A device (10) for determining a density of radicals (5) of a radical type in a measuring space (4) comprises
a catalyst material (1) which can be brought into contact with the measuring space at least in the region of a first surface (15) of the catalyst material, wherein the catalyst material is suitable for triggering an exothermic recombination reaction of radicals of the radical type when radicals of the radical type come into contact with the first surface;
a temperature actuator (2) in thermal contact with the first surface; and
a temperature sensor (3) in thermal contact with the first surface.
A device (10) for determining a density of radicals (5) of a radical type in a measuring space (4) comprises
a catalyst material (1) which can be brought into contact with the measuring space at least in the region of a first surface (15) of the catalyst material, wherein the catalyst material is suitable for triggering an exothermic recombination reaction of radicals of the radical type when radicals of the radical type come into contact with the first surface;
a temperature actuator (2) in thermal contact with the first surface; and
a temperature sensor (3) in thermal contact with the first surface.
The device is designed to control the temperature actuator by means of a control signal in such a way that the measured value detected by the temperature sensor is kept at a setpoint value, and wherein the control signal can be evaluated in order to determine the density of radicals of the radical type in the measuring space.
A device (10) for determining a density of radicals (5) of a radical type in a measuring space (4) comprises
a catalyst material (1) which can be brought into contact with the measuring space at least in the region of a first surface (15) of the catalyst material, wherein the catalyst material is suitable for triggering an exothermic recombination reaction of radicals of the radical type when radicals of the radical type come into contact with the first surface;
a temperature actuator (2) in thermal contact with the first surface; and
a temperature sensor (3) in thermal contact with the first surface.
The device is designed to control the temperature actuator by means of a control signal in such a way that the measured value detected by the temperature sensor is kept at a setpoint value, and wherein the control signal can be evaluated in order to determine the density of radicals of the radical type in the measuring space.
The invention is further directed to a method for determining a density of radicals (5) of one radical type in a measuring space.
G01N 25/32 - Investigating or analysing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly using electric temperature-responsive elements using thermoelectric elements
G01N 31/10 - Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroupsApparatus specially adapted for such methods using catalysis
A chamber, for bounding a plasma generation area in a vacuum pressure sensor, includes an electrically conductive casing element located radially on an outside relative to a central axis. The chamber includes electrically conductive wall elements arranged substantially perpendicular to the central axis and connected to the electrically conductive casing element. At least one of the wall elements has a first opening, through which the central axis extends. The electrically conductive casing element comprises at least a first and a second region. The first region is located closer to the central axis than the second region. The electrically conductive casing element is conical at least in part.
A vacuum feedthrough (10) which is constructed in radial layers comprises the following elements (from inwards to outwards): —a lens element (11), —a first ring (12) made of glass, —a first hollow cylinder (13) made of a first dielectric material, —a first electrically conductive layer (18), —a second hollow cylinder (14) made of glass, —a third hollow cylinder (15) made of ceramic, —a second ring made of glass (16), and—a frame (17) made of metal. On the basis of the vacuum feedthrough, the invention additionally relates to an electrode assembly, to a device for generating a DBD plasma discharge, to a measuring device for characterizing a pressure and/or a gas composition, and to a method for operating the measuring device.
G01L 11/02 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group or by optical means
G01N 21/67 - Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1′, 1″) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2′, 2″) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.
The present invention relates to a device for plasma generation in a wide pressure range. The device comprises a first plasma source (1) in a first discharge chamber (2) in order to generate a first plasma in a low-pressure range, a second plasma source (3) in a second discharge chamber (4) in order to generate a second plasma in a high-pressure range, a first coupling element (5) for coupling the device to a system, in order to guide gas out of the system, and a second coupling element (6) for coupling the device to an optical sensor (12). The first discharge chamber (2) has a first optical connection with at least one optical lens (7, 8) to the second coupling element (6) and the second discharge chamber (4) has a second optical connection with at least one optical lens (8) to the second coupling element (6). This invention further relates to a system for optical gas analysis or gas detection and corresponding methods for plasma generation and for operating the system.
Method for operating a group 1 of pressure sensors which are arranged in such a manner that they can measure the pressure in a common measurement volume 2, wherein the group of pressure sensors comprises at least a first pressure sensor 1′ with a first pressure measurement range and a second pressure sensor 1″ with a second pressure measurement range, wherein the first and second pressure measurement ranges overlap in an overlap pressure measurement range, wherein the first and second pressure sensors are each based on an indirect pressure measurement principle and are configured to output a measurement signal calibrated to a reference gas, and wherein the method comprises the steps of: a) providing calibration data specific to the type of gas for the first measurement signal and for the second measurement signal, which calibration data describe a dependence of the first and second measurement signals on the effective pressure and on a list of types of gas, respectively; b) recording a first and a second measured value of the first and second measurement signals, respectively; c) determining a resultant type of gas which best matches the combination of the recorded first measured value and the recorded second measured value, taking into account the first and second calibration data. In one variant, a resultant pressure which is independent of the type of gas is additionally determined. The invention is also directed to an apparatus for earring out the method and to a computer program product.
A method for operating a group of pressure sensors is provided. First and second pressure sensors respectively have first and second pressure measurement ranges, and are arranged to measure the pressure in a common measurement volume, and have measurement ranges that overlap in a range. The method comprises: aa) reading out first and second measurement signals respectively from the first and second pressure sensors substantially simultaneously while the pressure in the common measurement volume is in the overlapping range; bb) stipulating the first measurement signal which has been read out as the adjustment point for the second pressure sensor; cc) determining at least one calibration parameter, in particular a gas-dependent calibration parameter, for the second pressure sensor as a function of the first measurement signal, as a function of the adjustment point for the second pressure sensor, as stipulated in bb), and as a function of the second measurement signal.
G01L 21/34 - Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
G01L 21/32 - Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
G01L 27/00 - Testing or calibrating of apparatus for measuring fluid pressure
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
8.
DEVICE AND METHOD FOR DETERMINING A DENSITY OF A RADICAL IN A GAS
Device (10) for determining a density of radicals (5) of a radical type in a measuring space (4), wherein the device comprises : a catalyst material (1) which can be brought into contact with the measuring space at least in the region of a first surface (15) of the catalyst material, wherein the catalyst material is suitable for triggering an exothermic recombination reaction of radicals of the radical type when radicals of the radical type come into contact with the first surface, a temperature actuator (2) in thermal contact with the first surface, and a temperature sensor (3) in thermal contact with the first surface, wherein the device is designed to control the temperature actuator by means of a control signal in such a way that the measured value detected by the temperature sensor is kept at a setpoint value, and wherein the control signal can be evaluated in order to determine the density of radicals of the radical type in the measuring space. The invention is further directed to a method for determining a density of radicals (5) of one radical type in a measuring space.
G01N 25/32 - Investigating or analysing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly using electric temperature-responsive elements using thermoelectric elements
9.
Method for determining a pressure in a pressure measurement cell and a measurement cell assembly
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G01L 9/12 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance
A vacuum pressure sensor includes a vacuum-tight electrical feedthrough. The feedthrough has an electrically insulating insulator element with a through-opening, having a first boundary surface adjacent to the through-opening and a second boundary surface also adjacent to the through-opening and opposite to the first boundary surface, and an electrically conductive conductor element which extends through the through-opening and which is connected to the insulator element in a vacuum-tight manner along a circumferential line of the conductor element. The insulator element is transmissive to electromagnetic radiation in an optical wavelength range and the first boundary surface and/or the second boundary surface is formed as a curved surface.
e) determining 105 the pressure in the vacuum system as a function of the measured current intensity, the measured first radiation intensity, and the measured second radiation intensity. Further, the invention relates to a vacuum pressure sensor.
A vacuum feedthrough (10) which is constructed in radial layers comprises the following elements (from inwards to outwards): - a lens element (11), - a first ring (12) made of glass, - a first hollow cylinder (13) made of a first dielectric material, - a first electrically conductive layer (18), - a second hollow cylinder (14) made of glass, - a third hollow cylinder (15) made of ceramic, - a second ring made of glass (16), and - a frame (17) made of metal. On the basis of the vacuum feedthrough, the invention additionally relates to an electrode assembly, to a device for generating a DBD plasma discharge, to a measuring device for characterizing a pressure and/or a gas composition, and to a method for operating the measuring device.
G01N 21/67 - Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
G01L 21/34 - Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
The present invention relates to a device for plasma generation in a wide pressure range. The device comprises a first plasma source (1) in a first discharge chamber (2) in order to generate a first plasma in a low-pressure range, a second plasma source (3) in a second discharge chamber (4) in order to generate a second plasma in a high-pressure range, a first coupling element (5) for coupling the device to a system, in order to guide gas out of the system, and a second coupling element (6) for coupling the device to an optical sensor (12). The first discharge chamber (2) has a first optical connection with at least one optical lens (7, 8) to the second coupling element (6) and the second discharge chamber (4) has a second optical connection with at least one optical lens (8) to the second coupling element (6). This invention further relates to a system for optical gas analysis or gas detection and corresponding methods for plasma generation and for operating the system.
G01N 21/3504 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
G01N 21/67 - Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
Method (100) for operating a group of pressure sensors, wherein the group comprises at least a first pressure sensor with a first pressure measurement range and a second pressure sensor with a second pressure measurement range, wherein the first and second pressure sensors are arranged in such a manner that they can measure the pressure in a common measurement volume, wherein the first and second pressure measurement ranges overlap in an overlap pressure measurement range, and wherein the method comprises the steps of: aa) reading out (101) a first measurement signal from the first pressure sensor and a second measurement signal from the second pressure sensor substantially at the same time while the pressure in the common measurement volume is in the overlap pressure measurement range; bb) stipulating (102) the first measurement signal which has been read out as the adjustment point for the second pressure sensor; cc) determining (103) at least one calibration parameter, in particular a gas-dependent calibration parameter, for the second pressure sensor as a function of the first measurement signal, as a function of the adjustment point for the second pressure sensor, as stipulated in step bb), and as a function of the second measurement signal. The invention also relates to a method for operating a vacuum process plant, to an apparatus for carrying out the method and to a computer program product.
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G01L 21/12 - Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filamentsVacuum gauges of the Pirani type
G01L 21/34 - Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
G01L 27/00 - Testing or calibrating of apparatus for measuring fluid pressure
G01L 15/00 - Devices or apparatus for measuring two or more fluid pressure values simultaneously
Method for operating a group 1 of pressure sensors which are arranged in such a manner that they can measure the pressure in a common measurement volume 2, wherein the group of pressure sensors comprises at least a first pressure sensor 1' with a first pressure measurement range and a second pressure sensor 1'' with a second pressure measurement range, wherein the first and second pressure measurement ranges overlap in an overlap pressure measurement range, wherein the first and second pressure sensors are each based on an indirect pressure measurement principle and are configured to output a measurement signal calibrated to a reference gas, and wherein the method comprises the steps of: a) providing calibration data specific to the type of gas for the first measurement signal and for the second measurement signal, which calibration data describe a dependence of the first and second measurement signals on the effective pressure and on a list of types of gas, respectively; b) recording a first and a second measured value of the first and second measurement signals, respectively; c) determining a resultant type of gas which best matches the combination of the recorded first measured value and the recorded second measured value, taking into account the first and second calibration data. In one variant, a resultant pressure which is independent of the type of gas is additionally determined. The invention is also directed to an apparatus for carrying out the method and to a computer program product.
G01L 15/00 - Devices or apparatus for measuring two or more fluid pressure values simultaneously
G01L 21/12 - Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filamentsVacuum gauges of the Pirani type
G01L 21/30 - Vacuum gauges by making use of ionisation effects
G01L 27/02 - Testing or calibrating of apparatus for measuring fluid pressure of indicators
G01N 27/00 - Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
16.
METHOD FOR DETERMINING A PRESSURE IN A PRESSURE MEASUREMENT CELL, AND MEASUREMENT CELL ASSEMBLY
G01L 9/12 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance
The invention relates to a method (100) for detecting pressure in a vacuum system, said method having the following steps: a) generating (101) a plasma in a sample chamber which is fluid-dynamically connected to the vacuum system and electrically contacts a first electrode and a second electrode; b) measuring (102) the strength of an electric current flowing between the first electrode and the second electrode through the plasma; c) measuring (103) a first radiation intensity of an electromagnetic radiation of a first wavelength range being emitted from the plasma, said first wavelength range containing at least one first emission line of a first plasma species of a first chemical element; d) measuring (104) a second radiation intensity of an electromagnetic radiation of a second wavelength range being emitted from the plasma, said second wavelength range containing a second emission line of the first plasma species of the first chemical element or of a second plasma species of the first chemical element, wherein the second emission line lies outside of the first wavelength range; and e) detecting (105) the pressure in the vacuum system as a function of the measured current strength, the measured first radiation intensity, and the measured second radiation intensity. The invention additionally relates to a vacuum pressure sensor.
The invention relates to a vacuum-tight electrical feedthrough (10) comprising: - an electrically insulating insulator element (2) having a through-opening (23), a first boundary face (21) adjacent to the through-opening, and a second boundary face (22) likewise adjacent to the through-opening and opposite the first boundary face, and - an electrically conductive conductor element (1), which extends through the through-opening (23) and is connected to the insulator element (2) in a vacuum-tight manner along a circumferential line of the conductor element (1), wherein the insulator element (2) is transparent to electromagnetic radiation (25) within an optical wavelength range, and wherein the first boundary face (21) and/or the second boundary face (22) is designed as a curved face, in particular a convex or concave face. The invention also relates to a vacuum pressure sensor having the vacuum-tight electrical feedthrough and to a method for measuring the intensity of electromagnetic radiation.
The invention relates to an ionization vacuum measuring cell (10) comprising an evacuable housing (12) with a measurement connection for a vacuum to be measured at an end portion; a measurement chamber (14) in the housing (12), said measurement chamber being fluidically connected to the measurement connection, wherein the measurement chamber (14) is designed as a replaceable component; and a first and a second electrode (16, 18) in the measurement chamber (14), said electrodes being substantially coaxial to an axis and being arranged at a distance from each other. The measuring cell further comprises an electrically insulating and vacuum-tight feedthrough (20) for an electric supply to the second electrode (18) and a magnetization assembly which is designed to generate a magnetic field in the ionization chamber. According to the invention, the measurement chamber (14), in particular at least one of the electrodes (16, 18), comprises a magnetic material.
G01L 21/30 - Vacuum gauges by making use of ionisation effects
G01L 21/34 - Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
G01N 27/60 - Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables
G01N 27/62 - Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosolsInvestigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electric discharges, e.g. emission of cathode
G01N 27/66 - Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosolsInvestigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber and measuring current or voltage
G01N 27/68 - Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosolsInvestigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas
G01N 27/70 - Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosolsInvestigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas and measuring current or voltage
H01J 41/06 - Discharge tubes and means integral therewith for measuring gas pressure with ionisation by means of cold cathodes
20.
Method for processing a measurement signal from a pressure measurement cell, and a measurement cell arrangement
Method for determining a pressure in a pressure cell, the method consisting in determining a measuring signal (x) that is at least proportional to a measured pressure in the pressure cell, generating an output signal (y) from the measuring signal (x) using a filter unit (10) comprising a transfer function by at least reducing, preferably eliminating, a noise signal contained in the measuring signal determining a change over time of the measuring signal (x), and setting the transfer function as a function of the change over time of the measuring signal (x). A measuring cell arrangement is also specified.
G01D 3/036 - Measuring arrangements with provision for the special purposes referred to in the subgroups of this group mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
G01L 19/08 - Means for indicating or recording, e.g. for remote indication
The invention relates to a capacitive vacuum measuring cell having a first housing body (1) with a membrane (2) which is arranged at a distance therefrom so as to form a seal in the edge region (3) in such a way that a reference vacuum space (9) is formed in between, wherein opposite surfaces (7, 8) of the first housing body and of the membrane (2) comprise at least one electrode (G, G1, G2,... Gn; M1, M2,... Mn). A second housing body (4) is provided so as to form a seal with respect to the membrane (2) in the edge region and forms, with said membrane, a measuring vacuum space (10) in which connection means (5) for connection to a process space are present. In this case, the electrode (G, G1, G2,... Gn; M1, M2,... Mn) comprises, on the housing surface (7) and/or the membrane surface (8), at least two housing electrodes (G1, G2,... Gn) which are electrically insulated with respect to one another and/or membrane electrodes (M1, M2,... Mn) which are arranged in such a manner that they form at least two measuring capacitances (C1, C2,... Cn) with at least one opposite electrode (G, M), as a result of which it is possible to capacitively detect the deflection of the membrane at a plurality of points. The housing electrode (G) or the housing electrodes (G1, G2,... Gn) and/or the membrane electrode (M) or the membrane electrodes (M1, M2,... Mn) can be operatively connected to a signal processing unit in this case.
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
The invention relates to an ionization vacuum measuring cell (10) comprising an evacuable housing (12) with a measurement connection for a vacuum to be measured at an end portion; a measurement chamber (14) in the housing (12), said measurement chamber being fluidically connected to the measurement connection, wherein the measurement chamber (14) is designed as a replaceable component; and a first and a second electrode (16, 18) in the measurement chamber (14), said electrodes being substantially coaxial to an axis and being arranged at a distance from each other. The measuring cell further comprises an electrically insulating and vacuum-tight feedthrough (20) for an electric supply to the second electrode (18) and a magnetization assembly which is designed to generate a magnetic field in the ionization chamber. According to the invention, the measurement chamber (14), in particular at least one of the electrodes (16, 18), comprises a magnetic material.
The invention relates to a method for adjusting a pressure in a pressure cell, the method consisting in determining a measurement signal (x), which is at least proportional to a measured pressure in the pressure cell, generating an output signal (y) from the measurement signal (x) with the aid of a filter unit (10) having a transfer function by at least reducing, preferably eliminating, a noise signal contained in the measurement signal (x), adjusting the pressure in the pressure cell at least in proportion to the output signal (y), determining a change of the measurement signal (x) over time, and adjusting the transfer function depending on said change of the measurement signal (x) over time. The invention further relates to a measurement cell arrangement.
G01D 1/16 - Measuring arrangements giving results other than momentary value of variable, of general application giving a value which is a function of two or more values, e.g. product or ratio
G01D 3/032 - Measuring arrangements with provision for the special purposes referred to in the subgroups of this group mitigating undesired influences, e.g. temperature, pressure affecting incoming signal, e.g. by averagingMeasuring arrangements with provision for the special purposes referred to in the subgroups of this group mitigating undesired influences, e.g. temperature, pressure gating undesired signals
G01L 19/08 - Means for indicating or recording, e.g. for remote indication
24.
METHOD FOR PROCESSING A MEASUREMENT SIGNAL FROM A PRESSURE MEASUREMENT CELL, AND A MEASUREMENT CELL ARRANGEMENT
The invention relates to a method for determining a pressure in a pressure cell, the method consisting in determining a measurement signal (x), which is at least proportional to a measured pressure in the pressure cell, generating an output signal (y) from the measurement signal (x) with the aid of a filter unit (10) having a transfer function by at least reducing, preferably eliminating, a noise signal contained in the measurement signal (x), determining a change of the measurement signal (x) over time, and adjusting the transfer function depending on said change of the measurement signal (x) over time. The invention further relates to a measurement cell arrangement.
G01D 1/16 - Measuring arrangements giving results other than momentary value of variable, of general application giving a value which is a function of two or more values, e.g. product or ratio
G01D 3/032 - Measuring arrangements with provision for the special purposes referred to in the subgroups of this group mitigating undesired influences, e.g. temperature, pressure affecting incoming signal, e.g. by averagingMeasuring arrangements with provision for the special purposes referred to in the subgroups of this group mitigating undesired influences, e.g. temperature, pressure gating undesired signals
G01L 19/08 - Means for indicating or recording, e.g. for remote indication
25.
Method and device for measuring a vacuum pressure using a measuring cell arrangement
Arrangement with capacitive pressure-measuring cell has a diaphragm for measuring vacuum pressure and a printed circuit board acting as a temperature sensor and another electronic component designed as a microchip that contains a digital signal processor with a temperature-to-digital converter and a capacitance-to-digital converter using a time measuring method. The converters determine temperature and capacitance of the cell in comparison to a reference resistor for temperature arranged on the printed circuit board and reference capacitor for capacitance for the pressure to be measured dependent on deformation of the diaphragm. A temperature-corrected pressure signal derived from the two measured signals uses correlation, the measured signals having been determined in advance from a calibration process, and the temperature-corrected pressure signal is provided as a pressure signal at the signal output for further processing. In this manner there is quick pressure measurement with high measuring accuracy.
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G01L 9/12 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance
G01L 13/02 - Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
patents
