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2022
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Invention
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Method for removing particles of ion beam etching system, and ion beam etching system.
A method ... |
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Invention
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Inductive coupled coil, radio frequency provision apparatus, radio frequency control method, and ... |
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Invention
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Ion beam etching machine and lower electrode structure thereof.
An ion beam etching machine and ... |
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2021
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Invention
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Control method for sidewall contamination of mram magnetic tunnel.
The present invention provide... |
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Invention
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Method for reducing damage to magnetic tunnel junction of mram.
A method for reducing damage to ... |
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Invention
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Plasma treatment method.
A plasma treatment method, which is applied to a plasma treatment appar... |
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Invention
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Dual-wall multi-structure quartz cylinder device.
A double-wall multi-structure quartz cylinder ... |
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Invention
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Method for etching mram magnetic tunnel junction.
A method for etching an MRAM magnetic tunnel j... |
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Invention
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Ion beam etching machine and lifting and rotating platform device thereof.
A lifting and rotatin... |
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Invention
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Plasma processing system and multi-section faraday shielding device thereof.
A Faraday shielding... |
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Invention
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Separated gas inlet structure for blocking plasma backflow.
A separated gas inlet structure for ... |
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Invention
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Ion source baffle, ion etching machine, and usage method therefor.
An ion source baffle includes... |
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Invention
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Anti-breakdown ion source discharge apparatus. An anti-breakdown ion source discharge apparatus i... |
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Invention
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Hydrogen fluoride vapor phase corrosion apparatus and method.
A hydrogen fluoride vapor phase co... |
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2020
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Invention
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Device for blocking plasma backflow in process chamber to protect air inlet structure. The presen... |
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Invention
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Ceramic air inlet radio frequency connection type cleaning device.
Disclosed is a ceramic air in... |
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Invention
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Rotatable faraday cleaning apparatus and plasma processing system. The present invention provides... |
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Invention
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Faraday cleaning device and plasma processing system. Provided are a faraday cleaning device and ... |
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Invention
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Plasma processing system with faraday shielding device.
Disclosed is a plasma processing system ... |
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Invention
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Plasma etching system.
Disclosed is a plasma etching system, comprising a reaction chamber, a ba... |
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Invention
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Inductively coupled plasma treatment system. Disclosed in the present application is an inductive... |
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2019
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Invention
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Etching uniformity regulating device and method. An etching uniformity regulating device and meth... |
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Invention
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Reaction chamber lining. A reaction chamber lining including an annular side wall and a flange ar... |
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Invention
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Etching device and method of inductively coupled plasma.
An etching device and method of inducti... |
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Invention
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Hydrogen fluoride vapor phase corrosion method. A hydrogen fluoride vapor phase corrosion method ... |
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Invention
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Etching method for single-isolated magnetic tunnel junction.
A method for etching magnetic tunne... |
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Invention
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Method for manufacturing magnetic tunnel junction.
Disclosed is a method for manufacturing a mag... |
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Invention
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Method for etching magnetic tunnel junction. Disclosed is method for etching a magnetic tunnel ju... |
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Invention
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Semiconductor device manufacturing method. A semiconductor device manufacturing method, wherein t... |
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Invention
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Multilayer magnetic tunnel junction etching method and mram device. A multilayer magnetic tunnel ... |
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Invention
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Etching method for magnetic tunnel junction. There is provided a method for etching magnetic tunn... |
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Invention
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Wafer cutting device and method. A wafer cutting device comprises an etching unit, including a wa... |
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2018
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Invention
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Gas injection device. A gas injection device, wherein comprising: a gas channel including an air ... |
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Invention
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Wafer processing apparatus and method. Disclosed is a wafer processing apparatus and method. The ... |
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Invention
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Ion beam etching system. An ion beam etching system includes an etching cavity, an etching electr... |
