|
2024
|
Invention
|
Semiconductor device and semiconductor device manufacturing method.
The present invention relate... |
|
|
Invention
|
High-pressure wafer processing method using dual high-pressure wafer processing facility.
The pr... |
|
|
Invention
|
Wafer processing apparatus for combined high-pressure process and vacuum process, and wafer proce... |
|
|
Invention
|
High-pressure substrate processing apparatus. The present invention provides a high-pressure subs... |
|
2023
|
Invention
|
High-pressure substrate processing apparatus, and processing gas line used therefor. The present ... |
|
|
Invention
|
Method for manufacturing semiconductor device. The present invention relates to a method for manu... |
|
|
Invention
|
Manufacturing method for semiconductor device. The present invention relates to a manufacturing m... |
|
|
Invention
|
Gas box assembly for high pressure processing apparatus.
Provided is a gas box assembly for a hi... |
|
|
Invention
|
High pressure processing apparatus.
Provided is a high pressure processing apparatus including: ... |
|
|
Invention
|
Method for manufacturing three-dimensional nand flash memory array. According to one embodiment o... |
|
|
Invention
|
Thin film transistor and method for manufacturing thin film transistor. The present invention rel... |
|
|
Invention
|
Method for manufacturing semiconductor device. The present specification relates to a method for ... |
|
|
Invention
|
Dram cell manufacturing method. A DRAM cell manufacturing method according to one mode may compri... |
|
|
Invention
|
Semiconductor device and method for manufacturing semiconductor device. The present invention rel... |
|
|
Invention
|
High-pressure substrate processing apparatus and high-pressure chemical vapor deposition method f... |
|
|
Invention
|
Semiconductor device and semiconductor device manufacturing method. The present invention relates... |
|
|
Invention
|
High-pressure wafer processing method using dual high-pressure wafer processing facility. The pre... |
|
|
Invention
|
Insulation film manufacturing method of semiconductor process. The present invention provides an ... |
|
2022
|
Invention
|
High pressure heat treatment apparatus.
Provided is a high pressure heat treatment apparatus inc... |
|
|
Invention
|
Method for doping carbon in thin film on wafer. The present invention provides a method for dopin... |
|
|
Invention
|
High-pressure heat treatment apparatus and gas monitoring module used therefor. The present inven... |
|
|
Invention
|
Wafer treatment device for combined high-pressure process and vacuum process, and wafer treatment... |
|
|
Invention
|
Gas management assembly for high pressure heat-treatment apparatus.
Provided is a gas management... |
|
|
G/S
|
Machines for manufacturing semiconductors; Exposure apparatus for manufacturing semiconductors; S... |
|
|
G/S
|
Machines for manufacturing semiconductors; apparatus for
manufacturing semiconductors; semicondu... |
|
2015
|
Invention
|
Methods and apparatuses for deuterium recovery. Novel methods, systems, and apparatuses for recla... |
|
2013
|
Invention
|
Computer readable medium for high pressure gas annealing. Novel methods and apparatuses for annea... |
|
2009
|
Invention
|
Method for high pressure gas annealing. Novel methods and apparatuses for annealing semiconductor... |
|
2008
|
Invention
|
Method of fabricating flash memory. A method of fabricating a flash memory is provided. The metho... |
