Process of determining a position of a droplet in an extreme ultraviolet (EUV) source includes generating a laser curtain along a plane intersecting a droplet path, the laser curtain having a polarization state that varies in a direction along the plane; scattering and/or reflecting from the droplet radiation of the laser curtain as the target passes through the laser curtain; measuring polarization components of the scattered and/or reflected radiation; and determining the droplet position in the direction along the plane based on the measured polarization components. Systems for performing the process are also disclosed.
The invention relates to a quantum sensor (1), in particular for magnetic field measurement, comprising: a sensor element (4) in the form of a crystal doped with colour centres (5), in particular a diamond crystal doped with NV centres, wherein the colour centres (5) are designed to generate fluorescent light (7) during excitation with excitation light (6); a carrier substrate (2) having a surface (2a) to which the sensor element (4) is attached; and a detector (8), in particular a photodiode, for detecting the fluorescent light (7). In the quantum sensor (1), the carrier substrate (2) has a waveguide (3) for guiding the excitation light (6) to the sensor element (4).
G01R 33/26 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux using optical pumping
G01R 33/32 - Excitation or detection systems, e.g. using radiofrequency signals
The invention relates to a device (10) and a method for characterizing a particle (12) depending on at least two light curtains (26A, 26B) and different intensity, polarization and/or wavelength distributions.
The invention relates to a shielding device (10) for positionally accurately receiving a gas cell of an atomic gyrometer, comprising a support frame (12) having a first support plate (14) and a second support plate (16), a shielding body (22) designed for receiving the gas cell and two compensating rings (24) designed for arranging the shielding body (22) on the support frame (12); wherein the shielding body (22) comprises a magnetically soft nickel–iron alloy for magnetically shielding the gas cell and is situated between the support plates (14, 16) of the support frame (12); wherein the compensating rings (24) each have a retaining collar (26) for arrangement on the shielding body (22) and a fastening collar (28) for fastening the retaining collar (26) in each case on one of the support plates (14, 16) of the support frame (12); wherein the compensating rings (24) are designed for reducing mechanical oscillation and thermal stresses on the shielding body (22). The invention also relates to an atomic gyroscope and to a production method (70).
AMMW…BBAMMW…AOPTMOPT…AM…BB) of the quantum sensor. The invention also relates to a quantum sensor, in particular a magnetic field sensor (1), which has a calibration device (12) designed to carry out the method.
G01R 33/26 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux using optical pumping
G01R 33/32 - Excitation or detection systems, e.g. using radiofrequency signals
G01N 24/00 - Investigating or analysing materials by the use of nuclear magnetic resonance, electron paramagnetic resonance or other spin effects
A device for characterizing a particle includes a light source for projecting a light beam along a beam axis, a beam shaper arranged configured to adjust a location-dependent intensity distribution of the light beam in a measurement volume which extends partly along the beam axis, and a detector configured to detect a measurement beam reflected and/or scattered by the particle when the particle is located in the measurement volume, and to output at an intensity signal to an analyzer. The analyzer is configured to determine a particle characteristic within the measurement volume based on the intensity signal. The beam shaper is configured to shape the location-dependent intensity distribution in a projection plane, which extends within the measurement volume transversely to the beam axis, such that an intensity of the light beam is minimal along an outer contour of an oval and is maximal at one point within the oval.
The invention relates to a device (10) for characterizing at least one particle (12), having features of claim 1, and to a method for characterizing at least one particle (12), having features of the additional independent claim.
The present invention relates to a device for characterising at least one particle in a measurement volume, comprising at least one light source for emitting at least one light beam along a beam path in the direction of the measurement volume, at least one first beam shaping optical unit arranged in the beam path, wherein the first beam shaping optical unit is designed to form, in the measurement volume, a first location-dependent intensity distribution of the light in a plane perpendicular to the beam path at a first focal position along the beam path of the light beam, and at least one detector, wherein the detector is designed to pick up at least a part of the measurement beam generated by reflection and/or scattering of the light off the particle in the measurement volume and to output at least one measured intensity signal to an evaluation unit, wherein the evaluation unit is designed to determine a property of the particle within the measurement volume depending on the intensity signal, wherein the first beam shaping optical unit is at least partly wavelength-dependent in order to form at least one second location-dependent intensity distribution of the light in a plane perpendicular to the beam path at a second focal position along the beam path of the light beam.
The invention relates to a method for producing an integrated photonic circuit (10), comprising the following steps: (11) providing a waveguide layer (12), in particular on a wafer (14) or on a chip; (13) thinning the waveguide layer (12) in at least one region (16); (15) forming at least one waveguide (18) in the waveguide layer (12). The invention also relates to an integrated photonic circuit (10) produced according to such a method.
The invention relates to an integrated photonic circuit (10) comprising at least one waveguide (12) for guiding light and at least one coupling device (14) for coupling light into the waveguide (12) and/or for coupling light out of the waveguide (12), wherein: the waveguide (12) has at least one end (16) for coupling light in and/or out; the waveguide (12) has a tapered portion (18) at its end (16); the tapered portion (18) extends at least partly, in particular completely, along a longitudinal direction (11); the waveguide (12) is tapered along the tapered portion (18) towards the end (16) of the waveguide (12); the tapered portion (18) has a first portion (20) in which the waveguide (12) is in the form of a ridge waveguide; the tapered portion (18) has a second portion (22) which adjoins the first portion (20) and in which the waveguide (12) is in the form of a strip waveguide; the coupling device (14) at least partly covers the tapered portion (18), in particular the second portion (22); in particular the coupling device (14) is at least partly, in particular completely, tapered along the longitudinal direction (11) towards the end (16) of the waveguide (12). The invention also relates to a set consisting of at least one integrated photonic circuit of this type and at least one optical fiber (36).
G02B 6/30 - Optical coupling means for use between fibre and thin-film device
G02B 6/12 - Light guidesStructural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Lasers, not for medical purposes, in particular for
projection, holography, for use in data communications and
for optical sensors or measurement tasks; light guides
(fibre optic cables); light guiding devices, namely light
shaping apparatus; measuring machines; measuring apparatus;
measuring apparatus and instruments; sensors; optical
sensors; detectors; high-frequency transducers for use in
the optics sector; scanners, namely mirror units for optical
projection; rate gyros; magnetometers; particle detectors;
particle classifying apparatus; quantum computers;
computers; integrated circuits; machine control software;
machine learning software; parts and components for the
aforesaid goods, included in this class. Prosthetics and artificial implants; particle analyzers for
medical use; medical instruments for application in human
bodies; laser instruments for medical use. Product research and development; development of new
products; software design and development; engineering
consultancy services; quantum computing; scientific research
in the field of quantum computing.
13.
TUNABLE PHOTONIC UNIT FOR GENERATING FREQUENCY CONVERTED AND/OR SQUEEZED LIGHT AND PHOTONIC APPARATUS COMPRISING A PLURALITY OF SUCH DEVICES
The invention relates to a photonic device (1) for generating frequency converted and/or squeezed light. The device (1) comprises an optical waveguide (6) that has a plurality of regions (8) arranged one behind the other in the direction of light propagation. In this way, the optical waveguide (6) varies accordingly in regions in a property that influences a light property of the light passing through the optical waveguide (6). The device (1) further comprises a unit (7) for controllably influencing, in regions, the refractive index of the material of the optical waveguide (6) for the light passing through in at least one selection of the regions (8). The invention also relates to a photonic apparatus that comprises a plurality of such photonic devices.
G02F 1/01 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulatingNon-linear optics for the control of the intensity, phase, polarisation or colour
B82Y 20/00 - Nanooptics, e.g. quantum optics or photonic crystals
G02F 1/065 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulatingNon-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material in an optical waveguide structure
G02F 1/365 - Non-linear optics in an optical waveguide structure
G02B 6/12 - Light guidesStructural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Lasers, not for medical purposes, in particular for
projection, holography, for use in data communications and
for optical sensors or measurement tasks; light guides
(fibre optic cables); light guiding devices, namely light
shaping apparatus; measuring machines; measuring apparatus;
measuring apparatus and instruments; sensors; optical
sensors; detectors; high-frequency transducers for use in
the optics sector; scanners, namely mirror units for optical
projection; rate gyros; magnetometers; particle detectors;
particle classifying apparatus; quantum computers;
computers; integrated circuits; machine control software;
machine learning software; parts and components for the
aforesaid goods, included in this class. Prosthetics and artificial implants; particle analyzers for
medical use; medical instruments for application in human
bodies; laser instruments for medical use. Product research and development; development of new
products; software design and development; engineering
consultancy services; quantum computing; scientific research
in the field of quantum computing.
G01R 33/032 - Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday
G01R 33/26 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux using optical pumping
A magnetic field gradiometer includes two spatially spaced-apart measurement regions including color centers in a diamond, which emit fluorescence upon excitation by an excitation light, a first detector for detecting the fluorescence from a first measurement region, a second detector for detecting the fluorescence from a second measurement region, a first microwave emitter for applying a first microwave field to the first measurement region, a second microwave emitter for applying a second microwave field to the second measurement region, an evaluation device configured to determine a magnetic field gradient based on the detected fluorescence from the first and the second measurement regions, and a signal generator unit configured to generate a first and a second microwave signals for the first and the second microwave emitters, respectively. Each of the first and the second microwave signals includes two frequency components with a phase offset of π with respect to one another.
G01R 33/26 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux using optical pumping
G01R 33/36 - Electrical details, e.g. matching or coupling of the coil to the receiver
17.
SENSOR ELEMENT AND OPTICAL SENSOR HAVING A SENSOR ELEMENT
G01N 24/10 - Investigating or analysing materials by the use of nuclear magnetic resonance, electron paramagnetic resonance or other spin effects by using electron paramagnetic resonance
G01R 33/26 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux using optical pumping
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
(1) Lasers, not for medical purposes, in particular for projection, holography, for use in data communications and for optical sensors or measurement tasks; light guides (fibre optic cables); light guiding devices, namely light shaping apparatus; measuring machines; measuring apparatus; measuring apparatus and instruments; sensors; optical sensors; detectors; high-frequency transducers for use in the optics sector; scanners, namely mirror units for optical projection; rate gyros; magnetometers; particle detectors; particle classifying apparatus; quantum computers; computers; integrated circuits; machine control software; machine learning software; parts and components for the aforesaid goods, included in this class.
(2) Prosthetics and artificial implants; particle analyzers for medical use; medical instruments for application in human bodies; laser instruments for medical use. (1) Product research and development; development of new products; software design and development; engineering consultancy services; quantum computing; scientific research in the field of quantum computing.
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Lasers, not for medical purposes, in particular for projection, holography, for use in data communications and for optical sensors or measurement tasks; light guides (fibre optic cables); light guiding devices, namely light shaping apparatus; measuring machines; measuring apparatus; measuring apparatus and instruments; sensors; optical sensors; detectors; high-frequency transducers for use in the optics sector; scanners, namely mirror units for optical projection; rate gyros; magnetometers; particle detectors; particle classifying apparatus; quantum computers; computers; integrated circuits; machine control software; machine learning software; parts and components for the aforesaid goods, included in this class. Prosthetics and artificial implants; particle analyzers for medical use; medical instruments for application in human bodies; laser instruments for medical use. Product research and development; development of new products; software design and development; engineering consultancy services; quantum computing; scientific research in the field of quantum computing.
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
(1) Lasers, not for medical purposes, in particular for projection, holography, for use in data communications and for optical sensors or measurement tasks; light guides (fibre optic cables); light guiding devices, namely light shaping apparatus; measuring machines; measuring apparatus; measuring apparatus and instruments; sensors; optical sensors; detectors; high-frequency transducers for use in the optics sector; scanners, namely mirror units for optical projection; rate gyros; magnetometers; particle detectors; particle classifying apparatus; quantum computers; computers; integrated circuits; machine control software; machine learning software; parts and components for the aforesaid goods, included in this class.
(2) Prosthetics and artificial implants; particle analyzers for medical use; medical instruments for application in human bodies; laser instruments for medical use. (1) Product research and development; development of new products; software design and development; engineering consultancy services; quantum computing; scientific research in the field of quantum computing.
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Lasers, not for medical purposes, in particular for projection, holography, for use in data communications and for optical sensors or measurement tasks; light guides (fibre optic cables); light guiding devices, namely light shaping apparatus; measuring machines; measuring apparatus; measuring apparatus and instruments; sensors; optical sensors; detectors; high-frequency transducers for use in the optics sector; scanners, namely mirror units for optical projection; rate gyros; magnetometers; particle detectors; particle classifying apparatus; quantum computers; computers; integrated circuits; machine control software; machine learning software; parts and components for the aforesaid goods, included in this class. Prosthetics and artificial implants; particle analyzers for medical use; medical instruments for application in human bodies; laser instruments for medical use. Product research and development; development of new products; software design and development; engineering consultancy services; quantum computing; scientific research in the field of quantum computing.
22.
MAGNET DEVICE FOR PRODUCING A HOMOGENEOUS MAGNETIC FIELD AND MAGNETOMETER HAVING SAME
iiii) at its centre of gravity. The invention also relates to a method for producing a magnet device (1) of this type. The invention also relates to an NV magnetometer which has such a magnet device (1) or a plurality of individual magnets (2) with are arranged in a plurality of Halbach rings with different radii such that the individual magnets (2) are at least substantially distributed over the surface of the imaginary sphere (3).
G01R 33/383 - Systems for generation, homogenisation or stabilisation of the main or gradient magnetic field using permanent magnets
G01R 33/26 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux using optical pumping
A photonic circuit includes a substrate, a plurality of waveguides mounted on the substrate, and a plurality of modulators for modulating light guided in the waveguides. The plurality of waveguides is formed from an electro-optically active material. The modulators are electro-optical modulators. Each modulator includes an electrode for generating an electrical field in a portion of a respective waveguide. Each modulator includes a conductor track for feeding an electrical modulation signal to the electrode. The photonic circuit is configured to reduce stray electrical fields in the plurality of waveguides by feeding the electrical modulation signals to the electrodes.
G02F 1/035 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulatingNon-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels or Kerr effect in an optical waveguide structure
The invention relates to a waveguide device (1) for photonic applications. The waveguide device (1) comprises a plurality of light-guiding regions (6, 7), at least one first light-guiding region (6) being made of a first electro-optical light-guiding material and at least one second light-guiding region (7) being made of a different second electro-optical light-guiding material. The first light-guiding region (6) and the second light-guiding region (7) are arranged such that light guided in the first light-guiding region (6) can pass from there into the second light-guiding region (7).
G02B 6/12 - Light guidesStructural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
25.
LOW-NOISE EMITTER DEVICE, CONTROL LOOP, AND METHOD FOR OPERATING THE CONTROL LOOP
The invention relates to an emitter device (1) comprising: a plurality of emitters (5); a plurality of current drivers (6); and a plurality of TEC systems (4), wherein each individual emitter (5) is assigned at least one of the current drivers (6) and one of the TEC systems (4) and the plurality of TEC systems (4) are designed and configured to control the temperature of at least one of the emitters (5) and of at least one of the current drivers (6).
The invention relates to a sensor arrangement (1) for detecting features of particles (2), comprising a transmitter (3) for emitting electromagnetic radiation (4), a detector (5) for receiving radiation (4a) emitted from the transmitter (3) and for providing detector signals (D) according to the received radiation (3), a measuring volume (6) which can be irradiated via the radiation (4) from the transmitter (3) for receiving particles (2) flowing through it, a digitisation unit (7) for digitising the detector signals (D), and an evaluation unit (8) in which a trained algorithm (10) for machine learning is stored, which is designed to determine at least one feature of the particles (2) using the detector signals (D). The sensor arrangement (1) has a camera (11) for providing images (B) of particles (2) flowing through the measuring volume (6) in order to provide detector signals (D) for particles (2) with known features to train the machine learning algorithm (10), as well as an associated method.
G01N 15/0227 - Investigating particle size or size distribution by optical means using imagingInvestigating particle size or size distribution by optical means using holography
G01N 15/1433 - Signal processing using image recognition
G01N 15/14 - Optical investigation techniques, e.g. flow cytometry
G01N 15/02 - Investigating particle size or size distribution
27.
METHOD FOR PRODUCING A SEMICONDUCTOR WAFER, AND SEMICONDUCTOR WAFER
The invention relates to a method for producing a semiconductor wafer in which a coating wafer (1) is placed onto a carrier wafer (2) and secured to the carrier wafer (2), an initial thickness of the coating wafer (1) is reduced to a first processing thickness by means of a mechanical first ablation process, the thickness of the coating wafer (1) that results after the first ablation process, over the entire base surface of said coating wafer bearing against the carrier wafer (2), is ascertained in the form of a thickness map, and the thickness of the coating wafer (1) is reduced further in a second ablation process by means of an ion beam and/or a laser beam, wherein regions to be ablated and portions to be ablated of the thickness of the coating wafer (1) are chosen as a function of the thickness map created.
H01L 21/18 - Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
H01L 21/20 - Deposition of semiconductor materials on a substrate, e.g. epitaxial growth
H01L 21/76 - Making of isolation regions between components
The invention relates to a device and a method for providing an output signal stream (19) of optical signals for a photonic processor (12), comprising the steps of: (a) transmitting a pulsed light signal stream from a light source (1); (b) receiving the pulsed light signal stream in an optical distributor (14) and splitting the received light signal stream into at least two partial light signal streams; (c) relaying the partial light signal streams from the optical distributor (14) to state generators (4) in a signal relay device at the same time and/or at staggered times; (d) receiving a respective partial light signal stream in a respective state generator (4) and generating a respective signal stream of non-Gaussian optical states for encoding qubits from the partial light signal stream in each state generator (4); (e) receiving all signal streams from the state generators (4) in an optical multiplexer (18) and generating the output signal stream (19) for the photonic processor (12) from the signal streams.
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (Germany)
Q.ANT GMBH (Germany)
Inventor
Gizzi, Leonardo
Schneider, Urs
Avci, Okan
Maufroy, Christophe
Rölver, Robert
Kress, Florian
Weinert, Pascal
Jag-Lauber, Katharina
Abstract
The invention relates to a body-complementing/supplementing device such as, for example, a prosthesis, orthosis or exoskeleton, which is controlled by magnetic field measurements of magnetic fields generated by the body of a user.
The invention relates to a method for characterising particles (6) in an evaluation unit (9) which is configured to receive polarisation-dependent intensity signals (8) which contain information relating to a field distribution of a laser beam (4) through which the particles (6) can be guided. The method comprises the steps of generating a time series of particle signals which are calculated from the received intensity signals (8), reading in or ascertaining a locus curve of defined reference values for intensity and polarisation direction in the field distribution, determining individual particle signals in the time series which correlate with a reference value of the locus curve, wherein the correlated reference values differ in their polarisation directions, and outputting the features of the particles (6). The invention also relates to a sensor arrangement comprising a correspondingly configured evaluation apparatus.
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Lasers, not for medical purposes, in particular for projection, holography, for use in data communications and for optical sensors or measurement tasks; Light guides (fibre optic cables); Light guiding devices, namely light shaping apparatus; Measuring machines; Measuring apparatus; Measuring apparatus and instruments; Sensors; Optical sensors; Detectors; High-frequency transducers for use in the optics sector; Scanners, namely mirror units for optical projection; Rate gyros; Magnetometers; Particle detectors; Particle classifying apparatus; Quantum computers; Computers; Integrated circuits; Machine control software; Machine learning software; Parts and components for the aforesaid goods, included in this class. Prosthetics and artificial implants; Particle analyzers for medical use; Medical instruments for application in human bodies; Laser instruments for medical use. Product research and development; Development of new products; Software design and development; Engineering consultancy services; Quantum computing; Scientific research in the field of quantum computing.
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Lasers, not for medical purposes, in particular for projection, holography, for use in data communications and for optical sensors or measurement tasks; Light guides (fibre optic cables); Light guiding devices, namely light shaping apparatus; Measuring machines; Measuring apparatus; Measuring apparatus and instruments; Sensors; Optical sensors; Detectors; High-frequency transducers for use in the optics sector; Scanners, namely mirror units for optical projection; Rate gyros; Magnetometers; Particle detectors; Particle classifying apparatus; Quantum computers; Computers; Integrated circuits; Machine control software; Machine learning software; Parts and components for the aforesaid goods, included in this class. Prosthetics and artificial implants; Particle analyzers for medical use; Medical instruments for application in human bodies; Laser instruments for medical use. Product research and development; Development of new products; Software design and development; Engineering consultancy services; Quantum computing; Scientific research in the field of quantum computing.
A magnetic field gradiometer for determining a magnetic field gradient includes at least one excitation light source for emitting excitation light, and two spatially spaced-apart measuring areas for magnetic field measurement. Color centers in diamond are arranged in the two measuring areas. The color centers emit fluorescent light upon excitation using the excitation light. The magnetic field gradiometer further includes at least one microwave emitter for applying at least one microwave field to the spatially spaced-apart measuring areas, two detectors for detecting the fluorescent light from the two spatially spaced-apart measuring areas, and an evaluator for determining the magnetic field gradient based on the fluorescent light detected by the two detectors. The two measuring areas are configured as freestanding measuring waveguides of a common diamond crystal. The diamond crystal is used as a substrate for the measuring waveguides.
HAHN-SCHICKARD-GESELLSCHAFT FÜR ANGEWANDTE FORSCHUNG E.V. (Germany)
Q.ANT GMBH (Germany)
Inventor
Bülau, André
Fritz, Karl-Peter
Haybat, Mehmet
Sahakalkan, Serhat
Günther, Thomas
Rölver, Robert
Kress, Florian
Förtsch, Michael
Jag-Lauber, Katharina
Abstract
A quantum device having at least one crystal body that exhibits at least one imperfection, in particular an NV center; and an optical arrangement having one or more elements; these being designed to channel light toward the crystal body and/or away from the crystal body: The one and/or more elements comprise a COC material and/or a COP material and/or an epoxy molding compound material and/or a silicone material and/or a PMMA material and/or a PC material and/or PS material and/or an EBA material and/or an EVAC material and/or an SAN material and/or a phenolic resin material and/or a transparent silicone elastomer and/or polyimide material and/or a polyetherimide material and/or a 3D-printable photoresist and/or a UV-curable polymer.
G01R 33/26 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux using optical pumping
G01N 24/00 - Investigating or analysing materials by the use of nuclear magnetic resonance, electron paramagnetic resonance or other spin effects
G01R 29/08 - Measuring electromagnetic field characteristics
G01K 11/00 - Measuring temperature based on physical or chemical changes not covered by group , , , or
35.
LASER LIGHT SOURCE COMPRISING A SEMICONDUCTOR DEVICE
The invention relates to a laser light source (30), comprising a semiconductor device (10) with at least one nonlinear optical medium, in particular a nonlinear crystal, and at least one pump laser source (32) for producing a pump laser beam (35) in order to form a signal beam (37) and/or an idler beam (38) in the nonlinear optical medium by parametric down-conversion.
The invention relates to a device (1) for characterizing a particle, comprising a light source (2) for projecting a light beam (4) along a beam axis (5) and comprising a beam-shaping optical unit (3) which is arranged along the beam axis (5) and is designed to adjust a location-dependent intensity distribution of the light beam (4) in a measurement volume (6) which extends partly along the beam axis (5). When a particle (7) is located in the measurement volume (6), a detector (10) is designed to detect a measurement beam (8) reflected and/or scattered by the particle (7) and output an intensity signal to an analysis unit. The analysis unit is designed to determine a particle characteristic within the measurement volume on the basis of the intensity signal. The beam-shaping optical unit (3) is designed to shape the intensity distribution on a projection plane (x-y), which extends transversely to the beam axis (5), such that the intensity of the light beam is minimal along the outer contour (15) of an oval (11) and maximal at at least one point within (14) the oval (11).
A sensor arrangement for detecting features of particles includes an emitter for emitting electromagnetic radiation, a detector for receiving the electromagnetic radiation emitted from the emitter and for providing detector signals based on the received electromagnetic radiation, and a measurement volume irradiable by the electromagnetic radiation emitted by the emitter. The measurement volume is configured for receiving particles flowing therethrough. The sensor arrangement further includes a digitizing unit for digitizing the detector signals, and an evaluation unit for evaluating the detector signals. The evaluation unit stores a trained algorithm for machine learning. The algorithm is configured for determining at least one feature of the particles based on the detector signals.
A sensor arrangement for detecting features of particles includes an emitter for emitting electromagnetic radiation, a detector for receiving the radiation emitted from the emitter and for providing detector signals as a function of the received radiation, a measurement chamber configured to be irradiated by the radiation emitted by the emitter and to receive particles flowing therethrough, an evaluation unit for evaluating the detector signals, and a locating unit for locating the measurement chamber with respect to a reference point of a coordinate system, so that a respective position of a respective particle within the radiation is determinable.
The invention relates to a method (100) for determining an external magnetic field (B) with an NV magnetometer (1) with automated resonance control, as well as to said type of NV magnetometer (1) and to the use of one or more NV magnetometers (1) of said type for gradiometric measurements.
G01R 33/32 - Excitation or detection systems, e.g. using radiofrequency signals
G01R 33/26 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux using optical pumping
40.
MICROWAVE COUPLER AND SENSOR HAVING A MICROWAVE COUPLER
The invention relates to a microwave coupler (1) for coupling a microwave field (1a) into a coupling volume (4) arranged between a first and a second conductor path portion (3a, 3b), having a circuit board (2) which has the first conductor path portion (3a) on a first side face (2a) and the second conductor path portion (3b) on a second side face (2b), which is located in particular on the opposite side from the first side face (2a) with regard to the circuit board (2), wherein the two conductor path portions (3a, 3b) are formed in a coil-like manner and are located on opposite sides from one another with regard to the circuit board (2), in order to form a homogeneous magnetic field in the coupling volume (4). The invention also relates to a sensor for measuring at least one measured variable, in particular a magnetic field, the sensor having at least one such microwave coupler (1).
G01R 33/34 - Constructional details, e.g. resonators
G01R 33/32 - Excitation or detection systems, e.g. using radiofrequency signals
G01R 33/26 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux using optical pumping
G01R 33/36 - Electrical details, e.g. matching or coupling of the coil to the receiver
G01R 33/24 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux
G01R 33/32 - Excitation or detection systems, e.g. using radiofrequency signals
42.
METHOD FOR CALIBRATING A PARTICLE SENSOR, PARTICLE SENSOR, AND APPARATUS HAVING A PARTICLE SENSOR
A method for calibrating a particle sensor includes focusing a laser beam on a calibration plane for generating a calibration intensity distribution in the calibration plane. A calibration plate is arranged in the calibration plane. Contrast regions for modulating an intensity of the laser beam are formed on the calibration plate. The method further includes moving the calibration plate and/or the calibration intensity distribution in the calibration plane, recording at least one intensity signal of the laser beam, following passage through the calibration plane, and calibrating the particle sensor by evaluating the at least one intensity signal.
The invention relates to a photonic circuit (1) comprising: a substrate (3), a plurality of wave guides (2.1, ...) mounted on the substrate (3), and a plurality of modulators, in particular phase modulators (6a, ...), for modulating light guided in the wave guides (2.1, ...). The wave guides (2.1, ...) are formed from an electro-optically active material; the modulators are designed as electro-optical modulators (6a, ...), which each have an electrode (8) for generating an electrical field (E) in a portion of a particular wave guide (2.1, ...) and each have a conductor track (12) for feeding an electrical modulation signal (10) to the electrode (8). The photonic circuit (1) is designed to reduce any stray electrical fields caused in the wave guides (2.1, ...) by the feeding of the electrical modulation signals (10) to the electrodes (8).
G02F 1/225 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulatingNon-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
G02F 1/313 - Digital deflection devices in an optical waveguide structure
44.
Method for joining an optical crystal to a substrate
A method for joining an optical crystal to a substrate includes radiating a pulsed laser beam through the optical crystal or through the substrate onto a surface of an intermediate layer between the optical crystal and the substrate, and forming a fusion zone in the intermediate layer between the optical crystal and the substrate by the radiation of the pulsed laser beam, thereby integrally joining the optical crystal and the substrate.
The invention relates to a magnetic field gradiometer (1) for determining a magnetic field gradient (GB) comprising: at least one excitation light source (2) for emitting excitation light (AL), two spatially separated measuring zones (3) for magnetic field measurement, in which measuring zones colour centres in diamond, preferably NV centres (4), are arranged, which emit fluorescent light (FL) on excitation with the excitation light (AL), at least one microwave emitter for applying at least one microwave field to the spatially separated measuring zones (3), two detectors (5) for detecting the fluorescent light (FL) from the two measuring zones (3) and an evaluation device (6) for determining the magnetic field gradient (GB) by means of the fluorescent light (FL) detected by the detectors (5). The measuring zones (3) are configured as preferably free-standing measurement waveguides (3) of a shared diamond crystal (7) which is used as a substrate for the measurement waveguides (3). The invention also relates to a magnetic field gradiometer array, a three-dimensional magnetic field gradiometer array and an integrated optical circuit for use in a magnetic field gradiometer, in particular in a magnetic field gradiometer (1) which is configured as described above.
G01R 33/26 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux using optical pumping
G01R 33/032 - Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday
G01N 24/00 - Investigating or analysing materials by the use of nuclear magnetic resonance, electron paramagnetic resonance or other spin effects
G01N 24/10 - Investigating or analysing materials by the use of nuclear magnetic resonance, electron paramagnetic resonance or other spin effects by using electron paramagnetic resonance
G01R 33/60 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance using electron paramagnetic resonance
46.
METHOD FOR FORMING FREESTANDING MICROSTRUCTURES ON A DIAMOND CRYSTAL AND DIAMOND CRYSTAL
A method for forming at least one freestanding microstructure on a diamond crystal includes the step of removing material from the diamond crystal so as to form a structured surface, wherein the removing of the material includes creating at least two trenches, each trench having a bottom and two side walls and wherein adjacent side walls of the at least two trenches form side walls of the structured surface. The method also includes the steps of depositing at least one masking layer on the structured surface, removing at least a portion of the at least one masking layer from the bottom of each of the at least two trenches, removing additional material from the diamond crystal at least along the side walls so as to deepen the trenches, and undercutting the diamond crystal so as to form the freestanding microstructure.
C30B 33/04 - After-treatment of single crystals or homogeneous polycrystalline material with defined structure using electric or magnetic fields or particle radiation
G02B 6/122 - Basic optical elements, e.g. light-guiding paths
G02B 6/13 - Integrated optical circuits characterised by the manufacturing method
The invention relates to a sensor assembly (10I-10IV) for detecting features of particles (12), in which sensor assembly an emitter (14) emits electromagnetic radiation (16) which is at least partially received by a detector (18a, 18b) and converted into detector signals. A measuring volume (20) designed for particles (12) to be conducted therethrough is disposed in the direction of the radiation (16) exiting the emitter (14), so that the measuring volume (20) can be irradiated by this radiation (16). A digitization unit (22) converts the detector signals into digital signals. The sensor assembly (10I-10IV) also has an evaluation unit (24) for evaluating the digital signals. The evaluation unit (24) is equipped with a trained algorithm (28) for machine learning in order to determine selected features of the particles (12) on the basis of the detector signals.
The invention relates to a particle sensor (1), comprising: a light source (2) configured to generate a light beam (3) propagating along a light path (4), a beam splitter unit (5) configured to split the light beam (3) into a first partial beam (3a) propagating along a signal path (7a) and a second partial beam (3b) propagating along a reference path (7b), the signal path (7a) passing through a measurement region (9) that is accessible to particles (P), a first photodetector (8a) arranged in the signal path (7) and configured to detect an intensity (I1) of the first partial beam (7a) after propagating through the measurement region (9), and a second photodetector (8b) arranged in the reference path (7b) and configured to detect an intensity (I2) of the second partial beam (3b), wherein the particle sensor (1) is configured to detect, in particular to characterize, particles (P) in the measurement region (9) based on a difference (I1 – I2) between the intensity (I1) of the first partial beam (3a) and the intensity (I2) of the second partial beam (3b). The invention also relates to a device comprising such a particle sensor (1) as well as to a corresponding method for detecting, in particular for characterizing, particles (P).
A method for producing at least one optically usable microstructure, in particular at least one waveguide structure, on an optical crystal is provided. The method includes irradiating a pulsed laser beam onto a surface of the optical crystal, moving the pulsed laser beam and the optical crystal relative to one another along a feed direction in order to remove material of the optical crystal along at least one ablation path in order to form the optically usable microstructure. The pulsed laser beam is irradiated onto the surface of the optical crystal with pulse durations of less than 5 ps, preferably less than 850 fs, more preferably less than 500 fs, in particular less than 300 fs, and with a wavelength of less than 570 nm, preferably less than 380 nm.
The invention relates to a method for calibrating a particle sensor (2), comprising: - focusing a light beam, in particular a laser beam (8), onto a calibration plane (KE) to generate a calibration intensity distribution (10), in particular a calibration focus, in the calibration plane (KE), wherein a calibration disc (1), on which contrast regions (2) for modulating the intensity (I) of the light beam, in particular of the laser beam (8), are formed, is provided in the calibration plane (KE); - moving the calibration disc (1) and/or the calibration focus (10) in the calibration plane (KE); - detecting at least one intensity signal (IT; IR) of the light beam, in particular of the laser beam (8), after it has passed through the calibration plane (KE); and - calibrating the particle sensor (2) by evaluating the at least one intensity signal (IT; IR). The invention also relates to a particle sensor (2) for carrying out the method and to a device having at least one such particle sensor (2).
The invention relates to a method for splitting a crystal (2), comprising: irradiating the crystal (2) with a pulsed laser beam in order to modify, in particular remove, material of the crystal (2). Upon irradiation with the pulsed laser beam, the material of the crystal (2) is modified as far as a penetration depth that corresponds to at least 30%, preferably at least 40% of a thickness of the crystal (2), wherein the crystal (2) is split along a specified breaking edge due to being irradiated with the pulsed laser beam.
A sensor arrangement characterizes particles. The arrangement has an emitter with a laser source that generates a laser beam; a mode converter that generates a field distribution of the laser beam, which at each position has a different combination of a local intensity and a local polarization direction of the laser beam; and focusing optics that focus the field distribution of the laser beam onto at least one measurement region, through which the particles pass, in a focal plane. A receiver is also provided with analyzer optics configured to determine polarization-dependent intensity signals of the field distribution of the laser beam in the at least one measurement region; and an evaluator configured to characterize the particles, including the particle position, the particle velocity, the particle acceleration, or the particle size, using the polarization-dependent intensity signals.
The invention relates to a method for joining an optical crystal (2) to a substrate (3), comprising: radiating a pulsed laser beam (5) through the optical crystal (2) or through the substrate (3) onto a surface (7) which is formed between the optical crystal (2) and the substrate (3), in order to integrally join the optical crystal (2) to the substrate (3) by the formation of a fusion zone (9). An intermediate layer (8) is formed between the optical crystal (2) and the substrate (3), and the pulsed laser beam (5) is radiated onto the surface (7) of the intermediate layer (8) in order to form the fusion zone (9). The invention also relates to a component produced by means of the method.
A laser light source includes a nonlinear optical medium and a pump laser source configured to generate a pump laser beam to form a signal beam and an idler beam in the nonlinear optical medium by parametric down conversion. The laser light source further includes a seed light source configured to generate a seed signal beam and/or a seed idler beam having a coherence length lesser than a coherence length of the pump laser beam, and a superpositioning device configured to superposition the seed signal beam and/or the seed idler beam with the pump laser beam for joint coupling into the nonlinear optical medium.
H01S 3/108 - Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
B23K 26/0622 - Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
B23K 26/066 - Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
B23K 26/142 - Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beamNozzles therefor for the removal of by-products
B23K 26/082 - Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
xyxyxy1234xyxyxy12344). The invention also relates to an optical assembly for an EUV radiation generation device, comprising a sensor assembly (1) of this type.
A laser light source for producing incoherent laser beams, in particular for speckle-free imaging and/or projection, with at least two different wavelengths, preferably with three different wavelengths, includes: at least two optical devices, in particular at least two optical parametric oscillators, which each have a nonlinear optical medium for respectively producing a signal beam and an idler beam, and a superposition device configured to respectively superpose either the signal beam or the idler beam of each of the at least two optical devices for producing an incoherent laser beam with the at least two different wavelengths. A laser projector for producing an image, in particular a speckle-free image, on a projection surface, can include such a laser light source.
The invention relates to a laser light source (1), comprising at least one nonlinear optical medium (3), in particular one nonlinear crystal, and at least one pump laser source (2) for producing a pump laser beam (5) in order to form a signal beam (7) and an idler beam (8) in the nonlinear optical medium (3) by parametric down-conversion. The laser light source (1) comprises at least one seed light source (4) for producing a seed signal beam (7') and/or a seed idler beam having a coherence length smaller than the coherence length of the pump laser beam (5), and at least one superposing device (16) for superposing the seed signal beam (7') and/or the seed idler beam with the pump laser beam (5) for joint coupling into the nonlinear optical medium (3). The invention further relates to a laser projector having a laser light source (1) of this type.
H04N 9/31 - Projection devices for colour picture display
G02F 1/39 - Non-linear optics for parametric generation or amplification of light, infrared, or ultraviolet waves
H01S 3/10 - Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
H01S 3/23 - Arrangement of two or more lasers not provided for in groups , e.g. tandem arrangement of separate active media
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
11 - Environmental control apparatus
42 - Scientific, technological and industrial services, research and design
Goods & Services
Laser, not for medical purposes, in particular for
projection, holography, for use in data communication and
for optical sensors or measurement tasks; Projection
apparatus; Holographic projectors; Light-emitting electronic
pointers; Light guides (Fibre optic cables); Light guiding
devices, namely light-shaping devices; Measuring machines;
Measuring instruments; measuring apparatus and instruments;
Sensors, Optical sensors; Detectors, High frequency
converters for use in the field of optics; scanners, namely
mirror units for optical projection; Parts and components
for the aforementioned goods, as far as included in this
class. Lasers for medical purposes; Light sources for medical
purposes; Lasers and light sources for use in medical
measuring, diagnostic and testing apparatus. Light sources, except for medical and photographic purposes;
Self-luminous light sources; Projection lamps and
luminaires; laser light projectors; Lasers for lighting;
Laser-based light sources. Product research and development; Development of new
products; Software design and development; Engineering
consultancy services.
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
11 - Environmental control apparatus
42 - Scientific, technological and industrial services, research and design
Goods & Services
Lasers, not for medical purposes, in particular for projection, holography, for use in data communications and for optical sensors or measurement tasks; Projection apparatus; Holographic projectors; Light-emitting electronic pointers; Light guides (fibre optic cables); Light guiding devices, namely light shaping apparatus; Measuring machines; Measuring apparatus; Measuring apparatus and instruments; Sensor; Optical sensors; Detectors; High-frequency transducers for use in the optics sector; Scanners, namely mirror units for optical projection; Parts and components for the aforesaid goods, included in this class. Lasers for medical purposes; Light sources for medical use; Lasers and light sources for use in medical measuring, diagnostic and testing apparatus. Light sources, other than for medical or photography purposes; Self-luminous light sources; Projection lamps and lights; Laser light projectors; Lasers for lighting; Laser-based light sources. Product research and development; Development of new products; Software design and development; Engineering consultancy services.
The invention relates to a method (100) for determining an external magnetic field (B) with an NV magnetometer (1) with automated resonance control, as well as to said type of NV magnetometer (1) and to the use of one or more NV magnetometers (1) of said type for gradiometric measurements.
G01R 33/26 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux using optical pumping
G01R 33/32 - Excitation or detection systems, e.g. using radiofrequency signals
The invention relates to a magnetic field gradiometer (1) for determining a magnetic field gradient (Ba – Bb), comprising: at least one excitation light source (5a, 5b) for emitting excitation light (6a, 6b); two spatially distanced measurement regions (3a, 3b) for measuring a magnetic field, which regions comprise colour centres in a diamond, preferably NV centres (4a, 4b), which emit fluorescent light (71, 7b) when excited by the excitation light (6a, 6b); a first detector (8a) for detecting the fluorescent light (7a) from the first measurement region (3a); a second detector (8b) for detecting the fluorescent light (7b) from the second measurement region (3b); a first microwave emitter (10a) for applying a first microwave field (9a) to the first measurement region (3a); a second microwave emitter (10b) for applying a second microwave field (9b) to the second measurement region (3b); and an evaluation device (11), which is designed to determine the magnetic field gradient (Ba – Bb) on the basis of the detected fluorescent light (7a) from the first measurement region (3a) and on the basis of the detected fluorescent light (7b) from the second measurement region (3b). The magnetic field gradiometer (1) comprises a signal generator (12), which is designed to generate a first microwave signal (fMW1(t)) for the first microwave emitter (10a), which signal comprises at least two frequency components mutually phase shifted by , and to generate a second microwave signal (fMW2(t)) for the second microwave emitter (10b), which signal comprises at least two frequency components mutually phase shifted by .
G01R 33/24 - Arrangements or instruments for measuring magnetic variables involving magnetic resonance for measuring direction or magnitude of magnetic fields or magnetic flux
G01R 33/32 - Excitation or detection systems, e.g. using radiofrequency signals
