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2020
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Invention
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Inspection system and inspection method to qualify semiconductor structures. An inspection system... |
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2019
|
Invention
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Charged particle beam system and methods.
Disclosed is a charged particle beam system comprising... |
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2017
|
Invention
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Charged particle beam system. An ion source includes an external housing, an electrically conduct... |
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2016
|
Invention
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Charged particle detecting device and charged particle beam system with same. A charged particle ... |
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2015
|
Invention
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Charged particle beam system and methods. Disclosed is a charged particle beam system comprising ... |
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Invention
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Charged particle beam system and method of operating a charged particle beam system. The disclosu... |
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Invention
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Charged particle beam system and method of operating a charged particle beam system. −5 per incid... |
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Invention
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Ion sources, systems and methods. Ion sources, systems and methods are disclosed. |
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2014
|
Invention
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Charged particle beam system and method of operating a charged particle beam system. The present ... |
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2013
|
Invention
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Ion sources, systems and methods. Ion sources, systems and methods are disclosed. In some embodim... |
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Invention
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Isotope ion microscope methods and systems. Ion microscope methods and systems are disclosed. In ... |
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2012
|
Invention
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Cooled charged particle systems and methods.
Cooled charged particle sources and methods are dis... |
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2011
|
Invention
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Ion beam stabilization. Ion microscope methods and systems are disclosed. In general, the systems... |
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Invention
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Variable energy charged particle systems. Charged particle system are disclosed and include a fir... |
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Invention
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Charged particle source with light monitoring for tip temperature determination. Systems and meth... |
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|
Invention
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Charged particle detectors. Disclosed are devices, systems, and methods are disclosed that includ... |
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Invention
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Gas delivery system with voltage gradient for an ion microscope. −2 Torr-inches or greater than a... |
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Invention
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Gas field ion microscopes having multiple operation modes. The disclosure relates to ion beams sy... |
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Invention
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Scan method. In general, in one aspect, the disclosure features a method and system for imaging o... |
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Invention
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Sample preparation. Disclosed are methods for preparing samples that include forming a first chan... |
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2009
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Invention
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Aligning charged particle beams.
Disclosed are systems (2000) and a method for aligning a charge... |
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Invention
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Electron detection systems and methods.
Systems and methods to detect electrons from one or more... |
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Invention
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Sample inspection methods, systems and components. The disclosure relates to sample inspection us... |
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Invention
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Reducing particle implantation. Methods disclosed herein include: (a) forming a channel in a samp... |
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2008
|
Invention
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Systems and methods for a gas field ionization source. In one aspect the invention provides a gas... |
