A double-sided or single-sided machine tool includes a first working disk and a counter-bearing element. The first working disk and the counter-bearing element can be driven rotationally relative to each other by means of a rotary drive. A working gap is formed between the first working disk and the counter-bearing element for the double-sided or single-sided machining of flat workpieces. The double-sided or single-sided machine tool comprises multiple sensors that record measurement data relating to tool and/or machining parameters of the double-sided or single-sided machine tool during operation. A control apparatus obtains the measurement data recorded by the sensors during operation. The control apparatus comprises an artificial neural network that is designed to create a state vector of the double-sided or single-sided machine tool from the measurement data and to compare said state vector with at least one target state vector.
B24B 49/00 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or workArrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
B24B 37/04 - Lapping machines or devicesAccessories designed for working plane surfaces
2.
Method for Configuring a Double- or Single-Sided Processing Machine, and Double- or Single-Sided Processing Machine
A double- or single-sided processing machine and a method for configuring a double- or single-sided processing machine are described. A first working disk and a counter-bearing element are driven rotationally relative to each other. A working gap for processing of flat workpieces is formed between the first working disk and the counter-bearing element. A control apparatus actuates step-by-step or continuous deformation of the first working disk between a concave shape and a convex shape. During the deformation, the working gap width at two or more radially spaced apart locations of the first working disk is measured. The control apparatus determines measurement value averages from the measurement values. The control apparatus determines the minimum of the measurement value averages and, using the determined minimum, specifies a target value for deforming the first working disk as a starting value for the processing of a flat workpiece.
B24B 49/00 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or workArrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
B24B 37/04 - Lapping machines or devicesAccessories designed for working plane surfaces
A fine blanking press includes a press frame with two or more guide elements extending along a vertical axis, a press ram including a ram plate section configured to carry a fine blanking tool and two or more guide sections positioned on the two opposing side surfaces of the ram plate section. The ram plate section includes an upper surface, lower surface, and two opposing side surfaces. The two or more guide sections are structured to guide movement of the press ram relative to a press frame of the fine blanking press during a fine blanking process. The two or more guide sections extend in a vertical direction to a level that is higher than the upper surface of the ram plate section.
A method for operating a double-sided processing machine having a top working disk and a bottom working disk which rotate relative to each other and define a working gap between them that is configured for processing flat workpieces is disclosed. The method includes performing a heating step by heating at least the working disks to an operating temperature using a heating apparatus. Then processing the workpieces using one or more processing steps after completion of the heating step.
B24B 37/08 - Lapping machines or devicesAccessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
A machine tool includes a first support disk and a first working disk. The first working disk defines a clamping surface and is fastened to the first support disk. A counter bearing element is positioned relative to the first working disk such that a working gap is formed between the first working disk and the counter bearing element and is dimensioned to accept a flat workpiece. A first clamping arrangement clamps the clamping surface of the first working disk to the first support disk such that the clamping surface faces away from the working gap. At least one decoupling element is positioned to at least one decoupling element configured to reduce friction between the first support disk and the first working disk.
B24B 37/08 - Lapping machines or devicesAccessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
B24B 37/28 - Work carriers for double side lapping of plane surfaces
B24B 7/17 - Single-purpose machines or devices for grinding end faces, e.g. of gauges, rollers, nuts or piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
B24B 49/14 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or workArrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the temperature during grinding
The invention pertains to a device for cutting a solid substrate, preferably a solid semiconductor substrate for use as wafer material, comprising at least two guiding rollers and a cutting wire guided by the at least two guiding rollers forming a wire web between them, and comprising moving means for effecting a relative movement between a solid substrate and the guiding rollers to introduce the solid substrate into the wire web for cutting the solid substrate into a multitude of substrate slices, wherein the wire web is of sufficient size to allow cutting of a solid substrate with a cross section extension of at least 25 cm, wherein the device comprises at least three guiding rollers arranged preferably in triangular form wherein the cutting wire is guided by the at least three guiding rollers and the solid substrate can be introduced by the moving means into the wire web between a first guiding roller and a second guiding roller of the at least three guiding rollers for cutting, and wherein the device comprises pivoting means for alternately pivoting the solid substrate about a longitudinal axis of the solid substrate during cutting and/or for alternately pivoting the guiding rollers about a common axis parallel to their longitudinal axes during cutting. The invention further pertains to a corresponding method.
B28D 5/04 - Fine working of gems, jewels, crystals, e.g. of semiconductor materialApparatus therefor by tools other than of rotary type, e.g. reciprocating tools
B28D 5/00 - Fine working of gems, jewels, crystals, e.g. of semiconductor materialApparatus therefor
03 - Cosmetics and toiletries; cleaning, bleaching, polishing and abrasive preparations
07 - Machines and machine tools
37 - Construction and mining; installation and repair services
Goods & Services
Cleaning, polishing, scouring and abrasive preparations;
polishing preparations and lapping and grinding compounds,
as far as included in class 3, for use exclusively with
lapping, honing, fine grinding and polishing machines. Machines for metal, glass, ceramics, plastics and
semiconductor processing and tool machines; motors [except
engines for land vehicles]; clutches and power transmission
devices [except those for land vehicles]; precision fine
grinding, lapping, polishing and deburring machines for the
metal, electronics, ceramics, glass and semiconductor
industries; machines for processing ingots; machines for
processing and manufacturing, semiconductor substrates and
wafers; machines and machine tools for cutting silicon
ingots; presses [machines]; hydraulic presses for
metalworking; mechanical presses for metalworking; servo
presses for metalworking; hybrid presses for metalworking;
friction presses, electric presses and combined actuating
presses for metalworking; cutting machines for metalworking;
punching presses; injection molding machines; metal casting
machines; machine parts, namely tools and molds for punching
presses, injection molding machines and metal casting
machines; winding wire as machine parts for wire saws; saws
[machines] and accessories including saw wire; machine parts
of the aforesaid machines, as far as included in class 7;
accessories for machines, in particular lapping, fine
grinding and polishing wheels, carriers, lapping mandrels,
lapping rings, polishing rolls and diamond wire for cutting
ingots [machine part] as far as included in class 7. Installation, maintenance and repair of machinery;
installation, maintenance and repair of machine tools;
maintenance service for machine tools.
A machining machine comprises a first support disk, a first working disk coupled to the first support disk, and a counter bearing element positioned to define a working gap between the first working disk and the counter bearing element. The first working disk and the counter bearing element are configured to rotate relative to each other to machine at least one side of a flat workpiece. A pressure volume is positioned between the first support disk and the first working disk and is configured to hold a pressure fluid, which generates a pressure configured to deform the first working disk. One or more temperature-controlling channels are positioned within the first working disk and configured to hold a temperature-controlling fluid that is configured to control a temperature of the first working disk, wherein the one or more temperature-controlling channels are fluidly separate from the pressure volume.
03 - Cosmetics and toiletries; cleaning, bleaching, polishing and abrasive preparations
07 - Machines and machine tools
37 - Construction and mining; installation and repair services
Goods & Services
Cleaning, polishing, scouring and abrasive preparations; polishing preparations in nature of lapping and grinding compounds, for use exclusively with lapping, honing, fine grinding and polishing machines Machines for metal, glass, ceramics, plastics and semiconductor processing; tool grinding machines, tool polishing machines, tool lapping machines, tool deburring machines; clutches and apparatus for power transmission other than for land vehicles; precision fine grinding, lapping, polishing and deburring machines for the metal, electronics, ceramics, glass and semiconductor industries; machines for processing ingots; machines for processing and manufacturing semiconductor substrates and wafers; machines and machine tools for cutting silicon ingots; Machines, namely presses for metalworking; hydraulic presses for metalworking; mechanical presses for metalworking; Metal working machines in the nature of servo presses for metalworking; Metal working machines in the nature of hybrid presses for metalworking; Metal working machines in the nature of friction presses, electric presses and combined actuating presses for metalworking; cutting machines for metalworking; punching presses for metalworking; injection plastic molding machines; Continuous metal casting machines; machine parts, namely metal working machine tools and molds for punching presses, injection molding machines and metal casting machines; winding wire as machine parts for wire saws; saw machines and accessories for saw machines, namely, saw wire; machine parts of the aforesaid machines, namely saw wire for cutting ingots made out of metal, glass, ceramics, plastics, and semiconductor, wire guide rollers for wire saws for cutting ingots for metal, glass, ceramics, plastics, and semiconductor, reeling apparatus for wire saws and deflection pulley for deflecting wire in wire saw; accessories for machines, in the nature of machine parts, in particular lapping, fine grinding and polishing wheels, carriers, lapping mandrels, lapping rings, polishing rolls and diamond wire for cutting ingots Installation, maintenance and repair of machinery; installation, maintenance and repair of machine tools; maintenance service for machine tools
10.
ROTOR DISK AND DOUBLE-SIDED PROCESSING MACHINE FOR PROCESSING AT LEAST ONE WORKPIECE AND ASSOCIATED METHOD
A rotor disk for guiding workpieces in a double-sided processing machine including a fluid feeding apparatus to feed a processing fluid into a working gap between a first working disk and a second working disk is provided. The rotor disk comprises a surface defining at least one workpiece opening configured to receive at least one workpiece to be processed on both sides in the double-sided processing machine in a material-removing manner using the processing fluid. A contact angle of a drop of the processing fluid with the surface is at least 60°.
B24B 37/08 - Lapping machines or devicesAccessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
A press ram for a fine blanking press comprises a ram plate section configured to carry a fine blanking tool and at least two guide sections positioned on opposing sides of the ram plate section. The ram plate section comprises an upper surface, a lower surface, and two opposing side surfaces. The at least two guide sections of the ram plate section are configured to guide movement of the press ram relative to a press frame during a fine blanking process. The at least two guide sections extend in a vertical direction to a level that is higher than the upper side of the ram plate section.
Press ram for a fine blanking press ABSTRACT The invention pertains to a press ram for a fine blanking press, comprising a ram plate section for carrying a fine blanking tool, and comprising guide sections for guiding ram movement relative to a press frame of the fine blanking press during a fine blanking process, arranged on two opposite sides of the ram plate section, wherein the guide sections extend to a vertically higher level than the upper side of the ram plate section on both opposite sides of the ram plate section. The invention also pertains to a fine blanking press. Date Recue/Date Received 2020-11-20
A fine blanking system comprises one or more movable parts, further comprises at least one first drive of a first drive type and at least one second drive of a second drive type different from the first drive type for driving at least one of the movable parts, wherein the first drive and the second drive are arranged to drive the same movable part.
Fine blanking system comprising one or more movable parts, further comprising at least one first drive of a first drive type and at least one second drive of a second drive type different from the first drive type for driving at least one of the movable parts, wherein the first drive and the second drive are arranged to drive the same movable part.
A method for operating a fine blanking system comprises at least one fine blanking press having a first press unit, a second press unit, and one or more sensors. The method comprises obtaining parameter data from the one or more sensors for at least one of the first press unit, the second press unit, and another component of the fine blanking system during a first fine blanking process step. Adjustments are determined for control parameters of at least one of the first press unit, the second press unit, and the other component based on the parameter data. The adjustments are applied to the control parameters in a second fine blanking process step subsequent to the first fine blanking process step.
The invention pertains to a method for operating a fine blanking system comprising at least one fine blanking press comprising at least one first press unit and at least one second press unit, further comprising at least one first press drive for driving the at least one first press unit in a first driving movement against the at least one second press unit during a fine blanking process step, further comprising sensors arranged to collect parameter data from the at least one first press unit and/or the at least one second press unit and/or from other components of the fine blanking system, the method comprising the steps of: .cndot. collecting parameter data with the sensors from the at least one first press unit and/or the at least one second press unit and/or from other components of the fine blanking system during a first fine blanking process step, .cndot. determining adjustments for control parameters of the at least one first press unit and/or the at least one second press unit and/or of other components of the fine blanking system based on the collected parameter data, and .cndot. applying the adjustments to the control parameters of the at least one first press unit and/or the at least one second press unit and/or of other components of the fine blanking system in a second fine blanking process step subsequent to the first fine blanking process step.
The disclosure pertains to a fine blanking press comprising a first press unit comprising a first press drive for driving the first press unit in a first driving movement during a fine blanking process step, and a second press unit wherein the second press unit is driven in a second driving movement at least partially during the first driving movement of the first press unit, and wherein a force control unit exerts a counter force against a force exerted by the first press unit during its first driving movement, and wherein the force control unit comprises at least one sensor and a controller operative to receive measuring data collected by the at least one sensor, and wherein the controller is configured to carry out a closed loop control on basis of the received measuring data. The disclosure further pertains to a method for operating a fine blanking press.
The invention pertains to a fine blanking press comprising a first press unit, selected from the group comprising, but not limited to, press rams, press cushions and chopping units, comprising a first press drive for driving the first press unit in a first driving movement during a fine blanking process step, further comprising a second press unit selected from the group comprising, but not limited to, press rams, working tables, press cushions and press plates, wherein the second press unit is driven in a second driving movement at least partially during the first driving movement of the first press unit, wherein a force control unit is provided for exerting a counter force against a force exerted by the first press unit during its first driving movement, wherein the force control unit comprises at least one sensor and a controller receiving measuring data collected by the at least one sensor, wherein the controller is configured to carry out a closed loop control on basis of the received measuring data. The invention further pertains to a method for operating a fine blanking press.
A method for casting a ring-shaped plastic frame comprises providing two mold parts, wherein at least one of the two molds parts includes at least one ring-shaped seat. Positioning a rotor disk between the two mold parts where the rotor disk comprises at least one annular recess. Engaging a mold core with at least a portion of each of the two mold parts. The mold core comprises at least one casting channel configured to attach at one end to a supply of plastified plastic. Inserting at least one mold insert into the at least one ring-shaped seat. A mold volume is defined by the at least one mold insert, the mold core and an edge of the at least one annular recess, wherein the mold volume is configured to fluidly connect with the at least one casting channel to receive plastified plastic to form a plastic frame.
B29C 39/10 - Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressureApparatus therefor for making articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. casting around inserts or for coating articles
B29C 45/14 - Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mouldApparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
The invention pertains to a fine blanking press comprising a blanking ram and a counter unit arranged opposite the blanking ram and comprising a press drive for driving at least the blanking ram along a driving direction during a fine blanking process step, further comprising a feeding device for feeding a process material to be processed in the fine blanking press to a process zone between the blanking ram and the counter unit, and comprising at least one handling device for handling the process material before entering the process zone and/or after leaving the process zone, wherein the at least one handling device comprises at least one levelling drive designed to drive the at least one handling device in the same direction as the blanking ram during a fine blanking process step. The invention also pertains to a method for handling a process material to be processed in a fine blanking press.
A fine blanking press comprises a blanking ram and a counter unit positioned opposite the blanking ram. A press drive is configured to drive at least the blanking ram along a driving direction during a fine blanking process step. A feeding device is configured to feed a process material to a process zone defined between the blanking ram and the counter unit and at least one handling device is configured to handle the process material outside of the process zone. At least one levelling drive is configured to drive the at least one handling device in a same direction as the blanking ram during a fine blanking process step.
A machining machine includes an annular bottom working disk and a top counter bearing element. The bottom working disk and top counter bearing element are driven to rotate relative to each other. A working gap is defined between the bottom working disk and the top counter bearing to machine flat work pieces on at least one side. A means for generating a local deformation of the bottom working disk are also provided.
B24B 49/08 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or workArrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving liquid or pneumatic means
B24B 7/00 - Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfacesAccessories therefor
B24B 49/14 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or workArrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the temperature during grinding
23.
Method and device for casting a ring-shaped plastic frame in a recess of a rotor disk of a double-sided machining machine
The invention relates to a device for casting a ring-shaped plastic frame. The device includes a first mold part and a second mold part, a rotor having at least one recess, and a mold core. The mold core includes at least one casting channel configured to connect to a supply one end. The mold parts may also include at least one mold insert. The mold volume is at least partially defined by the at least one mold insert, the at least one recess of the rotor, and the mold core. The mold volume is fluidly connected to the other end of the at least one casting channel.
B29C 39/10 - Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressureApparatus therefor for making articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. casting around inserts or for coating articles
03 - Cosmetics and toiletries; cleaning, bleaching, polishing and abrasive preparations
07 - Machines and machine tools
Goods & Services
Cleaning preparations; polishing preparations; scouring
preparations; abrasive preparations; polishing preparations
and lapping preparations; lapping compounds and abrasive
compounds, included in this class for the exclusive use for
lapping machines, honing machines, fine grinding machines
and polishing machines; polishing, lapping and abrasive
preparations in powder form, paste form or liquid; polishing
cloth as abrading medium. Machines for material processing and machines for material
treatment and machine tools; machines for metal treating,
glass working, ceramic processing, plastics processing,
semiconductor processing and woodworking and machine tools;
motors (except for land vehicles); Machine coupling and
transmission components (except for land vehicles);
precision fine-grinding, lapping, polishing and deburring
machines for the metal, electronics, ceramic, glass and
semiconductor industries; functional components for the
aforesaid machines, included in this class; abrasive belts
for machines; dressing tools for machines; fittings for the
aforesaid machines and machine tools, in particular lapping,
fine grinding and polishing discs, carrier wheels, lapping
mandrels, lapping rings and polishing rolls, included in
this class; spare parts for the aforesaid machines and
machine tools included in this class.
37 - Construction and mining; installation and repair services
41 - Education, entertainment, sporting and cultural services
42 - Scientific, technological and industrial services, research and design
Goods & Services
Machine tools, in particular tool grinding machines; milling machines; CNC-machines, namely, computer-controlled, power-operated machines for machining, grinding, and abrasive jet cutting, numerically controlled machines and machine tools used for machining parts, computer-controlled lathes; machine parts for the aforementioned machine tools in the nature of grinding disks, grinding tools and milling tools, namely, abrasive disks for power-operated grinders, flat disks for power-operated grinders, grindstones, grinding tools for power operated grinding machines, abrasive wheels for power-operated grinders, milling tools for power-operated milling machines Installation, maintenance and repair of machine tools Organization of and conducting of educational training regarding programming, operating and maintenance of machine tools, namely, providing training classes and seminars in the use, maintenance and operation of machine tools, providing hands or practical training of proper use and maintenance of the machine tools Scientific and technological services, in particular services of engineers for layout and development of machines, namely, design and development for machines for others, machine part design services for others, engineering services in the fields of machine tools, tool grinding machines and milling machines
37 - Construction and mining; installation and repair services
41 - Education, entertainment, sporting and cultural services
42 - Scientific, technological and industrial services, research and design
Goods & Services
Machine tools, in particular tool grinding machines; milling machines; CNC-machines, namely, computer-controlled, power-operated machines for machining, grinding, and abrasive jet cutting, numerically controlled machines and machine tools used for machining parts, computer-controlled lathes; machine parts for the aforementioned machine tools in the nature of grinding disks, grinding tools and milling tools, namely, abrasive disks for power-operated grinders, flat disks for power-operated grinders, grindstones, grinding tools for power operated grinding machines, abrasive wheels for power-operated grinders, milling tools for power-operated milling machines Installation, maintenance and repair of machine tools Organization of and conducting of educational training regarding programming, operating and maintenance of machine tools, namely, providing training classes and seminars in the use, maintenance and operation of machine tools, providing hands or practical training of proper use and maintenance of the machine tools Scientific and technological services, in particular services of engineers for layout and development of machines, namely, design and development for machines for others, machine part design services for others, engineering services in the fields of machine tools, tool grinding machines and milling machines
09 - Scientific and electric apparatus and instruments
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Machines for metal treating, glass working, ceramic
processing, plastics processing, semiconductor processing
and woodworking and machine tools; motors and engines
(except for land vehicles); machine coupling and
transmission components (except for land vehicles);
precision fine-grinding, lapping, polishing and deburring
machines for the metal, electronics, ceramic, glass and
semiconductor industries; functional components for the
aforesaid machines, included in this class; fittings for
machines, in particular lapping, precision grinding and
polishing discs, carrier wheels, lapping mandrels, lapping
rings and polishing rolls, included in this class. Scientific, optical, measuring, checking (supervision) and
control apparatus and instruments; apparatus and instruments
for conducting, switching, transforming, accumulating,
regulating or controlling electricity; apparatus for
recording, transmission or reproduction of sound or images;
magnetic data carriers, recording discs; compact discs, DVDs
and other digital recording media; calculating machines,
data processing hardware, computers; computer hardware and
computer software. Material treatment, treatment of metal, glass, ceramic,
plastic, semiconductors; polishing by abrasion, optical
glass grinding; metal plating; planing, milling, abrasion.
28.
Method for the simultaneous double-sided material removal processing of a plurality of semiconductor wafers
A device for double-sided processing of flat workpieces has upper and lower working discs forming between them a working gap containing a carrier disc with cutout(s) for workpiece(s), the carrier disc having circumferential teeth by means of which it rolls on an inner and an outer gear wheel or pin ring, wherein the gear wheels or pin rings have a multiplicity of gear or pin arrangements which engage the teeth of the carrier discs during rolling, at least one of the pin arrangements having a guide which delimits movement of the margin of the carrier disc in at least one axial direction, the guide formed by a circumferential shoulder or a circumferential groove.
Carriers suitable for receiving one or more semiconductor wafers for the machining thereof in lapping, grinding or polishing machines, comprise a core of a first material which has a high stiffness, the core being completely or partly coated with a second material, and also at least one cutout for receiving a semiconductor wafer, wherein the second material is a thermoset polyurethane elastomer having a Shore A hardness of 20-90. The carriers are preferably coated with the second material after chemical surface activation and application of adhesion promoter, and may be used for simultaneous double-side material-removing machining of a plurality of semiconductor wafers.
B24B 37/08 - Lapping machines or devicesAccessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
B24B 37/28 - Work carriers for double side lapping of plane surfaces
03 - Cosmetics and toiletries; cleaning, bleaching, polishing and abrasive preparations
07 - Machines and machine tools
08 - Hand tools and implements
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
40 - Treatment of materials; recycling, air and water treatment,
42 - Scientific, technological and industrial services, research and design
Goods & Services
Cleaning, polishing, scouring and abrasive preparations;
polishing agents and lapping compounds and abrasive
compounds, included in this class for the exclusive use for
lapping machines, honing machines, fine grinding machines
and polishing machines. Machines for the treatment and converting of metal, glass,
ceramic, plastic, semiconductor and wood, and machine tools;
motors and engines (except for land vehicles), machine
coupling and transmission components (except for land
vehicles), precise fine grinding machines, lapping machines,
polishing machines and deburring machines for the metal
industry, electronic industry, ceramic industry, glass
industry and semiconductor industry; functional parts of the
aforementioned machines, as far as included in this class,
spare parts for machines, especially lapping wheels, fine
grinding wheels and polishing wheels, carriers, lapping
mandrels, lapping rings and polishing grinder included in
this class. Hand tools and implements (hand-operated) for the machine
manufacturing, apparatus manufacturing and vehicle
manufacturing as well as for the construction technique;
cutlery, hand operated tools included in this class,
especially lapping tools, lapping mandrels and abrasive
sleeves. Scientific, weighing, measuring, signalling, checking
(supervision) apparatus and instruments; apparatus and
instruments for conducting, switching, transforming,
accumulating, regulating or controlling electricity;
electric and electronic monitoring apparatus, controlling
apparatus, regulating apparatus and measuring apparatus,
especially for monitoring and controlling of machines,
lapping machines, honing machines and fine grinding
machines; data processing equipment and computers; computer
software (recorded). Installation services; installation, maintenance and
repairing of machines; installation, maintenance and
repairing of machine tools; maintenance service for machine
tools. Treatment of materials; treatment of metal, glass, ceramic,
plastic, semiconductors; polishing by grinding, polishing of
optical glasses; plating of metals, planning, milling,
abrading. Scientific and technological services and research and
design relating thereto; industrial analysis and research
services; technical consulting; services of engineering
consultant; services of engineers, design and development of
computer hardware and software, programming of software for
operating, maintaining and repairing of machines,
programming of software, especially for the
online-support-service of maintenance, repairing and
functional analysis of machine tools.
31.
Method for the simultaneous grinding of a plurality of semiconductor wafers
Simultaneous double-side grinding of a plurality of semiconductor wafers involves positioning each wafer freely in a cutout of one of plural carriers which rotate on a cycloidal trajectory, wherein the wafers are machined between two rotating ring-shaped working disks, each disk having a working layer of bonded abrasive, wherein the form of the working gap between working layers is determined during grinding and the form of the working area of at least one disk is altered such that the gap has a predetermined form. The wafers, during machining, may temporarily overhang the gap. The carrier is optionally composed only of a first material, or is completely or partly coated with the first material such that during machining only the first material contacts the working layer, and the first material does not reduce the machining ability of the working layer.
B24B 49/00 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or workArrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
03 - Cosmetics and toiletries; cleaning, bleaching, polishing and abrasive preparations
07 - Machines and machine tools
09 - Scientific and electric apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Polishing agents and lapping compounds and abrasive
compounds, included in this class for the exclusive use for
lapping machines, honing machines, fine grinding machines
and polishing machines. Machines and their parts, included in this class, in
particular lapping machines, honing machines, fine grinding
machines and polishing machines as well as spare parts as
machine parts, in particular lapping wheels, fine grinding
wheels and polishing wheels, carriers, lapping mandrels,
lapping rings and polishing grinder; mechanically driven
tools, included in this class, in particular mechanical
reeling apparatus, gas-operated soldering irons and tools
for the installation of machines. Electric and electronic monitoring apparatus, controlling
apparatus, regulating apparatus and measuring apparatus
included in this class, especially for monitoring and
controlling of lapping machines, honing machines and fine
grinding machines. Services in the field of engineering and of metal working
and of metal processing included in this class, namely
technical consulting, services of engineering consultants,
services of engineers, design, development and programming
of software for operating, maintaining and repairing of
machines, programming of software, especially for the online
support service of maintenance, repairing and functional
analysis of machines.
03 - Cosmetics and toiletries; cleaning, bleaching, polishing and abrasive preparations
07 - Machines and machine tools
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
40 - Treatment of materials; recycling, air and water treatment,
42 - Scientific, technological and industrial services, research and design
Goods & Services
Cleaning, polishing, scouring and abrasive preparations; [polishing agents in the nature of polishing powders and preparations,] lapping compounds in the nature of abrasive pastes and abrasive preparations, included in this class for the exclusive use with lapping machines, honing machines, fine grinding machines and polishing machines Machines for the treatment and converting of metal, glass, ceramic, plastic, semiconductor and [wood,] namely, metal working machines, grinding machines for the treatment of glass and ceramics, polishing machines for use in grinding and polishing metal, [wood,] ceramics, and plastics and semiconductor manufacturing machines; and metal working machine tools; motors and engines except for land vehicles, machine coupling and transmission components except for land vehicles, precise fine grinding machines, lapping machines, polishing machines for use in grinding and polishing metal, wood, ceramics, and plastics and deburring machines for the metal industry, electronic industry, ceramic industry, glass industry and semiconductor industry; structural parts of the aforementioned machines, as far as included in this class, spare parts for machines, namely, lapping wheels being structural parts of machines, fine grinding wheels being structural parts of machines and polishing wheels being structural parts of machines, carriers being structural parts of machines, lapping mandrels being structural parts of machines, lapping rings being structural parts of machines and polishing grinders Electric and electronic monitoring apparatus, controlling apparatus, regulating apparatus and measuring apparatus, for monitoring and controlling of machines, lapping machines, honing machines and fine grinding machines, namely, electric control panels, voltage regulators, and laser measuring systems; data processing equipment and computers; recorded computer software for controlling of metal working machines Installation services, namely, installation of metal working machines; installation, maintenance and repairing of metal working machines; installation, maintenance and repairing of metal working machine tools; maintenance of metal working machine tools [Treatment of materials by metal working, namely, smithing, welding and soldering;] treatment of metal, glass, ceramic, plastic, semiconductors, namely, grinding and polishing; grinding and polishing of glass for optical glasses [; plating of metals; planing, namely, sawmill planing; mill working, namely, metal working; abrading, namely, grinding] [ Scientific and technological services and research and design relating thereto, namely, scientific research and industrial design; industrial analysis and research services, namely, industrial research in the field of metal working machines; technical consulting, namely, information technology consultation; services of engineering consultant, namely, engineering consultation; services of engineers, namely, engineering; design and development of computer hardware and software, computer programming of software for operating, maintaining and repairing of machines, computer programming of software, especially for the online-support-service of maintenance, repairing and functional analysis of machine tools ]
03 - Cosmetics and toiletries; cleaning, bleaching, polishing and abrasive preparations
07 - Machines and machine tools
08 - Hand tools and implements
09 - Scientific and electric apparatus and instruments
37 - Construction and mining; installation and repair services
40 - Treatment of materials; recycling, air and water treatment,
42 - Scientific, technological and industrial services, research and design
Goods & Services
Cleaning, polishing, scouring and abrasive preparations;
polishing agents and lapping compounds and abrasive
compounds, included in this class for the exclusive use for
lapping machines, honing machines, fine grinding machines
and polishing machines. Machines for the treatment and converting of metal, glass,
ceramic, plastic, semiconductor and wood, and machine tools;
precise fine grinding machines, lapping machines, polishing
machines and deburring machines for the metal industry,
electronic industry, ceramic industry, glass industry and
semiconductor industry; functional parts of the
aforementioned machines, as far as included in this class;
spare parts for machines, especially lapping wheels, fine
grinding wheels, polishing wheels, lapping rings and
polishing grinder included in this class. Hand tools and implements (hand-operated) for the machine
manufacturing, apparatus manufacturing and vehicle
manufacturing as well as for the construction technique;
cutlery, hand operated tools included in this class,
especially lapping tools, lapping mandrels and abrasive
sleeves. Scientific, weighing, measuring, signalling, checking
(supervision) apparatus and instruments; apparatus and
instruments for conducting, switching, transforming,
accumulating, regulating or controlling electricity;
electric and electronic monitoring apparatus, controlling
apparatus, regulating apparatus and measuring apparatus,
especially for monitoring and controlling of machines,
lapping machines, honing machines and fine grinding
machines; data processing equipment and computers; computer
software (recorded). Installation services; installation, maintenance and
repairing of machines; installation, maintenance and
repairing of machine tools; maintenance service for machine
tools. Treatment of materials; treatment of metal, glass, ceramic,
plastic, semiconductors; polishing by grinding, polishing of
optical glasses; plating of metals, planning, milling,
abrading. Scientific and technological services and research and
design relating thereto; industrial analysis and research
services; technical consulting; services of engineering
consultant; services of engineers, design and development of
computer hardware and software, programming of software for
operating, maintaining and repairing of machines,
programming of software, especially for the
online-support-service of maintenance, repairing and
functional analysis of machine tools.
Machines for the treatment and converting of metal, glass, ceramic, plastic, * and * semiconductor [ and wood ], namely, metal working machines, grinding machines for the treatment of glass and ceramics, polishing machines for use in grinding and polishing metal, [ wood, ] ceramics, and plastics; precise fine grinding machines, lapping machines, and deburring machines for the metal industry, electronic industry, ceramic industry, glass industry and semiconductor industry; structural parts of the aforementioned machines and spare parts for machines, namely, lapping wheels being structural parts of machines, fine grinding wheels being structural parts of machines and polishing wheels being structural parts of machines, work piece carriers being structural parts of machines, lapping mandrels being structural parts of machines, lapping rings being structural parts of machines and polishing grinders
36.
Method for the simultaneous double-side grinding of a plurality of semiconductor wafers
A method for the simultaneous double-side grinding of a plurality of semiconductor wafers, involves a process wherein each semiconductor wafer lies such that it is freely moveable in a cutout of one of a plurality of carriers caused to rotate by means of a rolling apparatus and is thereby moved on a cycloidal trajectory, wherein the semiconductor wafers are machined in material-removing fashion between two rotating working disks, wherein each working disk comprises a working layer containing bonded abrasive. The method according to the invention makes it possible, by means of specific kinematics, to produce extremely planar semiconductor wafers.
B24B 49/00 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or workArrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
B24B 51/00 - Arrangements for automatic control of a series of individual steps in grinding a workpiece
