A rotating drum of a rotating drum-type workpiece cleaning device is provided with feed fins that extend helically along the inner circumferential surface of the drum body. The feed fins are, for example, fins in which metal sheets have been folded. On both sides of the feed fins, the angle of the internal corner between the feed fin and the inner circumferential surface of the drum body is an obtuse angle, for example, about 120 degrees. It is possible to prevent or limit the trapping of conveyed workpiece in the internal corner and trapping between adjacent fin sections.
A cleaning device (1) is provided with a three-dimensional circulation route (2) for circulating workpiece holding tools (16) that hold a workpiece, and this three-dimensional circulation route (2) is formed by an endless conveyor chain (13) bendable in various directions being disposed within a rectangular parallelepiped space (20) following along the upper and lower side thereof. The conveyor chain (13) circulates from an upper side horizontal transport path portion (41) via a falling side transport path portion (42), a lower side horizontal transport path portion (43), and a rising side transport path portion (44), and the workpiece held in the workpiece holding tools (16) is treated by ultrasonic cleaning, shower cleaning, steam cleaning, drying and the like. Thus, it is possible to suitably dispose a workpiece transport route in a limited rectangular parallelepiped space, and carry out cleaning operations for the workpiece efficiently.
A rotating drum (7) of a rotating drum-type workpiece cleaning device is provided with feed fins (13) that extend helically along the inner circumferential surface (11a) of the drum body (11). The feed fins (13) are, for example, fins in which metal sheets have been folded. On both sides of the feed fins (13), the angle (θ) of the internal corner (64) between the feed fin (13) and the inner circumferential surface (11a) of the drum body (11) is an obtuse angle, for example, about 120 degrees. The present invention is able to prevent or limit the trapping of conveyed workpieces (w) in the internal corner (64) and trapping between adjacent fin sections (13a, 13b).
For an XY stage device (1), a sheet metal X-axis stage plate (3), which slides in the X-axis direction, is mounted on a sheet metal base plate (2), and a Y-axis stage plate (4), which slides in the Y-axis direction, is mounted thereupon. The thin X-axis stage plate (3) and Y-axis stage plate (4) are manufactured by way of a precise sheet metal processing using a thin metal sheet, and, by bending the four perimeter sides thereof, twice, on the back face and the front face, step portions (35 to 38) (45 to 48) are formed. Thus, the strength and the machining accuracy of the metal X-axis stage plate (3) and the Y-axis stage plate (4) are improved. A thin XY stage device can be provided without impairing reliability in positioning.
G12B 5/00 - Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereofCompensating for the effects of tilting or acceleration, e.g. for optical apparatus
B21D 5/01 - Bending sheet metal along straight lines, e.g. to form simple curves between rams and anvils or abutments
In a rotating drum (4) of a rotating drum type work washing apparatus (1), a first cylindrical body section (21), in which a liquid impassable part (21a) that follows the circumferential orientation and does not allow a washing solution to pass and a liquid passing part (21b) that allows the washing solution to pass are formed, is provided. With the rotation of a rotating drum (4), work (w) is transported in the direction of the line of the central axis along the inner circumferential surface part on the lower side inside the rotating drum by spiral work transport fins (8) formed along the inner circumferential surface inside the rotating drum. During transport with the rotation of the rotating drum (4), the washing configuration for the work is switched from immersion washing to flowing water washing and shower washing in that order. The work can be washed in different configurations; therefore, the washing effect on the work can be increased by the rotating drum with the spiral work transport fins.
Provided is a beam processing apparatus or a beam monitoring apparatus which has reduced sizes and reduced cost. The beam processing apparatus or the beam monitoring apparatus is provided with a beam outputting source; a beam passing member (25), which has an outputting section (25a) for outputting a beam toward a work (2) and permits the beam traveling toward the work (2) from the beam outputting source to pass through; a fixed member (6), which has a fixing surface (6a) for fixing the work (2) and moves in a prescribed direction; and a hollow member (23), which is formed hollow to be deformed in three-dimensional directions and has the beam passing member (25) inside. The hollow member (23) is composed of at least a first hollow member (26) and a second hollow member (27) connected to each other. At one end of the hollow member (23), an opening section (37) is formed, the one end of the hollow member (23) abuts to the fixing surface, and inside the hollow member (23) is in a vacuum state.
H01J 37/20 - Means for supporting or positioning the object or the materialMeans for adjusting diaphragms or lenses associated with the support
H01J 37/317 - Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation
7.
BEAM MACHINING APPARATUS AND BEAM OBSERVING APPARATUS
A beam machining apparatus (1) is provided with a beam outputting source (13) for outputting a beam for machining a work (2); a vacuum chamber (3) having a first channel (34) where the beam outputted from the beam outputting source (13) passes through; a local vacuum chamber (27), which has a second channel (40) connected to the first channel (34) for passing through the beam passed through the first channel (34), and an outputting port (78a) for outputting the beam toward the work (2); and a detecting means arranged on the outputting port (78a) or the like with a member (53) to be irradiated, for detecting the beam irradiation position. Thebeam machining apparatus (1) performs machining to the work (2) which is at least partially arranged under the external atmospheric pressure of the vacuum chamber (3) and the local vacuum chamber (27).
H01J 37/317 - Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation
A treatment bath section (10) of an electrolytic plating apparatus (1) is provided with a hollow rotating shaft (23) horizontally arranged on the upper side of a plurality of treatment baths (42-47). The hollow rotating shaft (23) is concentrically provided with a plurality of rotating drums (52-57), and the outer circumference sections on the lower side of the drums are impregnated with a treatment solution. When the hollow rotating shaft (23) is rotated, a work is guided in a radius direction by a whorl-like path (74) formed in the rotating drums (52-57), and treatment such as cleaning and plating is performed in treatment baths (42-47). Then, the work is sent to a rotating drum of the subsequent step by a shaft direction path (117) formed by a feeding fin (108) in the hollow rotating shaft (23). The small and compact electrolytic plating apparatus which can be easily assembled and disassembled is provided.
C25D 17/28 - Apparatus for electrolytic coating of small objects in bulk with means for moving the objects individually through the apparatus during the treatment
B08B 3/06 - Cleaning involving contact with liquid using perforated drums in which the article or material is placed
B65G 49/02 - Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid
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