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2025
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Invention
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Vacuum pump and stator disc. [Problem] To provide a vacuum pump comprising a Siegbahn exhaust mec... |
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Invention
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Vacuum exhaust system, vacuum pump cleaning method, and cleaning unit. [Problem] To provide a vac... |
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Invention
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Vacuum pump system and interface circuit. [Problem] Provided is a vacuum pump system and an inter... |
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Invention
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Vacuum evacuation device. [Problem] To provide a vacuum evacuation device that is low-cost and ex... |
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Invention
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Vacuum exhaust system. Provided is a vacuum exhaust system (10) that can send exhaust gas and dil... |
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Invention
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Vacuum pump and vacuum pump component. A vacuum pump having more excellent mechanical characteris... |
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Invention
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Vacuum pump. A vacuum pump which can suppress precipitation of by-products in a pump is provided.... |
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Invention
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Magnetic bearing device, turbomolecular pump, and control method for. A magnetic bearing device i... |
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Invention
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Trap device and exhaust gas detoxifying system. [Problem] To provide a trap device capable of eff... |
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Invention
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Vacuum pump and vacuum pump component. [Problem] To provide a vacuum pump having superior mechani... |
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Invention
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Vacuum pump and magnetic bearing device. [Problem] To provide a vacuum pump and a magnetic bearin... |
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2024
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Invention
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Cooling system. [Problem] To provide a cooling system capable of efficiently cooling an electrost... |
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Invention
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Vacuum pump and inflow guide component used in same. [Problem] To improve back pressure dependenc... |
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Invention
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Vacuum pump, protective net, and contact part.
A vacuum pump that is small in height (length) is... |
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Invention
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Vacuum pump, rotary body of vacuum pump, and rotary blade on upstream side of vacuum pump. [Probl... |
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Invention
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Vacuum pump, fixed disk, and retrofitted component. [Problem] To provide a vacuum pump in which e... |
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Invention
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Vacuum pump. [Problem] To propose a vacuum pump that offers excellent back pressure performance e... |
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Invention
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Abnormality detection device for vacuum pump, vacuum pump system, and abnormality detection metho... |
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Invention
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Vacuum exhaust system and vacuum pump. Provided is a vacuum exhaust system (10) for exhausting pr... |
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Invention
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Vacuum evacuation device. [Problem] To provide a vacuum evacuation device that can favorably perf... |
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Invention
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Vacuum pump and hermetic connector. [Problem] To achieve a hermetic connector with a small size a... |
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Invention
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Vacuum pump and vacuum pump control device. [Problem] To provide a vacuum pump capable of keeping... |
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Invention
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Vacuum pump and fixed disk. [Problem] To provide a vacuum pump and a fixed disk with which moveme... |
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Invention
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Vacuum pump and method for operating vacuum pump. To make it possible to detect the presence or a... |
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Invention
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Vacuum pump and vacuum pump control device. [Problem] To provide a vacuum pump and a vacuum pump ... |
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Invention
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Vacuum pump and method for changing evacuation performance of vacuum pump. The present invention ... |
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Invention
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Vacuum pump and magnetic bearing control device. [Problem] To propose a vacuum pump and a magneti... |
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Invention
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Vacuum pump, magnetic bearing control device, and compression/decompression method. [PROBLEM] To ... |
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Invention
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Vacuum pump, control device, and temperature rising time control method. [Problem] To provide a v... |
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Invention
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Vacuum pump. [Problem] To provide a vacuum pump capable of providing further improved safety. [So... |
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2023
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Invention
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Vacuum pump and vacuum evacuation system.
A vacuum pump and a vacuum exhaust system are provided... |
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Invention
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Vacuum pump.
A vacuum pump which can sufficiently prevent flow-in of a gas into an accommodating... |
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Invention
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Vacuum pump, rotating body for vacuum pump, and balance correcting member for vacuum pump.
A vac... |
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Invention
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Vacuum pump.
Provided is a vacuum pump in which deformation of a peripheral part fastened to an ... |
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Invention
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Vacuum pump, rotating body for vacuum pump, and method for manufacturing vacuum pump.
A vacuum p... |
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2022
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Invention
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Vacuum pump and control device. A vacuum pump including: a current measuring means that measures ... |
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Invention
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Vacuum pump and control device. A vacuum pump that allows for the identification of the noise imm... |
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Invention
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Vacuum pump, vacuum pump bearing protection structure, and vacuum pump rotating body.
A vacuum p... |
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Invention
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Vacuum pump and insulation member for use in vacuum pump.
A vacuum pump and a heat insulating me... |
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Invention
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Detoxification device and nozzle scraper.
A detoxifying device of a structure wherein the deposi... |
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Invention
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Abatement device, deposited material removing means, and deposited material removing method.
In ... |
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Invention
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Magnetic bearing device and vacuum pump.
A magnetic bearing device and a vacuum pump configured ... |
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Invention
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Vacuum pump.
A vacuum pump includes a contact portion that contacts a jig used to adjust the hei... |
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Invention
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Vacuum pump. A vacuum pump, which prevents adhesion of products even when a rotating body is stop... |
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Invention
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Vacuum pump.
To obtain a vacuum pump which appropriately performs temperature management of a ga... |
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Invention
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Turbomolecular pump.
A turbomolecular pump is obtained in which a gas absorbing substance is pla... |
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Invention
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Vacuum pump and spacer.
There are proposed a vacuum pump capable of suppressing a temperature in... |
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Invention
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Vacuum pump and rotating body thereof. There are provided a vacuum pump which can effectively pre... |
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Invention
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Vacuum pump, rotating body, cover portion, and manufacturing method of rotating body.
A vacuum p... |
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2019
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G/S
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Vacuum pumps; turbomolecular pumps; compound molecular pumps being turbomolecular pumps; semicond... |
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G/S
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Vacuum pump installations, vacuum pump apparatus and vacuum
pump machines; vacuum pumps; turbomo... |
