Goods & Services

Cathode materials and components, namely, grid cap assemblies, grid cap and anode assemblies, electron gun assemblies, and electron columns for use with microscopy, lithography, metrology, tomography and non-scale displays; specialized neutral-charged electron devices for use in space propulsion acceleration systems, advanced metal fabrication systems, free electronic lasers, x-ray generators and microwave generators, namely, thermionic and field emission cathodes, lanthanum hexaboride and cerium hexaboride cathodes, transition metal carbide thermionic and field emission cathodes, cathodes for plasma light sources, and guard ring cathodes made of pyrolytic carbon, graphite or colloidal carbon coating on transition metal carbides; deposited, structured field emitter array cathodes; field emitters, namely, single-crystal carbide and refractory metal, single-crystal etched cathodes for thermal and field electron emitters, STM (Scanning Tunnel Microscopes) probes, and Schottky electron sources; tungsten wire electrodes for use in electron emission sources; single-crystal carbide probes for STM (Scanning Tunneling Microscopes) probes; scientific apparatus in the nature of liquid metal ion sources (LMIS) for microscopes, namely, liquid-metal ion sources and plasma sources; ion gun assemblies for use in mass Spectrometry; ion columns for use with microscopy, lithography, metrology, tomography, and nanofabrication Scientific and technological research and development related to electron emission testing and new product development and transition metal carbides, thermionic electron emission cathodes, and field electron sources; providing expert advice and consultation to others on the subject of scientific and technological research and development related to emission testing and new product development of transition metal carbides, thermionic electron emission cathodes, and field electron sources; custom design and development of electron emitting materials and electron emission sources; research for others in the field of fundamental electron emissions, and preparing reports in connection therewith; scientific analysis of auger surfaces and field emission measurements over a large range of currents and operating atmospheres

Abstract

A monolithic graphite heater for heating a thermionic electron cathode includes first and second electrically conductive arms, each one of the first and second electrically conductive arms having an electrode mount at a proximal end, a thermal apex at a distal end, and a transitional region between the electrode mount and the thermal apex; a cathode mount electrically and mechanically coupling each thermal apex to form a maximum Joule-heating region at or adjacent the cathode mount and decreasing Joule-heating along each transitional region; and a press-fit aperture formed in the cathode mount, the press-fit aperture sized to receive at least a portion of the thermionic electron cathode for facilitating thermionic emission produced therefrom in response to operative heat power generation provided by the maximum Joule-heating region.

IPC Classes  ?

• H01J 1/16 - Cathodes heated directly by an electric current characterised by the shape
• H01J 9/04 - Manufacture of electrodes or electrode systems of thermionic cathodes
• H05B 3/14 - Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic

Abstract

A monolithic graphite heater for heating a thermionic electron cathode includes first and second electrically conductive arms, each one of the first and second electrically conductive arms having an electrode mount at a proximal end, a thermal apex at a distal end, and a transitional region between the electrode mount and the thermal apex; a cathode mount electrically and mechanically coupling each thermal apex to form a maximum Joule-heating region at or adjacent the cathode mount and decreasing Joule heating along each transitional region; and a press-fit aperture formed in the cathode mount, the press-fit aperture sized to receive at least a portion of the thermionic electron cathode for facilitating thermionic emission produced therefrom in response to operative heat power generation provided by the maximum Joule-heating region.

IPC Classes  ?

• H01J 1/16 - Cathodes heated directly by an electric current characterised by the shape
• H01J 9/04 - Manufacture of electrodes or electrode systems of thermionic cathodes
• H05B 3/14 - Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic

Abstract

A monolithic graphite heater for heating a thermionic electron cathode includes first and second electrically conductive arms, each one of the first and second electrically conductive arms having an electrode mount at a proximal end, a thermal apex at a distal end, and a transitional region between the electrode mount and the thermal apex; a cathode mount electrically and mechanically coupling each thermal apex to form a maximum Joule-heating region at or adjacent the cathode mount and decreasing Joule heating along each transitional region; and a press-fit aperture formed in the cathode mount, the press-fit aperture sized to receive at least a portion of the thermionic electron cathode for facilitating thermionic emission produced therefrom in response to operative heat power generation provided by the maximum Joule-heating region.

IPC Classes  ?

• H01J 1/22 - Heaters
• H01J 1/20 - Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
• H01J 1/15 - Cathodes heated directly by an electric current
• H01J 9/04 - Manufacture of electrodes or electrode systems of thermionic cathodes
• H01J 37/065 - Construction of guns or parts thereof
• H01J 1/14 - Solid thermionic cathodes characterised by the material

Goods & Services

Cathode materials and components, namely, grid cap assemblies, grid cap and anode assemblies, electron gun assemblies, and electron columns for use with microscopy, lithography, metrology, tomography and non-scale displays; specialized neutral-charged electron devices for use in space propulsion acceleration systems, advanced metal fabrication systems, free electronic lasers, x-ray generators and microwave generators, namely, thermionic and field emission cathodes, lanthanum hexaboride and cerium hexaboride cathodes, transition metal carbide thermionic and field emission cathodes, cathodes for plasma light sources, and guard ring cathodes made of pyrolytic carbon, graphite or colloidal carbon coating on transition metal carbides; deposited, structured field emitter array cathodes; field emitters, namely, single-crystal carbide and refractory metal, single-crystal etched cathodes for thermal and field electron emitters, STM (Scanning Tunnel Microscopes) probes, and Schottky electron sources; tungsten wire electrodes for use in electron emission sources; single-crystal carbide probes for STM (Scanning Tunneling Microscopes) probes; scientific apparatus in the nature of liquid metal ion sources (LMIS) for microscopes, namely, liquid-metal ion sources and plasma sources; ion gun assemblies for use in mass Spectrometry; ion columns for use with microscopy, lithography, metrology, tomography, and nanofabrication Scientific and technological research and development related to electron emission testing and new product development and transition metal carbides, thermionic electron emission cathodes, and field electron sources; providing expert advice and consultation to others on the subject of scientific and technological research and development related to emission testing and new product development of transition metal carbides, thermionic electron emission cathodes, and field electron sources; custom design and development of electron emitting materials and electron emission sources; research for others in the field of fundamental electron emissions, and preparing reports in connection therewith; scientific analysis of auger surfaces and field emission measurements over a large range of currents and operating atmospheres

Abstract

An electron source emitter is made from transition metal carbide materials, including hafnium carbide (HfC), zirconium carbide (ZrC), titanium carbide (TiC), vanadium carbide (VC), niobium carbide (NbC), and tantalum carbide (TaC), which are of high refractory nature. Preferential evaporating and subsequent development of different crystallographic planes of the transition metal carbide emitter having initially at its apex a small radius (50 nm-300 nm) develop over time an on-axis, sharp end-form or tip that is uniformly accentuated circumferentially to an extreme angular form and persists over time. An emitter manufactured to the (110) crystallographic plane and operating at high electron beam current and high temperature for about 20 hours to 40 hours results in the (110) plane, while initially not a high emission crystallographic orientation, developing into a very high field emission orientation because of the geometrical change. This geometrical change allows for a very high electric field and hence high on-axis electron emission.

IPC Classes  ?

• H01J 1/304 - Field-emissive cathodes
• H01J 9/02 - Manufacture of electrodes or electrode systems

Abstract

An electron emitter that consists of: a low work function material including Lanthanum hexaboride or Iridium Cerium that acts as an emitter, a cylinder base made of high work function material that has a cone shape where the low work function material is embedded in the high work function material but is exposed at end of the cone and the combined structure is heated and biased to a negative voltage relative to an anode, an anode electrode that has positive bias relative to the emitter, and a wehnelt electrode with an aperture where the cylindrical base protrudes through the wehnelt aperture so the end of the cone containing the emissive area is placed between the wehnelt and the anode.

IPC Classes  ?

• H01J 19/32 - Anodes
• H01J 19/10 - Thermionic cathodes characterised by the shape
• H01J 19/38 - Control electrodes, e.g. grid
• H01J 19/068 - Thermionic cathodes characterised by the material with compounds having metallic conductive properties, e.g. lanthanum boride, as an emissive material
• H01J 21/06 - Tubes with a single discharge path having electrostatic control means only
• H01J 19/82 - Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Abstract

An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.

IPC Classes  ?

• H01J 1/146 - Solid thermionic cathodes characterised by the material with metals or alloys as an emissive material
• H01J 1/148 - Solid thermionic cathodes characterised by the material with compounds having metallic conductive properties, e.g. lanthanum boride, as an emissive material
• H01J 19/10 - Thermionic cathodes characterised by the shape
• H01J 1/14 - Solid thermionic cathodes characterised by the material

Abstract

An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.

IPC Classes  ?

• H01J 1/14 - Solid thermionic cathodes characterised by the material
• H01J 1/146 - Solid thermionic cathodes characterised by the material with metals or alloys as an emissive material
• H01J 19/10 - Thermionic cathodes characterised by the shape
• H01J 1/148 - Solid thermionic cathodes characterised by the material with compounds having metallic conductive properties, e.g. lanthanum boride, as an emissive material

Abstract

A thermionic emission assembly includes a Wehnelt cap that has a cap beam aperture and a cavity within which a cathode is supported. Electrical energy applied to the cathode causes it to reach a sufficiently high temperature to emit a beam of electrons that propagate through the cap beam aperture. An anode having an anode beam aperture is positioned in spatial alignment with the cap beam aperture to receive the electrons. The anode accelerates the electrons and directs them through the anode beam aperture for incidence on a target specimen. A ceramic base forms a combined interface that electrically and thermally separates the Wehnelt cap and the anode. The thermal isolation of the Wehnelt cap from the anode allows the Wehnelt cap to increase in heat to rapidly reach a stable temperature as the cathode emits the beam of electrons.

IPC Classes  ?

• H01J 9/02 - Manufacture of electrodes or electrode systems
• H01J 9/04 - Manufacture of electrodes or electrode systems of thermionic cathodes
• H01J 37/065 - Construction of guns or parts thereof

Abstract

A thermionic emission assembly includes a Wehnelt cap that has a cap beam aperture and a cavity within which a cathode is supported. Electrical energy applied to the cathode causes it to reach a sufficiently high temperature to emit a beam of electrons that propagate through the cap beam aperture. An anode having an anode beam aperture is positioned in spatial alignment with the cap beam aperture to receive the electrons. The anode accelerates the electrons and directs them through the anode beam aperture for incidence on a target specimen. A ceramic base forms a combined interface that electrically and thermally separates the Wehnelt cap and the anode. The interface thermally isolates the Wehnelt cap from the anode to allow the cathode to rapidly reach the sufficiently high temperature to emit the beam of electrons.

IPC Classes  ?

• H01J 9/02 - Manufacture of electrodes or electrode systems

Goods & Services

Cathode materials and components, namely, grid cap assemblies, grid cap and anode assemblies, electron gun assemblies, and electron columns for use with microscopy, lithography, metrology, tomography and non-scale displays; specialized neutral-charged electron devices for use in space propulsion acceleration systems, advanced metal fabrication systems, free electronic lasers, x-ray generators and microwave generators, namely, thermionic and field emission cathodes, lanthanum hexaboride and cerium hexaboride cathodes, transition metal carbide thermionic and field emission cathodes, cathodes for plasma light sources, and guard ring cathodes made of pyrolytic carbon, graphite or colloidal carbon coating on transition metal carbides; deposited, structured field emitter array cathodes; field emitters, namely, single-crystal carbide and refractory metal, single-crystal etched cathodes for thermal and field electron emitters, STM (Scanning Tunnel Microscopes) probes, and Schottky electron sources; tungsten wire electrodes for use in electron emission sources; single-crystal carbide probes for STM (Scanning Tunneling Microscopes) probes Scientific and technological research and development related to electron emission testing and new product development and transition metal carbides, thermionic electron emission cathodes, and field electron sources; providing expert advice and consultation to others on the subject of scientific and technological research and development related to emission testing and new product development of transition metal carbides, thermionic electron emission cathodes, and field electron sources; custom design and development of electron emitting materials and electron emission sources; research for others in the field of fundamental electron emissions, and preparing reports in connection therewith; scientific analysis of auger surfaces and field emission measurements over a large range of currents and operating atmospheres

Goods & Services

Cathode materials and components, namely, grid cap assemblies, grid cap and anode assemblies, electron gun assemblies, and electron columns for use with microscopy, lithography, metrology, tomography and non-scale displays; specialized neutral-charged electron devices for use in space propulsion acceleration systems, advanced metal fabrication systems, free electronic lasers, x-ray generators and microwave generators, namely, thermionic and field emission cathodes, lanthanum hexaboride and cerium hexaboride cathodes, transition metal carbide thermionic and field emission cathodes, cathodes for plasma light sources, and guard ring cathodes made of pyrolytic carbon, graphite or colloidal carbon coating on transition metal carbides; deposited, structured field emitter array cathodes; field emitters, namely, single-crystal carbide and refractory metal, single-crystal etched cathodes for thermal and field electron emitters, STM (Scanning Tunnel Microscopes) probes, and Schottky electron sources; tungsten wire electrodes for use in electron emission sources; single-crystal carbide probes for STM (Scanning Tunneling Microscopes) probes Scientific and technological research and development related to electron emission testing and new product development and transition metal carbides, thermionic electron emission cathodes, and field electron sources; providing expert advice and consultation to others on the subject of scientific and technological research and development related to emission testing and new product development of transition metal carbides, thermionic electron emission cathodes, and field electron sources; custom design and development of electron emitting materials and electron emission sources; research for others in the field of fundamental electron emissions, and preparing reports in connection therewith; scientific analysis of auger surfaces and field emission measurements over a large range of currents and operating atmospheres

Goods & Services

Cathodes and electron sources, namely, thermionic and [field emission] cathodes for use in microscopy, metrology, lithography and wafer inspection