2019
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Invention
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Carbon dioxide compression and delivery system. The present invention is embodied in a carbon dio... |
2014
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Invention
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System and method for welding a plurality of small diameter palladium alloy tubes to a common bas... |
2013
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Invention
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Method and system for anhydrous ammonia recovery. An apparatus for recycling exhaust gas includes... |
2009
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Invention
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System and method for welding small diameter tubes into a high-density matrix. A tube matrix and ... |
2008
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Invention
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Hydrogen gas separator system having a micro-channel construction for efficiently separating hydr... |
2006
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Invention
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System and method for separating hydrogen gas from a mixed gas source using composite structure t... |
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Invention
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Gas purification with carbon based materials. A fluid purifier includes an enclosure provided wit... |
2005
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Invention
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System and method for efficiently separating hydrogen gas from a mixed gas source. A hydrogen pur... |
2004
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Invention
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System and method for reducing thermal shock in a hydrogen diffusion cell. A system and method of... |
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Invention
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System and process for treating contaminated fluid system.
A system for treating a fluid stream ... |
2002
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Invention
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Air purification system and method for maintaining nitrogen and oxygen ratios with regenerative p... |
2001
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Invention
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Apparatus for removal of water from evacuated chambers or from gasses using boron oxide. A proces... |
2000
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Invention
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Rejuvenable ambient temperature purifier. A rejuvenable ambient temperature purifier is provided.... |
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Invention
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Gas purification system with an integrated hydrogen sorption and filter assembly. A gas purificat... |
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Invention
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Integrated heated getter purifier system. A method and apparatus to purify various gases utilizin... |
1999
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Invention
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Semiconductor manufacturing system with getter safety device. A semiconductor manufacturing syste... |
1998
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Invention
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Gas purification system with safety device and method for purifying gases. A gas purification sys... |
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Invention
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Method and apparatus for purification of hydride gas streams. A process and apparatus for the dec... |
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Invention
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In situ getter pump system and method. A wafer processing system (12) including a processing cham... |
1997
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Invention
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Getter pump module and system including focus shields. An improved getter pump module includes a ... |
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Invention
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Getter pump module and system. A getter pump module includes a number of getter disks provided wi... |
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Invention
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Combination cryopump/getter pump and method for regenerating same. A combination cryopump/getter ... |
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Invention
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Method and apparatus for purifying hydrogen gas. A method and apparatus for providing substantial... |
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Invention
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In situ getter pump system and method. A wafer processing system including a processing chamber, ... |
1996
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Invention
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Method and apparatus for removing residual hydrogen from a purified gas. The invention relates ge... |
1995
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Invention
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Getter pump module and system. A getter pump module includes a number of Better disks provided wi... |
1994
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Invention
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Method and apparatus for predicting end-of-life of a consumable in a fluid purification system. A... |
1991
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Invention
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Aerodynamic blender. A blender designed on aerodynamic principles produces a thorough mixing of a... |