Tokyo Electron Limited
Japan
New patents and trademarks in the last week
Last updated : 2026-10-17
Summary
Patents |
Trademarks |
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26 | 0 |
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Viewing 1 - 44 of 44
trademarks
patents
| # | ID | Jurisdiction | Title |
|---|---|---|---|
| 1 | 19175894 |
|
CONDUCTIVE LINER FOR RUTHENIUM SEMI-DAMASCENE SUBTRACTIVE INTERCONNECT AND METHODS OF MAKING THE SAME |
| 2 | 19696703 |
|
FILM FORMING METHOD, PLASMA PRCESSING METHOD, AND PLASMA PRCESSING APPARATUS |
| 3 | 19691641 |
|
ETCHING METHOD AND ETCHING DEVICE |
| 4 | 19716671 |
|
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS |
| 5 | 19555233 |
|
FILM FORMING METHOD AND FILM FORMING APPARATUS |
| 6 | 19687693 |
|
INSPECTION SYSTEM, INSPECTION METHOD, AND SHELL STRUCTURE |
| 7 | 19718997 |
|
SYSTEMS AND METHODS THAT USE INFRARED (IR) SPECTROSCOPY TO MONITOR PROCESS CHEMICALS UTILIZED IN A SEMICONDUCTOR PROCESS |
| 8 | 19637801 |
|
SURFACE MODIFICATION OF PHOTORESIST FOR DIRECTED SELF-ASSEMBLY |
| 9 | 19636574 |
|
Film Forming Method and Film Forming Apparatus |
| 10 | 19695528 |
|
SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS |
| 11 | US2026016239 |
|
SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING SAME |
| 12 | JP2026012648 |
|
PLASMA PROCESSING DEVICE AND IMPEDANCE MATCHING METHOD |
| 13 | JP2026014748 |
|
PLASMA PROCESSING DEVICE |
| 14 | JP2026012310 |
|
DIE BONDING HEAD, DIE BONDING DEVICE, AND DIE BONDING METHOD |
| 15 | US2026022302 |
|
SURFACE MODIFICATION OF PHOTORESIST FOR DIRECTED SELF-ASSEMBLY |
| 16 | JP2026012740 |
|
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD |
| 17 | US2025055806 |
|
CONDUCTIVE LINER FOR RUTHENIUM SEMI-DAMASCENE SUBTRACTIVE INTERCONNECTAND METHODS OF MAKING THE SAME |
| 18 | JP2025026095 |
|
SENSOR SUBSTRATE ASSEMBLY, SEMICONDUCTOR MANUFACTURING APPARATUS, AND SENSING METHOD |
| 19 | JP2025026092 |
|
SENSOR SUBSTRATE ASSEMBLY, SEMICONDUCTOR FABRICATION DEVICE, AND SENSING METHOD |
| 20 | 19696084 |
|
Substrate Processing Method, Substrate Processing Device, and Substrate Processing System |
| 21 | 19689300 |
|
FILM-FORMING METHOD AND FILM-FORMING APPARATUS |
| 22 | 19634417 |
|
METHOD OF TEACHING SUBSTRATE TRANSFER DEVICE, AND SUBSTRATE PROCESSING APPARATUS |
| 23 | 19467005 |
|
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS |
| 24 | 19177073 |
|
SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING SAME |
| 25 | 19673039 |
|
SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS |
| 26 | 19116513 |
|
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM |
| 27 | 19694116 |
|
PLASMA PROCESSING APPARATUS |
| 28 | 19106512 |
|
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
| 29 | 19718097 |
|
FILM DEPOSITION APPARATUS |
| 30 | 19690044 |
|
GAS SUPPLIER, SHOWERHEAD, AND PIPE |
| 31 | 19717666 |
|
ELECTROSTATIC CHUCK, SUBSTRATE SUPPORT, AND SUBSTRATE PROCESSING APPARATUS |
| 32 | 19465205 |
|
FILM FORMING METHOD AND FILM FORMING APPARATUS |
| 33 | 19467883 |
|
ETCHING METHOD AND PLASMA PROCESSING APPARATUS |
| 34 | 19684045 |
|
SUBSTRATE PROCESSING APPARATUS AND CONNECTOR ASSEMBLY |
| 35 | 19463687 |
|
PATTERNING METHOD USING SECONDARY RESIST SURFACE FUNCTIONALIZATION FOR MASK FORMATION |
| 36 | JP2026012194 |
|
PLASMA PROCESSING DEVICE, POWER SUPPLY SYSTEM, AND CONTROL METHOD |
| 37 | JP2026012033 |
|
CONTROL DEVICE, SUBSTRATE PROCESSING DEVICE, CONTROL PROGRAM, AND LEARNING METHOD |
| 38 | JP2026012781 |
|
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND PROGRAM |
| 39 | JP2026011684 |
|
PLASMA PROCESSING DEVICE AND UPPER ASSEMBLY |
| 40 | US2026017729 |
|
PULSE WINDOWING OPTICAL SENSOR |
| 41 | US2025055811 |
|
METHODS AND SYSTEMS FOR AREA SELECTIVE PROCESSING |
| 42 | US2026018570 |
|
SYNCHRONIZED MULTI-ARM ROBOT |
| 43 | JP2025026093 |
|
SENSOR SUBSTRATE ASSEMBLY, SEMICONDUCTOR MANUFACTURING DEVICE, AND SENSING METHOD |
| 44 | JP2025026094 |
|
SENSOR SUBSTRATE ASSEMBLY, SEMICONDUCTOR MANUFACTURING APPARATUS, AND SENSING METHOD |
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