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2025
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G/S
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Semiconductor manufacturing equipment, namely, ion implanters |
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2024
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Invention
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Ribbon beam angle adjustment in an ion implantation system.
The present disclosure relates gener... |
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2022
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G/S
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Ion implanters, namely, machines for accelerating ions into a solid target, for use in semiconduc... |
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G/S
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Ion implanter, namely, machine for accelerating ions into a solid target, for use in semiconducto... |
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2021
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Invention
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Ribbon beam angle adjustment in an ion implantation system. The present disclosure relates genera... |
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Invention
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Hybrid magnet structure. The disclosure provides a hybrid magnet structure which includes two dip... |
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Invention
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Wafer temperature measurement in an ion implantation system.
The present disclosure relates gene... |
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Invention
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Wafer temperature measurement in an ion implantation system. The present disclosure relates gener... |
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2020
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Invention
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Apparatus and method for reduction of particle contamination by bias voltage. The invention provi... |
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Invention
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Apparatus and method for monitoring the relative relationship between the wafer and the chuck. An... |
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2019
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Invention
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Wafer charges monitoring. Apparatus and method for monitoring wafer charges are proposed. A condu... |
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Invention
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Vacuum jacketed tube.
The proposed vacuum jacketed tube may deliver the high/low temperature flu... |
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2018
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Invention
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Calibration system with at least one camera and method thereof. A method for calibrating element ... |
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Invention
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Method for ion implantation.
A method for ion beam implantation is provided. The method provides... |
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2016
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Invention
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Method of cleaning electrostatic chuck. A method of cleaning an electrostatic chuck (ESC) is disc... |
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Invention
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Plasma-based processing system and operation method thereof.
A plasma-based processing system an... |
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Invention
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Plasma-based material modification with neutral beam.
Systems and processes for plasma-based mat... |
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Invention
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Magnetic field fluctuation for beam smoothing. The time-averaged ion beam profile of an ion beam ... |
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2015
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Invention
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Deposition apparatus and deposition method using the same.
The present invention provides a depo... |
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Invention
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Ion implantation system and process. Ion implantation systems and processes are disclosed. An exe... |
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Invention
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Method for ion implantation. A method for an ion implantation is provided. First, a non-parallel ... |
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Invention
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Forming punch-through stopper regions in finfet devices. In forming a punch-through stopper regio... |
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Invention
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Ion implanter and method for ion implantation.
An ion implanter comprising a process chamber, a ... |
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Invention
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Deceleration apparatus for ribbon and spot beams. A deceleration apparatus capable of deceleratin... |
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Invention
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Method and ion implanter for low temperature implantation.
A method for a recipe of a low temper... |
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2014
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Invention
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Electrode assembly having pierce electrodes for controlling space charge effects.
An electrode a... |
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Invention
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Single bend energy filter for controlling deflection of charged particle beam. A single bend ener... |
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Invention
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Lower dose rate ion implantation using a wider ion beam. In an exemplary process for lower dose r... |
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Invention
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Plasma-based material modification using a plasma source with magnetic confinement. A plasma-base... |
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Invention
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Replacement source/drain finfet fabrication. A finFET is formed having a fin with a source region... |
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Invention
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Replacement source/drain finfet fabrication.
A finFET is formed having a fin with a source regio... |
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Invention
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Beam control assembly for ribbon beam of ions for ion implantation. A beam control assembly to sh... |
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Invention
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Implant method and implanter by using a variable aperture. A variable aperture within an aperture... |
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Invention
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Multi-energy ion implantation. In a multi-energy ion implantation process, an ion implanting syst... |
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2013
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Invention
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Gas mixture method for generating ion beam. A gas mixture method for generating an ion beam is pr... |
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Invention
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Ion source of an ion implanter. An ion source uses at least one induction coil to generate ac mag... |
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Invention
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Ion implantation method and ion implanter.
An ion implantation method and an ion implanter with ... |
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Invention
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Scan head and scan arm using the same. A scan head assembled to a scan arm for an ion implanter a... |
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Invention
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Ion implanter and ion implant method thereof. An ion implanter and an ion implant method are disc... |
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2012
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Invention
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Gas mixture method and apparatus for generating ion beam. A gas mixture method and apparatus of p... |
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Invention
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Plasma doping a non-planar semiconductor device. In plasma doping a non-planar semiconductor devi... |
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Invention
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Doping a non-planar semiconductor device. In doping a non-planar semiconductor device, a substrat... |
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2011
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Invention
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Apparatus and method for measuring ion beam current. Techniques for measuring ion beam current, e... |
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Invention
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Extremely low temperature rotary union. A chuck assembly has a wafer chuck attached to a shaft th... |
