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2019
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Invention
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Conductive sputter targets with silicon, zirconium and oxygen. xy22 2-theta peak at 30.05° +/- 0.... |
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Invention
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Magnetron with controller for monitoring and control. A magnetron structure is described for use ... |
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2018
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Invention
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Sprayed lithium cobalt oxide targets. yzxα1α1 radiation. |
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Invention
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Feedback system. A feedback system (210) for controlling properties of a single layer or multiple... |
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2017
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Invention
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A universally mountable end-block.
An end-block for use in a deposition apparatus, for connectin... |
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Invention
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A universally mountable end-block. An end-block (100) for use in a deposition apparatus, for conn... |
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Invention
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Electrical transfer in an endblock for a sputter device. A power transfer system (100) is describ... |
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2015
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Invention
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A cover with a sensor system for a configurable measuring system for a configurable sputtering sy... |
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Invention
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Device having two end blocks, an assembly and a sputter system comprising same, and a method of p... |
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Invention
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Cylindrical structure for use in an rf sputter process and a sputtering system comprising same. A... |
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Invention
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A device having two end blocks, an assembly and a sputter system comprising same, and a method of... |
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G/S
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Coating machines; vacuum coating machines; sputtering machines; endblocks for coating machines an... |
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G/S
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Coating machines; vacuum coating machines; sputtering
machines; endblocks for coating machines a... |
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Invention
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Sputter device with moving target. A sputter device for depositing a layer on a substrate in a va... |
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Invention
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Sputter device with moving target. A sputter device (100) for depositing a layer on a substrate i... |
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Invention
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Sputter system for uniform sputtering.
A sputter system for applying a coating on a substrate is... |
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Invention
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Sputter system for uniform sputtering. A sputter system (100) for applying a coating on a substra... |
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2014
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Invention
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Gas configuration for magnetron deposition systems.
A magnetron deposition system for depositing... |
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Invention
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Magnetic configuration for a magnetron sputter deposition system.
A sputter deposition magnetron... |
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Invention
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Magnetic configuration for a magnetron sputter deposition system. A sputter deposition magnetron ... |
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Invention
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Gas configuration for magnetron deposition systems. A magnetron deposition system for depositing ... |
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Invention
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Hybrid magnet support structure. A magnet support structure is described which comprises a set of... |
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Invention
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(ga) zn sn oxide sputtering target. A sputtering target having a one-piece top coat comprising a ... |
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2013
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Invention
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Online adjustable magnet bar. An end-block for rotatably carrying a sputtering target tube and fo... |
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Invention
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Online adjustable magnet bar. The present invention provides an end-block (100) for rotatably car... |
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2011
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Invention
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Soft sputtering magnetron system. A sputtering method and apparatus having at least one set of du... |
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Invention
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Sputtering apparatus and method. A sputtering installation and method are described for coating s... |
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Invention
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Soft sputtering magnetron system. A sputtering method and apparatus are described having at least... |
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2009
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Invention
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Method to manufacture an oxide sputter target comprising a first and second phase.
The invention... |
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Invention
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Rotatable sputtering magnetron with high stiffness. A sputtering magnetron (300) insertable in a ... |
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Invention
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Multiple grooved vacuum coupling.
The present invention relates to a coupling system (10) to rel... |
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2007
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Invention
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Insert piece for an end-block of a sputtering installation.
An insert piece (340) is described f... |
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Invention
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Rotatable sputter target. The invention relates to a rotatable sputter target and to a method to ... |
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2006
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Invention
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Module for coating both sides of a substrate in a single pass. A module to carry targets in a spu... |
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Invention
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Single, right-angled end-block.
A single, right-angled end-block is claimed for rotatably carryi... |
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2005
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Invention
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Flat end-block for carrying a rotatable sputtering target. An end-block for use in a tubular magn... |
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Invention
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End-block for a rotatable target sputtering apparatus. An end-block for electrically energising a... |
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1995
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Invention
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Apparatus for affixing a rotating cylindrical magnetron target to a spindle. An apparatus to rele... |
