Abstract

A mask sensing assembly comprises a mask-like sensing module and a housing. The mask-like sensing module has a sensor and a storage unit. The sensor senses environment information in a simulating lithography process and generates a sensing signal to be stored in the storage unit. The housing, which is designated to receive the mask-like sensing module, has a housing processor, a plurality of control buttons and indicators. The control buttons are manipulated to generate a predetermined command, and the command is transmitted to the mask-like sensing module in a wireless way to execute the command. The mask-like sensing module generates a status signal after the command is executed, and the status signal is transmitted back to the housing to control the indicators showing specified message accordingly.

IPC Classes  ?

• G03F 7/00 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfacesMaterials therefor, e.g. comprising photoresistsApparatus specially adapted therefor

Abstract

A mass flow meter includes a main member and a sensor. The main member has a main channel, a first sensor channel, a second sensor channel, and a chamber. The first and second sensor channels are connected to the main channel and the chamber respectively. The sensor is mounted within the chamber and connected to the first and the second sensor channels, so that the sensor may receive a fluid in the main channel to sense a flow rate of the fluid. The main member further has a pressure chamber, which is communicated with the main channel and the chamber, allowing a portion of the fluid flows into the pressure chamber to maintain internal and external pressure of the sensor at approximately the same level. On the other hand, a mass flow controller having the mass flow meter is also provided.

IPC Classes  ?

• G01F 1/50 - Correcting or compensating means
• G01F 1/42 - Orifices or nozzles

Abstract

A warning device is mounted on a valve including a valve body, a valve seat and a valve stem. The warning device comprises a base, a shaft, a sensing module, a control module and a warning module. The base is connected to the valve body. The shaft has a shaft body and a first sensing member. A profile of a cross section of the shaft being passed through by the first sensing member is asymmetric along at least a radial direction. The sensing module has a second sensing member received in the base and corresponded to the first sensing member to detect changes in position of the first sensing member and generate a sensing signal accordingly. The control module receives the sensing signal generated by the sensing module and calculates a rotation data accordingly. The warning module generates a warning signal according to the rotation data from the control module.

IPC Classes  ?

• F16K 37/00 - Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
• G01L 3/10 - Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
• G01L 3/14 - Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft
• G01L 5/00 - Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes

Abstract

A reticle-like sensing assembly comprises a main body, a sensing module, a power supply and a wireless charging receiver. The main body has a space therein; wherein the main body has a dimension identical to the real reticle to collecting various data which affects a reticle in a lithography process. The sensing module is received in the space of the main body to sense information related to the main body and compute the information to obtain a sensing data accordingly. The power supply is received in the space of the main body and electrically connected to the sensing module to provide electric power to the sensing module. The wireless charging receiver is received in the space of the main body and electrically connected to the power supply to be driven to charge the power supply.

IPC Classes  ?

• G03F 1/44 - Testing or measuring features, e.g. grid patterns, focus monitors, sawtooth scales or notched scales
• G01M 99/00 - Subject matter not provided for in other groups of this subclass

Abstract

An end effector, which is connected to a wafer transfer robot, includes a main member, a sensor and a lid. The main member has a first room on a side thereof, in which the sensor is received. The lid is fixed to the main member to cover the sensor. The sensor transmits a vibration signal to a central controller when the main member is vibrating. The end effect may work in a narrow space to transfer wafers and still keep high sensible and precise detection of vibration.

IPC Classes  ?

• B25J 15/00 - Gripping heads
• B65G 47/90 - Devices for picking-up and depositing articles or materials

Abstract

An apparatus, which is connected to a bicycle, includes a case having a chamber, a main device received in the chamber of the case, a locking member connected to the main device, a lid connected to the case to seal the chamber, wherein the lid has a bore and the bore is received in the chamber of the case, and a transceiver received in the chamber of the case and electrically connected to the locking member, wherein the transceiver receives a signal to control the locking member accordingly. The apparatus can be opened by the outside signal transmitted to the transceiver only.

IPC Classes  ?

• B62H 5/00 - Appliances preventing or indicating unauthorised use or theft of cyclesLocks integral with cycles
• B62J 9/00 - Containers specially adapted for cycles, e.g. panniers or saddle bags
• G06Q 50/30 - Transportation; Communications
• B62H 3/00 - Separate supports or holders for parking or storing cycles

Abstract

A smart lock of a bicycle includes a bicycle locking apparatus and a dock locking apparatus. The bicycle locking apparatus works with a key to lock the bicycle without dock, and the dock locking apparatus works with a dock to lock the bicycle to the dock. The bicycle locking apparatus includes a gear, a locking member, and a driving module. The locking member has a locking tooth portion, the driving module moves the locking member to engage and disengage the locking tooth portion of the locking member with an engaging portion of the key. The dock locking apparatus has a locking latch and a stop member. The driving module moves the locking member to let the stop member against or away from the locking latch to lock or unlock the bicycle to the dock.

IPC Classes  ?

• B62H 5/00 - Appliances preventing or indicating unauthorised use or theft of cyclesLocks integral with cycles
• B62H 3/02 - Separate supports or holders for parking or storing cycles involving means for gripping the cycle by the handle-bars or by the upper part of the frame
• B62H 3/00 - Separate supports or holders for parking or storing cycles
• E05B 15/00 - Other details of locksParts for engagement by bolts of fastening devices
• E05B 47/00 - Operating or controlling locks or other fastening devices by electric or magnetic means

Abstract

A bicycle rental system includes a plurality of rental bicycles, each of which has a locking apparatus, a controlling apparatus, and a parking locker. The locking apparatus is operated to lock the rental bicycle, and the parking locker is able to engage and lock a dock locker of the dock. The controlling apparatus transmits signals to a control system, and receives signals from the control system through a network. The bicycle rental system may return the rental bicycle with or without the docks, and may rent the rental bicycle by a mobile device or a tag device.

IPC Classes  ?

• G08B 21/00 - Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
• B62H 5/20 - Appliances preventing or indicating unauthorised use or theft of cyclesLocks integral with cycles indicating unauthorised use, e.g. acting on signalling devices
• G07C 9/00 - Individual registration on entry or exit
• G06Q 30/06 - Buying, selling or leasing transactions