A scanning probe microscope is configured to measure a topography of a sample. The microscope includes a probe mount and a cantilever carried by the probe mount. The cantilever extends from a proximal end at the probe mount to a distal end remote from the probe mount. The microscope also includes a probe tip at the distal end of the cantilever, a scanning system configured to generate a relative scanning motion between the probe mount and the sample, and an interferometer configured to measure a height of the distal end of the cantilever to generate a height measurement signal. The microscope further includes a signal processor configured to monitor the height measurement signal to obtain a series of topography measurements indicative of a topography of the sample, a height actuation system configured to adjust a height of the proximal end of the cantilever by moving the probe mount under control of a height control signal, a photothermal actuation system configured to bend the cantilever by illuminating the cantilever with an actuation beam under control of a photothermal offset signal and an oscillation signal, an oscillation signal generator configured to generate the oscillation signal, and a control system configured to adjust the photothermal offset signal and the height control signal on a basis of the height measurement signal.
A scanning probe microscope comprising: a sample stage configured to carry a sample; a probe stage configured to carry a probe; an objective lens with an objective lens focal plane; and an interferometer configured to direct a detection light beam onto the objective lens The objective lens is configured to focus the detection light beam onto the objective lens focal plane and the interferometer is configured to receive a return light beam returning from the objective lens focal plane via the objective lens, combine the return light beam with a reference light beam to produce interference, and measure the interference. An image sensor is provided; and an imaging lens configured to receive image light from a vision focal plane via the objective lens and focus the image light onto the image sensor. The vision focal plane is offset from the objective lens focal plane and the objective lens focal plane is positioned between the objective lens and the vision focal plane.
A scanning probe microscope configured to measure a topography of a sample. the scanning probe microscope comprising: a probe mount; a cantilever carried by the probe mount, the cantilever extending from a proximal end at the probe mount to a distal end remote from the probe mount; a probe tip at the distal end of the cantilever; a scanning system configured to generate a relative scanning motion between the probe mount and the sample; an interferometer configured to measure a height of the distal end of the cantilever to generate a height measurement signal; a signal processor configured to monitor the height measurement signal to obtain a series of topography measurements indicative of a topography of the sample; a height actuation system configured to adjust a height of the proximal end of the cantilever by moving the probe mount under control of a height control signal; a photothermal actuation system configured to bend the cantilever by illuminating the cantilever with an actuation beam under control of a photothermal offset signal and an oscillation signal; an oscillation signal generator configured to generate the oscillation signal; and a control system configured to adjust the photothermal offset signal and the height control signal on a basis of the height measurement signal.
A method of measuring a sample with a probe including a cantilever mount, a cantilever extending from the cantilever mount to a free end, and a probe tip carried by the free end of the cantilever is disclosed. The method includes taking a series of measurements of a sidewall of the sample with the probe; and analysing the series of measurements to determine a characteristic of the sidewall. The measurements are taken during a measurement cycle that includes a pair of measurement drive phases. The measurement drive phases include first and second drive phases in which the probe is driven, respectively, down, then up, next to the sidewall. During one of the drive phases the probe tip interacts with the sidewall, and the series of measurements are taken by measuring an angle of the cantilever as the probe tip interacts with the sidewall during the one of the drive phases.
A probe microscope comprising a probe array with an array of probes, each probe comprising a cantilever and a probe tip. A lighting system comprises a plurality of light sources. Each light source is configured to output a respective light beam. A lens array comprises an array of lenses. Each source lens is positioned to receive a respective one of the light beams from the lighting system. A collector lens is configured to collect the light beams from the lens array. An objective lens is configured to receive the light beams from the collector lens and focus each light beam onto the cantilever of a respective one of the probes. The lighting system is configured to modulate a power of the light beams to actuate the probes, and the lighting system is configured to modulate the power of some or all of the light beams independently.
A probe microscopy system comprising: a probe comprising a cantilever mount, a cantilever extending from the cantilever mount to a free end, and a probe tip carried by the free end of the cantilever; a drive system configured to drive the probe towards and away from a training sample; a measurement system configured to acquire probe data in a measurement cycle during which the probe tip interacts with the training sample, wherein the measurement cycle comprises a first drive phase in which the probe is driven towards the training sample followed by a second drive phase in which the probe is driven away from the training sample, and the probe data is acquired by measuring a parameter of the probe; a machine-learning model; and a training module configured to input the probe data as training data into the machine-learning model, thereby training the machine-learning model by machine learning, wherein the training data comprises a dataset of plural measurements of the parameter of the probe, and each measurement in the dataset was acquired during the same measurement cycle.
A method of training a neural network for use in surface metrology includes providing height image data comprising a series of height measurements of a sample, the height image data comprising a plurality of features; obtaining, from the height image data, a plurality of height image patches, each height image patch containing at least a portion of a feature. The method also includes applying one or more effects to each of the height image patches to obtain a corresponding modified height image patch for each height image patch and inputting one or more of the modified height image patches into the neural network. The method further includes using the neural network to identify a feature in each of the one or more modified height image patches and training the neural network based on the identification.
G06T 7/62 - Analysis of geometric attributes of area, perimeter, diameter or volume
G06V 10/44 - Local feature extraction by analysis of parts of the pattern, e.g. by detecting edges, contours, loops, corners, strokes or intersectionsConnectivity analysis, e.g. of connected components
G06V 10/60 - Extraction of image or video features relating to illumination properties, e.g. using a reflectance or lighting model
A method of measuring a sample, the sample comprising a first region and a feature, the method comprising: scanning the sample to obtain a series of height image data, the height image data comprising first region data corresponding to the first region, and feature data corresponding to the feature; using a trained neural network to segment the height image data so as to identify the feature data; using the identified feature data to determine at least two measurement points in the height image data; and using the measurement points to determine a dimension of the feature.
A method of measuring a feature with a probe microscope. The feature comprises a base, an entrance, and a pair of opposed side walls. The feature is filled with a liquid. The probe microscope comprises a cantilever and a probe tip extending from the cantilever. The method comprises: inserting the probe tip into the feature via the entrance; and performing a measurement of the feature by contacting the base of the feature with the probe tip.
09 - Scientific and electric apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Apparatus, instruments and software for scanning probe
microscopy; microscopes; apparatus, devices and software for
surface scanning, capture, measurement and analysis of 3D
and nanoscale structures, and 3D and conductive measurements
of sub-nanometer surface features; parts and fittings for
the aforesaid apparatus, instruments and devices. Scientific and technological services relating to scanning
probe microscopy; science and technology services, namely,
surface scanning, capture and measurement of 3D and
nanoscale structures, and 3D and conductive measurements of
sub-nanometer surface features; software as a services and
technical data analysis, and consultation in relation to for
the aforesaid.
09 - Scientific and electric apparatus and instruments
Goods & Services
Apparatus, instruments, devices and software for surface
scanning, capture, measurement and analysis of 3D and
nanoscale structures, and 3D and conductive measurements of
sub-nanometer surface features; parts and fittings for the
aforesaid apparatus, instruments and devices.
09 - Scientific and electric apparatus and instruments
Goods & Services
Semiconductor apparatus, instruments, devices and software for surface scanning, capture, measurement and analysis of 3D and nanoscale structures, and 3D and conductive measurements of sub-nanometer surface features being 3D scanners and recorded software for operating 3D scanners, all for use in semiconductor manufacturing; structural and replacement parts and fittings for the aforesaid semiconductor 3D scanners for use in semiconductor manufacturing
09 - Scientific and electric apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Apparatus, instruments and software for scanning probe microscopy being microscopes and downloadable software for use in operating microscopes; microscopes; apparatus, devices and software for surface scanning, capture, measurement and analysis of 3D and nanoscale structures, and 3D and conductive measurements of sub-nanometer surface features being microscopes and downloadable software for use in operating microscopes; structural and replacement parts and fittings for the aforesaid microscopes Scientific and technological services relating to scanning probe microscopy services being scientific and technological research in the field of microscopy; science and technology services, namely, surface scanning, capture and measurement of 3D and nanoscale structures, and 3D and conductive measurements of sub-nanometer surface features being scientific and technological research in the field of microscopy and semiconductor manufacturing; software as a service (SaaS) services featuring software for use in operating microscopes; technical data analysis relating to scanning probe microscopy for scientific research purposes
14.
METHOD AND APPARATUS FOR SCANNING A SAMPLE WITH A PROBE
A method of measuring a sample with a probe, the probe comprising a cantilever mount, a cantilever extending from the cantilever mount to a free end, and a probe tip carried by the free end of the cantilever, the method comprising: taking a series of sidewall measurements of a sidewall of the sample with the probe; and analysing the series of sidewall measurements to determine a characteristic of the sidewall. The sidewall measurements are taken during a sidewall measurement cycle, comprising a pair of sidewall measurement drive phases. The pair of sidewall measurement drive phases comprises a first drive phase in which the probe is driven down next to the sidewall followed by a second drive phase in which the probe is driven up next to the sidewall. During one of the sidewall measurement drive phases the probe tip interacts with the sidewall, and the series of sidewall measurements are taken by measuring an angle of the cantilever as the probe tip interacts with the sidewall during the one of the sidewall measurement drive phases.
A method includes scanning a probe laterally across a surface so that the probe follows a scanning motion across the surface and steering a detection beam onto the probe via a steering mirror, the detection beam reflecting from the probe in the form of a return beam. The method also includes moving the steering mirror so that the detection beam follows a tracking motion which is synchronous with the scanning motion and the detection beam remains steered onto the probe by the steering mirror and using the return beam to obtain image measurements, each indicative of a measured height of a respective point on the surface. An associated height error measurement is obtained for each point on the surface, each measurement being indicative of a respective error in the measured height. The height error measurements are used to correct the image measurements so as to generate corrected image measurements.
A probe microscope comprising a probe array with an array of probes, each probe comprising a cantilever and a probe tip. A lighting system comprises a plurality of light sources. Each light source is configured to output a respective light beam. A lens array comprises an array of lenses. Each source lens is positioned to receive a respective one of the light beams from the lighting system. A collector lens is configured to collect the light beams from the lens array. An objective lens is configured to receive the light beams from the collector lens and focus each light beam onto the cantilever of a respective one of the probes. The lighting system is configured to modulate a power of the light beams to actuate the probes, and the lighting system is configured to modulate the power of some or all of the light beams independently.
A method of scanning a sample with a scanning probe system, the scanning probe system comprising a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever, the method comprising using the probe to measure an electrostatic interaction between the sample and the probe; and after measuring the electrostatic interaction between the sample and the probe, scanning the sample with the probe while simultaneously applying a bias voltage to the scanning probe system, the applied bias voltage based on the measured electrostatic interaction between the sample and the probe.
A method of scanning a sample with a scanning probe system, the scanning probe system comprising a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever, the method comprising using the probe to measure an electrostatic interaction between the sample and the probe; and after measuring the electrostatic interaction between the sample and the probe, scanning the sample with the probe while simultaneously applying a bias voltage to the scanning probe system, the applied bias voltage based on the measured electrostatic interaction between the sample and the probe.
A method of imaging a surface using a scanning probe microscope, the scanning probe microscope comprising a probe having a cantilever extending from a base support (2) to a free end, and a probe tip carried by the free end of the cantilever, and a steering mirror (13), the method comprising: scanning the probe laterally across the surface so that the probe follows a scanning motion across the surface; steering a detection beam onto the probe via the steering mirror, the detection beam reflecting from the probe in the form of a return beam; moving the steering mirror so that the detection beam follows a tracking motion which is synchronous with the scanning motion and the detection beam remains steered onto the probe by the steering mirror; using the return beam to obtain image measurements, each image measurement being indicative of a measured height of a respective point on the surface; obtaining an associated height error measurement for each point on the surface by comparing a target value of the steering mirror position to the actual position of the steering mirror position, each height error measurement being indicative of a respective error in the measured height; and using the height error measurements to correct the image measurements so as to generate corrected image measurements.
A scanning probe microscope with a first actuator (3) configured to move a feature in the form of a tip (2) so that the feature follows a scanning motion. A vision system (10) is configured to collect light from a field of view to generate image data. The field of view includes the feature and the light from the field of view travels from the feature to the vision system via the steering element (13). A tracking control system (15)bis configured to generate one or more tracking drive signals in accordance with stored reference data. A second actuator (14) is configured to receive the one or more tracking drive signals and move the steering element on the basis of the one or more tracking drive signals so that the field of view follows a tracking motion which is synchronous with the scanning motion and the feature remains within the field of view. An image analysis system (20) is configured to analyse the image data from the vision system to identify the feature and measure an apparent motion of the feature relative to the field of view. A calibration system is configured to adjust the stored reference data based on the apparent motion measured by the image analysis system.
A method of scanning a feature with a probe, the probe comprising a cantilever mount, a cantilever extending from the cantilever mount to a free end, and a probe tip carried by the free end of the cantilever. An orientation of the probe is measured relative to a reference surface to generate a probe orientation measurement. The reference surface defines a reference surface axis which is normal to the reference surface and the probe tip has a reference tilt angle relative to the reference surface axis. A shape of the cantilever is changed in accordance with the probe orientation measurement so that the probe tip moves relative to the cantilever mount and the reference tilt angle decreases from a first reference tilt angle to a second reference tilt angle. A sample surface is scanned with the probe, wherein the sample surface defines a sample surface axis which is normal to the sample surface and the probe tip has a scanning tilt angle relative to the sample surface axis. During the scanning of the sample surface the cantilever mount is moved so that the probe tip is inserted into a feature in the sample surface with the scanning tilt angle below the first reference tilt angle.
A scanning probe system with a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip.
A scanning probe microscope with a first actuator (3) configured to move a feature in the form of a tip (2) so that the feature follows a scanning motion. A vision system (10) is configured to collect light from a field of view to generate image data. The field of view includes the feature and the light from the field of view travels from the feature to the vision system via the steering element (13). A tracking control system (15)bis configured to generate one or more tracking drive signals in accordance with stored reference data. A second actuator (14) is configured to receive the one or more tracking drive signals and move the steering element on the basis of the one or more tracking drive signals so that the field of view follows a tracking motion which is synchronous with the scanning motion and the feature remains within the field of view. An image analysis system (20) is configured to analyse the image data from the vision system to identify the feature and measure an apparent motion of the feature relative to the field of view. A calibration system is configured to adjust the stored reference data based on the apparent motion measured by the image analysis system.
A method of scanning a feature with a probe, the probe comprising a cantilever mount, a cantilever extending from the cantilever mount to a free end, and a probe tip carried by the free end of the cantilever. An orientation of the probe is measured relative to a reference surface to generate a probe orientation measurement. The reference surface defines a reference surface axis which is normal to the reference surface and the probe tip has a reference tilt angle relative to the reference surface axis. A shape of the cantilever is changed in accordance with the probe orientation measurement so that the probe tip moves relative to the cantilever mount and the reference tilt angle decreases from a first reference tilt angle to a second reference tilt angle. A sample surface is scanned with the probe, wherein the sample surface defines a sample surface axis which is normal to the sample surface and the probe tip has a scanning tilt angle relative to the sample surface axis. During the scanning of the sample surface the cantilever mount is moved so that the probe tip is inserted into a feature in the sample surface with the scanning tilt angle below the first reference tilt angle.
A measurement system comprising: a radiation source arranged to generated a detection beam; a probe; and a probe positioning system arranged to move the probe from an un-aligned position in which it is not illuminated by the detection beam, to an aligned position in which it is illuminated by the detection beam and the detection beam is reflected by the probe to generate a reflected detection beam. A scanner generates a relative scanning motion between the probe and a sample, the sample being aligned with the probe and interacting with the probe during the relative scanning motion. A sensor detects the reflected detection beam during the relative scanning motion to collect a first data set from the sample. A second device is provided for modifying the sample or obtaining a second data set from the sample. A sample stage is arranged to move the sample in accordance with an offset vector stored in a memory so that it becomes un-aligned from the probe and aligned with the second device.
G01Q 70/00 - General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group
A scanning probe system with a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip.
A method of operating a scanning probe system that includes a probe support and probes carried by the probe support is disclosed. Each probe includes a cantilever extending from the support to a free end and a tip carried by the free end. The system is operated to perform interaction cycles, each including in an approach phase, moving the support so that the tips move together towards the sample surface; in a detection step, generating a surface signal on detection of an interaction of the tip(s) of a first subset of the probes with the sample surface before the rest of the probes have interacted with the sample; in a response step changing a shape of the cantilever(s) of the first subset in response to the generation of the surface signal; and in a retract phase moving the support so that the tips retract together away from the sample surface.
A probe actuation system has a detection system arranged to measure a position or angle of a probe to generate a detection signal. An illumination system is arranged to illuminate the probe. Varying the illumination of the probe causes the probe to deform which in turn causes the detection signal to vary. A probe controller is arranged to generate a desired value which varies with time. A feedback controller is arranged to vary the illumination of the probe according to the detection signal and the desired value so that the detection signal is driven towards the desired value. The probe controller receives as its inputs a detection signal and a desired value, but unlike conventional feedback systems this desired value varies with time. Such a time-varying desired value enables the probe to be driven so that it follows a trajectory with a predetermined speed. A position or angle of the probe is measured to generate the detection signal and the desired value represents a desired position or angle of the probe.
A probe system including a probe with first and second arms and a probe tip carried by the first and second arms, the probe tip having a height and a tilt angle; an illumination system arranged to deform the probe by illuminating the first arm at a first actuation location and the second arm at a second actuation location each with a respective illumination power; and an actuation controller arranged to independently control the illumination power at each actuation location in order to control the height and tilt angle of the probe tip.
A scanning probe system with a probe comprising a cantilever extending from a base to a free end,and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample. The control system is also arranged to modify the second drive signal in response to receipt of the surface signal from the surface detector, the modification of the second drive signal causing the second driver to control the probe tip.
A scanning probe microscope system. A sample stage is provided along with a microscope arranged to collect data with a probe carried by the microscope from a sample carried by the sample stage. A probe/sample exchange mechanism is arranged to exchange the probe carried by the microscope with a new probe, and is also arranged to exchange the sample carried by the sample stage with a new sample. The probe/sample exchange mechanism comprises a transport structure which can move relative to the microscope and the sample stage; a probe carrier carried by the transport structure and adapted to carry the probe or the new probe when the probe is exchanged with the new probe; a sample carrier carried by the transport structure, wherein the sample carrier is adapted differently from the probe carrier to carry the sample or the new sample when the sample is exchanged with the new sample; and a drive system arranged to move the transport structure relative to the microscope and the sample stage when the probe is exchanged with the new probe and the sample is exchanged with the new sample.
A scanning probe microscope comprising: a signal generator providing a drive signal for an actuator to move a probe repeatedly towards and away from a sample. In response to the detection of an interaction of the probe with the sample the drive signal is modified to cause the probe to move away from the sample. The drive signal comprises an approach phase in which an intensity of the drive signal increases to a maximum value; and a retract phase in which the intensity of the drive signal reduces from the maximum value to a minimum value in response to the detection of the surface position. The intensity of the drive signal is held at the minimum value during the retract phase and then increased at the end of the retract phase. The duration of the retract phase is dependent on the maximum value in the approach phase.
A method of performing a measurement routine on a probe, the probe comprising a cantilever extending from a support. An interferometer is operated to reflect a sensing beam with the cantilever thereby generating a reflected sensing beam and combine the reflected sensing beam with a reference beam to generate an interferogram. The interferometer generates a first interference measurement value at a first measurement time by measuring the interferogram and a second interference measurement value at a second measurement time by measuring the interferogram, The cantilever deforms to form a different shape between the measurement times. A change in height of the probe between the measurement times is estimated in accordance with a difference between the first and second interference measurement values, and corrected in accordance with the difference in shape of the cantilever between the measurement times.
A method of actuating a plurality of probes by delivering photothermal energy to the probes so that the probes are heated and deform relative to a sample. The photothermal energy is delivered to the probes by: directing an input beam into an optical device; transforming the input beam with the optical device into a plurality of actuation beamlets which are not parallel with each other; and scanning the actuation beamlets across the probes, optionally via an objective lens. A spacing between the actuation beamlets is different to a spacing between the probes so that only a subset (typically only one) of the actuation beamlets illuminates a probe at any instant. As the actuation beamlets scan across the probes the probes are illuminated in an illumination sequence. The actuation beamlets are controlled so that different amounts of photothermal energy are delivered to at least two of the probes during the illumination sequence.
A probe actuation system has a detection system arranged to measure a position or angle of a probe to generate a detection signal. An illumination system is arranged to illuminate the probe. Varying the illumination of the probe causes the probe to deform which in turn causes the detection signal to vary. A probe controller is arranged to generate a desired value which varies with time. A feedback controller is arranged to vary the illumination of the probe according to the detection signal and the desired value so that the detection signal is driven towards the desired value. The probe controller receives as its inputs a detection signal and a desired value, but unlike conventional feedback systems this desired value varies with time. Such a time-varying desired value enables the probe to be driven so that it follows a trajectory with a predetermined speed. A position or angle of the probe is measured to generate the detection signal and the desired value represents a desired position or angle of the probe.
A probe system comprising a probe with first and second arms and a probe tip carried by the first and second arms. An illumination system is arranged to deform the probe by illuminating the first arm at a first actuation location and the second arm at a second actuation location each with a respective illumination power. An actuation controller is arranged to independently control the illumination power at each actuation location in order to control the height and tilt angle of the probe and thus height and lateral position of the tip. The first and second arms are mirror images of each other on opposite sides of a plane of symmetry passing through the probe tip. A detection system is provided which not only measures a height of the probe tip to generate a height signal, but also measures a tilt angle of the probe to generate a tilt signal from which the lateral position of the tip can be determined.
Various methods of driving a probe of a scanning probe microscope are disclosed. One set of methods distribute the energy of a radiation beam over a wide area of the probe by either scanning the beam or increasing its illumination area. Another method changes the intensity profile of the radiation beam with a diffractive optical element, enabling a more uniform intensity profile across the width of the illumination. Another method uses a diffractive optical element to change the circumferential shape of the radiation beam, and hence the shape of the area illuminated on the probe, in order to match the shape of the probe and hence distribute the energy over a wider area.
A method of actuating a plurality of probes. Each probe may be made of two or more materials with different thermal expansion coefficients which are arranged such that when the probe is illuminated by an actuation beam it deforms to move the probe relative to a sample. Energy is delivered to the probes by sequentially illuminating them with an actuation beam via an objective lens in a series of scan sequences. Two or more of the probes are illuminated by the actuation beam in each scan sequence and the actuation beam enters the objective lens at a different angle to an optical axis of the objective lens for each probe which is illuminated in a scan sequence. The actuation beam is controlled so that different amounts of energy are delivered to at least two of the probes by the actuation beam during at least one of the scan sequences.
G11B 9/14 - Recording or reproducing using a method or means not covered by one of the main groups Record carriers therefor using near-field interactionsRecord carriers therefor using microscopic probe means
G11B 11/00 - Recording on, or reproducing from, the same record carrier wherein for these two operations the methods or means are covered by different main groups of groups or by different subgroups of group Record carriers therefor
A method of detecting the positions of a plurality of probes. An input beam is directed into an optical device and transformed into a plurality of output beamlets which are not parallel with each other. Each output beamlet is split into a sensing beamlet and an associated reference beamlet. Each of the sensing beamlets is directed onto an associated one of the probes with an objective lens to generate a reflected beamlet which is combined with its associated reference beamlet to generate an interferogram. Each interferogram is measured to determine the position of an associated one of the probes. A similar method is used to actuate a plurality of probes. A scanning motion is generated between the probes and the sample. An input beam is directed into an optical device and transformed into a plurality of actuation beamlets which are not parallel with each other.
G11B 9/14 - Recording or reproducing using a method or means not covered by one of the main groups Record carriers therefor using near-field interactionsRecord carriers therefor using microscopic probe means
G11B 11/00 - Recording on, or reproducing from, the same record carrier wherein for these two operations the methods or means are covered by different main groups of groups or by different subgroups of group Record carriers therefor
G03F 7/00 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfacesMaterials therefor, e.g. comprising photoresistsApparatus specially adapted therefor
40.
PROBE AND SAMPLE EXCHANGE MECHANISM FOR A SCANNING PROBE MICROSCOPE
A scanning probe microscope system. A sample stage is provided along with a microscope arranged to collect data with a probe carried by the microscope from a sample carried by the sample stage. A probe/sample exchange mechanism is arranged to exchange the probe carried by the microscope with a new probe, and is also arranged to exchange the sample carried by the sample stage with a new sample. The probe/sample exchange mechanism comprises a transport structure which can move relative to the microscope and the sample stage; a probe carrier carried by the transport structure and adapted to carry the probe or the new probe when the probe is exchanged with the new probe; a sample carrier carried by the transport structure, wherein the sample carrier is adapted differently from the probe carrier to carry the sample or the new sample when the sample is exchanged with the new sample; and a drive system arranged to move the transport structure relative to the microscope and the sample stage when the probe is exchanged with the new probe and the sample is exchanged with the new sample.
A scanning probe microscope comprising: a signal generator providing a drive signal for an actuator to move a probe repeatedly towards and away from a sample. In response to the detection of an interaction of the probe with the sample the drive signal is modified to cause the probe to move away from the sample. The drive signal comprises an approach phase in which an intensity of the drive signal increases to a maximum value; and a retract phase in which the intensity of the drive signal reduces from the maximum value to a minimum value in response to the detection of the surface position. The intensity of the drive signal is held at the minimum value during the retract phase and then increased at the end of the retract phase. The duration of the retract phase is dependent on the maximum value in the approach phase.
Apparatus for illuminating a probe of a probe microscope. A lens is arranged to receive a beam and focus it onto the probe. A scanning system varies over time the angle of incidence at which the beam enters the lens relative to its optical axis. The scanning system is typically arranged to move the beam so as to track movement of the probe, thereby maintaining the location on the probe at which the beam is focused. The scanning system may comprise a beam steering mirror which reflects the beam towards the lens; and a mirror actuator for rotating the beam steering mirror.
A method of driving a probe of a scanning probe microscope. The intensities of first and second radiation beams are modulated; and the beams are directed simultaneously onto the probe whereby each beam heats the probe and causes the probe to deform, typically by the photothermal effect. The optical system is arranged to direct the centers of the beams onto different locations on the probe. This enables the location of each beam to be chosen to optimize its effect. A lens receives the first and second beams and focuses them onto the probe. A beam combiner is arranged to receive and combine the beams and direct the combined beams towards the probe.
A method of investigating a sample surface. A probe is brought into close proximity with a first sample and scanned across the first sample. A response of the probe to its interaction with the sample is monitored using a detection system and a first data set is collected indicative of said response. The probe and/or sample is tilted through a tilt angle. The probe is scanned across the first sample or across a second sample after the tilting step, and a response of the probe to its interaction with the scanned sample is monitored using a detection system and a second data set is collected indicative of said response. The method includes the additional step of analyzing the first data set prior to tilting the probe and/or sample in order to determine the tilt angle.
A method of performing a measurement routine on a probe, the probe comprising a cantilever extending from a support. An interferometer is operated to reflect a sensing beam with the cantilever thereby generating a reflected sensing beam and combine the reflected sensing beam with a reference beam to generate an interferogram. The interferometer generates a first interference measurement value at a first measurement time by measuring the interferogram and a second interference measurement value at a second measurement time by measuring the interferogram, The cantilever deforms to form a different shape between the measurement times. A change in height of the probe between the measurement times is estimated in accordance with a difference between the first and second interference measurement values, and corrected in accordance with the difference in shape of the cantilever between the measurement times.
A method of actuating a plurality of probes by delivering photothermal energy to the probes so that the probes are heated and deform relative to a sample. The photothermal energy is delivered to the probes by: directing an input beam into an optical device; transforming the input beam with the optical device into a plurality of actuation beamlets which are not parallel with each other; and scanning the actuation beamlets across the probes, optionally via an objective lens. A spacing between the actuation beamlets is different to a spacing between the probes so that only a subset (typically only one) of the actuation beamlets illuminates a probe at any instant. As the actuation beamlets scan across the probes the probes are illuminated in an illumination sequence. The actuation beamlets are controlled so that different amounts of photothermal energy are delivered to at least two of the probes during the illumination sequence.
Various methods of driving a probe of a scanning probe microscope are disclosed. One set of methods distribute the energy of a radiation beam over a wide area of the probe by either scanning the beam or increasing its illumination area. Another method changes the intensity profile of the radiation beam with a diffractive optical element, enabling a more uniform intensity profile across the width of the illumination. Another method uses a diffractive optical element to change the circumferential shape of the radiation beam, and hence the shape of the area illuminated on the probe, in order to match the shape of the probe and hence distribute the energy over a wider area.
A method of detecting the positions of a plurality of probes. An input beam is directed into an optical device and transformed into a plurality of output beamlets which are not parallel with each other. Each output beamlet is split into a sensing beamlet and an associated reference beamlet. Each of the sensing beamlets is directed onto an associated one of the probes with an objective lens to generate a reflected beamlet which is combined with its associated reference beamlet to generate an interferogram. Each interferogram is measured to determine the position of an associated one of the probes. A similar method is used to actuate a plurality of probes. A scanning motion is generated between the probes and the sample. An input beam is directed into an optical device and transformed into a plurality of actuation beamlets which are not parallel with each other. The actuation beamlets are simultaneously directed onto the probes with an objective lens. Each probe is arranged such that when the probe is heated by its respective actuation beamlet it deforms to move the probe towards or away from the sample. The input beam can be modulated over time in order to modulate the actuation beamlets and thus modulate the positions of the probes relative to the sample. The optical device can be operated with a control signal in order to modulate the intensity of one or more of the actuation beamlets over time and thus modulate the positions of one or more of the probes relative to a sample.
G06Q 10/04 - Forecasting or optimisation specially adapted for administrative or management purposes, e.g. linear programming or "cutting stock problem"
G01Q 20/02 - Monitoring the movement or position of the probe by optical means
G11B 9/14 - Recording or reproducing using a method or means not covered by one of the main groups Record carriers therefor using near-field interactionsRecord carriers therefor using microscopic probe means
A method of actuating a plurality of probes. Each probe may be made of two or more materials with different thermal expansion coefficients which are arranged such that when the probe is illuminated by an actuation beam it deforms to move the probe relative to a sample. Energy is delivered to the probes by sequentially illuminating them with an actuation beam via an objective lens in a series of scan sequences. Two or more of the probes are illuminated by the actuation beam in each scan sequence and the actuation beam enters the objective lens at a different angle to an optical axis of the objective lens for each probe which is illuminated in a scan sequence. The actuation beam is controlled so that different amounts of energy are delivered to at least two of the probes by the actuation beam during at least one of the scan sequences.
G11B 9/14 - Recording or reproducing using a method or means not covered by one of the main groups Record carriers therefor using near-field interactionsRecord carriers therefor using microscopic probe means
A scanning probe microscope comprising a probe that is mechanically responsive to a driving force. A signal generator provides a drive signal to an actuator that generates the driving force, the drive signal being such as to cause the actuator to move the probe repeatedly towards and away from a sample. A detection system is arranged to output a height signal indicative of a path difference between light reflected from the probe and a height reference beam. Image processing apparatus is arranged to use the height signal to form an image of the sample. Signal processing apparatus is arranged to monitor the probe as the probe approaches a sample and to detect a surface position at which the probe interacts with the sample. In response to detection of the surface position, the signal processing apparatus prompts the signal generator to modify the drive signal.
A method of driving a probe of a scanning probe microscope. The intensities of first and second radiation beams are modulated; and the beams are directed simultaneously onto the probe whereby each beam heats the probe and causes the probe to deform, typically by the photothermal effect. The optical system is arranged to direct the centres of the beams onto different locations on the probe. This enables the location of each beam to be chosen to optimise its effect. A lens receives the first and second beams and focuses them onto the probe. A beam combiner is arranged to receive and combine the beams and direct the combined beams towards the probe.
Apparatus for illuminating a probe of a probe microscope. A lens is arranged to receive a beam and focus it onto the probe. A scanning system varies over time the angle of incidence at which the beam enters the lens relative to its optical axis. The scanning system is typically arranged to move the beam so as to track movement of the probe, thereby maintaining the location on the probe at which the beam is focused. The scanning system may comprise a beam steering mirror which reflects the beam towards the lens; and a mirror actuator for rotating the beam steering mirror.
A method of investigating a sample surface. A probe is brought into close proximity with a first sample and scanned across the first sample. A response of the probe to its interaction with the sample is monitored using a detection system and a first data set is collected indicative of said response. The probe and/or sample is tilted through a tilt angle. The probe is scanned across the first sample or across a second sample after the tilting step, and a response of the probe to its interaction with the scanned sample is monitored using a detection system and a second data set is collected indicative of said response. The method includes the additional step of analysing the first data set prior to tilting the probe and/or sample in order to determine the tilt angle.
A control system 32, 75 is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system 34 that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.
A probe assembly for use with a scanning probe microscope includes a carrier supporting at least two probes mounted on a tilt stage arranged to tilt the carrier about an axis. The probes may be distributed on one or more surfaces. In use, the tilt stage operates either as a selection device, orienting a selected probe or surface towards a sample, and/or as an alignment tool, adjusting a planar array of probes such that they are better aligned with the sample. This offers the potential for automated exchange of probes, with increased speed and accuracy, during microscope operation.
A scanning probe microscope comprising a probe that is mechanically responsive to a driving force. A signal generator provides a drive signal to an actuator that generates the driving force, the drive signal being such as to cause the actuator to move the probe repeatedly towards and away from a sample. A detection system is arranged to output a height signal indicative of a path difference between light reflected from the probe and a height reference beam. Image processing apparatus is arranged to use the height signal to form an image of the sample. Signal processing apparatus is arranged to monitor the probe as the probe approaches a sample and to detect a surface position at which the probe interacts with the sample. In response to detection of the surface position, the signal processing apparatus prompts the signal generator to modify the drive signal.
A control system (32, 75) is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system (34) that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.
c) and a height reference beam. Signal processing apparatus monitors the height signal and derives a measurement for each oscillation cycle that is indicative of the height of the probe. This enables extraction of a measurement that represents the height of the sample, without recourse to averaging or filtering, that may be used to form an image of the sample. The detection system may also include a feedback mechanism that is operable to maintain the average value of a feedback parameter at a set level.
A probe assembly (74, 16) for use with a scanning probe microscope includes a carrier (74) supporting at least two probes (78a) mounted on a tilt stage (16) arranged to tilt the carrier about an axis (23). The probes (78a) may be distributed on one or more (76a, 76b) surfaces. In use, the tilt stage (16) operates either as a selection device, orienting a selected probe or surface (76a) towards a sample (20), and / or as an alignment tool, adjusting a planar array (78) of probes such that they are better aligned with the sample (20). This offers the potential for automated exchange of probes, with increased speed and accuracy, during microscope operation.
A probe detection system (74) for use with a scanning probe microscope comprises both a height detection system (88) and deflection detection system (28). As a sample surface is scanned, light reflected from a microscope probe (16) is separated into two components. A first component (84) is analysed by the deflection detection system (28) and is used in a feedback system that maintains the average probe deflection substantially constant during the scan. The second component (86) is analysed by the height detection system (88) from which an indication of the height of the probe above a fixed reference point, and thereby an image of the sample surface, is obtained. Such a dual detection system is particularly suited for use in fast scanning applications in which the feedback system is unable to respond at the rate required to adjust probe height between pixel positions.
b) for controlling the position of the probe (3) relative to a sample surface. The probe (3) has a feedback mechanism (6, 5 7) for maintaining the deflection of the probe and a height measuring system (9) which includes means for compensating for environmental noise. The local probe microscopy apparatus is particularly suitable for use as a wafer inspection tool in a wafer fabrication plant where the inspection tool is liable to be exposed to significant mechanical vibration.
A control system (32, 75) is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system (34) that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.
A probe assembly is for use in a scanning probe microscope. The probe assembly includes a carrier having a plurality of at least three substantially identical probes, each probe having a tip that is located on a plane that is common to the plurality of probe tips and that is movable from this plane. The assembly also includes addressing means adapted to select one of the plurality of probes for relative movement with respect to a majority of the remainder of the probes. Such an assembly, with its potential to facilitate rapid, perhaps automated, replacement of a used probe, lends itself to use in high-speed scanning apparatus.
A dynamic probe detection system (29,32) is for use with a scanning probe microscope of the type that includes a probe (18) that is moved repeatedly towards and away from a sample surface. As a sample surface is scanned, an interferometer (88) generates an output height signal indicative of a path difference between light reflected from the probe (80a,80b,80c) and a height reference beam. Signal processing apparatus monitors the height signal and derives a measurement for each oscillation cycle that is indicative of the height of the probe. This enables extraction of a measurement that represents the height of the sample, without recourse to averaging or filtering,that may be used to form an image of the sample. The detection system may also include a feedback mechanism that is operable to maintain the average value of a feedback parameter at a set level.
A probe detection system (74) for use with a scanning probe microscope comprises both a height detection system (88) and deflection detection system (28). As a sample surface is scanned, light reflected from a microscopeprobe (16) is separated into two components. Afirstcomponent (84) is analysed by thedeflection detection system (28) and is used in a feedback systemthatmaintainsthe average probe deflection substantially constant during the scan. The second component (86) is analysed by the height detection system (88) from which an indication of the heightof the probe above a fixed reference point, and thereby an image of the sample surface, is obtained. Such a dual detection system is particularly suited for use in fast scanning applications in which thefeedback systemis unableto respond at the raterequired to adjust probe height betweenpixel positions.
A method of probe alignment is described in which an interrogating light beam is aligned with the probe of a scanning probe microscope. The methods described ensure that the light beam is positioned as closely as possible to a point directly above the probe tip. This improves image quality by removing variations that may arise if cantilever deflection is allowed to vary during the course of a scan and / or if scanning at high scanning speeds that may excite transient motion of the probe.
A The local probe microscopy apparatus (1) comprises a probe (3) with translation stages (5a, 5b) for controlling the position of the probe (3) relative to a sample surface. The probe (3) has a feedback mechanism (6, 5 7) for maintaining the deflection of the probe and a height measuring system (9) which includes means for compensating for environmental noise. The local probe microscopy apparatus is particularly suitable for use as a wafer inspection tool in a wafer fabrication plant where the inspection tool is liable to be exposed to significant mechanical vibration.
A probe assembly is for use in a scanning probe microscope. The probe assembly includes a carrier having a plurality of at least three substantially identical probes, each probe having a tip that is located on a plane that is common to the plurality of probe tips and that is movable from this plane. The assembly also includes addressing means adapted to select one of the plurality of probes for relative movement with respect to a majority of the remainder of the probes. Such an assembly, with its potential to facilitate rapid, perhaps automated, replacement of a used probe, lends itself to use in high-speed scanning apparatus.
