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2025
|
G/S
|
Phosphor coating for temperature probes |
|
|
G/S
|
AC/DC converters. |
|
|
G/S
|
Electronic power conversion products, namely, radio
frequency control systems and match networks. |
|
|
G/S
|
AC/DC converters. |
|
|
G/S
|
phosphor coating for temperature probes |
|
|
G/S
|
Impedance matching products, namely radio frequency match
network products; impedance alteration... |
|
2024
|
G/S
|
Electronic devices, namely, power supplies, power generators, power inverters, power shelves in t... |
|
|
G/S
|
Electronic power conversion products, namely, radio frequency control systems and match networks. |
|
|
G/S
|
AC/DC converters |
|
|
G/S
|
Temperature measurement products, namely pyrometers. |
|
|
Invention
|
Rf sputtering of multiple electrodes with optimized plasma coupling through the implementation of... |
|
|
Invention
|
Match network design for use with frequency sweeping. Match networks, systems, and methods are di... |
|
|
Invention
|
Passive capacitance sensing. Devices and methods for measuring capacitance of a load. A device ma... |
|
|
G/S
|
Impedance matching products, namely radio frequency match network products; impedance alteration ... |
|
|
Invention
|
Plasma behaviors predicted by current measurements during asymmetric bias waveform application. A... |
|
|
Invention
|
Gas flow diffusors for remote plasma sources. A remote plasma source (RPS) may include a toroidal... |
|
|
Invention
|
Active switch on time control for bias supply.
Bias supplies and plasma processing systems are d... |
|
|
Invention
|
Capacitance sensing systems and methods.
Systems, methods, and apparatuses for measuring capacit... |
|
|
Invention
|
Active switch leakage current diversion. A power supply component comprising a supply node to pro... |
|
|
Invention
|
Over-energy protection for a power supply. An energy delivery system comprises a power supply con... |
|
|
Invention
|
Phase shift scheme to optimize thermal efficiency for full-bridge converters. A power converter m... |
|
|
Invention
|
Bias supply control and data processing.
Bias supplies and plasma processing systems are disclos... |
|
|
Invention
|
Transition control in a bias supply.
Bias supplies and bias control methods are disclosed. One m... |
|
|
Invention
|
System and method of determining a load voltage in a power converter. Determining a load voltage ... |
|
|
Invention
|
Cascoded high-voltage amplifier. A cascoded high-voltage amplifier is disclosed. The amplifier ca... |
|
|
Invention
|
Class d-h preamplifier and cascoded high-voltage amplifier.
A cascoded high-voltage amplifier wi... |
|
|
Invention
|
Dynamic control-setpoint modification.
A generator and a method for controlling the generator ar... |
|
|
Invention
|
Synchronous switch driver with switched filter. A power converter comprises a transformer compris... |
|
|
Invention
|
Voltage converter with wide output range. A voltage converter comprises a drive control circuit c... |
|
|
Invention
|
Bias supply with resonant switching.
Bias supplies and plasma processing systems are disclosed. ... |
|
|
G/S
|
temperature measurement products, namely, pyrometers |
|
|
Invention
|
A power supply module and method of assembly. A method for assembling a power supply module, wher... |
|
|
Invention
|
Compact fluid flow sensor. Systems and methods are described for monitoring fluid flow through a ... |
|
|
Invention
|
Simplified voltage-boosting snubber network.
This disclosure describes a non-dissipative snubber... |
|
|
Invention
|
Capacitance as control of power applied by a bias-power-supply. A bias supply system and methods ... |
|
|
Invention
|
Input impedance networks with power recovery.
Input impedance networks and associated methods ar... |
|
2023
|
Invention
|
Compensation of impedance modulation in a plasma generator by frequency sweep. A plasma processin... |
|
|
G/S
|
Power modules being electrical power supplies, AC/DC power supplies, and DC/DC power supplies |
|
|
Invention
|
Disc cell assembly clamp. Method and apparatuses for clamping a disc cell assembly. An apparatus ... |
|
|
G/S
|
Power supplies, namely radio frequency plasma generators for
use in semiconductor and industrial... |
|
|
G/S
|
Power supplies; DC/DC power converters; AC/DC power converters; Power supplies, DC/DC power conve... |
|
|
Invention
|
Rf sputtering of multiple electrodes with optimized plamsa coupling through the implementation of... |
|
|
Invention
|
Match network design for use with frequency sweeping.
Match networks, systems, and methods are d... |
|
|
Invention
|
Passive capacitance sensing.
Devices and methods for measuring capacitance of a load. A device m... |
|
|
Invention
|
Plasma behaviors predicted by current measurements during asymmetric bias waveform application.
... |
|
|
Invention
|
Active switch leakage current diversion.
A power supply component comprising a supply node to pr... |
|
|
Invention
|
Over-energy protection for a power supply.
An energy delivery system comprises a power supply co... |
|
|
Invention
|
Phase shift scheme to optimize thermal efficiency for full-bridge converter.
A power converter m... |
|
|
G/S
|
Radio frequency power supplies for generating and supplying radio frequency energy to produce pla... |
|
|
Invention
|
Cascoded high-voltage amplifier.
A cascoded high-voltage amplifier is disclosed. The amplifier c... |
|
|
Invention
|
Shielding for capacitance sensing.
Systems, methods, and apparatuses for measuring capacitance o... |
|
|
Invention
|
System and method of determining a load voltage in a power converter.
Determining a load voltage... |
|
|
Invention
|
Synchronous switch driver with switched filter.
A power converter comprises a transformer having... |
|
|
Invention
|
Voltage converter with wide output range.
A voltage converter comprises a drive control circuit ... |
|
|
Invention
|
System with multiple power controllers to reduce harmonics. A power controller system comprises m... |
|
|
Invention
|
Adaptive output start-up ramp.
A power supply comprises a power converter configured to be coupl... |
|
|
Invention
|
Power supply module and method of assembly.
A method for assembling a power supply module, where... |
|
|
Invention
|
Compact fluid flow sensor.
Systems and methods are described for monitoring fluid flow through a... |
|
|
Invention
|
Multi-filar coil.
An inductive coil comprises a plurality of wires wound about a winding axis. T... |
|
|
Invention
|
Additional stray capacitor as another tuning knob for 1-supply ev source.
A bias supply system a... |
|
|
G/S
|
high voltage power supplies and replacement parts therefor |
|
2022
|
Invention
|
Apparatus and method for ground fault monitoring. An apparatus for ground fault monitoring compri... |
|
|
Invention
|
Adaptive impedance tracking.
Current sharing in a power system having multiple PSUs comprises ge... |
|
|
Invention
|
Compensation of impedance modulation in a plasma generator by frequency sweep.
A plasma processi... |
|
|
G/S
|
Phosphor-coated fiber optic temperature measurement probes
for controlling processes involving r... |
|
|
Invention
|
Disc cell assembly clamp.
Method and apparatuses for clamping a disc cell assembly. An apparatus... |
|
|
Invention
|
Reversible fan assembly with press fit stabilization.
A fan assembly comprises first and second ... |
|
|
G/S
|
Downloadable computer software to monitor power delivery
systems and perform analytics related t... |
|
|
G/S
|
Phosphor-coated fiber optic temperature measurement probes for controlling processes involving RF... |
|
|
Invention
|
Inter-period control system for plasma power delivery system and method of operating same.
A gen... |
|
|
G/S
|
Downloadable computer software to monitor power delivery systems and perform analytics related to... |
|
2021
|
G/S
|
High voltage power supplies. |
|
|
G/S
|
Computer services, namely, providing online non-downloadable
computer software for installing, m... |
|
|
G/S
|
Power controllers; power supplies. |
|
|
G/S
|
Computer Services, namely, providing online non-downloadable computer software for installing, mo... |
|
|
G/S
|
High Voltage Power Supplies |
|
|
G/S
|
HIGH VOLTAGE POWER SUPPLIES |
|
|
G/S
|
Power controllers; Power supplies |
|
|
G/S
|
High voltage multipliers; High voltage reactors; High voltage transformers; Power supplies; Power... |
|
|
G/S
|
Electrostatic voltmeters; instrumentation for locating
static charge and measuring ionizer perfo... |
|
|
G/S
|
Electrostatic voltmeters; instrumentation for locating static charge and measuring ionizer perfor... |
|
2020
|
G/S
|
Electronic devices, namely, power generators. Electronic devices, namely, power supplies, power i... |
|
|
G/S
|
Remote plasma sources, namely, apparatus for delivery of
activated gases for etching, deposition... |
|
|
G/S
|
Electronic devices, namely, power amplifiers and fiber optic temperature sensors |
|
|
G/S
|
Remote plasma sources, namely, electronic apparatus for delivery of activated gases for etching, ... |
|
2019
|
G/S
|
Electronic controllers for use with power converters; Electronic controllers used to reduce power... |
|
2017
|
G/S
|
Power Controllers; Power supplies |
|
|
G/S
|
Provision of technical information relating to the
installation, overhaul, maintenance and repai... |
|
|
G/S
|
Providing technical support services, namely, technical advice in the field of overhaul, maintena... |
|
2016
|
G/S
|
Power controllers. |
|
|
G/S
|
Power controllers |
|
2015
|
G/S
|
Apparatus for delivery of activated gases, namely,
electronic apparatus for remote delivery of a... |
