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2016
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G/S
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Outsourced parts cleaning services, parts restoration services, parts coating and recoating servi... |
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G/S
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Material testing and analytical services for the semiconductor, solar, medical device, pharmaceut... |
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Invention
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System and method for cleaning semiconductor fabrication equipment parts.
An exemplary embodimen... |
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2015
|
Invention
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Real time liquid particle counter (lpc) end point detection system.
Embodiments of the present i... |
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2013
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Invention
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Removing residues from substrate processing components.
Residues are removed from a surface of a... |
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Invention
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Method and apparatus for showerhead cleaning. Embodiments of the present invention generally rela... |
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2012
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Invention
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Methods and apparatus for cleaning deposition chamber parts using selective spray etch. In one as... |
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Invention
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Real time liquid particle counter (lpc) end point detection system. Embodiments of the present in... |
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2011
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Invention
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Electrochemical removal of tantalum-containing materials. A method of cleaning metal-containing d... |
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2009
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Invention
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Textured chamber surface. A method of fabricating a process chamber component having a textured s... |
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Invention
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Methods for producing quartz parts with low defect and impurity densities for use in semiconducto... |
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G/S
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CLEANING, REPAIR AND REFURBISHMENT OF PROCESS TOOL PARTS, CHAMBERS AND KITS FOR OTHERS IN THE SEM... |
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2008
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Invention
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Methods for cleaning process kits and chambers, and for ruthenium recovery. A method is provided ... |
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Invention
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Methods and apparatus for ex situ seasoning of electronic device manufacturing process components... |
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Invention
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Methods and apparatus for cleaning deposition chamber parts using selective spray etch.
In one a... |
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Invention
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Cleaning bench for removing contaminants from semiconductor process equipment. Described are clea... |
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2007
|
Invention
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Cleaning process residues from substrate processing chamber components. A component from a substr... |
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Invention
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Methods and apparatus for cleaning chamber components. In a first aspect, a method for cleaning a... |
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Invention
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Firepolished quartz parts for use in semiconductor processing. Described are methods and chemistr... |
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2006
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Invention
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Ultrasonic assisted etch using corrosive liquids. An ultrasonic etching apparatus for chemically-... |
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Invention
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Method for removing aluminum fluoride contamination from aluminum-containing surfaces of semicond... |
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2005
|
Invention
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Apparatus and methods for slurry cleaning of etch chambers.
Described are methods of cleaning de... |
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Invention
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Method and apparatus for the application of twin wire arc spray coatings. Methods and apparatuses... |
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|
Invention
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Steam cleaning system and method for semiconductor process equipment. Disclosed are systems and m... |
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G/S
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Material testing |
|
|
Invention
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Cleaning process and apparatus for silicate materials. A method for treating a surface of a quart... |
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Invention
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Etchants for removing titanium contaminant species from titanium substrates.
Described are metho... |
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Invention
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Methods for removing silicon and silicon-nitride contamination layers from deposition tubes. Desc... |
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Invention
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Apparatus for applying disparate etching solutions to interior and exterior surfaces. Described a... |
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2004
|
Invention
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Process for producing semi-conductor coated substrate.
A process of producing a clean substrate ... |
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G/S
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CLEANING AND REPAIRING OF SEMICONDUCTOR CHAMBERS AND PROCESS TOOL PARTS USED IN CONNECTION WITH T... |
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2003
|
Invention
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Cleaning chamber surfaces to recover metal-containing compounds. 2. The solution can be treated a... |
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|
Invention
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Cleaning processes for silicon carbide materials. The cleaning of silicon carbide materials on a ... |
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|
Invention
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Method for removing a composite coating containing tantalum deposition and arc sprayed aluminum f... |
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|
Invention
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System for removing contaminants from semiconductor process equipment. Described are cleaning met... |
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2002
|
Invention
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Method of cleaning a coated process chamber component. In a method of cleaning and refurbishing a... |
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|
Invention
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Volume efficient cleaning methods. Described are cleaning methods and apparatus that minimize the... |
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2001
|
Invention
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Process for cleaning components using cleaning media. A method for cleaning a semiconductor proce... |
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Invention
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Cleaning of semiconductor process equipment chamber parts using organic solvents. A system and me... |
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Invention
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Method for cleaning semiconductor fabrication equipment parts. A process for cleaning semiconduct... |
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2000
|
Invention
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Container for transporting refurbished semiconductor processing equipment. A pressurized containe... |
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Invention
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Volume efficient cleaning systems. Described are cleaning methods and apparatus that minimize the... |
