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2023
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Invention
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Plasma processing method and plasma processing apparatus.
Provided is a plasma processing method... |
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Invention
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Plasma processing method and plasma processing apparatus. The present invention provides a plasma... |
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2018
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Invention
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Method for bonding cycloolefin polymer to metal, method for producing biosensor, and biosensor. 2... |
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Invention
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Method for bonding cycloolefin polymer to metal, method for manufacturing biosensor, and biosenso... |
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Invention
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Vibration detection element and method for manufacturing same. A vibration detection element (10)... |
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Invention
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Wafer processing device.
A wafer processing device is a device for handling a framed wafer inclu... |
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Invention
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Cycloolefin polymer bonding method. 2O plasma; and a step of mating the bonding surface of the fi... |
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Invention
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Method for joining cycloolefin polymers. This method for joining cycloolefin polymers (COP) is fo... |
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2016
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G/S
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Semiconductor manufacturing machines and systems; cleaning
apparatus for semiconductor. Cleaning... |
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2015
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Invention
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Measuring instrument using light beam. The present invention provides a light beam measuring inst... |
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G/S
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Chemical processing machines and apparatus; textile machines
and apparatus; glassware manufactur... |
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2011
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G/S
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Semiconductor manufacturing machines; semiconductor manufacturing systems comprised of semiconduc... |
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Invention
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Method for etching sapphire substrate. The present invention provides a method for etching a sapp... |
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2008
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G/S
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Chemical processing machines and apparatus, namely, chemical etching machines, chemical depositin... |
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G/S
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Chemicals. Chemical processing machines and apparatus; textile machines
and apparatus; glassware... |
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2007
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Invention
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Plasma processing apparatus. An induction coil composed of n pieces of identically shaped coil el... |
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Invention
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Plasma processing apparatus. Above an object to be processed, n coil elements (n is two or more i... |
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Invention
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Plasma processing apparatus. A plasma processing apparatus comprises a plasma producing vessel ha... |
