A gas stream guiding device and a manufacturing equipment are provided. The gas stream guiding device is for use with a working bench having a top opening. The gas stream guiding device includes a casing, a gas inlet, a gas outlet, and a stream guiding part. The casing includes an inner space. The gas inlet is disposed on the casing, wherein a gas stream enters the inner space through the gas inlet from the side of the working bench. The gas outlet is disposed on the casing and is connected with the top opening, wherein the gas stream leaves the inner space from the gas outlet and enters the working bench. The stream guiding part is disposed in the casing and is located on the flow path of the gas stream, wherein at least a portion of the stream guiding part extends aside in the direction perpendicular to the gas inlet. The manufacturing equipment includes the gas stream guiding device and the working bench.
B01D 46/00 - Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
3.
FILTER MESH FRAME, FILTER MESH STRUCTURE, AND USAGE THEREOF
A filter mesh frame is provided. The filter mesh frame includes a first mesh and a second mesh. The first mesh surrounds to form a cylinder with respect to a first pivot direction. The second mesh surrounds the first mesh with respect to a first pivot direction and includes a plurality of bar structures, where the bar structures protrude outward with respect to the first mesh and are disposed parallel to the first pivot direction. A groove parallel to the first pivot direction is formed on one side of each bar structure with respect to the first mesh.
The present invention provides an activated carbon modification method, a filter mesh structure, use of the filter mesh structure, and a filter material regeneration method. The activated carbon modification method includes: providing an activated carbon; treating the surface of the activated carbon with hydrogen peroxide, so that the activated carbon forms a modified activated carbon; and removing the hydrogen peroxide from the surface of the modified activated carbon. The filter mesh structure includes the modified activated carbon, and the filter material therein can withstand hydrogen peroxide and temperatures above 100° C. and below 120° C. The filter material regeneration method includes: providing a filter material of the filter mesh structure as described above; treating the filter material with hydrogen peroxide; and removing substances from the surface of the modified activated carbon.
B01D 53/04 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
B01J 20/20 - Solid sorbent compositions or filter aid compositionsSorbents for chromatographyProcesses for preparing, regenerating or reactivating thereof comprising inorganic material comprising free carbonSolid sorbent compositions or filter aid compositionsSorbents for chromatographyProcesses for preparing, regenerating or reactivating thereof comprising inorganic material comprising carbon obtained by carbonising processes
B01J 20/30 - Processes for preparing, regenerating or reactivating
B01J 20/28 - Solid sorbent compositions or filter aid compositionsSorbents for chromatographyProcesses for preparing, regenerating or reactivating thereof characterised by their form or physical properties
A cylindrical filter device of the present invention includes a wavy filter screen, a sealing device, and a connecting device. The wavy filter screen includes a first flexible side strip, a second flexible side strip opposite to the first flexible side strip, and a plurality of wavy structures disposed between the first flexible side strip and the second flexible side strip. The wavy filter screen wraps to form a cylindrical structure with respect to an axis. The opposite ends of the cylindrical structure are respectively wrapped to form a first opening and a second opening by the first flexible side strip and the second flexible side strip. The sealing device is disposed at the first opening and has a first groove. The first flexible side strip is able to engage with the first groove with its elasticity and makes the first opening be sealed by the sealing device. The connecting device is disposed at the second opening. The connecting device has a second groove and a port. The second flexible side strip is able to engage with the second groove with its elasticity and makes the second opening communicate with the port.
B01D 53/00 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
B01D 53/04 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
A filter device and a filter system are provided. A magnetic unit is disposed on at least one side of the filter device. The filter device includes a filter and a magnetic fixing device. The filter includes a first side wall. The magnetic fixing device includes a body, a clipping portion, and the magnetic unit. The body includes a top edge, a bottom edge, a first side face, and a second side face opposite to the first side face. The clipping portion includes a top flange extending from the top edge along the facing direction of the first side face by a first distance and a clip plate extending from an outer edge of the top flange toward the bottom edge by a second distance. The first side wall is clipped between the clip plate and the first side face. The magnetic unit is disposed on the second side face. The filter system includes a frame and the filter device.
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