A gate valve control system (100) according to one embodiment of the present invention comprises: a gate valve (110) including a blade (111) for opening/closing a gate of a substrate processing apparatus, and a valve rod (112) coupled to the blade (111); a valve driving unit (120) for horizontally moving the blade (111) and vertically moving the valve rod (112); an operation signal generation unit (130) that provides an operation signal for selectively operating the valve driving unit (1200); an air-operated valve (140) for selectively supplying air to the valve driving unit (120); and an air supply part (150) including an opening air supply part (151) and a closing air supply part (152) for the opening/closing of the gate valve (110), wherein the operation signal generation unit (130) includes a main flow path (130a) and a signal flow path (130b), and provides the operation signal to the air-operated valve through a differential pressure between the main flow path (130a) and the signal flow path (130b).
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 31/122 - Operating meansReleasing devices actuated by fluid the fluid acting on a piston
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
The present invention relates to a gate valve and a substrate processing apparatus comprising same, and, more specifically, to a gate valve having an inclined sealing surface, and a substrate processing apparatus comprising same. The present invention provides the gate valve (10) comprising: a valve housing (100) having an opening (O) that forms a flow path (P), and a valve seat (101); and a valve plate part (200), which is provided in the valve housing (100) to be movable between a closing position at which the valve plate part comes into contact with the valve seat (101) so as to close the flow path (P) and an opening position at which the flow path (P) is opened.
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
F16K 3/14 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with wedge-shaped arrangements of sealing faces with special arrangements for separating the sealing faces or for pressing them together
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
In the present invention, a sealing blade unit and a rotary shutter unit are operated through one driving unit, and a sealing ring formed in a sealing member can be protected through a sealing shutter, which is lifted/lowered and rotated.
F16K 3/04 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with pivoted closure members
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
4.
SUBSTRATE RAISING/LOWERING MODULE, SUBSTRATE PROCESSING MODULE INCLUDING SAME, AND SUBSTRATE PROCESSING SYSTEM
The present invention relates to a substrate raising/lowering module, a substrate processing module including same, and a substrate processing system. Disclosed is a raising/lowering module (200) characterized by comprising: a substrate support part (210) located in the inner space (S) of a chamber (21) and supporting a substrate (G); and a vertical driving part (220) that is coupled to the substrate support part (210) and drives the up and down movement of the substrate support part (210). The vertical driving part (220) includes: a shaft (222) coupled to the substrate support part (210) and extending outward through the chamber (21); and a rotation prevention part (228) coupled to the shaft (222) to prevent circumferential rotation about the longitudinal reference axis of the shaft (222).
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
The present invention relates to a wafer processing apparatus, and more specifically, to a wafer processing apparatus comprising a valve module installed in a channel in which gas expelled from a processing chamber flows. Disclosed in the present invention is a wafer processing apparatus comprising: a processing chamber (100) forming a wafer processing space (S); an exhaust pump (200) for expelling gas from the wafer processing space (S) to the outside; a first channel unit (310) coupled to the processing chamber (100) to communicate with the wafer processing space (S); a second channel unit (320) coupled to the exhaust pump (200); and a valve module (400) installed between the first channel unit (310) and the second channel unit (320) to open and close a channel (402) in which gas flows.
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
H01L 21/677 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for conveying, e.g. between different work stations
H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
The present invention is configured such that, when a fluid discharge part is open, a shutter member rotates and is positioned at the lower part of a sealing member so as to cover an exposed part of a sealing ring, and the present invention thereby has the benefit of securing reliability for sealing of a vacuum valve by preventing damage to the sealing ring due to a processing by-product such as a particle even if the sealing ring is exposed to a fluid transport part as the fluid discharge part is open for an air cleaning operation.
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 27/04 - Construction of housingsUse of materials therefor of sliding valves
H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
7.
VALVE MODULE AND SUBSTRATE PROCESSING DEVICE COMPRISING SAME
The present invention relates to a valve module and a substrate processing device comprising same and, more particularly, to a valve module installed in a flow path through which a gas activated by plasma flows, and a substrate processing device comprising same. Disclosed is a valve module (400) installed in a substrate processing device comprising: a process chamber (100) which forms a substrate processing space (S); and a flow path portion (300) which is coupled to the process chamber (100) and forms a flow path (302) through which a gas activated by plasma flows, wherein the valve module (400) comprises: an opening/closing plate (410) which is installed so as to be capable of moving back and forth across the flow path (300), through an opening slit (301) which is provided on one side of the flow path portion (300), so as to open and close the flow path (302); a first driving portion (420) which drives forward and backward movement of the opening/closing plate (410); an opening/closing plate protection portion (430) which moves into the space between the opening/closing plate (410) and the flow path (302) to prevent the opening/closing plate (410) from being damaged by the activated gas, when the opening/closing plate (410) moves backward and keeps the flow path (302) open; and a second driving portion (440) which drives the movement of the opening/closing plate protection portion (430).
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
H05H 1/46 - Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
The present invention provides a vacuum valve which is configured such that gas supplied from an external source is injected near a sealing ring formed in a sealing member, whereby even when, in a state where a fluid discharge part is opened for an air cleaning operation, the sealing ring is exposed to a portion through which a fluid is moving, the sealing ring is prevented from being damaged by process byproducts such as particles, and thus the reliability of sealing of the vacuum valve can be ensured.
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 27/02 - Construction of housingsUse of materials therefor of lift valves
F16K 1/24 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
The present invention configures a shutter valve which opens and closes a substrate moving path formed in a cylindrical well liner to be vertically and horizontally movable, and thus has an advantage in that it is possible to manufacture a reliable substrate by preventing unnecessary out-of-process space, causing plasma to be uniformly distributed, securing reliability of an etching or vapor deposition process, and ensuring uniformity of a thin film pattern.
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
According to the present invention, a main body housing is divided into two spaces provided with first and second pistons, respectively, wherein the first piston is provided, between driving parts, in an upper space inside the main body housing, and the second piston is provided in a lower space inside the main body housing. The first and second pistons are connected by a main shaft such that a blade can be lifted or lowered by even a small amount of pressure, and thus driving efficiency is enhanced and the energy required for driving can be reduced.
F16K 31/122 - Operating meansReleasing devices actuated by fluid the fluid acting on a piston
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
The present invention is characterized by being comprised of: a blade (200) installed inside a valve housing (100) in the front surface and rear surface of which a first and second moving hole (110, 120) are formed, respectively, the blade (200) for opening and closing each of the moving holes (110, 120); a shaft (300) coupled to the lower portion of the blade (200); a first driving block (400) provided at the lower portion of the valve housing (100) and provided with a first cylinder (410) in which the shaft (300) is inserted, a first piston (420) installed inside the first cylinder (410), coupled to the bottom portion of the shaft (300), and moving the shaft (300) upward and downward according to the variation in pressure inside the first cylinder (410), and horizontally moving guide rollers (430, 430') provided on both external side surfaces, respectively, of the first driving block to guide the horizontal movement of the blade (200); a second driving block (500) coupled to be capable of moving upward and downward to the bottom portion of the first driving block (400) and having horizontally moving guide recesses (510, 510'), for guiding the horizontal movement of the blade (200,) formed in both inner side surfaces thereof, respectively, according to the upward and downward movement of the horizontally moving guide rollers (430, 430') inserted in the moving guide recesses; a third driving block (600) formed on the bottom portion of the second driving block (500) and including first and second seating portions (610, 620) respectively forming separate spaces therein, a second piston (611) coupled to the second driving block (500) in the first seating portion (610) and moving the second driving block (500) upward and downward according to the variation in pressure inside the first seating portion (610), and a movement restricting member (621) installed on the second seating portion (620) to be movable upward and downward and restricting the downward movement of the second piston (611); and a main body bracket (700) formed at the bottom portion of the valve housing (100) and housing the first, second, and third driving blocks (400, 500, 600).
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
The present invention comprises: an opening and closing plate formed in a plate shape and having one side surface coming into contact with a moving passage part, a screw coupling part formed on the other side surface, and a first elastic member seating part on the outer circumference of the screw coupling part so as to allow the one side surface of a first elastic member to be seated thereon; at least one shaft connecting bar provided on the other side surface of the opening and closing plate, and having a contact protrusion part having a second elastic member seating part formed to allow the other side surface of the first elastic member to be seated thereon, and a connecting part formed in the contact protrusion part so that a connecting unit is inserted; the first elastic member provided between the first elastic member seating part and the second elastic member seating part so as to guide the elastic connection between the opening and closing plate and the shaft connecting bar; and the connecting unit inserted into the connecting part so as to be connected to the other side surface of the opening and closing plate.
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/16 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together
The present invention comprises: a valve housing having a driving space formed therein and a moving passage part perforated in both surfaces thereof; a blade provided in the driving space, for opening and closing the moving passage part from the inside; a main shaft coupled to the rear surface of the blade; a vertical moving part which is formed beneath the valve housing, and in which the main shaft and a first piston, which moves vertically by air pressure, are connected to vertically move the blade; a horizontal moving part coupled to the lower part of the vertical moving part and provided with a vertical moving guide groove perforated vertically in both side surfaces; a horizontal moving unit having a second piston provided inside the horizontal moving part, a moving guide block formed beneath the second piston, and a cam roller formed at both sides of the moving guide block and passing through the vertical moving guide groove; and a main body bracket formed such that the vertical moving part and the horizontal moving part are accommodated beneath the valve housing, and having an opening and closing guide groove inclinedly formed in both side surfaces such that the cam roller, having passed through the vertical moving guide groove, is inserted so as to guide the forward-backward movement of the blade according to the upward-downward movement of the horizontal moving unit.
F16K 3/02 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
The present invention relates to a vacuum valve and is derived in order to solve specified problems. The purpose of the present invention is to have formed on both lateral sides of an operation block an opening and closing guide groove, comprising a protruding groove section and first and second inclined groove sections, and to have formed on an L-motion block an L-motion roller moveably pushed into the opening and closing guide groove such that, if the L-motion roller is positioned on the end part of the first inclined groove section, one lateral side of a valve blade closes an inlet port and, if the L-motion roller is positioned on the end part of the second inclined groove section, one lateral side of the valve blade comes into contact with the inner side of a housing and substantially blocks a packing ring, which is provided on the closing side of the valve blade, from coming into contact with the air and fluid, thereby extending the replacement period of the packing ring by enhancing the product quality of the packing ring
The present invention relates to an angle valve having a fixed heater block, the angle valve comprising: a valve casing (100) having an inlet portion (110) through which a fluid flows therein and an outlet portion (120) through which a fluid is discharged therefrom; a fixed heater block (200) fixedly installed in the inner side of the valve casing (100) and having a slide hole (210) therein; a driving member (300) detachably coupled to the upper portion of the valve casing (100) so as to provide a driving force; a sealing part (400) coupled to the driving member (300) so as to open/close the inlet portion (110) depending on whether the sealing part (400) is driven by the driving member (300).
F16K 1/32 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces Details
F16K 49/00 - Means in or on valves for heating or cooling
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 31/122 - Operating meansReleasing devices actuated by fluid the fluid acting on a piston
The present invention relates to a gate valve (100) comprising: a valve blade (120) for closing an opening (112) of a valve housing (110); a valve rod (130) which connects to the valve blade (120) and can move vertically and horizontally; a guide housing (140) which is connected to the outside of the valve housing (110); an L-motion block (150) which connects to the valve rod (130) by coupling and is provided with guide rollers (151) on both side surfaces thereof; a cam-block (160) which is installed inside of the guide housing (140); a driving rod coupling roller (152) which is installed at the lower end of the valve rod (130); a driving rod (170) into which the driving rod coupling roller (172) is inserted and guided thereby, and which is provided with a droving rod tilting groove (171), which is formed in a tilted manner toward a closing direction (C) toward the bottom; an elasticity provision means (175), which is installed between the L-motion block (150) and the driving rod (170), for providing elastic force; and a vertical driving means (180) for vertically driving the driving rod (170). 본 발명은 게이트 밸브에 관한 것으로, 밸브 하우징(110)에서 개구부(112)를 폐쇄할 수 있는 밸브 블레이드(120);와, 상기 밸브 블레이드(120)에 연결되며 상하 운동 및 수평 운동을 할 수 있는 밸브 로드(130);와, 상기 밸브 하우징(110)의 외측에 연결되는 가이드 하우징(140);과, 상기 밸브 로드(130)에 결합되어 연결되며, 양 측면에 가이드 롤러(151)가 설치되는 엘 모션 블록(L-Motion Block)(150);와, 상기 가이드 하우징(140)의 내부에 설치되는 캠 블록(Cam-Block)(160);과, 상기 밸브 로드(130)의 하측 말단에 설치되는 구동 로드 결합 롤러(172);와, 상기 구동 로드 결합 롤러(172)가 삽입되어 유도되며, 하방으로 가면서 폐쇄 방향(C) 측으로 경사지게 형성된 구동 로드 경사홈(171)이 형성되어 있는 구동 로드(170);와, 상기 엘 모션 블록(L-Motion Block)(150)과 상기 구동 로드(170) 사이에 탄성력을 제공하도록 설치되는 탄성 제공 수단(175);과, 상기 구동 로드(170)를 상하로 구동하는 상하구동 수단(180); 을 포함하여 구성되는 것을 특징으로 하는 게이트 밸브(100)에 관한 것이다.
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
The present invention relates to a gate valve (100) comprising: a valve blade (120) for closing an opening (112) of a valve housing (110); a valve rod (130) which connects to the valve blade (120) and can move vertically and horizontally; a guide housing (140) which is connected to the outside of the valve housing (110) and is provided with L-motion block guide grooves (142) on the interior surface of both sides; an L-motion block (150) which is connected to the valve rod (130), and on both sides of which guide rollers (151) that are driven by being inserted into the L-motion block guide grooves (142) are installed; a driving block (160) which is connected to the upper and lower portions of L-motion block (150) by means of at least one link (155); a tensile elasticity means (170), at least one of which is installed between the L-motion block (150) and the driving block (160); and a vertical driving means (180) for vertically driving the driving block (160). 본 발명은 밸브 하우징(110)에서 개구부(112)를 폐쇄할 수 있는 밸브 블레이드(120);와, 상기 밸브 블레이드(120)에 연결되며, 상하 운동 및 수평 운동을 할 수 있는 밸브 로드(130);와, 상기 밸브 하우징(110)의 외측에 연결되며, 엘 모션 블록 가이드 홈(142)이 양측 내면에 형성되어 있는 가이드 하우징(140);과, 상기 밸브 로드(130)에 연결되며, 양 측면에 상기 엘 모션 블록 가이드 홈(142)에 삽입되어 구동되는 가이드 롤러(151)가 설치되는 엘 모션 블록(L-Motion Block)(150);과, 상기 엘 모션 블록(L-Motion Block)(150)에 상측과 하측에 각각 하나 이상의 링크(155)를 통하여 연결되는 구동 블록(160);과, 상기 엘 모션 블록(L-Motion Block)(150)과 상기 구동 블록(160) 사이에 하나 이상 설치되는 인장 탄성 수단(170);과, 상기 구동 블록(160)을 상하로 구동하는 상하구동 수단(180); 을 포함하여 구성되는 것을 특징으로 하는 게이트 밸브(100)에 관한 것이다.
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
An up and down operating actuator unit which manages upward and downward motions of an opening and closing member, and a forward and backward actuator unit which manages forward and backward motions of the opening and closing member are configured so that the opening and closing member, which opens and closes a wafer movement path, can be accurately operated in an "L"-shaped motion.
H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
H01L 21/677 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for conveying, e.g. between different work stations
The present invention relates to a butterfly valve device. According to the butterfly valve device of the present invention, a guide groove is formed in a guide unit to guide rotation and vertical operation of a main shaft and thus friction, that is, contact stress does not occur during contact between a blade and a fluid passage, thereby preventing abrasion of an O-ring. Therefore, maintenance costs can be reduced and the interior of a vacuum pump can be completely isolated from the exterior.
F16K 31/528 - Mechanical actuating means with crank, eccentric, or cam with pin and slot
F16K 1/22 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves
F16K 31/122 - Operating meansReleasing devices actuated by fluid the fluid acting on a piston
A rectangular gate valve having an improved driving action is disclosed. The rectangular gate valve of the present invention includes a sealing member (100), which opens or closes a wafer moving passage, a main shaft (400), which is coupled to the sealing member and has a guide member (410), and a housing bracket (200), which has a first guide slot (210), into which the guide member is inserted. The gate valve further includes a valve drive unit (300), which is provided in the housing bracket and has an air cylinder (310), a piston (320), a piston shaft (330), a moving unit (340) and a connection link (350). The gate valve further includes a guide bracket (500), which has a vertical bracket (510), a second guide slot (530) and a horizontal bracket (520). The gate valve further includes a guide link (600), which is moved along the second guide slot to guide movement of the main shaft.
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
patents