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2020
|
Invention
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Photomask assembly with reflective photomask and method of manufacturing a reflective photomask. ... |
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2016
|
Invention
|
Reflective photomask and reflection-type mask blank. A reflective photomask includes a substrate ... |
|
2014
|
Invention
|
Shape metrology for photomasks. A method of manufacturing a photomask includes forming a mask pat... |
|
2012
|
Invention
|
Euv mask set and methods of manufacturing euv masks and integrated circuits. An EUV mask set and ... |
|
2010
|
Invention
|
Reducing ion migration of absorber materials of lithography masks by chromium passivation.
The d... |
|
|
Invention
|
Lithographic mask and method of forming a lithographic mask. A lithographic mask comprises a firs... |
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2009
|
Invention
|
Particle beam writing method, particle beam writing apparatus and maintenance method for same. A ... |
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2008
|
Invention
|
Mask blank, photomask and method of manufacturing a photomask.
Mask blanks of the invention incl... |
|
|
Invention
|
Euv mask and method for repairing an euv mask. An EUV mask comprises a substrate, a reflective mu... |
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2007
|
Invention
|
Method for producing a photomask, method for patterning a layer or layer stack and resist stack o... |
|
|
Invention
|
Illumination system and a photolithography apparatus employing the system.
An illumination syste... |
|
|
Invention
|
Test pattern and method of evaluating the transfer properties of a test pattern. A test pattern o... |
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2006
|
Invention
|
Method for determining an exposure dose and exposure apparatus. A method of determining an exposu... |
|
|
Invention
|
Method for cleaning a surface of a photomask. 2 in a supercritical state, to the vessel. An addit... |
|
|
Invention
|
Method of cleaning a substrate surface from a crystal nucleus.
A method of cleaning a substrate ... |
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2003
|
G/S
|
Scientific apparatus and instruments, included in class 09, especially for production of memory c... |
|
|
G/S
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Scientific apparatus and instruments, included in this
class, especially for production of memor... |
