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2024
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Invention
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Ion pump and method of assembly. An ion pump and its method of assembly are described. The ion pu... |
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2023
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Invention
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Sputter ion pump. Sputter ion pump comprising: an anode, wherein the anode comprises a radial sym... |
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Invention
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Sputter ion pump. Sputter ion pump comprising: an anode (14), wherein the anode comprises a radia... |
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Invention
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Sputter ion pump. Sputter ion pump comprising: an anode, wherein the anode defines a plurality of... |
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Invention
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Exhaust gas abatement system.
The present invention provides an exhaust gas abatement system for... |
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Invention
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Exhaust gas abatement system and method thereof. The present invention provides an exhaust gas ab... |
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Invention
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Sputter ion pump module and vacuum pump. Sputter ion pump, SIP, module comprising a frame structu... |
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Invention
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Vacuum pump. Vacuum pump comprising: a sputter ion pump, SIP, module, having a first end and a se... |
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Invention
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Magnetic assembly for a sputter ion pump. Magnetic assembly for a sputter ion pump, SIP, comprisi... |
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Invention
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Connector. Connector, in particular for a vacuum application, comprising at least one connecting ... |
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Invention
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Sputter ion pump module and vacuum pump. Sputter ion pump, SIP, module for a vacuum pump, compris... |
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Invention
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Temperature sensor. A temperature sensing system (100) comprising a choke (150) formed from a mat... |
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Invention
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Motion converting device. A device for converting between motion in one direction and motion in a... |
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Invention
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Refrigerant testing. A refrigerant testing device and method for testing refrigerant diverted fro... |
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2022
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Invention
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Ion trap and method for detecting ions in an ion trap. ΩRFRF RF of the RF storage signal is modif... |
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Invention
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Cryopump. A cryopump comprising: a vessel (10) comprising a radiation shield (12) having a fronta... |
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Invention
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Hydrogen recovery system and method. HYDROGEN RECOVERY SYSTEM AND METHOD Aspects of the present i... |
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Invention
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Liquid filter apparatus with thermal shield. A liquid filter apparatus for gas/solid separation i... |
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G/S
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Pumps; vacuum pumps; capture vacuum pumps; gas capture pump, gas entrapment pumps; ion pumps; get... |
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Invention
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Detecting contamination of a cryogenic refrigerant in a cryogenic refrigeration system.
A sensor... |
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Invention
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Detecting contamination of a cryogenic refrigerant in a cryogenic refrigeration system. A sensor ... |
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Invention
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Mounting a flanged vacuum pump to a vacuum system. A flanged vacuum pump, a vacuum system and a m... |
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Invention
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In line water scrubber system for semiconductor processing.
A semiconductor processing system in... |
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Invention
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In line water scrubber system for semiconductor processing. A semiconductor processing system inc... |
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Invention
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A mecanum wheel module.
A compact mecanum wheel module is disclosed. The mecanum wheel module co... |
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Invention
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A mecanum wheel module. A compact mecanum wheel module is disclosed. The mecanum wheel module com... |
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Invention
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Method and ion trap for detecting ions. Method and ion trap for detecting ions, wherein the metho... |
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Invention
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Connecting and disconnecting a cooling loop from a refrigeration system.
A control system for co... |
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Invention
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Connecting and disconnecting a cooling loop from a refrigeration system. A control system for con... |
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Invention
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Electrochemical hydrogen pump.
A multistage electrochemical hydrogen pump, comprising a first el... |
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Invention
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Electrochemical hydrogen pump. A multistage electrochemical hydrogen pump, comprising a first ele... |
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2021
|
Invention
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Monitoring the performance of a cryopump.
A method of monitoring the performance of a cryopump, ... |
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Invention
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Liquid filter apparatus with thermal shield.
A liquid filter apparatus for gas/solid separation ... |
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Invention
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Cryopumps and inlet flow restrictors for cryopumps.
A flow restrictor for restricting a flow rat... |
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Invention
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Cryopanel structure for a cryopump. A cryopump comprising: a pump inlet, a two stage refrigerator... |
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Invention
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Cryopanel structure for a cryopump. A cryopump with a pump inlet; a two stage refrigerator; a fir... |
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Invention
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Vacuum apparatus temperature sensor assembly.
A vacuum apparatus temperature sensor assembly for... |
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Invention
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Transport device and method of moving vacuum system components in a confined space.
A transport ... |
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Invention
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Mounting a flanged vacuum pump to a vacuum system.
A vacuum pump comprises an inlet flange for c... |
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G/S
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Custom manufacture and assembly of pumps, vacuum pumps, ion pumps, getter pumps, ion getter pumps... |
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Invention
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Pump module. Pump module for a vacuum apparatus with a flange which can be connected to a vacuum ... |
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Invention
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Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump. Me... |
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Invention
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Flange for a vacuum apparatus. Flange for a vacuum apparatus comprises a housing to be connected ... |
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Invention
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Pressure regulated semiconductor wafer cooling apparatus and method and a pressure regulating app... |
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Invention
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Housing for a vacuum pump.
Housing for a vacuum pump, in particular a NEG or IGP-NEG combination... |
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Invention
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A semiconductor wafer temperature control apparatus.
A temperature control apparatus for supplyi... |
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Invention
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Detecting component temperature in a system.
There is provided a method of detecting the tempera... |
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2020
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Invention
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Cryopump. A cryopump comprising: a vessel comprising a frontal open area, the frontal open area c... |
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Invention
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Reducing plasma formation in an ion pump. An ion pump controller configured to alternate between ... |
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Invention
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Vacuum system with diagnostic circuitry and a method and computer program for monitoring the heal... |
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Invention
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Multiple vacuum chamber exhaust system and method of evacuating multiple chambers.
A vacuum exha... |
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Invention
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Very low temperature refrigeration system with fast operation cycle.
Methods for shortening the ... |
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2019
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G/S
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Metal vacuum flange and metal vacuum flange fittings; metal clamps; small metal vacuum flange fit... |
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G/S
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Vacuum pumps; ion pumps; titanium sublimation pumps; getter pumps; vacuum pump controls. |
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G/S
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Vacuum pumps, ion pumps, titanium sublimation pumps, getter pumps, vacuum pump controls. |
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G/S
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VACUUM PUMPS; VACUUM PUMPS IN THE NATURE OF ION PUMPS AND TITANIUM SUBLIMATIONS PUMPS; GETTER PUM... |
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2016
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G/S
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Vacuum pumps; Shaft bearings for vacuum pumps. Technical support services, namely, technical advi... |
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G/S
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[ Vacuum pumps; shaft bearings for vacuum pumps ] Technical support services, namely, technical a... |
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2012
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G/S
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Industrial oils, namely, mineral oils, silicone oils, synthetic oils and perfluoropolyether oils;... |
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2009
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G/S
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Metal vacuum flange and metal vacuum flange fittings; metal clamps; klein flange fittings; commer... |
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G/S
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Industrial oils, namely, mineral oils, silicone oils,
synthetic oils and perfluoropolyether oils... |
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2006
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G/S
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Apparatus for refrigerating; refrigerators operating at liquid helium temperatures. |
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G/S
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Vacuum pumps; cryogenically cooled vacuum pumps; cryopumps. |
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G/S
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Cryopumps; vacuum pumps. Control electronics modules for cryopump systems; keypads/displays for c... |
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G/S
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Repair and installation services, except for taximeters; maintenance and repair of high-vacuum pu... |
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2005
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G/S
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Compressors for cryogenic refrigerators; cryopump systems and parts thereof including compressors... |
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2003
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G/S
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Apparatus for lighting, heating, steam generating, cooking, refrigerating, drying, ventilating, w... |
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G/S
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Semiconductor manufacturing machines and equipment; fab manufacturing equipment, namely equipment... |
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2002
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G/S
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Scientific, measuring, signalling, computer, communication, monitoring, data analysis, control an... |
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2001
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G/S
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Computer hardware, namely communication units for use in connection with the monitoring, communic... |
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1999
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G/S
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Scientific, electric, electronic, measuring, checking, monitoring, communication and analysis app... |
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1998
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G/S
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computer diagnostic services for manufacturing processes involving the interpretation and analysi... |
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1995
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G/S
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pump vanes and pump stators made of metals, plastics or laminates |
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1990
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G/S
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Cryopumps and controls therefor
Vacuum pumps
Control electronics modules for cryopump systems and... |
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G/S
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CRYOPUMPS AND CONTROLS THEREFOR CONTROL ELECTRONICS MODULES FOR CRYOPUMP SYSTEMS, AND KEYPAD/DISP... |
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1988
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G/S
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Compressors for cryogenic refrigerators-cryopumps, primarily comprising compressors and cryopanel... |
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1987
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G/S
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REFRIGERATION SYSTEMS FOR INDUSTRIAL USE |
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G/S
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Maintenance and repair of high-vacuum pumps, and consulting services in connection therewith; tra... |
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1984
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G/S
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Compressors for cryogenic refrigerators; cryopump systems and parts therefor namely compressors, ... |
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1968
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G/S
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CRYOGENICALLY COOLED VACUUM PUMPS, OFTEN REFERRED TO AS CRYOPUMPS |
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1960
|
G/S
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Refrigerators Operating at Liquid Helium Temperatures |
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1948
|
G/S
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VACUUM PUMPS |
