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2014
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Invention
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Multi-stage vacuum pump of the dry pump type.
A multi-stage vacuum pump of the dry pump type is ... |
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2013
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Invention
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Station and method for measuring particulate contamination of a transport chamber for conveying a... |
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Invention
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Station and method for measuring the particulate contamination of a transport chamber for conveyi... |
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Invention
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Detection method and facility for checking sealed products for leaks. The invention concerns a de... |
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Invention
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Method and device for pumping of a process chamber. The present invention relates to a pumping de... |
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2012
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Invention
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Multi-stage vacuum pump device. The invention relates to a device for pumping gas intended to be ... |
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Invention
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Gas pumping and treatment device. The invention relates to a gas pumping and treatment device com... |
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2011
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Invention
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Method and device for regenerating a hydrogen sensor.
The regeneration method relates to a hydro... |
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Invention
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Gas discharge pipe and associated method.
The embodiments of the present invention describe a ga... |
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Invention
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Method and device for the depollution of a pelliculated reticle.
The object of the present inven... |
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Invention
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Method and device for the depollution of a pelliculated reticle. The object of the present invent... |
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Invention
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Treatment device for transport and storage boxes. a) and the decontamination chambers (5) of each... |
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Invention
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Device and method for drying a photomask. The subject of the present invention is a device for dr... |
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Invention
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Treatment device for transport and storage boxes. A treatment device for transport and storage bo... |
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Invention
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Device and method for controlling a dehydration operation during a freeze-drying treatment. A dev... |
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2010
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Invention
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Method and device for controlling the manufacture of semiconductor by measuring contamination. Th... |
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Invention
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Method and device for pumping with reduced power use. The pumping device comprises: a dry rough v... |
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Invention
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Method for predicting a rotation fault in the rotor of a vacuum pump, and associated pumping devi... |
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Invention
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Device and method for analysing gas and associated measurement station.
The invention relates to... |
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Invention
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Device and method for analysing gas and associated measurement station. The invention relates to ... |
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Invention
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Ionization cell for a mass spectrometer, and corresponding leak detector. The invention relates t... |
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Invention
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Device for measuring and processing a high dynamic input signal, and corresponding leak detector ... |
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2009
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Invention
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Method for lowering the pressure in a load lock and associated equipment.
The invention relates ... |
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Invention
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Method for lowering the pressure in a charge-discharge lock and associated equipment. The inventi... |
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Invention
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Dry vacuum pump, and associated assembly method. The invention relates to a dry vacuum pump compr... |
