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2019
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Invention
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Catalyst reference device. Provided is a catalyst reference device which is capable of preventing... |
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Invention
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Working device. [Problem] To provide a catalyst-referred planarization device which does not requ... |
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2017
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Invention
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Planarizing device. [Problem] To enable precise planarizing with a compact device without causing... |
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2015
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Invention
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Planarizing method and planarizing device. [Purpose] To make a device compact while realizing pre... |
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Invention
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Method and device for processing wide-bandgap semiconductor substrate. [Problem] To provide a met... |
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Invention
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Silicon-substrate planarization method and device used therein. [Problem] To provide a silicon-su... |
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2014
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G/S
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Equipment for planarizing a substrate; pads for planarizing
a substrate. Planarized substrate. P... |
