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2024
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Invention
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Overcurrent protection. A microelectromechanical systems (MEMS) switch device including current s... |
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2021
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G/S
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Custom manufacture of micro electro-mechanical systems (MEMS), photonic chips, sensors and biochi... |
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2019
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Invention
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Resonant filter using mm wave cavity. Systems and methods for forming a mm wave resonant filter i... |
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2018
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Invention
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Gas sensor comprising a rotatable fabry-perot multilayer etalon. Systems and methods for forming ... |
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Invention
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Gas sensor using mm wave cavity. Systems and methods for forming a compact gas sensor include usi... |
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Invention
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Microfabricated fiber optic platform. Described here is a platform for supporting a fiber optic c... |
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Invention
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Self-aligned silicon fiber optic connector. A transceiver and interconnect for connecting a plura... |
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Invention
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Microfabricated optical apparatus with grounded metal layer. A microfabricated optical apparatus ... |
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2017
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Invention
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Thermocompression bonding with raised feature. A method for bonding two substrates is described, ... |
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Invention
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Microfabricated pressure transducer. A microfabricated pressure transducer is formed in a multila... |
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2016
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Invention
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Anodic bonding of dielectric substrates. A first ion rich dielectric substrate with a patterned d... |
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2015
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Invention
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Method for forming a microfabricated structure. A method for forming a feature in a device layer,... |
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2014
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Invention
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Solder bump sealing method and device. A method for forming a cavity in a microfabricated structu... |
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Invention
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Method and device using silicon substrate to glass substrate anodic bonding. A bonding technology... |
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Invention
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Wafer level hermetic bond using metal alloy with raised feature and wetting layer. Systems and me... |
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Invention
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Device using glass substrate anodic bonding. A bonding technology is disclosed that can form an a... |
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2013
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Invention
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Method using glass substrate anodic bonding. A bonding technology is disclosed that can form an a... |
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Invention
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Microfabricated magnetic field transducer with flux guide. A microfabricated magnetic field trans... |
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Invention
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Exothermic activation for high vacuum packaging. An approach to obtain localized heat within a se... |
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2012
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Invention
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Wafer level hermetic bond using metal alloy with keeper layer. Systems and methods for forming an... |
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Invention
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Mems particle sorting actuator and method of manufacturing. A MEMS-based system and a method are ... |
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2011
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Invention
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Method and apparatus for applying thin liquid coatings. Systems and methods for applying a thin l... |
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Invention
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Configurable power supply using mems switch. Systems and methods for forming a configurable power... |
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2010
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Invention
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Plating process and apparatus for through wafer features. A method for forming through features i... |
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Invention
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In-plane electromagnetic mems pump. A micromechanical pumping system is formed on a substrate sur... |
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Invention
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Inlaid optical material and method of manufacture. An optical material is inlaid into a supportin... |
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2009
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Invention
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Method of manufacturing a hysteretic mems two-dimensional thermal device. A MEMS hysteretic therm... |
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Invention
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Wafer level hermetic bond using metal alloy with raised feature. Systems and methods for forming ... |
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Invention
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Hysteretic mems thermal device and method of manufacture. A MEMS hysteretic thermal actuator may ... |
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2008
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Invention
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Indented lid for encapsulated devices and method of manufacture. A method for providing improved ... |
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Invention
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System and method for providing access to an encapsulated device. A method for providing access t... |
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2007
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Invention
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Wafer bonding material with embedded conductive particles. A material for bonding a first wafer t... |
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Invention
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Lid structure for microdevice and method of manufacture. A system and a method are described for ... |
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2006
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Invention
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Contact electrode for microdevices and etch method of manufacture. A contact electrode for a devi... |
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Invention
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Interconnect structure using through wafer vias and method of fabrication. A device and a method ... |
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Invention
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Indented structure for encapsulated devices and method of manufacture. A method for providing imp... |
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Invention
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Wafer bonding material with embedded rigid particles. A material for bonding a lid wafer to a dev... |
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Invention
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Mems device using nimn alloy and method of manufacture. A material for forming a conductive struc... |
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Invention
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Mems thermal device with slideably engaged tether and method of manufacture. A MEMS thermal switc... |
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Invention
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System and method for forming moveable features on a composite substrate. A method for forming mo... |
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Invention
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Elastic interface for wafer bonding apparatus. An apparatus for bonding a lid wafer to a device w... |
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Invention
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Hysteretic mems thermal device and method of manufacture. A MEMS hysteretic thermal device may ha... |
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2005
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Invention
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Method and apparatus for assembling an array of micro-devices. The invention describes a method a... |
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Invention
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Mems actuator and method of manufacture for mems particle sorting device. A micromechanical parti... |
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Invention
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Hermetic interconnect structure and method of manufacture. x alloy bond. |
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Invention
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Method and apparatus for sorting particles with a mems device. A micromechanical particle sorting... |
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2004
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Invention
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Method and apparatus for sorting biological cells with a mems device. A micromechanical actuator ... |
