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2024
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Invention
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Deposition system with integrated carrier cleaning modules.
A method of cleaning wafer carriers ... |
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G/S
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Machines for surface deposition, namely, chemical vapor deposition machines, chemical vapor depos... |
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Invention
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Integrated synchronous system for gridded ion sources.
An ion beam system including an integrate... |
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Invention
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Integrated synchronous system for gridded ion sources. An ion beam system including an integrated... |
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2023
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Invention
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Grid surface conditioning for ion beam system. in situin situ cleansing of grids of an ion beam s... |
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Invention
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Ion beam deposition of a low resistivity metal.
Methods for forming thin, low resistivity metal ... |
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Invention
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Multi-disc chemical vapor deposition system. A multi-wafer metal organic chemical vapor depositio... |
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Invention
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Multi-disc chemical vapor deposition system with cross flow gas injection. A multi-wafer metal or... |
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Invention
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Multi-disc chemical vapor deposition system.
A multi-wafer metal organic chemical vapor depositi... |
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Invention
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Multi-disc chemical vapor deposition system with cross flow gas injection.
A multi-wafer metal o... |
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Invention
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Grid surface conditioning for ion beam system.
An in situ cleansing of grids of an ion beam syst... |
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Invention
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Lightpipe for high temperature substrate processing.
A substrate processing system in accordance... |
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Invention
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Lightpipe for high temperature substrate processing. A substrate processing system in accordance ... |
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Invention
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Ion beam deposition of ruthenium thin films. Methods for forming a low resistivity ruthenium (Ru)... |
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Invention
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Ion beam deposition of ruthenium thin films.
Methods for forming a low resistivity ruthenium (Ru... |
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Invention
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Wafer carrier assembly with improved temperature uniformity.
A wafer carrier includes a base inc... |
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Invention
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Wafer carrier assembly with improved temperature uniformity. A wafer carrier includes a base incl... |
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Invention
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Scatter melt detection systems and methods of using the same.
High bandwidth time-and-space reso... |
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Invention
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Scatter melt detection systems and methods of using the same. High bandwidth time-and-space resol... |
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Invention
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Laser spike annealing process temperature calibration utilizing photoluminescence measurements.
... |
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2022
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Invention
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Wafer carrier assembly with pedestal and cover restraint arrangements that control thermal gaps. ... |
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Invention
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Rotating disk reactor with split substrate carrier.
A self-centering split substrate carrier tha... |
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G/S
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Machines and apparatus for manufacturing, namely, physical,
chemical and electro technical equip... |
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G/S
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Manufacturing machines and apparatus, namely, physical,
chemical and electro technical equipment... |
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2021
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G/S
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Manufacturing machines and apparatus, namely, semiconductor fabrication machines and magnetic sto... |
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Invention
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Reactor with centering pin for epitaxial deposition.
A substrate reactor with centering pin for ... |
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Invention
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Ion beam deposition of a low resistivity metal. Methods for forming thin, low resistivity metal l... |
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2020
|
Invention
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An apparatus and method for die stack flux removal. A system for removing flux from openings form... |
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Invention
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Apparatus and method for die stack flux removal. A system for removing flux from openings formed ... |
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Invention
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An apparatus and method for the minimization of undercut during a ubm etch process. A plurality o... |
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Invention
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Molecular beam epitaxy systems with variable substrate-to-source arrangements.
Systems and metho... |
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Invention
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Molecular beam epitaxy systems with variable substrate-to-source arrangements. Systems and method... |
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Invention
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Enhanced cathodic arc source for arc plasma deposition. An improved cathodic arc source and metho... |
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Invention
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Melt detection systems and methods of using the same. High bandwidth time-and-space resolved phas... |
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Invention
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Deposition system with integrated carrier cleaning modules. A chemical vapor deposition system fo... |
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Invention
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Cvd reactor single substrate carrier and rotating tube for stable rotation.
A self-centering sub... |
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Invention
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Automated batch production thin film deposition systems and methods of using the same.
Fully aut... |
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Invention
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Automated batch production thin film deposition systems and methods of using the same. Fully auto... |
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Invention
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Rotating disk reactor with self-locking carrier-to-support interface for chemical vapor depositio... |
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2019
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Invention
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Apparatus and method for the minimization of undercut during a ubm etch process. A plurality of e... |
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Invention
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Semiconductor wafer processing chamber.
A wafer processing system according to one embodiment in... |
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Invention
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Micro-led transfer methods using light-based debonding. Transfer methods disclosed herein include... |
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Invention
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Apparatus and method for the minimization of undercut during a ubm etch process. A semiconductor ... |
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Invention
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System and method for self-cleaning wet treatment process. An apparatus for supporting and maneuv... |
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Invention
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Multi-filament heater assembly |
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Invention
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Transportable semiconductor wafer rack |
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2018
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Invention
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System and method for metrology using multiple measurement techniques.
Systems and methods for d... |
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Invention
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Chemical vapor deposition wafer carriers.
A wafer carrier has a plurality of built-up pockets co... |
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G/S
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Atomic layer deposition systems comprised of a reaction chamber, a wafer handler, electronic cont... |
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G/S
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deposition systems for the production of LED lights, advanced LED lights, and photonics applicati... |
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Invention
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Mid-filament spacer |
|
2017
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G/S
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Metal organic chemical vapor deposition (MOCVD) machines |
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2015
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G/S
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Manufacturing machines and apparatus, namely, physical, chemical and electro technical equipment,... |
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G/S
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Metal organic vapor phase deposition system, namely, a gas distribution system used in the manufa... |
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G/S
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Process equipment, namely, Metal Organic Chemical Vapor
Deposition (MOCVD) equipment. |
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G/S
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Process control software for MOCVD equipment. |
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2014
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G/S
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Process equipment, namely, Metal Organic Chemical Vapor Deposition (MOCVD) equipment |
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G/S
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Optical coating ion beam machine for coating multi-layer
optical thin films. |
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G/S
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Optical monitoring machines for thin film production. |
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G/S
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Gas mixing apparatus for CVD and MOCVD process machines. |
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G/S
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Apparatus for dispensing material sold as a component part of Metal Organic Chemical Vapor Deposi... |
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G/S
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Heating wafer coil sold as a component part of Metal Organic Chemical Vapor Deposition (MOCVD) eq... |
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G/S
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Process control software for MOCVD equipment |
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G/S
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Optical monitoring devices for monitoring properties of coatings for use in thin film production |
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G/S
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Gas mixers specially adapted for installation in CVD (chemical vapor deposition) and MOCVD (metal... |
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G/S
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Optical coating ion beam machine for coating multi-layer optical thin films |
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2013
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G/S
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Molecular beam epitaxy systems, namely, machinery for
growing epitaxial layers on substrates, an... |
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G/S
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semiconductor single wafer processing machines using etch chemicals for the semiconductor industry |
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G/S
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semiconductor single wafer wet processing machines using solvent chemicals |
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G/S
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Machinery and parts therefor for applying vacuum coatings on substrates using ion sources |
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G/S
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Pyrometers |
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G/S
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Molecular beam epitaxy systems, namely, machinery for growing epitaxial layers on substrates, and... |
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G/S
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Manufacturing process equipment systems, namely, semiconductor fabrication machines and magnetic ... |
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2012
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G/S
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Computer software for use in processing semiconductor wafers |
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2011
|
G/S
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Calibration instruments for process equipment, namely, measurement instruments for chemical vapor... |
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2009
|
G/S
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Atomic layer deposition systems for a variety of coating applications, namely, gate dielectrics, ... |
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G/S
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183 Atomic layer deposition systems for a variety of coating applications, namely, gate dielectri... |
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G/S
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Atomic layer deposition machines for a variety of coating applications, namely, gate dielectrics,... |
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2008
|
G/S
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manufacturing process equipment machines for applying vacuum coatings onto items from ion sources... |
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G/S
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Machines containing ion sources and ion source controllers for vacuum coating processes |
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2006
|
G/S
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Manufacturing process equipment systems, namely semiconductor fabrication machines and magnetic s... |
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2005
|
G/S
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TEMPERATURE MEASUREMENT APPARATUS, NAMELY EMISSIVITY CORRECTED PYROMETER USED TO MEASURE THE SURF... |
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2003
|
G/S
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Stepper and lithography machines for use in the production of semiconductors and manuals therefor... |
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2001
|
G/S
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Lithographic and implanting machines for producing images, and printing or implanting images on w... |
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G/S
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lithographic and implanting machines for producing images, and printing or implanting images on w... |
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G/S
|
GAS SENSORS AND CONTROLS FOR REGULATING GAS CONCENTRATIONS AND/OR MASS TRANSFER RATES IN VARIOUS ... |
|
2000
|
G/S
|
Equipment for the production of semiconductors, namely, ion beam etching and deposition machines |
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G/S
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Process control and monitoring software used in the operation of equipment for the production of ... |
