Shimane University

United States of America

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IPC Class
C30B 13/06 - Single-crystal growth by zone-meltingRefining by zone-melting the molten zone not extending over the whole cross-section 1
C30B 13/24 - Heating of the molten zone by irradiation or electric discharge using electromagnetic waves 1
C30B 19/08 - Heating of the reaction chamber or the substrate 1
C30B 19/12 - Liquid-phase epitaxial-layer growth characterised by the substrate 1
C30B 29/16 - Oxides 1
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Found results for  patents

1.

Crystallization of two-dimensional structures comprising multiple thin films

      
Application Number 16989231
Grant Number 11621163
Status In Force
Filing Date 2020-08-10
First Publication Date 2021-02-11
Grant Date 2023-04-04
Owner
  • THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (USA)
  • Shimane University (USA)
Inventor
  • Kobayashi, Nobuhiko
  • Yeh, Wenchang

Abstract

A multi-layer thin film composite is formed by applying a thin film formed from non-single-crystalline oxide onto a substrate; applying a protection film onto the thin film; and supplying energy to the thin film through at least one of the protection film or the substrate.

IPC Classes  ?

  • H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
  • C30B 29/16 - Oxides
  • H01L 29/24 - Semiconductor bodies characterised by the materials of which they are formed including, apart from doping materials or other impurities, only inorganic semiconductor materials not provided for in groups , ,  or
  • C30B 19/08 - Heating of the reaction chamber or the substrate
  • C30B 19/12 - Liquid-phase epitaxial-layer growth characterised by the substrate
  • C30B 29/42 - Gallium arsenide
  • C30B 29/40 - AIIIBV compounds
  • C30B 13/06 - Single-crystal growth by zone-meltingRefining by zone-melting the molten zone not extending over the whole cross-section
  • C30B 13/24 - Heating of the molten zone by irradiation or electric discharge using electromagnetic waves