09 - Scientific and electric apparatus and instruments
Goods & Services
Control monitors, mass analyzers, and instruments for use in vacuum systems, in particular comprised of a vacuum manifold and one or more membrane holders, all the for environmental testing and gas analysis; gas leak detectors for detecting the presence of gas; refrigerant recovery meters; gas testing instruments; residual gas and process gas testing instruments; testing apparatus operated by use of a vacuum for testing gas and liquids; mass spectrometers; leak detection apparatus, namely, electrical leak detection hardware and recorded operating software sold as a unit; test leakage apparatus providing a predefined amount of gas leakage for testing and calibrating gas leak detectors; liquid chromatography apparatus for laboratory use for producing, displaying, monitoring and controlling thin layers; vacuum technology apparatus in the nature of gauges; pressure measuring apparatus, vacuum measuring apparatus, namely, leak detectors for vacuum pumps; pressure transducers that convert hydraulic or pneumatic pressure into analog electrical signals for monitoring and controlling hydraulic or pneumatic systems; components of electrical mains in ultra-high vacuum chamber systems, namely, metal flanges, connectors, transition pieces in the nature of transistors, metal sealing rings, automatic valves, inspection windows, ducting for electric cables
A method (14) for the controlled removal of a protective layer (3) from a surface of a component (10), the component comprising: - a main body (1); - an intermediate layer (2) which at least partially covers the main body; and - said protective layer (3), which comprises an amorphous solid, in particular an amorphous non-metal, in particular an amorphous ceramic, at least partially covers the intermediate layer; wherein the method comprises the following steps: - bringing (11) the protective layer (3) into contact with an etching or dissolving medium (4); and - removing (12) the protective layer (3) under the action of the etching or dissolving medium (4) until the intermediate layer (2) is exposed; and wherein the etching or dissolving medium effects a first etching or dissolving rate on the protective layer and a second etching or dissolving rate on the intermediate layer, and wherein the first etching or dissolving rate is greater than the second etching or dissolving rate. The invention also relates to a method for replacing an old protective layer on a component, a method for operating a thin film process installation, a component for use in a thin film process installation, and a method for producing the component.
C23C 16/02 - Pretreatment of the material to be coated
C23C 16/44 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
Vacuum bell probe (10) for detecting leaks in underground gas pipes, comprising a flexible suction cup (12) having a bottom side forming a suction opening (22), the suction cup defining an interior volume (36), characterized in that the bottom side (20) comprises a soft seal ring (32) having a higher elasticity than the suction cup (12), surrounding the suction opening (22) and forming a contact surface adapted to create a seal in contact with a ground surface under which a gas leak is assumed such that a vacuum may be generated within the interior volume (36) upon contact to the ground surface.
G01M 3/20 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
F17D 5/00 - Protection or supervision of installations
G01M 3/22 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables, or tubesInvestigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipe joints or sealsInvestigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for valves
5.
METHOD FOR QUANTIFYING THE AMOUNT OF OPTICALLY INTERFERING GAS IMPURITIES
Method for quantifying the amount of optically interfering gas impurities in a Gas detection system comprising a sample gas inlet (12), a reference gas inlet (14), a gas modulation valve (16) and an infrared absorption gas detector (24) used for analysis of methane or natural gas, wherein the gas modulation valve (16) alternatingly connects the sample gas inlet (12) to the gas detector (24) during a sample gas time period and the reference gas inlet (14) to the gas analyser during a reference gas time period characterized in that the infrared absorption is measured for at least two different sample gas concentrations in the gas detector (24) achieved via respective different ratios of sample gas time period vs. reference gas time period, wherein the amplitudes of the different measurement signals are compared with calibration functions representing the signal amplitude versus the gas concentration of different amounts of interfering gas impurities in methane or natural gas in order to thereby assess the actual gas impurities concentration in the sampled gas.
G01N 21/85 - Investigating moving fluids or granular solids
G01N 21/3504 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
G01N 21/37 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using pneumatic detection
Method for wide range gas detection using a gas detection system comprising a sample gas inlet (12), a reference gas inlet (14), a gas modulation valve (16) and a gas analyzer (24), wherein the gas modulation valve (16) alternatingly connects the sample gas inlet (12) to the gas analyzer (24) during a sample gas time period and the reference gas inlet (14) to the gas analyzer (24) during a reference gas time period, characterized in that the sample gas time period is shorter than the reference gas time period such that the sample gas concentration in the gas analyzer (24) is reduced.
G01N 33/00 - Investigating or analysing materials by specific methods not covered by groups
G01N 21/3504 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
A gas detection system comprising a sample gas inlet (12), a reference gas inlet (14) and a gas modulation valve (16) alternatingly connecting one of the sample gas inlet (12) and the reference gas inlet (14) to a gas sensor (24) is characterized in that a selective transfer filter (28) is located in the gas flow path (22) connecting the gas modulation valve (16) and the gas sensor (24).
G01N 33/00 - Investigating or analysing materials by specific methods not covered by groups
G01N 21/27 - ColourSpectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection
G01N 21/3504 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
G01N 21/3518 - Devices using gas filter correlation techniquesDevices using gas pressure modulation techniques
Infrared gas detection system (10) comprising a gas inlet (16), an infrared gas analyzer (12) connected to the gas inlet (16) and a secondary gas sensor (14) connected to the gas inlet (16), and an evaluation device evaluating the measurement signals from both the infrared gas analyzer (12) and from the secondary gas sensor (14), such that a gas is identified only if both the infrared measurement signal and the secondary measurement signal coincide in time.
G01N 21/3504 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
G01N 33/00 - Investigating or analysing materials by specific methods not covered by groups
9.
OPTICAL DETECTION OF TRACER GASES IN A GAS DISCHARGE CELL HAVING UNEXPOSED ELECTRODES
Tracer gas sensing device comprising a gas discharge cell (12) having cell walls (14) defining a discharge volume (30) and a tracer gas inlet (16) into the discharge volume (30), an optical spectrometer arrangement having a radiation source (26) on a first side of the discharge cell for emitting radiation into the discharge cell and a radiation detector (28) on a second side of the discharge cell opposite to the first side for detecting radiation which was emitted by the radiation source (26) through the discharge volume (30), and electrodes (32) on opposing sides of the discharge cell for generating a plasma within the discharge cell, said electrodes (32) being unexposed plasma electrodes (32). The discharge cell may be a dielectric barrier discharge cell and the electrodes may be powered by an AC power source. Furthermore, at least one magnet may be positioned behind each electrode to minimize losses of plasma electrons on the discharge cell walls. Either tracer or buffer gas may be helium, hydrogen, oxygen, neon, nitrogen or combinations thereof.
G01N 21/31 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
G01N 21/67 - Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
G01N 21/68 - Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using high frequency electric fields
G01M 3/00 - Investigating fluid tightness of structures
G01M 3/38 - Investigating fluid tightness of structures by using light
G01M 3/20 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
G01N 21/33 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
G01N 1/22 - Devices for withdrawing samples in the gaseous state
A carpet probe for detecting leaks in underground gas pipes, comprising a handle (12), a wheel (16) connected to the handle (12), and a flat carpet element (14) connected to the wheel (16) and comprising a sniffing inlet (28) connected to a gas sensor (18), is characterized in that the wheel (16) is the only wheel (16) of the carpet probe adapted for rolling on a ground surface.
G01M 3/22 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables, or tubesInvestigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipe joints or sealsInvestigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for valves
11.
METHOD FOR SELECTIVE PIN-POINTING OF UTILITY GAS LEAKS DURING OPERATION
A method for detecting the location of a gas leak (22) in a buried utility gas pipe (12) by measuring the presence of a gas (18) below or above the ground surface (14) above the pipe (12) is improved by injecting a tracer gas (18) into a utility gas (26) guided through the pipe during a mode of normal operation of the pipe and by using a gas detector (28) having a higher sensitivity to the tracer gas (18) than to the utility gas (26) for pin-pointing the leak position (22).
G01M 3/22 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables, or tubesInvestigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipe joints or sealsInvestigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for valves
12.
METHOD AND DEVICE FOR DISCRIMINATION BETWEEN NATURAL GAS AND SWAMP GAS
A method for determining whether a gas sample originates from biological processes or from a gas installation being tested and containing a utility gas is characterized in that an increased concentration of hydrogen in the sample as compared to that present in the utility gas is used as evidence that the sample originates from biological decay processes and not from the gas installation under test.
Method for processing a measurement signal (x) from a pressure measurement cell in order to generate an output signal (y) with the aid of a filter unit (10), wherein the method involves generating the output signal (y) with the aid of the filter unit (10) by at least reducing, preferably eliminating, a noise signal contained in the measurement signal (x), continuously determining a difference between the measurement signal (x) and the output signal (y), and changing a characteristic of the filter unit (10) as soon as the difference becomes greater than a threshold value, wherein the changed characteristic of the filter unit (10) remains as long as the difference becomes smaller than the threshold value, and wherein the changing of the filter characteristic involves decreasing the reduction in the noise signal present in the measurement signal (x).
G01L 23/08 - Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquidIndicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
14.
A METHOD FOR PREVENTING GASES AND FLUIDS TO PENETRATE A SURFACE OF AN OBJECT
The present invention relates to a method for preventing gases and fluids to penetrate a surface of an object, comprising the steps of: depositing (S1) an amorphous metal (5) on a surface of an object (4); forming (S2) a continuous layer of the amorphous metal (5) on the surface of the object (4); binding (S3) the amorphous metal (5) to the surface of the object by chemical binding; and passivation (S4) of a surface of the amorphous metal (5) facing away from the surface of the object (4).
C23C 28/00 - Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups , or by combinations of methods provided for in subclasses and
G01L 19/06 - Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
Vacuum pressure of a gas in a compartment (1) is measured. The vacuum pressure is established by a pump arrangement (3,5) with a pulsating pumping effect (g(t)). The shape of the resulting pulsation of the pressure (p(t)) in compartment (1) is exploited (15) as an indication of the operation status of the pump arrangement (3, 5).
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G01L 13/02 - Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
16.
METHOD OF AND APPARATUS FOR MEASURING PRESSURE, ESPECIALLY VACUUM PRESSURE
A pressure step (ps) is applied to the interior of a compartment (1). By means of a sensor (5) which monitors the pressure within compartment (1), besides of the prevailing pressure level (Psτ), the transient step response oscillation frequency (fTSR) is registered as indicative of the gas or gas mixture present in the compartment (1).
The invention relates to a sensor unit comprising a measuring cell (1) having a surface which is heat-conducting at least in parts, a housing (3; 4, 5, 6, 7) in which the measuring cell (1) is largely contained, and at least one access channel (2) to the measuring cell (1). Said sensor unit is characterised in that is has a cavity (8) which is mostly defined by an outer surface of the measuring cell (1) and by a wall of the housing (3; 4, 5, 6, 7) which is oriented to the surface of the measuring cell (1), said cavity (8) being closed therein.
A method for detecting the location of a gas leak (22) in buried utility gas pipes (12) by measuring the presence of a gas (18) below or above the ground surface (14) above the pipe (12) is improved by injecting a tracer gas (18) which is lighter than air into the utility gas (26) within the pipe (12) and by using a gas detector (28) having a higher sensitivity to the tracer gas (18) than to the utility gas (26) for pin-pointing the leak position (22).
G01M 3/08 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing bubbles in a liquid pool for pipes, cables, or tubesInvestigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing bubbles in a liquid pool for pipe joints or sealsInvestigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing bubbles in a liquid pool for valves
G01M 3/20 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
G01M 3/30 - Investigating fluid tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables, or tubesInvestigating fluid tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipe joints or sealsInvestigating fluid tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for valves using progressive displacement of one fluid by another
G01M 3/22 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables, or tubesInvestigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipe joints or sealsInvestigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for valves
An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by means of a releasable plug connection (106).
The invention relates to a measuring cell arrangement (100) containing a capacitive diaphragm pressure-measuring cell (20) for measuring a vacuum pressure using a diaphragm (2) as a pressure transducer, comprising a printed circuit board (10) which is positioned relative to the diaphragm pressure-measuring cell (20) such that the component which acts as the temperature sensor thermally contacts the first housing body via a heat transfer zone (13). Another electronic component is designed as a microchip (12), and the microchip contains a digital signal processor (DSP) with a temperature-to-digital converter (TDC) and a capacitance-to-digital converter (CDC) which operates using the time measuring method. The temperature-to-digital converter and the capacitance-to-digital converter ascertain the temperature (Tx) and the capacitance (Cx) of the diaphragm pressure-measuring cell (20) in comparison to a reference resistor (Rref) for the temperature and a reference capacitor (Cref) for the capacitance (Cx), said resistor and capacitor being arranged on the printed circuit board. The capacitance forms the measurement for the pressure to be measured dependent on the deformation of the diaphragm (2). A temperature-corrected pressure signal is derived from the two measured signals using correlation means, said measured signals having been ascertained in advance from a calibrating process, and the pressure signal is output as a pressure signal p=f(Cx,Teff) at the signal output (16) for further processing. In this manner, a quick pressure measurement is allowed with a high measuring accuracy.
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G01L 9/12 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance
G01L 13/02 - Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
G01L 19/00 - Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
The invention relates to an ionization vacuum measuring cell comprising: a) an evacuatable housing (10) with a measuring connection (8) for the vacuum to be measured, b) a first outer and a second inner electrode (3, 4) which are coaxially arranged in an interspaced manner with a common axis (7), whereby a measuring chamber (20) is formed between said two electrodes, said measuring chamber communicating with the measuring connection (8), c) a voltage source (16) which is connected to the electrodes (3, 4), d) a current measuring means (17) for analyzing a discharge current generated between the electrodes (3, 4), and e) at least one permanent magnet ring (1) which surrounds the coaxial electrode (3, 4) arrangement, has a magnetizing direction (13) directed radially to the axis, and comprises a soft-magnetic yoke (2) that surrounds the permanent magnet ring (1). The yoke (2) extends axially away from the permanent magnet ring (1) on both sides and radially towards the axis (7) and the first electrode (3) on both sides after a specified distance (d) from the permanent magnet ring (1) such that the yoke (2) forms two annular poles (9a, b) on both sides at a distance from the permanent magnet ring (1), via which at least some of the field lines of the permanent magnet ring (1) form a closed loop within the measuring chamber (20), penetrating the first electrode (3).
A gas pressure measurement cell arrangement comprises a heat conduction vacuum measurement cell according to Pirani (Pi), containing a measurement chamber housing (3), which encloses a measurement chamber (2) and having a measurement connection (4), which guides the gas pressure (P) to be measured into the measurement chamber (2). Arranged in the measurement chamber (2) is a heatable measurement filament (1), which is connected to a measurement electronic system (11), wherein the latter is arranged in thermal contact on one side of a ceramic support plate (10) and said support plate (10) forms, on the opposite side, part of the measurement chamber housing (3). The measurement filament (1) is supplied with current, in series with a measurement resistor (Rm), by the measurement electronic system (11) directly by way of feedback and the measurement electronic system (11) directly ascertains the resistance of the measurement filament (1).
G01L 21/12 - Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filamentsVacuum gauges of the Pirani type
23.
Ultra-thin membrane for chemical analyzer and related method for forming membrane
A method for forming an ultra-thin membrane for use in a chemical analyzer such as a mass spectrometer includes the step of applying a sacrificial blocking layer onto a porous substrate, applying a semi-permeable membrane layer onto the sacrificial blocking layer, and removing the sacrificial blocking layer following cure of the membrane layer. In a preferred version, at least one of the blocking layer and the membrane layer are applied to the porous support by means of spin coating, though other deposition techniques can be employed.
B05D 3/12 - Pretreatment of surfaces to which liquids or other fluent materials are to be appliedAfter-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
B01D 5/00 - Condensation of vapoursRecovering volatile solvents by condensation
B01D 29/46 - Edge filtering elements, i.e. using contiguous impervious surfaces of flat, stacked bodies
B01D 63/00 - Apparatus in general for separation processes using semi-permeable membranes
B32B 3/00 - Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shapeLayered products comprising a layer having particular features of form
H01J 49/04 - Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locksArrangements for external adjustment of electron- or ion-optical components
For leak testing, a tracer gas is advanced to the outer wall (11) of the hollow test object (10) while the test object (10) is in an evacuated state. The tracer gas is discharged from a blower device (14) in the form of soap bubbles (21). When contacting the outer wall (11), the soap bubbles will burst, thus forming a cloud (27) of tracer gas immediately on the outer wall (11). By the invention, it is made easier to localize the invisible tracer gas in the ambient air. Further, the tracer gas can be used more effectively so that the costs for performing the testing process are reduced.
G01M 3/12 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing elastic covers or coatings, e.g. soapy water
G01M 3/20 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
A leak detector comprises a cell provided with a tracer gas inlet preferably permeable to a tracer gas. In the cell, the tracer gas is caused to assume an energetically higher metastable state. By means of laser spectroscopy the absorption spectrum of the metastable tracer gas is sampled in an optical measuring section, whereby the presence of tracer gas is detected.
G01M 3/20 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
G01M 3/38 - Investigating fluid tightness of structures by using light
26.
A GAS-SELECTIVE MEMBRANE AND METHOD OF ITS PRODUCTION
A membrane selectively permeable to light gases comprises a membrane body formed by a first plate and a second plate. The second plate comprises a thin layer that is selectively gas-permeable. In the region of windows, this layer is exposed. There, support is provided by a porous bottom wall in the first plate or by narrow bores in the second plate. A heating device causes a radiation heating of the windows.
G01M 3/20 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
27.
TEST DEVICE FOR PERFORMING LEAK DETECTION AT A PLURALITY OF TEST SITES
The leak detection device comprises a plurality of measuring cells (10) in whose interior the absorption of a laser beam (17) is influenced by the presence of tracer gas. All of said measuring cells (10) are connected to a host unit (25) via light-conducting fibers (28, 34). In the host unit (25), a laser (26) designed for modulation and a photodetector (37) are arranged. Modulation of the laser radiation is preferably performed by two-tone frequency modulation. This has the effect that the fiber length cannot significantly skew the result of the measurement.
G01M 3/20 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
G01M 3/38 - Investigating fluid tightness of structures by using light
A pressure measuring cell arrangement comprises an optical diaphragm pressure transducer (23) which contains a housing body (1) with a diaphragm (5) arranged at a short distance therefrom, said arrangement being exposed to a process chamber (12) with the gaseous medium to be measured, wherein the housing body (1) has an optically transparent window (3). A signal receiving unit (32) comprising an optical fiber (22) for coupling and decoupling light onto the surface of the diaphragm (5) is provided at a distance from said window (3) across an optical path (9), said signal receiving unit being provided such that a measurement path is formed for detecting deflections of the diaphragm (5) by means of a signal analyzing unit (24), whereby a Fabry-Perot interferometer is formed. The process chamber (12) is sealed off from the atmosphere (10) by a chamber wall (30), and the process chamber (12) is delimited by a dividing means (25) such that a climate chamber (11) is formed between the dividing means (25, 31) and the chamber wall (30) provided at a distance therefrom. The signal receiving unit (32) is arranged so that it forms an optical passage through the chamber wall (30), and the dividing means (25) has optically transparent means (25a) at least in the region of the optical path (9) such that there is an optical connection for transmitting the optical pressure signal, said optical connection lying between the optical diaphragm pressure transducer (23) and the signal receiving unit (32).
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
A pressure measuring cell has a first housing body (1) and a membrane (2) disposed in the vicinity of the housing body, both being made of ceramic. The membrane (2) has an outer edge connected to the first housing body (1) in order to produce a reference pressure chamber (25). A second housing body (4) made of ceramic material is arranged opposite of the membrane (2) and connected to the outer edge of the membrane, wherein the second housing body (4) together with the membrane (2) forms a pressure measuring chamber (26). The second housing body (4) has a connector (5) for connecting the pressure measuring cell to a medium to be measured. The first housing body (1), the second housing body (4), and the membrane (2) are connected closely to each other at the outer edge of the membrane, and in a central region of the first housing body (1) a hole (7) is provided, which extends through the first housing body and at least into the central region of the membrane, and opposite of the hole a surface of the membrane is designed as a first optically reflective area (10). An optical fiber (15) is arranged in the hole (7) and tightly fastened in order to guide light onto the surface of the membrane. The end of the fiber (16) extends at least to the surface of the first housing body (1) and is designed as a second optically reflective area, which connects the first optically reflective area on the membrane (2) such that an optical hollow space (30) is produced between the fiber end (16) and the reflection area, said hollow space forming a measuring section in order to determine the extent of deformation of the membrane (2) and being part of a Fabry-Perot interferometer.
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
30.
METHOD AND APPARATUS FOR EVALUATING AN INTERFEROMETRIC MEASUREMENT VARIABLE
In order to evaluate a measurement variable (12) with a measurement cell (5), comprising a cavity (11) which produces an optical path length difference (doap) for light, which difference varies in accordance with the variation in measurement variable (12), the following method steps are proposed: injecting light (1) from a white-light source (2) into the cavity (11) with the aid of an optical waveguide (4) via a coupler (3) arranged in the path of the optical waveguide (4); coupling out at least some of the light (1’) reflected back from the cavity (11) into the optical waveguide with the aid of the coupler (3) and supplying this reflected light (1’) to an optical spectrometer (6); ascertaining the optical spectrum of the reflected light (1’) in the spectrometer (6) and producing a spectrometer signal (8); supplying the spectrometer signal (8) to an arithmetic logic unit (9), wherein the spectrometer signal (8) is converted by the arithmetic logic unit (9) directly into an interferogram and the position of the respective amplitude extreme value is ascertained from the intensity profile of the interferogram and said respective position directly represents the respective value of the optical path length difference in the cavity, which includes the measurement variable (12).
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
A diaphragm pressure-measuring cell arrangement contains a housing body (2) made at least partially of sapphire and a sapphire diaphragm (6) with a peripheral edge region which is connected to the housing body (2) using a first seal (8) in order to form a reference vacuum chamber (5). An outer surface of the diaphragm (6) is exposed to a medium to be measured. A ceramic support body (1) is arranged on the rear side of the housing body (2) using glass solder and has an overhanging surface which surrounds the housing body (2) and forms a first sealing surface. A tubular measuring cell housing (19) accommodates the measuring cell mounted on the ceramic support body (2), wherein the inside of the measuring cell housing (19) has a surrounding sealing surface (35) which corresponds to the first sealing surface. A metal ring seal (18) is arranged between the sealing surfaces, wherein pressing means (20) are provided for the purpose of pressing the sealing surfaces together.
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
32.
METHOD FOR CALIBRATING AND OPERATING A MEASURING CELL ARRANGEMENT
The following method sequence is proposed for calibrating a vacuum measuring cell arrangement: a) the measuring cell arrangement (1) is connected to a calibrating device (10), with the measuring connection (5) being connected to a vacuum volume (58) and the measuring cell interface (8) being connected to a calibrating sequence controller (11) by means of a signal line (20); b) a first heating temperature in the measuring cell arrangement is set to a predefined constant value; c) a first step for calibrating the measuring cell arrangement (1) is carried out by generating at least one predefined pressure in the vacuum volume (58) while simultaneously detecting the vacuum signals from the measuring cell arrangement (1) and at least one reference measuring cell (6), and the pressure values detected are stored in a calibrating data memory (13); d) a calibrating processor (14) is used to determine compensation values from the determined differential values of the measuring cell arrangement (1) and the reference measuring cell (6), and these differential values are buffered in a calibrating data memory (13) of the calibrating sequence controller (11); e) the measuring cell arrangement (1) is adjusted by transmitting the determined compensation values to the measuring cell data memory (6) for the differing values for pressures and temperature, which are determined at the different predefined operating points, with respect to the reference measuring cell (60).
The invention relates to a vacuum measuring cell device comprising a vacuum membrane measuring cell (8) having a connecting means (5, 6) arranged thereon for a communicating connection to the medium to be measured, an electronic system (34), which is electrically connected to the vacuum membrane measuring cell (8), and also comprising a heating arrangement (20, 21) for heating the vacuum membrane measuring cell (8) to a predefinable temperature value, wherein the heating arrangement (20, 21) substantially encloses the entire vacuum membrane measuring cell (8) such that said cell forms a thermal container (20). Said container constitutes a thermal body (20a) in the area of the connecting means (5, 6) and connecting means (6) are guided through it, the connecting means thereby being thermally contacted at least in some areas by the thermal body. The thermal container (20a) comprises a heating source (21) for the heating thereof. The thermal container (20) is substantially entirely enclosed by an insulating shell (22).
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
34.
METHOD FOR PRODUCING A VACUUM MEASURING CELL OF THE MEMBRANE TYPE
The invention relates to a capacitive vacuum measuring cell (8) which is produced entirely from a ceramic material. Small amounts of aluminium (3, 6) are provided between the aluminium oxide ceramic parts that are to be connected in regions that are to have seals or connections applied, or where passages or measuring connections are located and the two parts are combined at an increased temperature and pressure in the presence of a protective atmosphere containing a reductive gas such as hydrogen. This produces a solid connection. In an additional subsequent step the residual metallic aluminium in the connection region (3, 6) is oxidised at an increased temperature in an atmosphere containing oxygen to form aluminium oxide. As a result, the connection region (3, 6) consists essentially of the same material as the parts to be connected, thus achieving a high corrosion resistance, in particular in regions that are exposed to the aggressive process gases.
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
35.
ELECTRON SOURCE FOR A VACUUM PRESSURE MEASURING DEVICE
The vacuum pressure measuring device comprises an electron source (1) having a reaction zone (3) for forming ions (22) by means of impact ionization, wherein the electron source (1) communicates with the reaction zone (30) via a passage (40) for the electrons (21). The electron source is surrounded by an insulating housing with a vacuum chamber (7), and a partition part is designed as a membrane carrier (4), carrying a nanomembrane (5) at least in one section, the membrane separating the vacuum chamber (7) from the outer region in a gastight manner and being at least partially designed to be electron-permeable. Said vacuum chamber (7) comprises a cathode (2) for the emission of electrons (21). In the region of and/or on the nanomembrane (5), an anode arrangement (3) is provided such that electrons (21) are conducted against the nanomembrane (5) and at least partially through it. The nanomembrane (5) abuts the vacuum chamber of the vacuum pressure measuring device.
A method for producing a diaphragm vacuum measuring cell is presented, wherein a first housing plate (1) is arranged, such that it is spaced apart on one side of the diaphragm (2), with a connecting means (3) in the edge region so as to produce a seal, and wherein a second housing plate (4) is arranged, such that it is spaced apart on the other side of the diaphragm (2), with a connecting means (3) in the edge region so as to produce a seal, and wherein the second housing plate (4) has an opening in which a connection means (5) is arranged with connecting means (3) so as to produce a seal for the purpose of connecting the measuring cell (8) to the medium to be measured, wherein the diaphragm (2) and the two housing plates (1, 4) consist of a metal oxide. The measuring cell is coated in a vacuum chamber (64) using an ALD method, in particular through the opening of the measuring cell in such a manner that the inner wall of the measuring vacuum area (9) and the opening with the connection means (5) are covered with a protective layer (13) such that at least the connecting means (3) for the diaphragm (2) is covered so as to protect against corrosion.
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G01L 19/06 - Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
The invention relates to a mass spectrometer arrangement comprising a cathode arrangement (6) for emitting electrons (21), a reaction zone (3) connected to an entrance opening (14) for the supply of neutral particles (20), this opening being operatively connected to the cathode arrangement (6) for ionizing neutral particles (20), an ion extraction arrangement (4) which is arranged such that it communicates with the effective range of the reaction zone (3), means for guiding ions (22) to a detection system (12) and means for evacuating the mass spectrometer arrangement. The cathode arrangement (6) comprises a field emission cathode having an emitter area (7), wherein, at a small distance from said emitter area (7), an extraction grid (9) for extracting electrons is arranged, which grid substantially covers the emitter area (7). The emitter area (7) at least partially surrounds a cavity (13) such that a tubular structure is formed.
The invention relates to a vacuum measuring cell having a membrane (2, 41) which is arranged between two flat housing parts (1, 4), wherein the first housing part (1) forms a reference vacuum space (10) and the second housing part (4) forms a measuring vacuum space (9) having connection means (5) for connection to the medium to be measured, and means are provided for the purpose of measuring the displacement of the membrane, wherein the membrane surface (41a) which is exposed to the medium to be measured is in the form of a patterned surface in such a manner that stress bending caused by material from the measurement medium, which is deposited on the membrane, is considerably reduced.
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
A diaphragm arrangement for a vacuum measurement cell (15) comprises a tubular diaphragm housing (14) surrounding a diaphragm (20), which housing has an outlet opening (16) for a connection to a vacuum measurement cell (15) and has a connection opening (22) for a connection with the object space to be measured, wherein the diaphragm (20) is arranged between the two openings (16, 22) and is in the form of a helical diaphragm with spiral windings (21), wherein the outside diameter of its thread flank rests against the inner wall of the diaphragm housing (14) such that a gas flow between the outside diameter of the thread flank and the inner wall is impeded and is essentially forced into the spiral thread, and wherein the outlet opening (16) is on one side of the tube section (14) and the connection opening (22) is on the other, opposite side and the helical diaphragm (20) is designed such that the diaphragm arrangement (25) between the two openings (16, 22) is optically tight in the axial direction of vision.
G01L 19/00 - Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
G01L 7/08 - Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
C23C 14/54 - Controlling or regulating the coating process
