimator determines a first gain (Ku) for compensating for a stator resistance (Ra); and a second gain (KLa) for compensating a stator inductance (La). The first gain (Ku) is supplied to the first multiplying digital-to-analogue converter to generate a first output signal (VIAR) providing a scaled representation of the voltage drop across the stator resistance (Ra) per phase. The second gain (KLa) is supplied to the second multiplying digital-to-analogue converter to generate a second output signal (IA_LA) providing a scaled representation of the stator inductance (La) per phase. An air-gap flux estimation signal (PSI_MON) is generated in dependence on the first output (VIAR) and the second output (IA_LA).
There is provided a sealing gasket (100) for a vacuum pump, comprising a first annular sealing member (110), a second annular sealing member (120), a first longitudinal sealing member (130) and a second longitudinal sealing member (140). The first and second longitudinal sealing members (130, 140) are each connected between the first annular sealing member (110) and the second annular sealing member. (120) The first annular sealing member (110), second annular sealing member (120), first longitudinal sealing member (130) and second longitudinal sealing member (140) comprise metal.
[Problem] To provide a vacuum exhaust system, a vacuum pump cleaning method, and a cleaning unit that are capable of returning a vacuum pump to a state where, even if the vacuum pump is stopped in a state where a deposit constituting a byproduct is fixed to a rotor or the like, the vacuum pump can be easily restarted. [Solution] The present invention comprises: a vacuum pump 15 for discharging a process gas containing a condensable gas or oxidized dust; a cleaning solution storage tank 36 for storing a cleaning solution for removing a process gas deposit that has accumulated in a gas flow passage of the vacuum pump 15; a cleaning solution introduction pump 37 for introducing the cleaning solution in the cleaning solution storage tank 36 into the gas flow passage from an exhaust side of the gas flow passage; and a vacuum pump 39 for drawing in and discharging the cleaning solution in the gas flow passage from the exhaust side of the gas flow passage.
B08B 3/08 - Cleaning involving contact with liquid the liquid having chemical or dissolving effect
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
H01L 21/31 - Treatment of semiconductor bodies using processes or apparatus not provided for in groups to form insulating layers thereon, e.g. for masking or by using photolithographic techniquesAfter-treatment of these layersSelection of materials for these layers
H01L 21/205 - Deposition of semiconductor materials on a substrate, e.g. epitaxial growth using reduction or decomposition of a gaseous compound yielding a solid condensate, i.e. chemical deposition
A separator for separating contaminants suspended within an effluent stream includes an inlet conduit configured to receive from an effluent stream containing contaminants flowing in a first major direction from a lower portion of said separator towards an upper portion of said separator; a spray nozzle configured to spray an entraining fluid within the inlet conduit in the first major direction to entrain the contaminants within the effluent stream; a first flow redirection structure located downstream of the inlet conduit; and a first separation conduit located downstream of the first flow redirection structure, wherein the first flow redirection structure is configured to redirect flow of the effluent stream and the entraining fluid from an axial flow from the inlet conduit to a circumferential flow in a second major direction opposing the first major direction within the first separation conduit.
B01D 50/40 - Combinations of devices covered by groups and
B01D 45/16 - Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces generated by the winding course of the gas stream
A vacuum pumping or abatement system (400) for respectively evacuating or abating process gas from a process chamber, the system comprising: a frame (402) having a first end, a second end opposite to the first end, and a plurality of frame members (448) disposed therebetween, the frame (402) defining an interior space (401); a vacuum pumping or abatement apparatus positioned within the interior space and comprising a plurality of inlets (418); and a valve module (404) comprising a plurality of valves (426), each valve of the plurality of valves (426) configured to control a flow of a respective portion of the process gas to a corresponding inlet of the plurality of inlets (418); wherein each valve (426) of the valve module (404) is positioned in a common plane (450) substantially parallel to a boundary of the interior space defined by the first end; and the valve module (404) is positioned within the interior space (401) such that the valve module (404) is at or proximate to the boundary.
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04B 39/10 - Adaptation or arrangement of distribution members
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
Provided is a vacuum exhaust system (10) that can send exhaust gas and diluent gas to a predetermined location while maintaining a constant temperature without lowering a temperature of the exhaust gas and the diluent gas as much as possible. The vacuum exhaust system (10) includes: a gas exhaust pipe (14) that is connected to a subsequent stage of a vacuum pump (12) and has a vacuum heat insulating pipe structure with a vacuum layer (21) between an inner pipe (19), through which used gas (G1) discharged from the vacuum pump (12) passes, and an outer pipe (20) surrounding the inner pipe (19); and a diluent gas introduction pipe (24) that introduces diluent gas (G2) for heating the used gas (G1) into the inner pipe (19) so that the used gas (G1) is maintained in a gaseous state in the gas exhaust pipe (14).
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04B 41/02 - Pumping installations or systems specially adapted for elastic fluids having reservoirs
H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
[Problem] Provided is a vacuum pump system and an interface circuit in which one interface circuit can monitor and control a plurality of vacuum pumps when the plurality of vacuum pumps are monitored and controlled from a customer supervisory control tool via the interface circuit [Solving Means] Turbomolecular pumps 100 and control devices 300 are provided in pairs. An interface circuit 23 and AC/DC power supply circuits 15A, 15B, and 15C are not included in the control devices 300 but are configured in a separate integration unit 400. Conventional interface circuits 13A, 13B, and 13C are provided for respective turbomolecular pumps 100 in order to monitor and control respective control devices 200A, 200B, and 200C. In contrast, the interface circuit 23 integrally monitor and control the control devices 300A, 300B, and 300C. Thus, one interface circuit 23 is configured for three turbomolecular pumps 100.
[Problem] To provide a vacuum evacuation device that is low-cost and excellent in cleaning effect. [Solution] This vacuum evacuation device includes a plasma generation device 210. The plasma generation device 210 is configured to, for example, include: a plasma generation chamber 230 formed in a cathode electrode part 216; a fuel gas supply port part 214 arranged in an annular flow passage; a second insulation part 220 arranged in the plasma generation chamber 230; a connector 222 arranged in the plasma generation chamber 230; and a first insulation part 218 for electrically insulating the plasma generation chamber 230. Radicals can be supplied from the second insulation part 220 to an inside of a case composed of an outer cylinder and the like.
The present disclosure relates to a rotor blade for a turbomolecular vacuum pump. The rotor blade has a blade angle of 0° at the root, which increases continuously along substantially the entire span S of the rotor blade. The rotor blade tapers from a maximum thickness at the root to a point of minimum thickness over a portion of its span, and is made of a polymer material reinforced with short fibres. This provides a rotor blade with a more complex geometry that has reduced weight and improved performance and cost-effectiveness. The present disclosure also relates to a rotor comprising the rotor blade, a mould for injection moulding the rotor blade or rotor, and a method of injection moulding the rotor blade or rotor.
A vacuum pump having more excellent mechanical characteristics is provided. Provided is a turbomolecular pump having' a rotor blade 114 which is disposed, on a rotor shaft and rotates with the rotor shaft, and exhausting process gas by rotation of the rotor shaft and by an exhaust element ( rotor turbine blade, rotating-body main body 103a or the like ) provided on the rotor blade, wherein the rotor blade 114 is made of a first metal material and a second metal material, and at least some of parts to be constituted are made by a 3D printer and a. reinforcing material 118, which is the second metal material having strength higher than that of the f irst metal material constituting a main shape of the rotor blade 114 is disposed in an integral disposition structure.
A vacuum pump which can suppress precipitation of by-products in a pump is provided. A vacuum pump 300 is provided, which includes a casing 310, a. rotor shaft 113 disposed, in the casing' 310, and a rotor blade 102 rotatable together with the rotor shaft 113, with gas being' exhausted by rotation of the rotor blade 102 the vacuum pump 300 further including heating means 340 for heating a gas flow" passage in the vacuum pump 300, wherein the heating means 340 has a coil 342, a heated, portion 343, which is a magnetic body heated, by electromagnetic induction by causing an. AC current to flow through the coil 342, and a high-permeability magnetic body 341 covering an opposite side to a front surface 344 side, on which the heated portion 343 is disposed, of the coil 342.
The present invention provides a burner element for treating an effluent gas stream from a manufacturing process tool. The burner element comprises a porous sleeve at least partially defining a treatment chamber, said porous sleeve being configured to allow a first gaseous composition to pass through towards said treatment chamber, an array of inlets arranged about the porous sleeve such that each inlet is embedded in said porous sleeve, and wherein each inlet is configured to inject a second gaseous composition towards the treatment chamber. The present invention also provides an abatement apparatus, and a method for treating an effluent gas stream from a manufacturing process tool.
F23D 14/16 - Radiant burners using permeable blocks
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
37.
MAGNETIC BEARING DEVICE, TURBOMOLECULAR PUMP, AND CONTROL METHOD FOR
A magnetic bearing device including a rotating body, a magnetic bearing portion which levitates the rotating body in air and supports the rotating body by a magnetic force, and a control portion which controls drive of the magnetic bearing portion, in which the control portion includes a tuning portion which tunes the magnetic bearing portion, a power-source detecting portion which detects a state of a power source of the magnetic bearing device, and a stationary-levitated detecting portion which detects whether the rotating body is in a stationary-levitated state or not, and the tuning portion is configured to perform tuning of the magnetic bearing portion at least in either one of (A) a case where the power-source detecting portion detects that a power source of the magnetic bearing device has been switched from OFF to ON, and (B) a case where the stationary-levitated detecting portion detects that the rotating body is in the stationary-levitated state.
The present invention provides a dry absorber canister for an exhaust gas abatement system. The canister comprises a hollow chamber configured to retain particulate absorption media. The chamber having a cross-sectional area defined by a longitudinally extending wall, and the chamber having a gas inlet at a first end and a gas outlet at a second end. The cross-sectional area of the chamber varies between the first end and the second end. The cross-sectional area of the chamber increases from the gas inlet to a maximum cross-sectional area.
B01D 53/04 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
An inlet assembly for an abatement apparatus for treating an effluent stream from a semiconductor processing tool is disclosed. The inlet assembly comprises: an effluent stream inlet configured to convey the effluent stream to a nozzle conduit for delivery to an abatement chamber; a nozzle conduit scraper assembly having a nozzle conduit scraper housed within the nozzle conduit and configured to reciprocate within the nozzle conduit to reduce effluent stream deposits within the nozzle conduit; a reagent plenum configured to receive a reagent and having a wall through which at least a portion of the nozzle scraper assembly extends, the wall defining at least one reagent aperture configured to convey the reagent from the plenum and into the nozzle conduit.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
F23J 3/02 - Cleaning furnace tubesCleaning flues or chimneys
A fluid routing module (104) for a vacuum pumping system (100), the fluid routing module (104) comprising: a first fluid inlet (110a); a first fluid outlet (114a); a first fluid line (200) coupled between the first fluid inlet (110a) and the fluid outlet (114a); and a restrictor module (212) disposed along the first fluid line (200) between the first fluid inlet (110a) and the first fluid outlet (114a), the restrictor module (212) being configured to variably restrict a flow of fluid between the first fluid inlet (110a) and the first fluid outlet (114a).
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
Aspects of the present invention relate to a scroll pump (1) The scroll pump (1) includes a first scroll (3, 5) having a first scroll wall (7, 11) extending from a first scroll base (9, 13); and a second scroll (3, 5) having a second scroll wall (7, 11) extending from a second scroll base (9, 13) towards the first scroll base (9, 13). A seal (20, 40) disposed on the second scroll (3, 5) for cooperating with the first scroll (3, 5) to form a seal. At least one target (37A) is associated with the seal (20, 40), the at least one target (37A) being movable towards the first scroll (3, 5) along a longitudinal axis (X) as the seal (20, 40) is abraded. The scroll pump (1) includes at least one sensor (35A, 35B) for detecting the at least one target (37A), the at least one sensor (35A, 35B) being configured to output a sensor signal (SG1) providing an indication of a separation distance (ΔX1) between the at least one target (37A) and the at least one sensor (35A, 35B). Aspects of the present invention also relate to a method of monitoring a seal (20, 40) in a scroll pump (1); and a seal (20, 40).
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
The present invention provides an electrostatic precipitator for treating a gas stream carrying particulate matter. The electrostatic precipitator comprises a housing defining a chamber, the housing comprising an inlet configured to enable the gas stream carrying particulate matter to enter the chamber, and an outlet configured to enable the treated gas stream to exit the chamber. The electrostatic precipitator further comprises a charging electrode arranged within the chamber towards the inlet, a filter element arranged within the chamber towards the outlet such that to reach the outlet the gas stream passes through the filter element, an insulator element arranged between the charging electrode and the filter element, and a collection electrode configured to be held at electrical earth. The charging electrode is configured to be held at a first high voltage potential such that particulate matter in the gas stream becomes charged as it passes the charging electrode, and the filter element is configured to be held at a second high voltage potential that is greater than the first high voltage potential, such that when the gas stream is conveyed through the filter element to the outlet, charged particulate matter is repelled from the filter element towards the collection electrode. The invention further provides a method for removing particulate matter from a gas stream.
[Problem] To provide a trap device capable of efficiently capturing a product contained in an exhaust gas while preserving the conductance of the gas flow. [Solution] The present invention pertains to a trap device 10 installed between a vacuum pump 2 for sucking in and discharging an exhaust gas, and a detoxifying device 3 for detoxifying the exhaust gas discharged from the vacuum pump 2. The trap device 10 comprises: a tubular body 11 having a flow path through which the exhaust gas flows; and a first trap member 12A and second trap member 12B that are disposed inside the tubular body 11 and comprise a mesh pattern. The first trap member 12A and the second trap member 12B are disposed so as to be spaced apart from each other in the central axis direction of the tubular body 11 and so as to shield the entire flow path of the tubular body 11 in a planar manner.
B01D 45/08 - Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by impingement against baffle separators
C23C 16/44 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
H01L 21/31 - Treatment of semiconductor bodies using processes or apparatus not provided for in groups to form insulating layers thereon, e.g. for masking or by using photolithographic techniquesAfter-treatment of these layersSelection of materials for these layers
[Problem] To provide a vacuum pump having superior mechanical characteristics. [Solution] Provided is a turbo-molecular pump that includes a rotor blade 114 disposed on a rotor shaft and rotating together with the rotor shaft, and that exhausts a process gas by the rotation of the rotor shaft with exhaust elements (such as a rotary turbine blade 102 and a rotor body 103a) provided on the rotor blade. The rotor blade 114 is made from a first metal material and a second metal material, and at least some of constituent parts are produced using a 3D printer. A portion to be a joint 212 of the first metal material and the second metal material has an inclusion coupling structure in which one of the first metal material and the second metal material contains at least a portion of the other.
[Problem] To provide a vacuum pump and a magnetic bearing device in which an abnormal state can be detected even when a failure occurs simultaneously in an input circuit and an output circuit. [Solution] A magnetic bearing device 110 included in a vacuum pump 100 is characterized by comprising opposing electromagnets 104 positioned in relation to a rotating body 103, a current supply means 201 that supplies currents to the opposing electromagnets 104, a measuring means 202 that measures displacement of the rotating body 103 in relation to the opposing electromagnets 104, and a control means 203 that controls the currents on the basis of the displacement measured by the measuring means 202, the currents supplied to the opposing electromagnets 104 including a bias current Ib, and the control means 203 determining abnormality when the sum Is of the currents supplied to the opposing electromagnets 104 is less than a predetermined current value If.
A vacuum pump is provided in which a balance correction member can be reduced in size and is easily attachable. The vacuum pump includes a main body casing, a rotating body, and a motor. The rotating body and the motor are provided in the main body casing. A groove portion is provided in an inner circumference surface of the rotating body. A weight that is plate shaped is placed in the groove portion. The weight has elastic displacement portions and is held and fixed in the groove portion. The elastic displacement portions are formed by opening displacement permitting holes each having one open end in the weight.
A vacuum pump which can sufficiently prevent flow-in of a gas into an accommodating portion of an electric component portion which makes a rotating shaft rotatable is provided. The vacuum pump includes a casing, a rotating shaft enclosed in the casing and rotatably supported, the accommodating portion accommodating the electric component portion making the rotating shaft rotatable, a rotor disposed on an outer side of the accommodating portion and constituted integrally with the rotating shaft, a partition portion disposed on an outer peripheral side of the rotor and constituting a part of a stator, and a rotor disc extended in a radial direction from an outer peripheral surface of the rotor. An exhausted gas flows on the outer side of the rotor by rotation of the rotor. At least a part of opposed surfaces of the rotor disc and the partition portion opposed in an axial direction constitutes a non-contact seal structure which prevents the flow-in of the gas into the accommodating portion.
[Problem] To provide a cooling system capable of efficiently cooling an electrostatic chuck while saving power and space when processing a semiconductor wafer. [Solution] One end of a gas pipe 15A is attached to a base 11A1, and a chiller 13A is attached to the other end of the gas pipe 15A. Refrigerant gas is supplied from the chiller 13A and passes through a gas passage inside the base 11A1, thereby cooling the base 11A1. As the base 11A1 is cooled, an electrostatic chuck 3 is cooled so that a wafer can be cooled. One end of a gas branch pipe 17A is attached to a base 11A2, and the other end of the gas branch pipe 17A is connected to a chiller 23 serving as a common chiller, via a gas merging pipe 21. A valve 19A is disposed along the gas branch pipe 17A. By lowering the temperature of the electrostatic chuck 3, the temperature of the wafer can be lowered while power consumption is suppressed.
H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
H01L 21/205 - Deposition of semiconductor materials on a substrate, e.g. epitaxial growth using reduction or decomposition of a gaseous compound yielding a solid condensate, i.e. chemical deposition
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
b) extending around the drive shaft for supporting and facilitating rotation of the drive shaft, and a diaphragm (180) attached to the annular bearing to support the annular bearing, wherein the diaphragm is flexible in the axial direction to allow the annular bearing to move in the axial direction, thereby facilitating the movability of the drive shaft relative to the fixed scroll in the axial direction.
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
A liquid ring pump operating liquid additive comprising: a hygroscopic material; and a carrier liquid in which the hygroscopic material is dispersed, the carrier liquid being non-hydrating.
Vacuum feedthrough in particular to provide an electrical connection from ambient pressure into a vacuum chamber, comprising a first wall to be at least partially connected to or part of the vacuum chamber, a second wall, wherein the first wall and the second wall are connected by one or more sidewalls, wherein by the first wall, the second wall and the one or more sidewalls an internal volume is created, a first electrical feedthrough arranged in the first wall providing one or more electrical connection through the first wall in a vacuum tight manner, a second electrical feedthrough arranged in the second wall providing one or more electrical connection through the second wall in a vacuum tight manner, wherein one or more of the electrical connections of the first electrical feedthrough are connected with respective electrical connections of the second electrical feedthrough, wherein, in use, the internal volume is maintained at a pressure below ambient pressure.
This application relates to a mist-trap for a wet-scrubber abatement system. The mist trap comprises a demisting chamber having a gas inlet for receiving mist-laden exhaust gas from the wet-scrubber abatement system, a liquid capture surface on which the mist droplets may coalesce to form a liquid, and a gas outlet through which relatively dry gas may exit the chamber. The mist trap is configured such that at least a first portion of the captured liquid exits the chamber via the gas inlet to return to the wet-scrubber abatement system. The application also relates to a water-collecting baffle, an abatement system, and a method of moderating particulate build-up in a primary flow channel of an exhaust draw amplification device.
B01D 45/06 - Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by reversal of direction of flow
B01D 45/08 - Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by impingement against baffle separators
53.
METHOD FOR PREDICTING A REMAINING LIFETIME OF A VACUUM PUMP
Method for operating a vacuum pump, including acquiring vibration data of the vacuum pump during normal operation, training an anomaly detection model by the acquired vibration data of the vacuum pump during normal operation, and when the anomaly detection model determines a degrading operation of the vacuum pump, predicting by a lifetime prediction model an estimated remaining lifetime of the vacuum pump on the basis of vibration data acquired during degrading operation of the vacuum pump.
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04B 51/00 - Testing machines, pumps, or pumping installations
F04D 27/00 - Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
The present invention provides a system for controlling gas flow into an abatement apparatus The system comprises at least one vacuum pump configured to evacuate process gases from a process tool, an interface controller, a flow measurement device arranged downstream of the at least one vacuum pump and configured to measure the flow rate of the process gas flow and send a flow rate signal to the interface controller, an abatement apparatus arranged downstream of the flow measurement device, and an auto-tuning gas injection block arranged upstream of the abatement apparatus and configured to inject one or more gases into the process gas flow. During use, the process tool is configured to send a signal to the interface controller indicating the process step that is occurring in the tool, and the interface controller is configured to send a process step signal to the auto-tuning gas injection block to control the injection of the one or more gases according to the process step occurring in the tool. The interface controller is configured to send a flow rate signal to the auto-tuning gas injection block to control the injection of the one or more gases according to the gas flow rate measured by the flow measurement device. The present invention also provides a method for controlling gas flow into an abatement apparatus.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
Provided is a vacuum pump in which deformation of a peripheral part fastened to an outer cylinder can be prevented even when a count of bolts increases. A vacuum pump according to the present disclosure includes a rotating body, an outer cylinder that accommodates the rotating body, a peripheral part that is disposed on an outer perimeter side of the rotating body and concentrically with the outer cylinder, a plurality of bolts that fasten the outer cylinder and the peripheral part, and an axial force reducing means for reducing bolt axial force acting on the outer cylinder. The axial force reducing means is provided to at least one of the plurality of bolts.
[Problem] To improve back pressure dependency while suppressing a decrease in exhaust speed in a Siegbahn type exhaust mechanism. [Solution] A vacuum pump that is provided with: a casing having an intake port; a rotor shaft arranged in the casing; one or a plurality of rotary disks rotatable together with the rotor shaft; and one or a plurality of fixed disks arranged axially opposite each of the one or plurality of rotary disks and provided with spiral grooves having valleys and peaks on opposing surfaces, a gas flow passage being formed by the spiral grooves opposing the one or plurality of rotary disks, and gas introduced from the intake port being exhausted through interaction of the one or plurality of rotary disks and the one or plurality of fixed disks. The vacuum pump is characterized by comprising, further to the intake port side than a first rotary disk of the intake port side from among the one or plurality of rotary disks, an inflow guide part that guides inflow of the gas.
The present invention provides an abatement inlet gas injection system for automatically controlling injection of a gas flow into a process gas stream The system comprises a gas supply configured to provide a gas flow; an injection block connected to the gas supply, the injection block being configured to inject the gas flow into an inlet head of an abatement apparatus for mixture with a process gas stream; a flow measurement device configured to substantially continuously measure the gas flow rate upstream of the injection block and send a flow rate signal to a controller; wherein the controller is configured to receive the flow rate signal from the flow measurement device, and to provide a flow control signal to a flow control device in response to a change in the flow rate signal; wherein the flow control device is configured to change the gas flow rate entering the injection block in response to the flow control signal.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
F23N 1/02 - Regulating fuel supply conjointly with air supply
58.
WORK COIL FOR INDUCTION HEATED ABATEMENT APPARATUS
An induction heated abatement apparatus includes a work coil configured to inductively heat a porous susceptor defining an abatement chamber for treating an effluent stream, wherein said work coil is hollow to define a conduit coupled with a source of reaction reagents and wherein at least one surface of said work coil defines a plurality of apertures in fluid communication with said conduit for conveying said reaction reagents from said conduit to said surface of said work coil for supply to said porous susceptor. The work coil is protected from the effects of overheating whilst also reducing wasted heat because the heat obtained by the reaction reagents used as coolant gas is recycled and is used to facilitate abatement in the porous susceptor defining an abatement chamber.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
H05B 6/10 - Induction heating apparatus, other than furnaces, for specific applications
A heat exchanger is disclosed. The heat exchanger comprises a first set of first conduits for conveying a first fluid, first conduits having a triangular cross-section portion; and a second set of second conduits for conveying a second fluid, the second conduits having a triangular cross-section portion, wherein adjacent first conduits are interspaced by an intervening second conduit. In this way, the conduits may be located closely together with a space-efficient configuration which helps to improve the exchange of heat between the first and second fluids while also providing a compact arrangement which minimises the amount of material used to construct the heat exchanger.
F28D 7/16 - Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged in parallel spaced relation
60.
VACUUM PUMP, ROTARY BODY OF VACUUM PUMP, AND ROTARY BLADE ON UPSTREAM SIDE OF VACUUM PUMP
[Problem] To curb the inflow of heat from a downstream-side rotary blade to an upstream-side rotary blade. [Solution] A vacuum pump 100A includes: a first rotary blade 20A; a second rotary blade 30A disposed on a downstream side of the first rotary blade 20A; a rotary shaft 113 for transmitting rotation to the first rotary blade 20A and the second rotary blade 30A; a drive mechanism 121 for the rotary shaft 113; and a casing 127 that contains the rotary shaft 113, the first rotary blade 20A, and the second rotary blade 30A. A clearance n1 is provided between mutually opposing surface parts of the first rotary blade 20A and the second rotary blade 30A, and at least a section of the opposing surface part of the first rotary blade 20A is configured to have a lower emissivity than that of surface parts other than said opposing surface part.
A bearing assembly, method of assembling a bearing assembly and a pump are disclosed. The bearing assembly is for mounting a rotatable shaft of a pump, and comprises an inner ring and an outer ring and a plurality of rollable elements mounted between said inner and outer rings. The bearing assembly has a lubricant directing element extending radially outwards from an outer circumference of the inner ring. The lubricant directing element may comprise a sloped radial surface, at least a portion of the sloped radial surface facing an annular gap between the inner and outer rings, a radially inner portion of the sloped surface being closer to the rollable elements than a radially outer portion of the sloped surface.
F16C 33/66 - Special parts or details in view of lubrication
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D 29/063 - Lubrication specially adapted for elastic fluid pumps
F16C 19/16 - Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with a single row of balls
The present invention relates to a gaseous flow line section (1) for use in a thermally controlled gaseous flow line, comprising a first generally tubular wall portion (2) defining a gaseous flow conduit (3) configured to convey a gaseous flow, a second generally tubular wall portion (4) substantially surrounding the first generally tubular wall portion (2) to define therebetween a liquid conduit (5) configured to contain a thermally controlled liquid, and a third generally tubular wall portion (6) substantially surrounding the second generally tubular wall portion (4) to define therebetween a vacuum conduit (7) configured to be evacuated.
F16L 9/18 - Double-walled pipesMulti-channel pipes or pipe assemblies
B01D 53/34 - Chemical or biological purification of waste gases
C23C 16/44 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
F16L 53/32 - Heating of pipes or pipe systems using hot fluids
F16L 59/065 - Arrangements using an air layer or vacuum using vacuum
H01L 21/00 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid-state devices, or of parts thereof
F16L 39/00 - Joints or fittings for double-walled or multi-channel pipes or pipe assemblies
A non-contacting scroll pump, the non-contacting scroll pump comprising a housing, an orbiting scroll located within the housing, and a thrust bearing assembly located within the housing for axially supporting the orbiting scroll. The thrust bearing assembly comprises a first plate fixed to the orbiting scroll, a second plate spaced apart from the first plate, a ball bearing located between the first plate and the second plate, the ball bearing being configured to roll against the first and second plates during orbiting of the orbiting scroll, and a coupling structure extending axially between the housing and the second plate to couple the housing to the second plate, wherein the coupling structure is engaged with the second plate, and wherein the coupling structure comprises a spring arranged to push the coupling structure against the second plate.
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
A scroll pump (100, 200, 300, 400, 500) comprising an orbiting scroll (130, 230, 330, 430), a fixed scroll (120, 220, 320, 420), and a biasing mechanism (190, 290, 390, 490) arranged to provide a biasing force to axially bias the orbiting scroll and the fixed scroll together.
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
F01C 21/00 - Component parts, details, or accessories, not provided for in groups
F16C 25/08 - Ball or roller bearings self-adjusting
A vacuum pumping system and method for evacuating a vacuum system. The vacuum system may be a wafer transfer station and comprises a smaller load lock vacuum chamber (30) operable to cycle between a predetermined pressure that is below atmospheric pressure and atmospheric pressure, and a larger wafer transfer vacuum chamber (40) configured to be maintained at a pressure at or close to the predetermined pressure. The vacuum pumping system comprises: first and second vacuum pumps (10, 20); a valve system (V1, V2, V3, V4, V5) configured to selectively connect and isolate the first and second vacuum pumps with the smaller and larger vacuum chambers; and control circuitry (25). The control circuitry is configured in response to determining that a pressure within the smaller vacuum chambers (30) is to fall to the predetermined pressure within a first time period, to control the valve system (V1, V2, V3, V4, V5) such that the first and second pump (10, 20) are isolated from the larger vacuum chamber (40) and are in fluid communication with the smaller vacuum chamber (30) and both contribute to evacuating the chamber. When the smaller vacuum chamber (30) is at the predetermined pressure the valve system (V1, V2, V3, V4, V5) is controlled so that the second vacuum pump (20) is isolated from the smaller vacuum chamber (30) and pumps the larger vacuum chamber (40).
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
A vacuum pump system and method for evacuating a process chamber comprising is disclosed. The system has two vacuum pumps (20, 30) each having a required pumping performance and being arranged in parallel. There is a valve system comprising respective first and second valves (V1, V2) for controlling a rate of flow of fluid into the respective two vacuum pumps. There is also control circuitry (40) configured: to control the first and second valves (V1, V2) during a first period of operation, such that each of the valves is partially open and a cumulative pumping performance of the two vacuum pumps (20, 30) provides the required pumping performance. In response to determining that one of the two vacuum pumps is to be shut down, the control circuitry (40) closes one of the first and second valves and to fully opens the other of the first and second valves, such that the pumping performance of the pump with the open valve provides the required pumping performance.
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04B 49/02 - Stopping, starting, unloading or idling control
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04C 28/06 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
F04D 15/00 - Control, e.g. regulation, of pumps, pumping installations, or systems
The present invention provides an abatement apparatus for treating an effluent gas stream from a manufacturing processing tool. The abatement apparatus comprises a treatment chamber at least partially defined by a first porous wall, and comprising an inlet configured to enable an effluent gas stream from the manufacturing processing tool to enter the treatment chamber; a second porous wall generally surrounding the first porous wall and defining therebetween a second chamber, the second chamber being porous to allow gas flow therethrough; one or more heating elements are arranged within the second chamber and are configured to heat the gas flowing therethrough during use; a third porous wall generally surrounding the second chamber and defining therebetween a third chamber, the third chamber containing a relatively thermally insulating material, said third chamber being porous to allow gas flow; and a gas inlet. Wherein, the apparatus is configured such that, in use, a gas flow is conveyed from the gas inlet through the third chamber and the second chamber to the treatment chamber where it reacts with the effluent gas stream.
B01D 53/00 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
B01D 53/46 - Removing components of defined structure
B01J 12/00 - Chemical processes in general for reacting gaseous media with gaseous mediaApparatus specially adapted therefor
F23J 15/00 - Arrangements of devices for treating smoke or fumes
B01D 53/34 - Chemical or biological purification of waste gases
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
68.
VACUUM PUMP, FIXED DISK, AND RETROFITTED COMPONENT
[Problem] To provide a vacuum pump in which exhaust speed is improved while back pressure dependency performance is maintained, and a fixed disk and a retrofitted component used in the vacuum pump. [Solution] A vacuum pump according to the present embodiment is a Siegbahn element. In a fixed disk which is disposed opposing a rotary disk and in which a spiral groove having a valley part and a crest part is provided in an opposing surface, an inflow guide part for guiding inflow of gas is provided in a gas inflow port of the spiral groove. The inflow guide part has a shape in which the fixed disk crest part is extended farther outward than the outer diameter of the opposing rotary disk.
[Problem] To propose a vacuum pump that offers excellent back pressure performance even when the suction gas is hydrogen gas or the like. [Solution] A vacuum pump 100 comprising an exhaust part 114 that includes: a turbine pump section 115 with a plurality of stages of rotary blades 102 and fixed blades 123; and a drag pump section 116 positioned on the exhaust downstream side of the turbine pump section 115. Intake gas sucked in from an intake port 101 by the exhaust part 114 is discharged from an exhaust port 133 via a gas flow passage FP1. The vacuum pump 100 is characterized by comprising an introduction flow passage FP3 for introducing intermediate introduction gas having a higher viscosity than the intake gas. The vacuum pump 100 is also characterized in that the introduction flow passage FP3 is connected to the gas flow passage FP1 on the exhaust downstream side of the rotary blade 102 closest to the intake port 101 among the plurality of stages of rotary blades 102 in the exhaust part 114.
In order to provide an abnormality detection device for a vacuum pump, a vacuum pump system, and a vacuum pump abnormality detection method with which an abnormality in a gap between a rotary blade and a fixed blade or a casing can be detected easily and with high accuracy without disassembling the vacuum pump, an abnormality detection device (320) for a vacuum pump (100) is provided with a casing (311), a rotor shaft (113), a magnetic bearing device (312), a plurality of rotary blades (102), and a plurality of fixed blades (123). The abnormality detection device (320) is also provided with: a vibration detection means (321) for acquiring vibration generated in the vacuum pump (100); and a contact determination means (323) that controls the magnetic bearing device (312) to set the position of the rotor shaft (113) to a reference position set in advance and set the rotor shaft (113) to a designated predetermined operation state set in advance, and while the rotor shaft (113) is in the designated operation state, controls the magnetic bearing device (312) to offset the position of the rotor shaft (113) by a designated amount from a reference position, and determines whether or not there has been contact with the plurality of rotary blades (102) according to a change in the vibration data acquired by the vibration detection means (321) from before the offset to after the offset.
A vacuum pump, comprising a pump assembly (110), an inlet means (120) and an outlet means (130), and an enclosure (140) for containing the pump assembly (110), the enclosure (140) comprising a first-end part (141), a second-end part (142), and sleeve means (143) arranged between the first-end part (141) and the second-end part (142), wherein the sleeve means (143) comprises a bellows means (143a) for accommodating a thermal expansion of the vacuum pump (100).
The present disclosure relates to vacuum pump 10 comprising a substantially hermetically sealed enclosure 40, a core pump assembly located within the enclosure 40, and an inert purge gas inlet 70 fluidly connected to the enclosure 40 for supplying inert purge gas to an interior of the enclosure 40 surrounding the core pump assembly. By providing a sealed enclosure 40 around the core pump assembly and supplying inert purge gas thereto via the inlet 70, an inert positive pressure can be applied to the core pump assembly that reduces leakage of process gas from the core pump assembly such that seals therein can be removed or reduced. In particular, the need for elastomer seals that may be expensive and not be suited to high temperature or corrosive process gas conditions can be removed.
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
F04C 15/00 - Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
A vacuum pump which can prevent wasting of materials and can be manufactured easily is provided.
A vacuum pump which can prevent wasting of materials and can be manufactured easily is provided.
Main-body casings and a rotating body installed rotatably in the main-body casings are provided, and the rotating body has a structure that a second component is caused to cover a periphery of a first component disposed on an inner side. The second component is formed by solidifying a powder. The first component is formed of at least any one of an extruded material, a cast material, and a forged material. The second component is formed of a green pellet.
A turbomolecular pump bladed disc, comprising: a central hub configured to be rotated about an axis, the axis defining an axial direction; and one or more blades radially extending from the central hub; wherein each of the one or more blades has a cross-section that: tapers to a first point in a first direction, the first direction being parallel with the axial direction, tapers to a second point in a second direction, the second direction being parallel with the axial direction and opposite to the first direction; and is substantially a parallelogram in shape.
A vacuum pump that is small in height (length) is configured to bring a rotating body and a protective net as close to each other as possible by causing the rotating body to actively support the protective net. The vacuum pump is provided with a mechanism that causes a rotating body (a shaft or a rotor) to actively support a protective net when the protective net becomes deformed (bent) toward the vacuum pump side due to a change in pressure or temperature of the vacuum pump. Specifically, instead of preventing the protective net from being caught in the rotating body by increasing the distance therebetween, the entanglement of the protective net is prevented by actively supporting the protective net by bringing the protective net and the rotating body closer to each other. Accordingly, the height (length) of the vacuum pump can be reduced more.
A scroll pump and thrust bearing assembly for providing axial support for a first scroll member with respect to a second scroll member within the scroll pump are disclosed. The thrust bearing assembly comprises: at least one ball bearing and a first and second ball bearing cage for accommodating and constraining movement of the at least one ball bearing. The first and second ball bearing cages each comprise at least one aperture, the at least one aperture of the first ball bearing cage overlaps with the at least one aperture of the second ball bearing cage. The at least one ball bearing is accommodated within the respective overlapping apertures of the ball bearing cages and at least one control aperture of the first ball bearing cage is configured to have a predetermined length in one dimension that is at least 2% greater than a predetermined length in a direction perpendicular to the one dimension, such that a clearance relative to a path traced by the ball bearing in the one dimension is greater than a clearance in the perpendicular direction.
The present invention relates to a rotor for a separator apparatus. The rotor having an axis of rotation and comprising an inlet operable to receive an effluent stream, an annular skirt defining a centrifugal separator operable to separate the effluent stream, the centrifugal separator having a gas outlet in first direction and a waste outlet in a second direction. A surface of the annular skirt is angled towards the axis of rotation of the rotor, such that during rotation of the rotor, non-gaseous matter in the effluent stream is biased towards the waste outlet by contact with said surface. The invention also relates to a separator apparatus comprising such a rotor, a method of treating an effluent stream, and a method of designing a rotor.
B01D 45/14 - Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces generated by rotating vanes, discs, drums or brushes
A vacuum pump including: a current measuring means that measures a current flowing through a motor, in which a first region defined such that a current measured value flowing through the motor is equal to or larger than a current specified value and a rotational speed measured value of a rotor blade is equal to or larger than a rotational speed specified value, a second region defined such that the current measured value flowing through the motor is less than the current specified value or the rotational speed measured value of the rotor blade is less than the rotational speed specified value, a region determining means that determines which region a rotational speed measured value and the current measured value belong, and a calculating means that calculates a risk degree of a failure of the vacuum pump with elapse of time based on the determination by the region determining means.
A pumping system (100) comprising: a booster pump (104) comprising a booster pump inlet (114) and a booster pump outlet (116); and a primary pump (106) comprising a primary pump inlet (120) and a primary pump outlet (122); wherein the booster pump outlet (116) is fluidly coupled to the primary pump inlet (120); a maximum capacity of the booster pump (104) is less than or equal to 40m3/hr; and a maximum capacity of the primary pump (106) is less than or equal to 5m3/hr.
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
An interstage plate system comprising: a first plate portion comprising a first recess in a first mating surface of the first plate portion; and a second plate portion comprising a second recess in a second mating surface of the second plate portion; wherein the first plate portion and the second plate portion are configured to be coupled together so as to form an interstage plate for a vacuum pump and such that: the first mating surface and the second mating surface abut; and the first recess and the second recess are opposing, contiguous recesses which together form an aperture through the interstage plate.
F01C 21/10 - Outer members for co-operation with rotary pistonsCasings
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
81.
PUMP ASSEMBLY AND VACUUM PUMP WITH REDUCED SEAL REQUIREMENTS
A pump assembly (100) for a vacuum pump, comprising: an inlet side (110) and an outlet side (120) and a plurality of pump chambers (130) arranged therebetween; a first assembly component (140) defining a first sealing face (141) and a second assembly component (150) defining a second sealing face (151); wherein the first assembly component (140) and the second assembly component (150) are arranged to be joined together at the first and second sealing faces (141, 151) thereby providing a seal (160) for substantially sealing the plurality of pump chambers (130) from an exterior of the pump assembly (170); wherein the seal (160) comprises a labyrinth seal.
F01C 21/10 - Outer members for co-operation with rotary pistonsCasings
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
F04D 17/16 - Centrifugal pumps for displacing without appreciable compression
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
A claw booster pump (104) comprising: a pair of parallel shafts (202, 204) arranged to rotate in opposite directions to each other; a pair of rotors (206, 208) secured to the pair of shafts (202, 204), respectively, the pair of rotors (206, 208) including a first rotor (206) having a claw portion (220) projecting in a radial direction and a second rotor (208) having a recess (228) into which the claw portion (220) enters in use; a pump chamber (210) accommodating the pair of rotors (206, 208); an inlet (114) formed in the pump chamber (210) on one side of a plane (232) containing axes of the pair of shafts (202, 204); and an outlet (116) formed in the pump chamber (210) on another side of the plane (232); wherein a maximum capacity of the claw booster pump (104) is less than or equal to 40m3/hr.
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
A gas separator and method are disclosed. The gas separator is for separating a target gas component from a gas mixture and comprises: a first cryogenic stage configured in a solidifying phase to receive the gas mixture at a subatmospheric pressure, to solidify a first group of gas components of the gas mixture and to exhaust a second group of gas components of the gas mixture which includes the target gas component; and a second cryogenic stage configured to receive the second group of gas components at a subatmospheric pressure, to solidify the target gas component and to exhaust a third group of gas components of the gas mixture.
B01D 53/00 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
F25J 3/06 - Processes or apparatus for separating the constituents of gaseous mixtures involving the use of liquefaction or solidification by partial condensation
Provided is a vacuum exhaust system (10) for exhausting process gas from a plurality of chambers (10-1 to 10-n), the vacuum exhaust system (10) comprising a plurality of turbo molecular pumps (100-1 to 100-n), a collecting pipe (14) for connecting the exhaust ports of the plurality of turbo molecular pumps in parallel, one or more dry pumps (16) connected to the collecting pipe (14), and chamber introduction valve devices (30-1 to 30-n) that control the flow rate of the gas introduced into the plurality of chambers (10-1 to 10-n). A threshold value (T) for the process gas exhaust flow rate is set on the basis of the exhaust flow rates that the plurality of turbo molecular pumps (100-1 to 100-n) can achieve, and the gas introduction timing and/or flow rate are/is controlled by the chamber introduction valve devices (30-1 to 30-n) so as not to exceed the exhaust flow rate threshold value (T).
[Problem] To provide a vacuum evacuation device that can favorably perform plasma cleaning without the provision of a pressure adjustment valve. [Solution] A vacuum evacuation device 10 that comprises a turbo molecular pump 100 and a plasma generation device 210 comprises a throttle part 244 that can raise the internal pressure of the plasma generation device 210 to satisfy P≥0.3/D. P is the pressure [Pa], and D is the inter-electrode distance [m] inside the plasma generation device. The throttle part can also raise the internal pressure of the plasma generation device 210 to satisfy P≤1.5/D.
[Problem] To achieve a hermetic connector with a small size and high performance while suppressing manufacturing cost thereof. [Solution] Provided is a vacuum pump (100) provided with a hermetic connector (10), the vacuum pump (100) being characterized in that: the hermetic connector (10) has pins (11, 12) that are electrically connected, a connector base part (13) that surrounds the pins (11, 12), and a sealing part (14) that seals between the pins (11, 12) and the connector base part (13); and the sealing part (14) is formed of an insulating resin material.
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04B 39/00 - Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups
H01R 9/16 - Fastening of connecting parts to base or caseInsulating connecting parts from base or case
A vacuum pump that allows for the identification of the noise immunities or the like of a master circuit and one or more slave circuits for controlling an operation of at least one portion included in the vacuum pump, and a controller used for such a vacuum pump are proposed. The present disclosure includes a control means 200 configured to control an operation of at least one portion included in a vacuum pump 100. The control means 200 includes a slave circuit 201, 202 connected to the at least one portion to control the operation of the at least one portion and a master circuit 204 connected to the slave circuit 201, 202 to control the slave circuit 201, 202. The master circuit 204 is configured to perform periodical communications with the slave circuit 201, 202 and obtain a history of communication states in the communications.
The present invention provides a vacuum pump (1) passive magnetic bearing, the vacuum pump (1) including a stator (2) and a rotor (4) configured to rotate about a rotational axis relative to the stator (2); the passive magnetic bearing comprising a rotor bearing half (12) including one or more substantially annular rotor-side magnets (14) and an opposing and substantially concentrically radially arranged stator bearing half (16) including one or more substantially annular stator-side magnets (18); a radial gap (g) extending between the rotor and stator bearing halves (14,16); wherein at least one, preferably each, rotor-side magnet (14) has an axial extent which is from around 3.5 times to around 5.3 times the width of the radial gap (g), and a radial extent which is less than 1.2 times the axial extent of the respective magnet; and/or, wherein at least one, preferably each, stator-side magnet (18) has an axial extent which is from around 3.5 times to around 5.3 times the width of the radial gap (g), and a radial extent which is less than 1.2 times the axial extent of the respective magnet.
A vacuum pump and a method of controlling such a pump to reduce power consumption of the pump during a standby mode. The method comprises: operating the pump by driving a pumping mechanism at a nominal speed; determining that the pump is to enter a standby mode in which an exhaust non- return valve is closed; boosting a speed of the pumping mechanism for a predetermined time to reduce an amount of gas within the pump; and reducing the speed of the pumping mechanism and operating the pump in the standby mode with the exhaust non-return valve being closed.
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/06 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
F04C 29/12 - Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
91.
A VACUUM PUMP AND A PERMANENT MAGNETIC BEARING ASSEMBLY FOR A VACUUM PUMP
A vacuum pump includes a rotating body including a rotor blade; a rotor shaft disposed in a center of the rotating body; a magnetic bearing configured to levitate and support the rotor shaft; a touchdown bearing that is separated, by a gap, from the rotor shaft and configured to support the rotor shaft when the magnetic bearing is uncontrollable; and a bearing protection structure configured to protect the touchdown bearing. The bearing protection structure includes a protrusion disposed on at least one of the rotating body and a component around the rotating body. Upon a touchdown of the rotor shaft on the touchdown bearing, the rotating body comes into contact with the component around the rotating body through the protrusion so that kinetic energy of the rotating body acting on the touchdown bearing is reduced.
The present invention provides a vacuum pump (1), preferably a turbomolecular pump, comprising a rotor shaft (9) configured to have one or more rotor blades (8) coupled thereto and the rotor shaft (9) defining a bearing well (7) containing, in an interference-fit configuration, a permanent magnetic bearing, wherein the magnetic bearing insert comprises one or more permanent magnet alloy rings (3,4,5) of a rotor bearing half of a permanent magnetic bearing and a radially outwardly extending sleeve (16) coupled thereto around an outer circumference of the or each said permanent magnet alloy ring (3,4,5), and an outer surface of the permanent magnetic bearing insert (3) engages with an inward facing wall of the bearing well (7) to provide an interference fit, wherein the radially outwardly extending sleeve (16) has a coefficient of thermal expansion that is at least substantially the same as the coefficient of thermal expansion of the material of the rotor shaft (9) defining the engaged bearing well wall.
A method of manufacturing a permanent magnetic bearing insert for a vacuum pump comprising a rotor shaft defining a cavity configured to receive the magnetic bearing insert in an interference-fit configuration, the method comprising the steps of: a) providing one or more permanent magnet alloy rings of a rotor bearing half of a permanent magnetic bearing; b) masking one or more surfaces of the or each permanent magnet alloy ring which are configured to substantially interface with another surface of the permanent magnetic bearing insert and/or the rotor shaft cavity when the permanent magnetic bearing insert is received by the rotor shaft cavity; and c) applying a coating to the or each permanent magnet alloy ring; wherein step b) substantially prevents those masked surfaces from being coated during step c); and wherein step b) and step c) are carried out substantially externally from a vacuum pump.
A vacuum pump (100) comprising: a stator (102) comprising: a first end wall (110) at a first end (111) of the stator (102); a second end wall (112) at a second end (113) of the stator (102), the second end (113) of the stator (102) being opposite 5 to the first end (111) of the stator (102); and one or more side walls (114) disposed between the first end wall (110) and the second end wall (112); wherein the first end wall (110), the second end wall (112), and the one or more side walls (114) define a pumping chamber (104); the first end wall (110) comprises a first opening (116) therethrough; and the vacuum pump (100) further comprises a first end 10 plate (120) removably disposed in the first opening (116).
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
Flange assembly (100) for a vacuum pump apparatus, comprising a first flange (110) comprising a first rim (111), the first rim (111) defining a first contact face; a second flange (120) comprising a second rim (121), the second rim (121) defining a second contact face; and means for clamping the first flange (110) to the second flange (120). The means for clamping comprises a first plurality of holes (131) arranged through the first rim (111), each hole in the first plurality of holes (131) being arranged to receive a shaft (132a) of a respective bolt (132); a second plurality of holes (133) arranged in the second contact face (121a) for receiving said shafts (132a) of said respective bolts (132); wherein the first plurality of holes (131) and the respective bolts (132) define a clearance gap (160) around the shafts (132a) of the respective bolts (132), such that first and second flange axes (A, B) can be offset from each other in angle or in a first linear direction perpendicular to the flange axes (A, B).
F16L 23/02 - Flanged joints the flanges being connected by members tensioned axially
F16L 23/036 - Flanged joints the flanges being connected by members tensioned axially characterised by the tensioning members, e.g. specially adapted bolts or C-clamps
F16L 27/053 - Universal joints, i.e. with mechanical connection allowing angular movement or adjustment of the axes of the parts in any direction with partly-spherical engaging surfaces held in place by bolts passing through flanges
F16L 23/032 - Flanged joints the flanges being connected by members tensioned axially characterised by the shape or composition of the flanges
[Problem] To provide a vacuum pump capable of keeping a temperature around a heater constant even if a flow rate of gas changes. [Solution] A vacuum pump (100) for discharging gas sucked by rotation of a rotor (103) is characterized by comprising: a cooling component (128) having a flow path (110) through which a cooling medium flows; a heating component (153) disposed farther toward a gas discharge side than the cooling component and having a heater (190); and a control device (200) for performing temperature control of the cooling component and the heating component, and is also characterized in that the control device changes, on the basis of a history of the temperature control of one of the heating component and the cooling component, the temperature control of the other.
An inlet assembly includes: a combustion chamber module defining a plenum configured to supply combustion reagents to its combustion chamber, the combustion chamber module having a mount configured to interface with a common head which defines at least one gallery configured to supply the combustion reagents, the mount comprising a plurality of feed apertures positioned for fluid communication of the combustion reagents between the gallery and the plenum. In this way, a mount which is suited to its combustion chamber module interfaces with a standard or common head, which enables the combustion reagents to be supplied from the gallery of the common head via the mount and to the plenum of the combustion chamber module. This enables a common head to be used for different combustion chamber modules, which reduces the number of parts required for the assembly and maintenance of the abatement apparatus.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
A valve module for a vacuum pumping system, comprising: a plurality of inlets for receiving a fluid; a plurality of pressure sensors, each configured to measure a fluid pressure associated with a respective inlet; a first fluid line manifold; a second fluid line manifold; a plurality of multifurcating conduits, each connecting a respective inlet to both the first and second fluid line manifolds; a plurality of valves disposed in the multifurcating conduits; and a valve controller coupled to the sensors and the valves; wherein the valve controller is configured to control, based on pressure measurements from the sensors, the valves such that a fluid flow through a multifurcating conduit is directed to either only the first fluid line manifold or only the second fluid line manifold.
F04B 49/22 - Control of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for in, or of interest apart from, groups by means of valves
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
100.
CIRCUIT FOR DRIVING A MOTOR OF A VACUUM PUMP, VACUUM PUMP ASSEMBLY, AND METHOD
A circuit (210) for driving a motor of a vacuum pump (220). The circuit (210) 5 comprises a filter (212) configured to receive an alternating current 'AC' electrical input power. The filter (212) is configured to supply, a filtered AC electrical power. The circuit (210) comprises an active-front-end 'AFE' rectifier (213) configured to receive the filtered AC electrical power. The AFE rectifier (213) comprises a plurality of electrically connected switching devices. The 10 plurality of switching devices are controllable, by a plurality of switching signals, to convert the filtered AC electrical power to a direct current 'DC' electrical power. The circuit (210) comprises an inverter (215) configured to receive the DC electrical power. The inverter (215) is configured to convert the DC electrical power to an AC electrical output power for driving a motor of a vacuum pump 15 (220).
H02M 1/12 - Arrangements for reducing harmonics from AC input or output
H02M 5/458 - Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into DC by static converters using discharge tubes or semiconductor devices to convert the intermediate DC into AC using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
