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2009
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Invention
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End effector to substrate offset detection and correction. A port door providing an interface int... |
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Invention
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Controlled deflection of large area semiconductor substrates for shipping & manufacturing contain... |
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2008
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Invention
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Method and apparatus for wafer support. An end effector having a first arm and a second arm exten... |
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Invention
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End effector with sensing capabilities. In one embodiment, an end effector having a first arm ext... |
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Invention
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Method and apparatus for wafer marking. A semiconductor substrate is provided. The substrate incl... |
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2007
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Invention
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Environmental isolation system for flat panel displays. The present invention generally comprises... |
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Invention
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Loader and buffer for reduced lot size. A system comprising a load port and a transfer module. In... |
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Invention
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Variable pitch storage shelves. The present invention generally comprises a container storage sys... |
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Invention
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Series impedance matched inductive power pick up. A non-contact power distribution system is prov... |
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Invention
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Method and apparatus for vertical wafer transport, buffer and storage. A substrate support and tr... |
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Invention
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Method and apparatus for vertical wafer transport, buffer and storage.
A substrate support and t... |
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Invention
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Variable lot size load port. A variable lot size load port assembly includes a tool interface, a ... |
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Invention
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Variable lot size load port. A variable lot size load port assembly (600) is described having a t... |
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Invention
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Variable lot size load port. A variable lot size load port assembly includes a tool interface, an... |
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Invention
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Bridge loadport and method. a bridge loadport (100) is described comprising a tool interface, an ... |
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Invention
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Method and apparatus for transporting substrates. A substrate support and transport system for su... |
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2006
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Invention
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Horizontal array stocker. The present invention comprises a stocker. The stocker comprises multip... |
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Invention
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Discontinuous conveyor system. The present invention generally comprises a transport system for t... |
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Invention
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Belt conveyor for use with semiconductor containers. The present invention comprises a conveyor (... |
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Invention
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Workpiece support structures and apparatus for accessing same. The present invention comprises a ... |
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Invention
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Stocker. The present invention comprises a stocker for managing containers within a fabrication f... |
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Invention
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Extended read range rfid system. The present invention generally comprises an apparatus that allo... |
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Invention
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Interface between conveyor and semiconductor process tool load port. The present invention genera... |
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Invention
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Modular terminal for high-throughput amhs. The present invention generally comprises an apparatus... |
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Invention
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Automated job management. A method and apparatus are disclosed for improving the implementation o... |
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Invention
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Direct tool loading. The present invention comprises a container transport and loading system. Th... |
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Invention
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Multi-protocol multi-client equipment server. A method and apparatus are disclosed for improving ... |
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2005
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Invention
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Active edge grip rest pad. The present invention comprises a distal rest pad for supporting a por... |
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2003
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Invention
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Pre-aligner. The present invention is a pre-aligner capable of determining the center of a wafer ... |
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2002
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Invention
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Universal modular wafer transport system. The present invention is a wafer transfer system that t... |
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Invention
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Semiconductor material handling system. The semiconductor material handling system is an EFEM tha... |
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Invention
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Wafer engine. The present invention is a wafer engine for transporting wafers. The wafer engine i... |
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Invention
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Unified frame for semiconductor material handling system. The present invention is a unified spin... |
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Invention
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Integrated system for tool front-end workpiece handling. An intedgrated system is disclosed for w... |
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Invention
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Clean method and apparatus for vacuum holding of substrates. A system for preventing contaminants... |
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Invention
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Smif load port interface including smart port door. A SMIF load port assembly is disclosed includ... |
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Invention
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System for safeguarding integrated intrabay pod delivery and storage system. A system is disclose... |
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Invention
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Control system for transfer and buffering. A control system for transferring and buffering materi... |
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Invention
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Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers.... |
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2001
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Invention
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Self teaching robot. A robot calibration system for calibration of a workpiece handling robot (26... |
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Invention
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Fims interface without alignment pins. A front opening interface mechanical standard, or 'FIMS', ... |
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Invention
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Edge grip aligner with buffering capabilities. The present invention is an edge aligner (100) wit... |
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Invention
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Carrier monitoring and fab-wide carrier management systems. A system is disclosed capable of moni... |
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Invention
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Smif container including an electrostatic dissipative reticle support structure. The present inve... |
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Invention
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Smif container latch mechanism. The present invention includes a latch assembly (102), such as ma... |
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Invention
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Modular sorter. A modular sorter is disclosed in which modular sections may be easily added and r... |
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Invention
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System for parallel processing of workpieces. A dual paddle end effector robot (108) is disclosed... |
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2000
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Invention
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Wafer transport system. A wafer transport mechanism is disclosed capable of transferring workpiec... |
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Invention
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Wafer orienting and reading mechanism. An aligner (104) is disclosed including a buffer mechanism... |
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1997
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Invention
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Port door removal and wafer handling robotic system. An I/O minienvirornent including a port door... |
