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2011
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Invention
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Mems time-of-flight thermal mass flow meter. An apparatus comprising a micromachined (a.k.a. MEMS... |
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2009
|
Invention
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Method of forming metal interconnection on thick polyimide film. Many current micromachining devi... |
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Invention
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Robust micromachined thermal mass flow sensor with double side passivated polyimide membrane. A m... |
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2008
|
Invention
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Configuration and methods for manufacturing time-of-flight mems mass flow sensor. This invention ... |
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Invention
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Micromachined mass flow sensor and methods of making the same. A mass flow sensor is supported on... |
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2007
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Invention
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Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the sa... |
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Invention
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Integrated micromachined thermal mass flow sensor and methods of making the same. An integrated m... |
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2006
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Invention
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Method of manufacturing a flow rate sensor. A mass flow sensor is manufactured by a process of ca... |
