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2021
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Invention
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Short- wavelength radiation source with multisectional collector module. A radiation source conta... |
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Invention
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High-brightness laser-pumped plasma light source and method for reducing aberrations. A laser-pum... |
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Invention
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Laser-pumped plasma light source and plasma ignition method. The light source contains a gas fill... |
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2020
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Invention
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High brightness laser-produced plasma light source. A laser-produced plasma light source is provi... |
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2018
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Invention
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High-brightness lpp source and methods for generating radiation and mitigating debris. High-brig... |
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Invention
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Compact wideband vuv spectrometer. +1-1-1+1-1+1-1-1. The technical result of the invention is tha... |
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2014
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Invention
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Light source with laser pumping and method for generating radiation. The invention relates to a d... |
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2013
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Invention
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Light source with laser pumping and method for generating radiation. The invention relates to lig... |
