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2026
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G/S
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Thin film deposition apparatus being semiconductor manufacturing machine; Plasma chemical vapor d... |
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G/S
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Thin film deposition apparatus being semiconductor manufacturing machine; plasma chemical vapor d... |
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G/S
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downloadable and recorded computer software platforms for use in factory automation; downloadable... |
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2025
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G/S
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Robots for maintaining machines for making LCD, semiconductor, solar cells, OLED and LED; Multi-j... |
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Invention
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Heat exchange module and substrate processing apparatus including the same.
A heat exchange modu... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus comprises: a heater unit (200) ... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus comprises: an inner tube (100) ... |
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Invention
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Apparatus for processing substrate.
An embodiment relates to a substrate processing apparatus co... |
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2024
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Invention
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Substrate processing method. A substrate processing method according to one aspect of the present... |
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Invention
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Particle control method and substrate processing method for substrate processing apparatus. A sub... |
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Invention
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Substrate processing method. A substrate processing method according to an aspect of the present ... |
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Invention
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Plasma source and substrate processing apparatus. A plasma source according to one aspect of the ... |
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Invention
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Substrate processing method and substrate processing apparatus. A substrate processing method of ... |
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Invention
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Method for processing internal materials of substrate processing device and method for processing... |
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Invention
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Substrate processing apparatus. Provided is a technology relating to a substrate processing appar... |
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Invention
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Substrate processing apparatus. The present invention relates to a substrate processing apparatus... |
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Invention
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Stator module and substrate transport apparatus comprising same. The present invention relates to... |
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Invention
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Plasma source, plasma source assembly, and substrate processing apparatus. A plasma source assemb... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus according to an embodiment of th... |
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Invention
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Substrate processing apparatus and multi-component thin film formation method using same. The pre... |
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Invention
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Gap-filling method for a semiconductor device and method of manufacturing a semiconductor device ... |
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Invention
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Buffer module and substrate processing system including same. The present invention relates to a ... |
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Invention
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Substrate processing system. The present invention relates to a substrate processing system and, ... |
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Invention
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Substrate processing system, and substrate processing system installation method. The present inv... |
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Invention
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Transport unit and substrate transport apparatus comprising same. The present invention relates t... |
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Invention
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Plasma source assembly, plasma forming method, and substrate processing apparatus. A plasma sourc... |
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Invention
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Plasma source and substrate processing device. A plasma source, according to one aspect of the pr... |
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Invention
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Plasma source assembly and substrate processing device. A plasma source assembly according to one... |
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Invention
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Substrate processing apparatus and substrate processing method using same. A substrate processing... |
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Invention
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Bracket assembly for installing rod-shaped structure and valve assembly including same. A bracket... |
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Invention
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Method for forming dielectric layer. Disclosed is a technique related to a method for forming a d... |
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Invention
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Method for forming metal thin film. In the method for forming a metal thin film, an insulation pa... |
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Invention
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Valve assembly for controlling flow rate, flow rate control method, and substrate processing appa... |
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Invention
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Throttle valve assembly and substrate processing apparatus including same. A throttle valve assem... |
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Invention
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Substrate support apparatus and substrate treating apparatus comprising same. The substrate suppo... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus according to an aspect of the pr... |
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Invention
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Substrate processing device. A substrate processing device according to one aspect of the present... |
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2023
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Invention
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Method for etching thin film. A method for etching a thin film, according to one aspect of the pr... |
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Invention
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Method for forming thin film and apparatus for processing substrate therefor.
A method of formin... |
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Invention
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Method for forming metal nitride thin film. A method for forming a metal nitride thin film accord... |
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Invention
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Substrate processing apparatus and substrate processing method.
Disclosed herein is a substrate ... |
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Invention
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Substrate processing apparatus. Disclosed herein is a substrate processing apparatus including a ... |
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Invention
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Method of assembling substrate supporting apparatus. Disclosed herein is a method of assembling a... |
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Invention
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Substrate processing system comprising gate valve assembly. The present invention relates to a su... |
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Invention
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Processing method for substrate. The present invention relates to a substrate processing method, ... |
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Invention
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Apparatus for processing substrates and method of processing substrates using the same.
An appar... |
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Invention
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Substrate processing method.
A substrate processing method using a substrate processing apparatu... |
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Invention
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Feeding block and substrate processing apparatus including the same.
Provided is a feeding block... |
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Invention
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Substrate processing apparatus and substrate processing method. Provided is a substrate processin... |
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2022
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Invention
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Substrate treatment device and gas supply method. The present invention relates to a substrate tr... |
