|
2024
|
Invention
|
Electron emission cathode and method of forming an electron beam using the electron emission cath... |
|
2023
|
Invention
|
Method and apparatus for usable beam current and brightness in schottky thermal field emission (t... |
|
|
Invention
|
Method and apparatus for schottky tfe inspection. The present disclosure is related to a Schottky... |
|
|
Invention
|
Conical heat shield for electron emitting cathode. An electron emission cathode which includes a ... |
|
|
Invention
|
Method for evaluating thermionic electron emitter in situ.
A method of assessing thermionic elec... |
|
2021
|
Invention
|
Charged particle beam writing apparatus and charged particle beam writing method.
A charged part... |
|
|
Invention
|
Charged particle beam drawing device and method for charged particle beam drawing. A charged part... |
|
2020
|
Invention
|
Schottky thermal field emitter with integrated beam splitter. A Schottky thermal field emitter (T... |
|
|
Invention
|
Low-blur electrostatic transfer lens for multi-beam electron gun. An electrostatic beam transfer ... |
|
|
Invention
|
Multiple electron beams irradiation apparatus. A multiple electron beam irradiation apparatus inc... |
|
2019
|
Invention
|
High-resolution multiple beam source. A thermal field emitter, an apparatus, and a method for gen... |
|
|
Invention
|
Electron optical system and multi-beam image acquiring apparatus. An electron optical system incl... |
|
|
Invention
|
Multiple electron beam irradiation apparatus, multiple electron beam irradiation method, and mult... |
|
|
Invention
|
Deflector for multiple electron beams and multiple beam image acquiring apparatus. A deflector fo... |
|
|
Invention
|
Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and mul... |
|
2018
|
Invention
|
Low temperature, high-brightness, cathode. Thermionic cathodes and an electron emission apparatus... |
|
|
Invention
|
Electron guns for electron beam tools. An electron emission apparatus, an electron gun, and a met... |
|
|
Invention
|
High-brightness lanthanum hexaboride cathode and method for manufacturing of cathode. 6) crystal ... |
|
|
Invention
|
Individual beam detector for multiple beams, multi-beam irradiation apparatus, and individual bea... |
|
2017
|
Invention
|
Method of reducing work function in carbon coated lab6 cathodes. A method to reduce the work func... |
