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2019
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Invention
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Improved plasma initiation in an inductive rf coupling mode. A method, apparatus and system for i... |
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Invention
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Plasma initiation in an inductive rf coupling mode. A method, apparatus and system for initiating... |
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2014
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Invention
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Plasma concentration apparatus and method. An apparatus and method to concentrate a plasma from o... |
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2013
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Invention
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Plasma extension and concentration apparatus and method. An apparatus and method to extend and co... |
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2012
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Invention
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Plasma de-activation apparatus and method. An apparatus and method to de-activate a plasma from o... |
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2004
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Invention
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Higher power density downstream plasma. A method and system to obtain a high power density plasma... |
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2000
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Invention
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Downstream plasma using oxygen gas mixtures. A constriction in the exhaust side of a discharge ch... |
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1998
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Invention
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Downstream plasma using oxygen gas mixture. A constriction in the exhaust side of a discharge cha... |
