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2024
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Invention
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Edge ring for semiconductor manufacturing apparatus and manufacturing method therefor. Disclosed ... |
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Invention
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Silicon nanopowder manufacturing apparatus and silicon nanopowder manufacturing method. The prese... |
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2023
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Invention
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Tantalum carbide-coated material. The present disclosure relates to a tantalum carbide-coated mat... |
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2022
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Invention
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Semiconductor manufacturing part including boron carbide plasma-resistance member. The present in... |
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Invention
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Component for semiconductor manufacturing apparatus, and manufacturing method therefor. The prese... |
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2021
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Invention
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Tantalum carbide-coated carbon material and method for manufacturing same. The present disclosure... |
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Invention
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Tantalum carbide coated carbon material. The present invention relates to a tantalum carbide coat... |
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Invention
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Carbon-silicon composite and preparation method therefor.
The present invention relates to a car... |
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Invention
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Carbon-silicon composite and preparation method therefor. The present invention relates to a carb... |
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2020
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Invention
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Sic structure formed by cvd method.
The present invention relates to a component for manufacturi... |
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Invention
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Sic structure formed by cvd method. The present invention relates to a component for manufacturin... |
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Invention
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Sic material and method for manufacturing same. Described herein are an SiC material and a method... |
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Invention
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Sic material and method for manufacturing same. The present invention relates to an SiC material ... |
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Invention
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Sic edge ring. Described herein are edge ring among components for manufacturing semiconductors u... |
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Invention
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Method for preparing silicon-carbide-silicon-nitride composite material, and silicon-carbide- sil... |
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Invention
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Sic edge ring. The present invention relates to an edge ring among components for manufacturing s... |
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Invention
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Method for preparing silicon-carbide-silicon-nitride composite material, and silicon-carbide-sili... |
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2019
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Invention
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Carbonated tantalum coating material. −6/° C. or more. |
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Invention
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Anode active material, preparation method therefor, and lithium secondary battery comprising same... |
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2018
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Invention
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Method of manufacturing tantalum carbide coating layer using chemical vapor deposition and tantal... |
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Invention
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Bonded ceramic and manufacturing method therefor. Described herein are a bonded ceramic and a man... |
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Invention
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Method for manufacturing activated carbon for electrode material. Described herein is a method fo... |
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Invention
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Method for manufacturing activated carbon for electrode material. The present invention relates t... |
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Invention
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Bonded ceramic having channel through which fluid can flow, and method for manufacturing same. Th... |
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Invention
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Bonded ceramic and manufacturing method therefor. The present invention relates to a bonded ceram... |
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Invention
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Activated carbon and method for manufacturing same.
The present invention relates to an activate... |
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Invention
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Activated carbon and method for manufacturing same. The present invention relates to an activated... |
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Invention
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Method for manufacturing activated carbon for electrode material.
The present invention relates ... |
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Invention
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Carbon material having coating layer comprising tac, and method for producing said carbon materia... |
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2017
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Invention
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Method and apparatus for manufacturing semiconductor manufacturing parts by using jig. The presen... |
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Invention
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Semiconductor manufacturing component comprising deposition layer covering interlayer boundary an... |
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Invention
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Semiconductor manufacturing parts comprising sic deposition layer, and manufacturing method there... |
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Invention
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Part for manufacturing semiconductor, part for manufacturing semiconductor containing composite c... |
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Invention
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Component for fabricating sic semiconductor, having plurality of layers having different transmit... |
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Invention
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Sic material and sic composite material. The present invention relates to an SiC material and an ... |
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Invention
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Carbon material coated with tantalum carbide. The present invention relates to a carbon material ... |
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Invention
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High-hardness carbon material coated with tac and method for manufacturing same. According to one... |
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2016
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Invention
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Method and apparatus for reproducing component of semiconductor manufacturing apparatus, and repr... |
